Research Output

2011

Chemical interaction of B4C diffusion barriers with Mo/Si layered nanostructures

Nyabero, S. L., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLASH and LCLS

Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M. & 4 others, Moeller, S., Schlotter, W., Tiedtke, K. & Bijkerk, F., 2011, Hamburg

Research output: Other contributionOther research output

Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLSH and LCLS

Loch, R. A., Sobierajski, R., Bostedt, C., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y. C., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M., Moeller, S. & 3 others, Schlotter, W., Tiedtke, K. & Bijkerk, F., 26 Jan 2011, p. -.

Research output: Contribution to conferencePoster

Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

Louis, E., Sobierajski, R., Loch, R. A., Bostedt, C., Bozek, J., Burian, T., Chalupsky, J., Gaudin, J., Graf, A., Grzonka, J., Hajkova, V., Hau-Riege, S. P., van Hattum, E. D., Juha, L., Klinger, D., Krzywinski, J., London, R., Messerschmidt, M., Moeller, S., Plocinski, T. & 3 others, Wawro, A., Zabierowski, P. & Bijkerk, F., 2011, Prague

Research output: Other contributionOther research output

Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

Loch, R. A., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

Sobierajski, R., Bruijn, S., Khorsand, A. R., Louis, E., van de Kruijs, R. W. E., Burian, T., Chalupsky, J., Cihelka, J., Gleeson, M., Grzonka, J., Gullikson, E. M., Hajkova, V., Hau-Riege, S., Juha, L., Jurek, M., Klinger, D., Krzywinski, J., London, R., Pelka, J. B., Plocinski, T. & 6 others, Rasinski, M., Tiedtke, K., Toleikis, S., Vysin, L., Wabnitz, H. & Bijkerk, F., 2011, In : Optics express. 19, 1, p. 193-205

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)

Damage threshold of amorphous carbon mirror for 177 eV FEL radiation

Dastjani Farahani, S., Chalupsky, J., Burian, T., Chapman, H., Gleeson, A. J., Hajkoya, V., Juha, L., Jurek, M., Klinger, D., Sinn, H., Sobierajski, R., Störmer, M., Tiedtke, K., Toleikis, S., Tschentscher, T., Wabnitz, H. & Gaudin, J., 2011, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 635, 1, Suppl. 11, p. S39-S42

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Decay of crystalline order and equilibration during solid-to-plasma transition induced by 20-fs microfocused 92 eV Free Electron Laser pulses

Galtier, E., Rosmej, F. B., Dzelzainis, T., Riley, D., Khattak, F. Y., Heimann, P., Lee, R. W., Nelson, A. J., Vinko, S. M., Whitcher, T., Wark, J. S., Tschentscher, T., Toleikis, S., Faustlin, R. R., Sobierajski, R., Jurek, M., Juha, L., Chalupsky, J., Hajkova, V., Kozlova, M. & 2 others, Krzywinski, J. & Nagler, B., 2011, In : Physical review letters. 106, 16, p. 1-4 164801.

Research output: Contribution to journalArticleAcademicpeer-review

26 Citations (Scopus)

Depth profiling of Mo/Si multilayers: the effect of Ar-ion energy on layer structure

Zoethout, E., Louis, E. & Bijkerk, F., 2011, Paris, Fr

Research output: Other contributionOther research output

Determination of the density of ultrathin La films in La/B(4)C layered structures using X-ray standing waves

Makhotin, I. A., Louis, E., van de Kruijs, R. W. E., Yaskini, A. E., Zoethout, E., Seregin, A. Y., Tereschenko, E. Y., Yakunin, S. N. & Bijkerk, F., 2011, In : Physica status solidi A. 208, 11, p. 2597-2600

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Diffraction of EUV radiation on free-standing grid structures: theory and experiment

Medvedev, V., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

Diffusion phenomena in chemically stabilized multilayer structures

Bruijn, S., 27 Apr 2011, Enschede: University of Twente. 114 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

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40 Downloads (Pure)

