XUV Optics

Research Output

Research Output per year

2001 2021

• 226 Article
• 176 Poster
• 28 Conference contribution
• 21 Other contribution
• 66 More
  • 20 Patent
  • 20 PhD Thesis - Research UT, graduation UT
  • 10 PhD Thesis - Research external, graduation UT
  • 5 Abstract
  • 2 Conference article
  • 2 Pd Eng Thesis
  • 2 Working paper
  • 1 Report
  • 1 Chapter
  • 1 Paper
  • 1 Review article
  • 1 Web publication/site

Research Output per year

Research Output per year

Search results

• 2012

  Reconstruction of the structure of La/B4C and LaN/B4C multilayer mirrors using X-ray Standing Waves

  Makhotkin, I. A., Yakunin, S. N., Chuev, M., Zoethout, E., Louis, E., Novikov, D., Seregin, A. Y., Pashayev, I. M. & Bijkerk, F., 18 Jun 2012.

  Research output: Contribution to conference › Poster › Other research output

  Open Access

  File
  6 Downloads (Pure)

• Roughness development during growth and ion beam polishing of molybdenum silicon mulitlayer films

  Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

  Research output: Contribution to conference › Poster › Other research output

  • silicon films
  • polishing
  • molybdenum
  • roughness
  • ion beams

• RZLINE code modelling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

  Koshelev, K., Noivkov, V. G., Medvedev, V., Grushin, A. S. & Krivtsun, V. M., 2012, In : Journal of micro/nanolithography, MEMS, and MOEMS. 11, 2, p. 021112-1-021112-6 021112.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Laser produced plasmas
  • Plasma sources
  • extreme ultraviolet radiation
  • Tin
  • Ultraviolet radiation

• Simultaneous analysis of Grazing Incidence X-Ray reflectivity and X-ray standing waves from periodic multilayer systems

  Yakunin, S. N., Makhotkin, I. A., Chuyev, M. A., Seregin, A. Y., Pashayev, E. M., Louis, E., van de Kruijs, R. W. E., Bijkerk, F. & Kovalchuk, M. V., 15 Sep 2012, p. 115-115.

  Research output: Contribution to conference › Abstract › Other research output

  File

  • grazing incidence
  • standing waves
  • reflectance
  • x rays
  • fluorescence
  22 Downloads (Pure)

• Solid state diffusion in multilayered structures on a picometer lengthscale

  van de Kruijs, R. W. E., Bosgra, J., Bruijn, S., Yakshin, A. & Bijkerk, F., 15 Sep 2012, p. -.

  Research output: Contribution to conference › Poster › Other research output

  File

  • solid state
  • activation energy
  • grazing incidence
  • laminates
  • x ray diffraction
  13 Downloads (Pure)

• Spectral and spatial structure of extreme ultraviolet radiation in laser plasma-wall interactions

  Kuznetsov, A., Stuik, R., Bijkerk, F. & Shevelko, A. P., 2012, In : Plasma physics and controlled fusion. 54, 8, p. 1-6 6 p., 085019.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Beam plasma interactions
  • extreme ultraviolet radiation
  • Ultraviolet radiation
  • laser plasmas
  • Plasmas

• Spectral filter for splitting a beam with electromagnetic radiation having wavelengths in the extreme ultraviolet (EUV) or soft X-Ray (Soft X) and the infrared (IR) wavelength range

  van Goor, F. A., Bijkerk, F., van den Boogaard, T. & van der Meer, R., 23 Feb 2012, (Submitted) Patent No. WO 2012/023853 A1, Priority date 23 Feb 2012

  Research output: Patent

  File

  • electromagnetic radiation
  • filters
  • extreme ultraviolet radiation
  • grooves
  • wavelengths
  16 Downloads (Pure)

• Spiegeling en Daad

  Veen, W. & Bijkerk, F., 2012, In : Magazine voor alumni en relaties. 2012, 2, p. 32-33 2 p.

