Research Output per year
Research Output
2011
Chemical interaction of B4C diffusion barriers with Mo/Si layered nanostructures
Nyabero, S. L., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLASH and LCLS
Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M. & 4 others, , 2011, HamburgResearch output: Other contribution › Other research output
Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLSH and LCLS
Loch, R. A., Sobierajski, R., Bostedt, C., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y. C., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M., Moeller, S. & 3 others, , 26 Jan 2011, p. -.Research output: Contribution to conference › Poster
Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs
Louis, E., Sobierajski, R., Loch, R. A., Bostedt, C., Bozek, J., Burian, T., Chalupsky, J., Gaudin, J., Graf, A., Grzonka, J., Hajkova, V., Hau-Riege, S. P., van Hattum, E. D., Juha, L., Klinger, D., Krzywinski, J., London, R., Messerschmidt, M., Moeller, S., Plocinski, T. & 3 others, , 2011, PragueResearch output: Other contribution › Other research output
Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs
Loch, R. A., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources
Sobierajski, R., Bruijn, S., Khorsand, A. R., Louis, E., van de Kruijs, R. W. E., Burian, T., Chalupsky, J., Cihelka, J., Gleeson, M., Grzonka, J., Gullikson, E. M., Hajkova, V., Hau-Riege, S., Juha, L., Jurek, M., Klinger, D., Krzywinski, J., London, R., Pelka, J. B., Plocinski, T. & 6 others, , 2011, In : Optics express. 19, 1, p. 193-205Research output: Contribution to journal › Article › Academic › peer-review
Damage threshold of amorphous carbon mirror for 177 eV FEL radiation
Dastjani Farahani, S., Chalupsky, J., Burian, T., Chapman, H., Gleeson, A. J., Hajkoya, V., Juha, L., Jurek, M., Klinger, D., Sinn, H., Sobierajski, R., Störmer, M., Tiedtke, K., Toleikis, S., Tschentscher, T., Wabnitz, H. & Gaudin, J., 2011, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 635, 1, Suppl. 11, p. S39-S42Research output: Contribution to journal › Article › Academic › peer-review
Decay of crystalline order and equilibration during solid-to-plasma transition induced by 20-fs microfocused 92 eV Free Electron Laser pulses
Galtier, E., Rosmej, F. B., Dzelzainis, T., Riley, D., Khattak, F. Y., Heimann, P., Lee, R. W., Nelson, A. J., Vinko, S. M., Whitcher, T., Wark, J. S., Tschentscher, T., Toleikis, S., Faustlin, R. R., Sobierajski, R., Jurek, M., Juha, L., Chalupsky, J., Hajkova, V., Kozlova, M. & 2 others, , 2011, In : Physical review letters. 106, 16, p. 1-4 164801.Research output: Contribution to journal › Article › Academic › peer-review
Depth profiling of Mo/Si multilayers: the effect of Ar-ion energy on layer structure
Zoethout, E., Louis, E. & Bijkerk, F., 2011, Paris, FrResearch output: Other contribution › Other research output
Determination of the density of ultrathin La films in La/B(4)C layered structures using X-ray standing waves
Makhotin, I. A., Louis, E., van de Kruijs, R. W. E., Yaskini, A. E., Zoethout, E., Seregin, A. Y., Tereschenko, E. Y., Yakunin, S. N. & Bijkerk, F., 2011, In : Physica status solidi A. 208, 11, p. 2597-2600Research output: Contribution to journal › Article › Academic › peer-review
Diffraction of EUV radiation on free-standing grid structures: theory and experiment
Medvedev, V., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
Diffusion phenomena in chemically stabilized multilayer structures
Bruijn, S., 27 Apr 2011, Enschede: University of Twente. 114 p.Research output: Thesis › PhD Thesis - Research external, graduation UT
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Ellipsometry with an undetermined polarization state
