Research Output

2015

Anisotropy of heat conduction in Mo/Si multilayers

Medvedev, V., Yang, J., Schmidt, A. J., Yakshin, A., van de Kruijs, R. W. E., Zoethout, E. & Bijkerk, F., 2015, In : Journal of Applied Physics. 118, 8, p. - 085101.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

A wide band transmission mode spectrometer for diagnosis of EUV sources

Barreaux, J. L. P., Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePoster

Blister mechanism in extreme ultraviolet multilayer mirrors

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePoster

Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

Dolgov, A., Lopaev, D., Lee, C. J., Zoethout, E., Medvedev, V., Yakushev, O. & Bijkerk, F., 23 Jun 2015, In : Applied surface science. 353, p. 708-713 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Co-existence of 2D and 3D growth in thermally oxidized ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 11 May 2015, p. -.

Research output: Contribution to conferencePoster

Controlled growth of PbZr0.52Ti0.48O3 using nanosheet coated Si (001)

Chopra, A., Bayraktar, M., Bijkerk, F. & Rijnders, A. J. H. M., 2015, In : Thin solid films. 589, p. 13-16 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Controlling interface chemistry in 6.x nm La/B multilayer optics

Kuznetsov, D., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Louis, E. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePoster

Determination of oxygen diffusion kinetics during thin film ruthenium oxidation

Coloma Ribera, R., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 2015, In : Journal of Applied Physics. 118, p. 055303-

Research output: Contribution to journalArticleAcademicpeer-review

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4 Citations (Scopus)
155 Downloads (Pure)

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePoster

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePoster

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePoster

Electonegativity-dependent cleaning of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Electron density profile determination for multilayers

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePoster

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePoster

Electronegativity-dependent removal of tin from different surfact materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePoster

Emissivity of freestanding membranes with thin metal coatings

van Zwol, P. J., Vles, D. F., Voorthuijzen, W. P., Péter, M., Vermeulen, H., Zande, W. J., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 7 Dec 2015, In : Journal of Applied Physics. 118, 21, p. 213107- 21.

Research output: Contribution to journalArticleAcademicpeer-review

15 Citations (Scopus)

EUV collector design for spectral purification and infrared light recycling

Bayraktar, M., van Goor, F. A., Boller, K. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

Liu, F., Sturm, J. M., Darlatt, E., Kolbe, M., Bijkerk, F. & Lee, C. J., 5 Nov 2015, p. -.

Research output: Contribution to conferencePoster

Extreme ultraviolet (EUV) source and ultra-high vacuum chamber for studying EUV-induced processes

Dolgov, A., Yakushev, O., Abrikosov, A., Snegirev, E., Krivtsun, V. M., Lee, C. J. & Bijkerk, F., 29 Apr 2015, In : Plasma sources science and technology. 24, 3, p. - 7 p., 035003.

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)

Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range

Goh, S. J., Bastiaens, H. M. J., Vratzov, B., Huang, Q., Bijkerk, F. & Boller, K. J., 2015, In : Optics express. 23, 4, p. 4421-4434 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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100 Downloads (Pure)
15 Citations (Scopus)

GISAXS analysis of “delayed nitridation” 6.x nm multilayers

Kuznetsov, D., Yakshin, A., Makhotkin, I. A., Bijkerk, F., Mukharamova, N., Yakunin, S. N. & Subbotin, I. A., 1 Oct 2015, p. -.

Research output: Contribution to conferencePoster

High confinement, high yield Si3N4 waveguides for nonlinear optical applications

Epping, J. P., Hoekman, M., Mateman, R., Leinse, A., Heideman, R. G., van Rees, A., van der Slot, P. J. M., Lee, C. J. & Boller, K-J., 26 Jan 2015, In : Optics express. 23, 2, p. 642-648

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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48 Citations (Scopus)
30 Downloads (Pure)

High-reflectance La/B-based multilayer mirror for 6.x  nm wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M., van de Kruijs, R. W. E., Louis, E. & Bijkerk, F., 2015, In : Optics letters. 40, 16, p. 3378-3781

Research output: Contribution to journalArticleAcademicpeer-review

27 Citations (Scopus)

High reflectance La/B based multilayer mirrors for 6.x nm wavelength

Kuznetsov, D., Yakshin, A., Sturm, M., Van De Kruijs, R., Louis, E. & Bijkerk, F., 2015, Advances in X-Ray/EUV Optics and Components X. Goto, S., Morawe, C. & Khounsary, A. M. (eds.). Bellingham, WA: SPIE, 958806. (Proceedings of SPIE; vol. 9588).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 10 Mar 2015, p. -.