Ellipsometry with an undetermined polarization state

Liu, F., Lee, C. J., Chen, J., Louis, E., van der Slot, P. J. M., Boller, K. J. & Bijkerk, F., 2011

Research output: Non-textual formWeb publication/siteOther research output

EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Miami, Florida

Research output: Other contributionOther research output

Fiber-based ellipsometry for in situ monitoring

Liu, F., Lee, C. J., Chen, J., Louis, E. & Bijkerk, F., 2011, Baltimore, US

Research output: Other contributionOther research output

Infrared suppression by hybrid EUV multilayer - IR etalon structures

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N., Koshelev, K. & Bijkerk, F., 2011, In : Optics letters. 36, 17, p. 3344-3346

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)

In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers

Chen, J., Louis, E., Harmsen, R., Tsarfati, T., Wormeester, H., van Kampen, M., van Schaik, W., van de Kruijs, R. W. E. & Bijkerk, F., 2011, In : Applied surface science. 258, 1, p. 7-12 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)

In-situ study of the diffusion-reaction mechanism in nanometer scale layered films

Bruijn, S., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 2011, In : Applied surface science. 257, 7, p. 2707-2711 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

15 Citations (Scopus)

Interface diffusion kinetics and lifetime scaling in multilayer Bragg optics

van de Kruijs, R. W. E., Bruijn, S., Yakshin, A., Nedelcu, I. & Bijkerk, F., 2011, Advances in X-Ray/ EUV optics and Components VI: 22–24 August 2011, San Diego, California, United States. Morawe, C., Khounsary, A. M. & Goto, S. (eds.). Bellingham, WA: SPIE, 81390A. (Proceedings of SPIE; vol. 8139).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Introducing CP3E

Kuznetsov, A., Kleijn, A., Koshelev, K., Muellender, S., Kurz, P., van Kampen, M., Banine, V. Y., Temmerman, G. C., Goedheer, W. J. & Bijkerk, F., 16 Jun 2011, p. -.

Research output: Contribution to conferencePoster

Ion-enhanced growth in planar and structured Mo/Si multilayers

van den Boogaard, T., 13 Dec 2011, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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18 Downloads (Pure)

Kinetic study of EUV-induced plasma chemistry

Astakhov, D., Goedheer, W. J. & Lopaev, D., 2011, Rijnhuizen

Research output: Other contributionOther research output

Multilayer based solutions for suppression of IR radiation in EUV systems

Medvedev, V., van den Boogaard, T., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Veldhoven

Research output: Other contributionOther research output

Multilayer mirror

Krivtsun, V. M., Yakunin, A. M. & Medvedev, V., 26 May 2011, (In preparation) Patent No. PCT/EP2010/065155, Priority date 20 Nov 1999

Research output: Patent

Multilayers for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M. & Bijkerk, F., 2011, Veldhoven

Research output: Other contributionOther research output

Nanometer interface and materials control for multilayer EUV-optical applications

Louis, E., Yakshin, A., Bijkerk, F. & Tsarfati, T., 2011, In : Progress in surface science. 86, 11-12, p. 255-294 39 p.

Research output: Contribution to journalArticleAcademicpeer-review

99 Citations (Scopus)

Negating HIO-induced metal and carbide EUV surface contamination

Sturm, J. M., Gleeson, M., van de Kruijs, R. W. E., Lee, C. J., Kleyn, A. W. & Bijkerk, F., 2011

Research output: Other contributionOther research output

Nitrogen Passivation in La/B4C Layered Structures

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 2011, Bulgaria

Research output: Other contributionOther research output

Non-constant diffusion rate in sub nanometer thick Mo-Si interlayers

Bosgra, J., Yakshin, A. & Bijkerk, F., 2011, Dijon, France

Research output: Other contributionOther research output

Phase characterization of the reflection on an extreme UV multilayer: comparison between attosecond metrology and standing wave measurements

Loch, R. A., Dubrouil, A., Sobierajski, R., Descamps, D., Fabre, B., Lidon, P., van de Kruijs, R. W. E., Boekhout, F., Gullikson, E. M., Gaudin, J., Louis, E., Bijkerk, F., Mevel, E., Petit, S., Constant, E. & Mairesse, Y., 2011, In : Optics letters. 36, 17, p. 3386-3388 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)

Reduction of interlayer thickness by low-temperature deposition of Mo/Si multilayer mirrors for X-ray reflection

de Rooij-Lohmann, V. I. T. A., Yakshin, A., Zoethout, E., Verhoeven, J. & Bijkerk, F., 2011, In : Applied surface science. 257, 14, p. 6251-6255 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)

Structural properties of sub nanometer thick layers to enhance EUV multilayer mirror reflectance

Bosgra, J., van de Kruijs, R. W. E., Zoethout, E., Verhoeven, J., Yakshin, A. & Bijkerk, F., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

The Energy Dependence of the Ratio of Step and Terrace Reactivity for H(2) Dissociation on Stepped Platinum

Groot, I. M. N., Kleyn, A. W. & Juurlink, L. B. F., 2011, In : Angewandte Chemie (international edition). 50, 22, p. 5174-5177

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)

The interaction of Hyperthermal Argon Atoms with CO-covered Ru(0001): Scattering and Collision-Induced Desorption

Ueta, H., Gleeson, M. & Kleijn, A., 2011, In : Journal of chemical physics. 134, 6, p. 1-10 064706.

Research output: Contribution to journalArticleAcademicpeer-review

The Interaction of Hyperthermal Argon Atoms with CO-covered Ru(0001): Scattering and Collision-Induced Desorption

Gleeson, M., Ueta, H. & Kleyn, A. W., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

5 Citations (Scopus)

The interaction of hyperthermal nitrogen with N-covered Ag(111)

Ueta, H., Gleeson, M. & Kleijn, A., 2011, In : Journal of chemical physics. 135, 7, p. 1-10 074702.

Research output: Contribution to journalArticleAcademicpeer-review

18 Citations (Scopus)

Thermal damage in Mo/Si based multilayers for short-wavelength FELs

Yakshin, A., Van de Kruis, R. W. E., Sobierajski, R., Louis, E., Bruijn, S., Loch, R. A. & Bijkerk, F., 2011, Kyoto, Japan

Research output: Other contributionOther research output

TOF-OFF: A method for determining focal positions in tightly focused free-electron laser experiments by measurement of ejected ions

Iwan, B., Andreasson, J., Andrejczuk, A., Abreu, E., Bergh, M., Caleman, C., Nelson, A. J., Bajt, S., Chalupsky, J., Chapman, H. N., Fäustlin, R. R., Hájková, V., Heimann, P. A., Hjörvarsson, B., Juha, L., Klinger, D., Krzywinski, J., Nagler, B., Pálsson, G. K., Singer, W. & 8 others, Seibert, M. M., Sobierajski, R., Toleikis, S., Tschentscher, T., Vinko, S. M., Lee, R. W., Hajdu, J. & Timneanu, N., 2011, In : High energy density physics. 7, 4, p. 336-342

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Understanding solid state diffusion in multilayered structures on a picometer lengthscale

van de Kruijs, R. W. E., Bruijn, S. & de Rooij-Lohmann, V. I. T. A., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

Verfahren zur Herstellung eines reflektiven optischen Elements für die EUV-Lithographie

Kuznetsov, A., Gleeson, M., van de Kruijs, R. W. E. & Bijkerk, F., 2011, (In preparation) Patent No. DE 10 2011 077 983A1, Priority date 27 Apr 2011

Research output: Patent

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Muellender, S. & Bijkerk, F., 2011, Miami, Florida (US)

Research output: Other contributionOther research output

2010

Carbon film growth and hydrogenic retention of tungsten exposed to carbon-seeded high density deuterium plasmas

Wright, G. M., Al, R. S., Alves, E., Alves, L. C., Barradas, N. P., Kleyn, A. W., Cardozo, N. J. L., van der Meiden, H. J., Philipps, V., Rooij, G. J., Shumack, A. E., Vijvers, W. A. J., Westerhout, J., Zoethout, E. & Rapp, J., 2010, In : Journal of nuclear materials. 396, 2-3, p. 176-180

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Chemical interaction of B4C, B and C with Mo/Si layered structures

de Rooij-Lohmann, V. I. T. A., Veldhuizen, L. W., Zoethout, E., Yakshin, A., van de Kruijs, R. W. E., Thijsse, B. J., Gorgoi, M., Schaefers, F. & Bijkerk, F., 2010, In : Journal of Applied Physics. 108, 094314.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Damage mechanisms in Mo/Si multilayer optics for short-wavelengths FELs

Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Castagna, J. C., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., Hajkova, V., van Hattum, E. D., Hau-Riege, S., van de Kruijs, R. W. E., Klinger, D., Krzywinski, J., Jastrow, U., Juha, L., Louis, E. & 4 others, Messerschmidt, M., Moeller, S., Tiedtke, K. & Bijkerk, F., 28 Jun 2010, p. -.

Research output: Contribution to conferencePoster

Determination of the density of ultrathin films using x-ray standing waves

Makhotkin, I. A., Louis, E., van de Kruijs, R. W. E., Yakshin, A., Seregin, A. Y., Lubomirskii, M. Y., Yakunin, S. N., Tereschenko, E. Y., Kovalchuk, M. V. & Bijkerk, F., 20 Sep 2010, p. -.

Research output: Contribution to conferencePoster

Dynamic diffusion rates during evolution of Mo/Si interlayers under annealing

Bosgra, A., Yakshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 14 Feb 2010, p. -.

Research output: Contribution to conferencePoster

Electronic Structure of an XUV Photogenerated Solid-Density Aluminum Plasma

Vinko, S. M., Zastrau, U., Mazevet, S., Andreasson, J., Bajt, S., Burian, T., Chalupsky, J., Chapman, H. N., Cihelka, J., Doria, D., Döppner, T., Düsterer, S., Dzelzainis, T., Faustlin, R. R., Fortmann, C., Förster, E., Galtier, E. J., Glenzer, S. H., Göde, S., Gregori, G. & 29 others, Hajdu, J., Hajkova, V., Heimann, P. A., Irsig, R., Juha, L., Jurek, M., Krzywinski, J., Laarmann, T., Lee, H. J., Lee, R. W., Li, B., Meiwes-Broer, K-H., Mithen, J. P., Nagler, B., Nelson, A. J., Przystawik, A., Redmer, R., Riley, D., Rosmej, F. B., Sobierajski, R., Tavella, F., Thiele, R., Tiggesbaümker, J., Toleikis, S., Tschentscher, T., Vysin, L., Whitcher, T., White, N. & Wark, J., 4 Jun 2010, In : Physical review letters. 104, 22, 4 p., 225001.

Research output: Contribution to journalArticleAcademicpeer-review

50 Citations (Scopus)

Enhanced diffusion upon amorphous-to-nanocrystalline phase transition in Mo/B4C/Si layered systems

de Rooij-Lohmann, V. I. T. A., Yakshin, A., van de Kruijs, R. W. E., Zoethout, E., Kleyn, A. W., Keim, E. G., Gorgoi, M., Schäfers, F., Brongersma, H. H. & Bijkerk, F., 2010, In : Journal of Applied Physics. 108, 1, p. 014314/1-014314/5 5 p., 014314.

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)

EUV-multilayers on grating-like topographies

van den Boogaard, T., Louis, E., Goldberg, K. A., Mochi, I. & Bijkerk, F., 2010, Extreme Ultraviolet (EUV) Lithography: 22–25 February 2010, San Jose, California, United States. La Fontaine, B. M. (ed.). San Jose, CA, USA: SPIE - The International Society for Optical Engineering, 5 p. (Proceedings of SPIE; vol. 7636).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing

Dobrovolskiy, S., Yakshin, A., Tichelaar, F. D., Verhoeven, J., Louis, E. & Bijkerk, F., 2010, In : Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atoms. 268, 6, p. 560-567 8 p.

Research output: Contribution to journalArticleAcademicpeer-review