Liu, F., Lee, C. J., Chen, J., Louis, E., van der Slot, P. J. M., Boller, K. J. & Bijkerk, F., 2011Research output: Non-textual form › Web publication/site › Other research output
EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation
Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Miami, FloridaResearch output: Other contribution › Other research output
Fiber-based ellipsometry for in situ monitoring
Liu, F., Lee, C. J., Chen, J., Louis, E. & Bijkerk, F., 2011, Baltimore, USResearch output: Other contribution › Other research output
Infrared suppression by hybrid EUV multilayer - IR etalon structures
Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N., Koshelev, K. & Bijkerk, F., 2011, In : Optics letters. 36, 17, p. 3344-3346Research output: Contribution to journal › Article › Academic › peer-review
In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers
Chen, J., Louis, E., Harmsen, R., Tsarfati, T., Wormeester, H., van Kampen, M., van Schaik, W., van de Kruijs, R. W. E. & Bijkerk, F., 2011, In : Applied surface science. 258, 1, p. 7-12 6 p.Research output: Contribution to journal › Article › Academic › peer-review
In-situ study of the diffusion-reaction mechanism in nanometer scale layered films
Bruijn, S., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 2011, In : Applied surface science. 257, 7, p. 2707-2711 5 p.Research output: Contribution to journal › Article › Academic › peer-review
Interface diffusion kinetics and lifetime scaling in multilayer Bragg optics
van de Kruijs, R. W. E., Bruijn, S., Yakshin, A., Nedelcu, I. & Bijkerk, F., 2011, Advances in X-Ray/ EUV optics and Components VI: 22–24 August 2011, San Diego, California, United States. Morawe, C., Khounsary, A. M. & Goto, S. (eds.). Bellingham, WA: SPIE, 81390A. (Proceedings of SPIE; vol. 8139).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Introducing CP3E
Kuznetsov, A., Kleijn, A., Koshelev, K., Muellender, S., Kurz, P., van Kampen, M., Banine, V. Y., Temmerman, G. C., Goedheer, W. J. & Bijkerk, F., 16 Jun 2011, p. -.Research output: Contribution to conference › Poster
Ion-enhanced growth in planar and structured Mo/Si multilayers
van den Boogaard, T., 13 Dec 2011, Enschede: Universiteit Twente. 104 p.Research output: Thesis › PhD Thesis - Research external, graduation UT
Open Access
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Kinetic study of EUV-induced plasma chemistry
Astakhov, D., Goedheer, W. J. & Lopaev, D., 2011, RijnhuizenResearch output: Other contribution › Other research output
Multilayer based solutions for suppression of IR radiation in EUV systems
Medvedev, V., van den Boogaard, T., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, VeldhovenResearch output: Other contribution › Other research output
Multilayer mirror
Krivtsun, V. M., Yakunin, A. M. & Medvedev, V., 26 May 2011, (In preparation) Patent No. PCT/EP2010/065155, Priority date 20 Nov 1999Research output: Patent
Multilayers for the lithography generation beyond EUVL
Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M. & Bijkerk, F., 2011, VeldhovenResearch output: Other contribution › Other research output
Nanometer interface and materials control for multilayer EUV-optical applications
Louis, E., Yakshin, A., Bijkerk, F. & Tsarfati, T., 2011, In : Progress in surface science. 86, 11-12, p. 255-294 39 p.Research output: Contribution to journal › Article › Academic › peer-review
Negating HIO-induced metal and carbide EUV surface contamination
Sturm, J. M., Gleeson, M., van de Kruijs, R. W. E., Lee, C. J., Kleyn, A. W. & Bijkerk, F., 2011Research output: Other contribution › Other research output