  Research output: Contribution to journal › Article › Popular

• Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors

  Bosgra, J., Zoethout, E., Eerden, A. M. J., Verhoeven, J., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 20 Dec 2012, In : Applied Optics. 51, 36, p. 8541-8548 8 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Structural properties
  • Multilayers
  • laminates
  • mirrors
  • X rays
  5 Citations (Scopus)

• Study of EUV induced defects on few-layer graphene

  Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 23 Apr 2012, p. -.

  Research output: Contribution to conference › Poster

• Surface modifications by gas plasma control osteogenic differentiation of MC3T3-E1 cells

  Barradas, A. M. C., Lachmann, K., Hlawacek, G., Frielink, C., Truckenmüller, R. K., Boerman, O. C., van Gastel, R., Garritsen, H. S. P., Thomas, M., Moroni, L., van Blitterswijk, C. & de Boer, J., 2012, In : Acta biomaterialia. 8, 8, p. 2969-2977

  Research output: Contribution to journal › Article › Academic › peer-review

  • Plasma Gases
  • tetramethylsilane
  • poly(lactide)
  • Surface treatment
  • Biocompatible Materials
  29 Citations (Scopus)

• The noise-limited-resolution for stimulated emission depletion microscopy of diffusing particles

  Lee, C. J. & Boller, K. J., 2012, In : Optics express. 20, 12, p. 12793-12798 6 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • stimulated emission
  • depletion
  • microscopy
  • far fields
  • saturation
  38 Downloads (Pure)

• Thermally induced interface chemistry in Mo/B 4C/Si/B 4C multilayered films

  Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 10 Sep 2012, In : Journal of Applied Physics. 112, 5, p. 054317-1-054317-5 5 p., 054317.

  Research output: Contribution to journal › Article › Academic › peer-review

  • chemistry
  • expansion
  • annealing
  • barrier layers
  • grazing incidence
  6 Citations (Scopus)

• Thermoelectric properties of Bi0.5Sb1.5Te3/C60 nanocomposites

  Blank, V. D., Buga, S. G., Kulbachinskii, V. A., Kytin, V. G., Medvedev, V., Popov, Y. M., Stepanov, P. B. & Skok, V. F., 2012, In : Physical review B: Condensed matter and materials physics. 86, 7, p. 075426-1-075426-8 8 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Fullerenes
  • Nanocomposites
  • fullerenes
  • Molecules
  • Thermal conductivity
  53 Citations (Scopus)

• The X-ray Standing Waves analysis of short period La/B- based multilayers

  Makhotkin, I. A., Yakunin, S. N., Chuev, M. A., Zoethout, E., Louis, E., van de Kruijs, R. W. E., Bijkerk, F. & Kovalchuk, M. V., 15 Sep 2012, p. -.

  Research output: Contribution to conference › Poster › Other research output

  File

  • standing waves
  • reflectance
  • x rays
  • grazing incidence
  • laminates
  46 Downloads (Pure)

• Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

  Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, S. N., Muellender, S. & Bijkerk, F., 13 Mar 2012, Extreme Ultraviolet (EUV) Lithography III. Naulleau, P. P. & Wood II, O. R. (eds.). Bellingham, WA: SPIE, 5 p. 832213. (Proceedings of SPIE; vol. 8322).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  • lithography
  • coatings
  • mirrors
  • reflectance
  • wavelengths
  2 Citations (Scopus)

• Wavelength selection for multilayer coatings for the lithography generation beyond extreme ultraviolet

  Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M., Muellender, S. & Bijkerk, F., 19 Oct 2012, In : Journal of micro/nanolithography, MEMS, and MOEMS. 11, 4, p. 040501-1-040501-3 3 p., 040501.