Research output: Contribution to conferencePoster

Multi-layered structure for an EUV Mirror

Medvedev, V., Yakshin, A., Krivtsun, V. M. & Bijkerk, F., 30 Apr 2015, (Submitted) Patent No. PCT/EP2014/070877, Priority date 30 Sep 2014, Priority No. 10 2013 221 550.9

Research output: Patent

Narrow-band, 13.5 nm Zr-coated Ni/Si multilayer Borrmann filter

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 5 Oct 2015, p. -.

Research output: Contribution to conferencePaper

Narrow-band multilayer Borrmann filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

On-chip visible-to-infrared supercontinuum generation with more than 495 THz spectral bandwidth

Epping, J. P., Hellwig, T., Hoekman, M., Mateman, R., Leinse, A., Heideman, R. G., van Rees, A., van der Slot, P. J. M., Lee, C. J., Fallnich, C. & Boller, K-J., 2015, In : Optics express. 23, 15, p. 19596-19604 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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67 Citations (Scopus)
79 Downloads (Pure)

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
1 Downloads (Pure)

Phosphorus-based compounds for EUV multilayer optics materials

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 2015, In : Optical materials express. 5, 6, p. 1450-1459

Research output: Contribution to journalArticleAcademicpeer-review

File
9 Citations (Scopus)
68 Downloads (Pure)

Photoluminescence-based detection of particle contamination on extreme ultraviolet reticles

Gao, A., Rizo, P. J., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 2015, In : Review of scientific instruments. 86, 6, 8 p., 063109.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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100 Downloads (Pure)

Plasma probe characteristics in low density hydrogen pulsed plasmas

Astakhov, D., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsun, V. M., Zotovich, A. I., Zyryanov, S. M., Lopaev, D. & Bijkerk, F., 15 Sep 2015, In : Plasma sources science and technology. 24, 5, p. 1-10 10 p., 055018.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Simultaneous supercontinuum and third harmonic generation in Si3N4 waveguides

Epping, J. P., Hellwig, T., Hoekman, M., Mateman, R., Leinse, A., Heideman, R. G., Van Der Slot, P. J. M., Lee, C. J., Fallnich, C., Boller, K. J. & van Rees, A., 21 Jun 2015, p. CK_5_4.

Research output: Contribution to conferenceAbstract

Steam reforming of acetic acid - A major component in the volatiles formed during gasification of humin

Hoang, T. M. C., Geerdink, B., Sturm, J. M., Lefferts, L. & Seshan, K., 2015, In : Applied catalysis B: environmental. 163, p. 74-82

Research output: Contribution to journalArticleAcademicpeer-review

29 Citations (Scopus)

Surface oxide content examination of capping boron layers in UV photodetectors

Mohammadi, V., Rao, P. R., Van De Kruijs, R. W. E. & Nihtianov, S., 3 Aug 2015, 73rd Annual Device Research Conference, DRC 2015. IEEE, Vol. 2015-August. p. 73-74 2 p. 7175562

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Tailoring spectral properties of Extreme UV multilayer optics

Medvedev, V., 4 Nov 2015, Enschede: Universiteit Twente. 105 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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185 Downloads (Pure)

Translating the Borrmann effect into narrow-band EUV transmission windows

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 28 Sep 2015, p. -.

Research output: Contribution to conferencePoster

Ultra-narrow-linewidth tunable hybrid laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., Offerhaus, H. L., van der Slot, P. J. M. & Boller, K. J., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Wideband multilayer mirrors with minimal layer thicknesses variation

Kozhevnikov, I. V., Yakshin, A. & Bijkerk, F., 2015, In : Optics express. 23, 7, p. 9276-9283 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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15 Citations (Scopus)
192 Downloads (Pure)
2014

Advanced metrology for multilayer mirrors

Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePoster

A hybrid semiconductor-glass waveguide laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., Song, H., Khan, M. R. H., Offerhaus, H. L., van der Slot, P. J. M. & Boller, K-J., 14 Apr 2014, Laser Sources and Applications II. Mackenzie, J. I., Jelinkova, H., Taira, T. & Ahmed, M. A. (eds.). Brussels, Belgium: SPIE, 91351B. (Proceedings of SPIE; vol. 9135).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

20 Citations (Scopus)

Combined EUV reflectance and X-ray reflectivity data analysis of periodic multilayer structures

Yakunin, S. N., Makhotkin, I. A., Nikolaev, K. V., van de Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 2014, In : Optics express. 22, 17, p. 20076-20086 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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19 Citations (Scopus)
206 Downloads (Pure)

Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

Dolgov, A., Lopaev, D., Rachimova, T., Kovalev, A., Vasilyeva, A., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 2014, In : Journal of physics D: applied physics. 47, 6, p. - 9 p., 065205.

Research output: Contribution to journalArticleAcademicpeer-review

File
16 Citations (Scopus)
62 Downloads (Pure)