Nitrogen Passivation in La/B4C Layered Structures
Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 2011, BulgariaResearch output: Other contribution › Other research output
Non-constant diffusion rate in sub nanometer thick Mo-Si interlayers
Bosgra, J., Yakshin, A. & Bijkerk, F., 2011, Dijon, FranceResearch output: Other contribution › Other research output
Phase characterization of the reflection on an extreme UV multilayer: comparison between attosecond metrology and standing wave measurements
Loch, R. A., Dubrouil, A., Sobierajski, R., Descamps, D., Fabre, B., Lidon, P., van de Kruijs, R. W. E., Boekhout, F., Gullikson, E. M., Gaudin, J., Louis, E., Bijkerk, F., Mevel, E., Petit, S., Constant, E. & Mairesse, Y., 2011, In : Optics letters. 36, 17, p. 3386-3388 3 p.Research output: Contribution to journal › Article › Academic › peer-review
Reduction of interlayer thickness by low-temperature deposition of Mo/Si multilayer mirrors for X-ray reflection
de Rooij-Lohmann, V. I. T. A., Yakshin, A., Zoethout, E., Verhoeven, J. & Bijkerk, F., 2011, In : Applied surface science. 257, 14, p. 6251-6255 5 p.Research output: Contribution to journal › Article › Academic › peer-review
Structural properties of sub nanometer thick layers to enhance EUV multilayer mirror reflectance
Bosgra, J., van de Kruijs, R. W. E., Zoethout, E., Verhoeven, J., Yakshin, A. & Bijkerk, F., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
The Energy Dependence of the Ratio of Step and Terrace Reactivity for H(2) Dissociation on Stepped Platinum
Groot, I. M. N., Kleyn, A. W. & Juurlink, L. B. F., 2011, In : Angewandte Chemie (international edition). 50, 22, p. 5174-5177Research output: Contribution to journal › Article › Academic › peer-review
The interaction of Hyperthermal Argon Atoms with CO-covered Ru(0001): Scattering and Collision-Induced Desorption
Ueta, H., Gleeson, M. & Kleijn, A., 2011, In : Journal of chemical physics. 134, 6, p. 1-10 064706.Research output: Contribution to journal › Article › Academic › peer-review
The Interaction of Hyperthermal Argon Atoms with CO-covered Ru(0001): Scattering and Collision-Induced Desorption
Gleeson, M., Ueta, H. & Kleyn, A. W., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
5
Citations
(Scopus)
The interaction of hyperthermal nitrogen with N-covered Ag(111)
Ueta, H., Gleeson, M. & Kleijn, A., 2011, In : Journal of chemical physics. 135, 7, p. 1-10 074702.Research output: Contribution to journal › Article › Academic › peer-review
Thermal damage in Mo/Si based multilayers for short-wavelength FELs
Yakshin, A., Van de Kruis, R. W. E., Sobierajski, R., Louis, E., Bruijn, S., Loch, R. A. & Bijkerk, F., 2011, Kyoto, JapanResearch output: Other contribution › Other research output
TOF-OFF: A method for determining focal positions in tightly focused free-electron laser experiments by measurement of ejected ions
Iwan, B., Andreasson, J., Andrejczuk, A., Abreu, E., Bergh, M., Caleman, C., Nelson, A. J., Bajt, S., Chalupsky, J., Chapman, H. N., Fäustlin, R. R., Hájková, V., Heimann, P. A., Hjörvarsson, B., Juha, L., Klinger, D., Krzywinski, J., Nagler, B., Pálsson, G. K., Singer, W. & 8 others, , 2011, In : High energy density physics. 7, 4, p. 336-342Research output: Contribution to journal › Article › Academic › peer-review
Understanding solid state diffusion in multilayered structures on a picometer lengthscale
van de Kruijs, R. W. E., Bruijn, S. & de Rooij-Lohmann, V. I. T. A., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
Verfahren zur Herstellung eines reflektiven optischen Elements für die EUV-Lithographie
Kuznetsov, A., Gleeson, M., van de Kruijs, R. W. E. & Bijkerk, F., 2011, (In preparation) Patent No. DE 10 2011 077 983A1, Priority date 27 Apr 2011Research output: Patent
Wavelength selection for multilayer coatings for the lithography generation beyond EUVL
Makhotkin, I. A., Zoethout, E., Louis, E., Muellender, S. & Bijkerk, F., 2011, Miami, Florida (US)Research output: Other contribution › Other research output
2010
Carbon film growth and hydrogenic retention of tungsten exposed to carbon-seeded high density deuterium plasmas
Wright, G. M., Al, R. S., Alves, E., Alves, L. C., Barradas, N. P., Kleyn, A. W., Cardozo, N. J. L., van der Meiden, H. J., Philipps, V., Rooij, G. J., Shumack, A. E., Vijvers, W. A. J., Westerhout, J., Zoethout, E. & Rapp, J., 2010, In : Journal of nuclear materials. 396, 2-3, p. 176-180Research output: Contribution to journal › Article › Academic › peer-review
Chemical interaction of B4C, B and C with Mo/Si layered structures
de Rooij-Lohmann, V. I. T. A., Veldhuizen, L. W., Zoethout, E., Yakshin, A., van de Kruijs, R. W. E., Thijsse, B. J., Gorgoi, M., Schaefers, F. & Bijkerk, F., 2010, In : Journal of Applied Physics. 108, 094314.Research output: Contribution to journal › Article › Academic › peer-review
Damage mechanisms in Mo/Si multilayer optics for short-wavelengths FELs
Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Castagna, J. C., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., Hajkova, V., van Hattum, E. D., Hau-Riege, S., van de Kruijs, R. W. E., Klinger, D., Krzywinski, J., Jastrow, U., Juha, L., Louis, E. & 4 others, , 28 Jun 2010, p. -.Research output: Contribution to conference › Poster
Determination of the density of ultrathin films using x-ray standing waves
Makhotkin, I. A., Louis, E., van de Kruijs, R. W. E., Yakshin, A., Seregin, A. Y., Lubomirskii, M. Y., Yakunin, S. N., Tereschenko, E. Y., Kovalchuk, M. V. & Bijkerk, F., 20 Sep 2010, p. -.Research output: Contribution to conference › Poster
Dynamic diffusion rates during evolution of Mo/Si interlayers under annealing
Bosgra, A., Yakshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 14 Feb 2010, p. -.Research output: Contribution to conference › Poster
Electronic Structure of an XUV Photogenerated Solid-Density Aluminum Plasma
Vinko, S. M., Zastrau, U., Mazevet, S., Andreasson, J., Bajt, S., Burian, T., Chalupsky, J., Chapman, H. N., Cihelka, J., Doria, D., Döppner, T., Düsterer, S., Dzelzainis, T., Faustlin, R. R., Fortmann, C., Förster, E., Galtier, E. J., Glenzer, S. H., Göde, S., Gregori, G. & 29 others, , 4 Jun 2010, In : Physical review letters. 104, 22, 4 p., 225001.Research output: Contribution to journal › Article › Academic › peer-review
Enhanced diffusion upon amorphous-to-nanocrystalline phase transition in Mo/B4C/Si layered systems
de Rooij-Lohmann, V. I. T. A., Yakshin, A., van de Kruijs, R. W. E., Zoethout, E., Kleyn, A. W., Keim, E. G., Gorgoi, M., Schäfers, F., Brongersma, H. H. & Bijkerk, F., 2010, In : Journal of Applied Physics. 108, 1, p. 014314/1-014314/5 5 p., 014314.Research output: Contribution to journal › Article › Academic › peer-review
EUV-multilayers on grating-like topographies
van den Boogaard, T., Louis, E., Goldberg, K. A., Mochi, I. & Bijkerk, F., 2010, Extreme Ultraviolet (EUV) Lithography: 22–25 February 2010, San Jose, California, United States. La Fontaine, B. M. (ed.). San Jose, CA, USA: SPIE - The International Society for Optical Engineering, 5 p. (Proceedings of SPIE; vol. 7636).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing
Dobrovolskiy, S., Yakshin, A., Tichelaar, F. D., Verhoeven, J., Louis, E. & Bijkerk, F., 2010, In : Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atoms. 268, 6, p. 560-567 8 p.Research output: Contribution to journal › Article › Academic › peer-review