  Research output: Contribution to journal › Article › Academic › peer-review

  File

  • Boron
  • Lithography
  • Multilayers
  • Wavelength
  • boron
  13 Citations (Scopus)

  59 Downloads (Pure)

• Wavelength separation from extreme ultraviolet mirrors using phaseshift reflection

  van den Boogaard, T., van Goor, F. A., Louis, E. & Bijkerk, F., 10 Jan 2012, In : Optics letters. 37, 2, p. 160-162 2 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • reflectors
  • lithography
  • retarding
  • gratings
  • mirrors
  17 Citations (Scopus)
• 2011

  Atomic quantum scattering and molecular diffraction

  Kleijn, A., 2011, In : Progress in surface science. 86, 9-10, p. 163-168

  Research output: Contribution to journal › Article › Academic › peer-review

  • Atomic beams
  • Molecular beams
  • Surface structure
  • atomic beams
  • Diffraction
  2 Citations (Scopus)

• B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

  Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 13 Jun 2011, p. -.

  Research output: Contribution to conference › Poster

• B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

  Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Maui, Hawaii, US

  Research output: Other contribution › Other research output

  • infrared radiation
  • laser beams
  • mirrors
  • reflectance
  • retarding

• Behavior of transition metal and metal oxide surfaces under oxidative and reductive environment

  Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J. & Bijkerk, F., 18 Jan 2011, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Blistering behavior in Mo/Si multilayers

  Kuznetsov, A. S., Gleeson, M. A., van de Kruijs, R. W. E. & Bijkerk, F., 18 Apr 2011, SPIE Optics + Optoelectronics 2011. Kuznetsov, A. S. (ed.). SPIE, 6 p. 807713. (Proceedings of SPIE; vol. 8077).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  • blisters
  • hydrogen isotopes
  • gas flow
  • fluence
  • damage
  5 Citations (Scopus)

• Carbon induced extreme ultraviolet (EUV) reflectance loss characterized using visible-light ellipsometry

  Chen, J., Louis, E., Wormeester, H., Harmsen, R., van de Kruijs, R. W. E., Lee, C. J., van Schaik, W. & Bijkerk, F., 2011, In : Measurement science and technology. 22, 10, p. - 8 p., 105705.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Ellipsometry
  • Carbon
  • Optical constants
  • Multilayers
  • Spectroscopic ellipsometry
  9 Citations (Scopus)

• Characterization of EUV induced contamination on multilayer optics

  Chen, J., 1 Jul 2011, Enschede: Universiteit Twente. 119 p.

  Research output: Thesis › PhD Thesis - Research external, graduation UT

  Open Access

  File

  • contamination
  • optics
  • theses
  • characterization
  • reflectance
  755 Downloads (Pure)

• Characterization of Mo/Si multilayer growth on stepped topographies

  van den Boogaard, A. J. R., Louis, E., Zoethout, E., Goldberg, K. A. & Bijkerk, F., 2011, In : Journal of vacuum science and technology. B: Microelectronics and nanometer structures. 29, 5, p. 1-9 9 p., 051803.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Topography
  • Multilayers
  • topography
  • Characterization (materials science)
  • characterization
  3 Citations (Scopus)

  23 Downloads (Pure)

• Chemical interaction of B4C diffusion barriers with Mo/Si layered nanostructures

  Nyabero, S. L., 2011, Veldhoven, Netherlands

  Research output: Other contribution › Other research output

  • interactions
  • barrier layers
  • laminates
  • interlayers
  • x rays

• Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLASH and LCLS

  Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M. & 4 others, Moeller, S., Schlotter, W., Tiedtke, K. & Bijkerk, F., 2011, Hamburg

  Research output: Other contribution › Other research output

• Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLSH and LCLS

  Loch, R. A., Sobierajski, R., Bostedt, C., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y. C., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M., Moeller, S. & 3 others, Schlotter, W., Tiedtke, K. & Bijkerk, F., 26 Jan 2011, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

  Louis, E., Sobierajski, R., Loch, R. A., Bostedt, C., Bozek, J., Burian, T., Chalupsky, J., Gaudin, J., Graf, A., Grzonka, J., Hajkova, V., Hau-Riege, S. P., van Hattum, E. D., Juha, L., Klinger, D., Krzywinski, J., London, R., Messerschmidt, M., Moeller, S., Plocinski, T. & 3 others, Wawro, A., Zabierowski, P. & Bijkerk, F., 2011, Prague

  Research output: Other contribution › Other research output

  • optics
  • damage
  • free electron lasers
  • wavelengths
  • optical coatings

• Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

  Loch, R. A., 2011, Veldhoven, Netherlands

  Research output: Other contribution › Other research output

  • free electron lasers
  • optics
  • damage
  • wavelengths
  • yield point

• Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

  Sobierajski, R., Bruijn, S., Khorsand, A. R., Louis, E., van de Kruijs, R. W. E., Burian, T., Chalupsky, J., Cihelka, J., Gleeson, M., Grzonka, J., Gullikson, E. M., Hajkova, V., Hau-Riege, S., Juha, L., Jurek, M., Klinger, D., Krzywinski, J., London, R., Pelka, J. B., Plocinski, T. & 6 others, Rasinski, M., Tiedtke, K., Toleikis, S., Vysin, L., Wabnitz, H. & Bijkerk, F., 2011, In : Optics express. 19, 1, p. 193-205

  Research output: Contribution to journal › Article › Academic › peer-review
  26 Citations (Scopus)

• Damage threshold of amorphous carbon mirror for 177 eV FEL radiation

  Dastjani Farahani, S., Chalupsky, J., Burian, T., Chapman, H., Gleeson, A. J., Hajkoya, V., Juha, L., Jurek, M., Klinger, D., Sinn, H., Sobierajski, R., Störmer, M., Tiedtke, K., Toleikis, S., Tschentscher, T., Wabnitz, H. & Gaudin, J., 2011, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 635, 1, Suppl. 11, p. S39-S42

  Research output: Contribution to journal › Article › Academic › peer-review

  • Free electron lasers
  • Amorphous carbon
  • yield point
  • Mirrors
  • Radiation
  10 Citations (Scopus)

• Decay of crystalline order and equilibration during solid-to-plasma transition induced by 20-fs microfocused 92 eV Free Electron Laser pulses

  Galtier, E., Rosmej, F. B., Dzelzainis, T., Riley, D., Khattak, F. Y., Heimann, P., Lee, R. W., Nelson, A. J., Vinko, S. M., Whitcher, T., Wark, J. S., Tschentscher, T., Toleikis, S., Faustlin, R. R., Sobierajski, R., Jurek, M., Juha, L., Chalupsky, J., Hajkova, V., Kozlova, M. & 2 others, Krzywinski, J. & Nagler, B., 2011, In : Physical review letters. 106, 16, p. 1-4 164801.

  Research output: Contribution to journal › Article › Academic › peer-review

  • free electron lasers
  • conduction bands
  • decay
  • Auger effect
  • pulses
  31 Citations (Scopus)

• Depth profiling of Mo/Si multilayers: the effect of Ar-ion energy on layer structure

  Zoethout, E., Louis, E. & Bijkerk, F., 2011, Paris, Fr

  Research output: Other contribution › Other research output

  • erosion
  • ions
  • Bragg reflectors
  • molybdenum
  • Auger spectroscopy

• Determination of the density of ultrathin La films in La/B(4)C layered structures using X-ray standing waves

  Makhotin, I. A., Louis, E., van de Kruijs, R. W. E., Yaskini, A. E., Zoethout, E., Seregin, A. Y., Tereschenko, E. Y., Yakunin, S. N. & Bijkerk, F., 2011, In : Physica status solidi A. 208, 11, p. 2597-2600

  Research output: Contribution to journal › Article › Academic › peer-review
  4 Citations (Scopus)

• Diffraction of EUV radiation on free-standing grid structures: theory and experiment

  Medvedev, V., 2011, Veldhoven, Netherlands

  Research output: Other contribution › Other research output

  • transmittance
  • grids
  • filters
  • radiation
  • diffraction

• Diffusion phenomena in chemically stabilized multilayer structures

  Bruijn, S., 27 Apr 2011, Enschede: University of Twente. 114 p.

