Research Output

2012

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 22 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Extreme ultraviolet induced oxidation of Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Ground-state depletion for subdiffraction-limited spatial resolution in coherent anti-Stokes Raman scattering microscopy

Cleff, C., Groß, P., Fallnich, C., Offerhaus, H. L., Herek, J. L., Kruse, K., Beeker, W. P., Lee, C. J. & Boller, K-J., 16 Aug 2012, In : Physical review A: Atomic, molecular, and optical physics. 86, 2, 11 p., 023825.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
25 Citations (Scopus)
52 Downloads (Pure)

Hydrogen-induced blistering mechanisms in thin film coatings

Kuznetsov, A., Gleeson, M. A. & Bijkerk, F., 2012, In : Journal of physics: Condensed matter. 24, 5, p. - 6 p., 052203.

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)

Hydrogen-induced blistering phenomena in multilayered systems

Kuznetsov, A., Gleeson, M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Influence of noble gas ion polishing species on extreme ultraviolet mirrors

van den Boogaard, T., Zoethout, E., Makhotkin, I. A., Louis, E. & Bijkerk, F., 2012, In : Journal of Applied Physics. 112, 12, p. - 4 p., 123502.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
1 Downloads (Pure)

Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. N. & Bijkerk, F., 1 Apr 2012, In : Optics letters. 37, 7, p. 1169-1171 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Infrared suppression by hybrid EUV multilayer - IR lossy etalon structures

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Investigating the interaction of x-ray free electron laser radiation with grating structure

Gaudin, J., Ozkan, C., Chalupsky, J., Bajt, S., Burian, T., Vysin, L., Coppola, N., Dastjani Farahani, S., Chapman, H., Galasso, G., Hajkova, V., Harmand, M., Juha, L., Jurek, M., Loch, R. A., Möller, S., Nagasono, M., Störmer, M., Sinn, H., Saksl, K. & 6 others, Sobierajski, R., Schulz, J., Sovak, P., Toleikis, S., Tschentscher, T. & Krzywinski, J., 2012, In : Optics letters. 37, 15, p. 3033-3035

Research output: Contribution to journalArticleAcademicpeer-review

File
14 Citations (Scopus)
506 Downloads (Pure)

Ion assisted growth of B4C diffusion barrier layers in Mo/Si multilayered structures

Bruijn, S., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 16 Mar 2012, In : Journal of Applied Physics. 111, 6, p. 064303-1-064303-5 5 p., 064303.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

IR antireflective filtering for EUV multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

Modeling of Plasma Dynamics and EUV Generation for Distributed Sn Targets Irradiated with Short Laser Pulses

Grushin, A. S., Novikov, D., Ivanov, V., Medvedev, V., Krivtsun, V. M. & Koshelev, K., 8 Oct 2012, p. 78-78.

Research output: Contribution to conferencePoster

Open Access
File
8 Downloads (Pure)

Modeling of the effective electron energy distribution at an irradiated Multi Layer Mirror surface in vacuum

Astakhov, D., Goedheer, W. J., van Kampen, M., Lopaev, D., Ivanov, V. & Bijkerk, F., 11 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Modelling of shot damage tresholds of multilayer optics for short-wavelength FELs

Loch, R. A., Sobierajski, R., Louis, E., Bosgra, J., van de Kruijs, R. W. E., Makhotkin, I. A., Zoethout, E. & Bijkerk, F., 25 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Molecular Dynamics Simulations of Atomic H Etching SiC Surface

Sun, W., Liu, H., Lin, L., Zhao, C., Lu, X. & Gou, F., 2012, In : Physics procedia. 32, p. 539-544 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
45 Downloads (Pure)

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Muellender, S. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

Multilayer optics for 6.7 nm wavelength

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Multilayers for 6.8 nm Wavelength

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 8 Oct 2012, p. 74-74.

Research output: Contribution to conferencePoster

Open Access
File
4 Downloads (Pure)

Multilayers for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, N. & Bijkerk, F., 29 Sep 2012, p. -.

Research output: Contribution to conferencePoster

New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes

Koshelev, K. N., Krivtsun, V. M., Ivanov, V., Yakushev, O., Chekmarev, A., Koloshnikov, V., Snegirev, E. & Medvedev, V., 2012, In : Journal of micro/nanolithography, MEMS, and MOEMS. 11, 2, p. 021103-1-021103-6 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Nitrogen interface passivation of La/B layeren structures

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Non-constant diffusion characteristics of nanoscopic Mo-Si interlayer growth

Bosgra, J., Verhoeven, J., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 4 Sep 2012, In : Thin solid films. 522, p. 228-232 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

Physics and technology development of multilayer EUV reflective optics

Louis, E., 23 Nov 2012, Enschede: Universiteit Twente. 139 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
File
87 Downloads (Pure)

Reactions of ethanol on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 3 Sep 2012, p. -.

Research output: Contribution to conferencePoster

Reconstruction of the structure of La/B4C and LaN/B4C multilayer mirrors using X-ray Standing Waves

Makhotkin, I. A., Yakunin, S. N., Chuev, M., Zoethout, E., Louis, E., Novikov, D., Seregin, A. Y., Pashayev, I. M. & Bijkerk, F., 18 Jun 2012.

Research output: Contribution to conferencePoster

Open Access
File
6 Downloads (Pure)

Roughness development during growth and ion beam polishing of molybdenum silicon mulitlayer films

Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

RZLINE code modelling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

Koshelev, K., Noivkov, V. G., Medvedev, V., Grushin, A. S. & Krivtsun, V. M., 2012, In : Journal of micro/nanolithography, MEMS, and MOEMS. 11, 2, p. 021112-1-021112-6 021112.

Research output: Contribution to journalArticleAcademicpeer-review

Simultaneous analysis of Grazing Incidence X-Ray reflectivity and X-ray standing waves from periodic multilayer systems

Yakunin, S. N., Makhotkin, I. A., Chuyev, M. A., Seregin, A. Y., Pashayev, E. M., Louis, E., van de Kruijs, R. W. E., Bijkerk, F. & Kovalchuk, M. V., 15 Sep 2012, p. 115-115.

Research output: Contribution to conferenceAbstract

File
16 Downloads (Pure)

Solid state diffusion in multilayered structures on a picometer lengthscale

van de Kruijs, R. W. E., Bosgra, J., Bruijn, S., Yakshin, A. & Bijkerk, F., 15 Sep 2012, p. -.

Research output: Contribution to conferencePoster

File
11 Downloads (Pure)

Spectral and spatial structure of extreme ultraviolet radiation in laser plasma-wall interactions

Kuznetsov, A., Stuik, R., Bijkerk, F. & Shevelko, A. P., 2012, In : Plasma physics and controlled fusion. 54, 8, p. 1-6 6 p., 085019.

Research output: Contribution to journalArticleAcademicpeer-review

Spectral filter for splitting a beam with electromagnetic radiation having wavelengths in the extreme ultraviolet (EUV) or soft X-Ray (Soft X) and the infrared (IR) wavelength range

van Goor, F. A., Bijkerk, F., van den Boogaard, T. & van der Meer, R., 23 Feb 2012, (Submitted) Patent No. WO 2012/023853 A1, Priority date 23 Feb 2012

Research output: Patent

File
15 Downloads (Pure)

Spiegeling en Daad

Veen, W. & Bijkerk, F., 2012, In : Magazine voor alumni en relaties. 2012, 2, p. 32-33 2 p.

Research output: Contribution to journalArticlePopular

Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors

Bosgra, J., Zoethout, E., Eerden, A. M. J., Verhoeven, J., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 20 Dec 2012, In : Applied Optics. 51, 36, p. 8541-8548 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Study of EUV induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 23 Apr 2012, p. -.

