Research Output

2014

Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

Dolgov, A., Lopaev, D., Rachimova, T., Kovalev, A., Vasilyeva, A., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 2014, In : Journal of physics D: applied physics. 47, 6, p. - 9 p., 065205.

Research output: Contribution to journalArticleAcademicpeer-review

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16 Citations (Scopus)
62 Downloads (Pure)

Defect formation in single layer graphene under extreme ultraviolet irradiation

Gao, A., Zoethout, E., Sturm, J. M., Lee, C. J. & Bijkerk, F., 2014, In : Applied surface science. 317, p. 745-751 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePoster

Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation

Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A., Makhotkin, I. A., Bosgra, J. & Bijkerk, F., 2014, In : Journal of micro/nanolithography, MEMS, and MOEMS. 13, 1, p. 013014-013014-5 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)

Electronegativity-dependent cleaning of tin and tin hydride containing contamination of EUV optics

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePoster

Electronegativity-dependent cleaning of tin from metal capping layers

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 27 Oct 2014, p. -.

Research output: Contribution to conferencePoster

Graphene defect formation by extreme ultraviolet generated photoelectrons

Gao, A., Lee, C. J. & Bijkerk, F., 6 Aug 2014, In : Journal of Applied Physics. 116, 5, p. - 054312.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

High efficiency structures EUV multilayer mirror for spectral filtering of long wavelengths

Huang, Q., de Boer, M., Barreaux, J., van der Meer, R., Louis, E. & Bijkerk, F., 2014, In : Optics express. 22, 16, p. 19365-19374 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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5 Citations (Scopus)
88 Downloads (Pure)

Injection locking of a hybrid diode-glass waveguide laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 7 Oct 2014, p. -.

Research output: Contribution to conferencePoster

Method for producing a reflective optical element for EUV-lithography

Kuznetsov, A., Gleeson, M. A., van de Kruijs, R. W. E. & Bijkerk, F., 10 Jul 2014, (In preparation) Patent No. 14/137,225, Priority date 20 Dec 2013, Priority No. 10 2011 077 983.3

Research output: Patent

Model independent X-ray standing wave analysis of periodic multilayer structures

Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E., Chuev, M. A., Pashaev, E. M., Zoethout, E., Louis, E., Seregin, S. Y., Subbotin, I. A., Novikov, D., Bijkerk, F. & Kovalchuk, M. V., 2014, In : Journal of Applied Physics. 115, 13, p. - 134303.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Nanosheet controlled epitaxial growth of PbZr0.52Ti0.48O3 thin films on glass substrates

Bayraktar, M., Chopra, A., Bijkerk, F. & Rijnders, A. J. H. M., 2014, In : Applied physics letters. 105, 13, p. 132904- 132904.

Research output: Contribution to journalArticleAcademicpeer-review

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9 Citations (Scopus)
75 Downloads (Pure)

Narrow-band Borrmann multilayer filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 27 Oct 2014, p. -.

Research output: Contribution to conferencePoster

Narrow-band Borrmann multilayer filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 14 Oct 2014, p. -.

Research output: Contribution to conferenceAbstract

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29 Downloads (Pure)

Optical element comprising a multilayer coating, and optical arrangement comprising same

van de Kruijs, R. W. E., Nyabero, S. L., Yakshin, A. & Bijkerk, F., 6 Nov 2014, (Submitted) Patent No. PCT/EP2014/057637, Priority date 6 Nov 2014, Priority No. 10 2013 207 751.3 29 April 2013 (29.04.2013) DE

Research output: Patent

Q-factor measurements through injection locking of a semiconductor-glass hybrid laser with unknown intracavity losses

Fan, Y., Oldenbeuving, R., Khan, M. R. H., Roeloffzen, C. G. H., Klein, E. J., Lee, C. J., Offerhaus, H. L. & Boller, K. J., 1 Apr 2014, In : Optics letters. 39, 7, p. 1748-1751 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Spectral purification and infrared light recycling in extreme ultraviolet lithography sources

Bayraktar, M., van Goor, F. A., Boller, K. J. & Bijkerk, F., 3 Apr 2014, In : Optics express. 22, 7, p. 8633-8639

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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7 Citations (Scopus)
18 Downloads (Pure)

Spectral purity enhancement for the EUV Lithography Systems by suppressing UV reflection from multilayers

Huang, Q., de Boer, M. J., Barreaux, J. L. P., Paardekooper, D. M., van den Boogaard, T., van de Kruijs, R. W. E., Zoethout, E., Louis, E. & Bijkerk, F., 2014, Extreme Ultraviolet (EUV) Lithography V. Wood, O.R. & Panning, E.M. (eds.). San Jose, CA: SPIE - The International Society for Optical Engineering, p. - (Proceedings of SPIE; vol. 9048).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Subwavelength single layer absorption resonance antireflection coatings

Huber, S. P., van de Kruijs, R. W. E., Yakshin, A. E., Zoethout, E., Boller, K. . J. & Bijkerk, F., 3 Jan 2014, In : Optics express. 22, 1, p. 490-497

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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12 Citations (Scopus)
80 Downloads (Pure)

Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 22 May 2014, p. -.

Research output: Contribution to conferencePoster

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13 Downloads (Pure)

Surface and sub-surface thermal oxidation of ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Zoethout, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePoster

Surface and sub-surface thermal oxidation of thin ruthenium films

Coloma Ribera, R., van de Kruijs, R. W. E., Kokke, S., Zoethout, E., Yakshin, A. & Bijkerk, F., 2014, In : Applied physics letters. 105, 13, p. 131601- 131601.