  Research output: Thesis › PhD Thesis - Research external, graduation UT

  Open Access

  File

  • laminates
  • barrier layers
  • theses
  • damage
  • annealing
  60 Downloads (Pure)

• Ellipsometry with an undetermined polarization state

  Liu, F., Lee, C. J., Chen, J., Louis, E., van der Slot, P. J. M., Boller, K. J. & Bijkerk, F., 2011

  Research output: Non-textual form › Web publication/site › Other research output

  • ellipsometry
  • polarization
  • Poincare spheres
  • light beams
  • orbits

• EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

  Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Miami, Florida

  Research output: Other contribution › Other research output

  • laser beams
  • mirrors
  • reflectance
  • extreme ultraviolet radiation
  • etalons

• Fiber-based ellipsometry for in situ monitoring

  Liu, F., Lee, C. J., Chen, J., Louis, E. & Bijkerk, F., 2011, Baltimore, US

  Research output: Other contribution › Other research output

  • preserving
  • line of sight
  • ellipsometry
  • fibers
  • polarization

• Infrared suppression by hybrid EUV multilayer - IR etalon structures

  Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N., Koshelev, K. & Bijkerk, F., 2011, In : Optics letters. 36, 17, p. 3344-3346

  Research output: Contribution to journal › Article › Academic › peer-review
  11 Citations (Scopus)

• In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers

  Chen, J., Louis, E., Harmsen, R., Tsarfati, T., Wormeester, H., van Kampen, M., van Schaik, W., van de Kruijs, R. W. E. & Bijkerk, F., 2011, In : Applied surface science. 258, 1, p. 7-12 6 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Ellipsometry
  • Etching
  • Hydrogen
  • Carbon
  • Carbon films
  19 Citations (Scopus)

• In-situ study of the diffusion-reaction mechanism in nanometer scale layered films

  Bruijn, S., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 2011, In : Applied surface science. 257, 7, p. 2707-2711 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Temperature
  • Thick films
  • Activation energy
  • X ray diffraction
  • Experiments
  15 Citations (Scopus)

• Interface diffusion kinetics and lifetime scaling in multilayer Bragg optics

  van de Kruijs, R. W. E., Bruijn, S., Yakshin, A., Nedelcu, I. & Bijkerk, F., 2011, Advances in X-Ray/ EUV optics and Components VI: 22–24 August 2011, San Diego, California, United States. Morawe, C., Khounsary, A. M. & Goto, S. (eds.). Bellingham, WA: SPIE, 81390A. (Proceedings of SPIE; vol. 8139).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

  • optics
  • scaling
  • life (durability)
  • kinetics
  • scaling laws
  1 Citation (Scopus)

• Introducing CP3E

  Kuznetsov, A., Kleijn, A., Koshelev, K., Muellender, S., Kurz, P., van Kampen, M., Banine, V. Y., Temmerman, G. C., Goedheer, W. J. & Bijkerk, F., 16 Jun 2011, p. -.

  Research output: Contribution to conference › Poster › Other research output

• Ion-enhanced growth in planar and structured Mo/Si multilayers

  van den Boogaard, T., 13 Dec 2011, Enschede: Universiteit Twente. 104 p.

  Research output: Thesis › PhD Thesis - Research external, graduation UT

  Open Access

  File

  • molybdenum
  • polishing
  • gratings
  • roughness
  • silicon
  32 Downloads (Pure)

• Kinetic study of EUV-induced plasma chemistry

  Astakhov, D., Goedheer, W. J. & Lopaev, D., 2011, Rijnhuizen

  Research output: Other contribution › Other research output

• Multilayer based solutions for suppression of IR radiation in EUV systems

  Medvedev, V., van den Boogaard, T., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Veldhoven

  Research output: Other contribution › Other research output

  • retarding
  • reflectance
  • radiation
  • mirrors
  • specular reflection

• Multilayer mirror

  Krivtsun, V. M., Yakunin, A. M. & Medvedev, V., 26 May 2011, (In preparation) Patent No. PCT/EP2010/065155, Priority date 20 Nov 1999

  Research output: Patent