Research output: Contribution to conferencePoster

Surface modifications by gas plasma control osteogenic differentiation of MC3T3-E1 cells

Barradas, A. M. C., Lachmann, K., Hlawacek, G., Frielink, C., Truckenmüller, R. K., Boerman, O. C., van Gastel, R., Garritsen, H. S. P., Thomas, M., Moroni, L., van Blitterswijk, C. & de Boer, J., 2012, In : Acta biomaterialia. 8, 8, p. 2969-2977

Research output: Contribution to journalArticleAcademicpeer-review

29 Citations (Scopus)

The noise-limited-resolution for stimulated emission depletion microscopy of diffusing particles

Lee, C. J. & Boller, K. J., 2012, In : Optics express. 20, 12, p. 12793-12798 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
22 Downloads (Pure)

Thermally induced interface chemistry in Mo/B 4C/Si/B 4C multilayered films

Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 10 Sep 2012, In : Journal of Applied Physics. 112, 5, p. 054317-1-054317-5 5 p., 054317.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Thermoelectric properties of Bi0.5Sb1.5Te3/C60 nanocomposites

Blank, V. D., Buga, S. G., Kulbachinskii, V. A., Kytin, V. G., Medvedev, V., Popov, Y. M., Stepanov, P. B. & Skok, V. F., 2012, In : Physical review B: Condensed matter and materials physics. 86, 7, p. 075426-1-075426-8 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

49 Citations (Scopus)

The X-ray Standing Waves analysis of short period La/B- based multilayers

Makhotkin, I. A., Yakunin, S. N., Chuev, M. A., Zoethout, E., Louis, E., van de Kruijs, R. W. E., Bijkerk, F. & Kovalchuk, M. V., 15 Sep 2012, p. -.

Research output: Contribution to conferencePoster

File
43 Downloads (Pure)

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, S. N., Muellender, S. & Bijkerk, F., 13 Mar 2012, Extreme Ultraviolet (EUV) Lithography III. Naulleau, P. P. & Wood II, O. R. (eds.). Bellingham, WA: SPIE, 5 p. 832213. (Proceedings of SPIE; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Wavelength selection for multilayer coatings for the lithography generation beyond extreme ultraviolet

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M., Muellender, S. & Bijkerk, F., 19 Oct 2012, In : Journal of micro/nanolithography, MEMS, and MOEMS. 11, 4, p. 040501-1-040501-3 3 p., 040501.

Research output: Contribution to journalArticleAcademicpeer-review

File
13 Citations (Scopus)
51 Downloads (Pure)

Wavelength separation from extreme ultraviolet mirrors using phaseshift reflection

van den Boogaard, T., van Goor, F. A., Louis, E. & Bijkerk, F., 10 Jan 2012, In : Optics letters. 37, 2, p. 160-162 2 p.

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)
2011

Atomic quantum scattering and molecular diffraction

Kleijn, A., 2011, In : Progress in surface science. 86, 9-10, p. 163-168

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Maui, Hawaii, US

Research output: Other contributionOther research output

B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 13 Jun 2011, p. -.

Research output: Contribution to conferencePoster

Behavior of transition metal and metal oxide surfaces under oxidative and reductive environment

Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J. & Bijkerk, F., 18 Jan 2011, p. -.

Research output: Contribution to conferencePoster

Blistering behavior in Mo/Si multilayers

Kuznetsov, A. S., Gleeson, M. A., van de Kruijs, R. W. E. & Bijkerk, F., 18 Apr 2011, SPIE Optics + Optoelectronics 2011. Kuznetsov, A. S. (ed.). SPIE, 6 p. 807713. (Proceedings of SPIE; vol. 8077).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Carbon induced extreme ultraviolet (EUV) reflectance loss characterized using visible-light ellipsometry

Chen, J., Louis, E., Wormeester, H., Harmsen, R., van de Kruijs, R. W. E., Lee, C. J., van Schaik, W. & Bijkerk, F., 2011, In : Measurement science and technology. 22, 10, p. - 8 p., 105705.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

Characterization of EUV induced contamination on multilayer optics

Chen, J., 1 Jul 2011, Enschede: Universiteit Twente. 119 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
File
585 Downloads (Pure)