Research output: Contribution to journalArticleAcademicpeer-review

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8 Citations (Scopus)
367 Downloads (Pure)

Temperature dependencies of hydrogen- induced blistering of thin film multilayers

Kuznetsov, A., Gleeson, M. A. & Bijkerk, F., 2014, In : Journal of Applied Physics. 115, 173510, p. - 10 p., 173510.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

Nyabero, S. L., 7 Feb 2014, Enschede: Universiteit Twente. 110 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

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41 Downloads (Pure)

UV spectral filtering by surface structures multilayer mirrors

Huang, Q., Paardekooper, D. M., Zoethout, E., Medvedev, V., van de Kruijs, R. W. E., Bosgra, J., Louis, E. & Bijkerk, F., 2014, In : Optics letters. 39, 5, p. 1185-1188 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Water dissociation on Ru(0001) by EUV A TOF, RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2014.

Research output: Contribution to conferencePoster

Wavefront correction in the extreme ultraviolet wavelength range using piezoelectric thin films

Bayraktar, M., Chopra, A., Rijnders, G., Boller, K. & Bijkerk, F., 2014, In : Optics express. 22, 25, p. 30623-30632

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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6 Citations (Scopus)
37 Downloads (Pure)
2013

25 kHz narrow spectral bandwidth of a wavelength tunable diode laser with a short waveguide-based external cavity

Oldenbeuving, R., Klein, E. J., Offerhaus, H. L., Lee, C. J., Song, H. & Boller, K. J., 10 Dec 2013, In : Laser physics letters. 10, 1, p. 015804-1-015804-8 8 p., 015804.

Research output: Contribution to journalArticleAcademicpeer-review

56 Citations (Scopus)

2D PIC modeling of the EUV induced hydrogen plasma and comparison to the observed carbon etching rate

Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Krivtsun, V. M., Yakushev, O., Koshelev, K. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

A gain-coefficient switched Alexandrite laser

Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 11 Sep 2013, In : Journal of physics D: applied physics. 46, 1, p. - 4 p., 015103.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Blister formation on multilayer mirrors due to the exposure of hydrogen

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013, p. -.

Research output: Contribution to conferencePoster

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Koshelev, K., Yakushev, O. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013.

Research output: Contribution to conferencePoster

Deposition and Oxidation Studies by Low-Energy Ion Scattering (LEIS)

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePoster

Engineering optical constants for broadband single layer antireflection coatings

Huber, S. P., van de Kruijs, R. W. E., Yakshin, A. E., Zoethout, E. & Bijkerk, F., 27 Sep 2013, Advances in X-Ray/EUV Optics and Components VIII. Khounsary, A., Goto, S. & Morawe, C. (eds.). SPIE, 884814. (Proceedings of SPIE; vol. 8848).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Engineering optical constants for broadband single layer anti-reflection coatings

Huber, S., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 25 Aug 2013, p. -.

Research output: Contribution to conferencePoster

Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes

Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 2013, In : Applied physics letters. 103, 9, p. - 3 p., 093105.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

EUV optical elements with enhanced spectral selectivity for IR radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Louis, E. & Bijkerk, F., 2013, 2013 International Workshop in EUV and Soft X-ray Sources. Medvedev, V. V. (ed.). Dublin, Ireland: EUV Litho, Inc., p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
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10 Downloads (Pure)

Experimental set-up and procedures for the investigation of XUV free electron laser interactions with solids

Sobierajski, R., Jurek, M., Chalupsky, J., Krzywinski, J., Burian, T., Dastjani Farahani, S., Hajkova, V., Harmand, M., Juha, L., Klinger, D., Loch, R. A., Ozkan, C., Pelka, J. B., Sokolowski-Tinten, K., Sinn, H., Toleikis, S., Tiedtke, K., Tschentscher, T., Wabnitz, H. & Gaudin, J., 2013, In : Journal of instrumentation. 8, 2, p. 1-14 15 p., P02010.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings

van der Meer, R., Kozhevnikov, I. V., Bastiaens, H. M. J., Boller, K-J. & Bijkerk, F., 2013, In : Optics express. 21, 11, p. 13105-13117

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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9 Citations (Scopus)
17 Downloads (Pure)

Extreme Ultraviolet (EUV) induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 2013, In : Journal of Applied Physics. 114, 4, p. - 5 p., 044313.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Osorio, E., van Kampen, M., Lee, C. J. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakinun, A. M. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

High precision wavelength estimation method for integrated optics

Oldenbeuving, R. M., Song, H., Schitter, G., Verhaegen, M., Klein, E. J., Lee, C. J., Offerhaus, H. L. & Boller, K. J., 15 Jul 2013, In : Optics express. 21, 14, p. 17042-17052

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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3 Citations (Scopus)
18 Downloads (Pure)

Hydrogen-induced blistering of Mo/Si multilayers: Uptake and distribution

Kuznetsov, A., Gleeson, M. A. & Bijkerk, F., 2013, In : Thin solid films. 545, p. 571-579 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

Hydrogen particle and plasma interactions with heterogeneous structures

Kuznetsov, A., 18 Oct 2013, Enschede: Universiteit Twente. 157 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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353 Downloads (Pure)

Hydrogen uptake and distribution in a multi-layered systems and related effects

Gleeson, M., Kuznetsov, A. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster