Research Output

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Poster
2010

Damage mechanisms in Mo/Si multilayer optics for short-wavelengths FELs

Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Castagna, J. C., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., Hajkova, V., van Hattum, E. D., Hau-Riege, S., van de Kruijs, R. W. E., Klinger, D., Krzywinski, J., Jastrow, U., Juha, L., Louis, E. & 4 others, Messerschmidt, M., Moeller, S., Tiedtke, K. & Bijkerk, F., 28 Jun 2010, p. -.

Research output: Contribution to conferencePoster

Determination of the density of ultrathin films using x-ray standing waves

Makhotkin, I. A., Louis, E., van de Kruijs, R. W. E., Yakshin, A., Seregin, A. Y., Lubomirskii, M. Y., Yakunin, S. N., Tereschenko, E. Y., Kovalchuk, M. V. & Bijkerk, F., 20 Sep 2010, p. -.

Research output: Contribution to conferencePoster

Dynamic diffusion rates during evolution of Mo/Si interlayers under annealing

Bosgra, A., Yakshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 14 Feb 2010, p. -.

Research output: Contribution to conferencePoster

Growthof silicon nitride thin films at room temperature

Zoethout, E., Louis, E. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

Growth of silicon nitride thin films at room termperature

Zoethout, E. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

High reflectance multilayer coating technology for 3100 EUVL projection optics

van Hattum, E. D., Louis, E., van der Westen, A., Salle, P., Zoethout, E., von Blanckenhage, G., Enkish, H., Müllender, S. & Bijkerk, F., 21 Feb 2010, p. -.

Research output: Contribution to conferencePoster

Hydrogen interaction with mirrors for EUVL lithography

Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J., Schmid, K. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

2011

B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 13 Jun 2011, p. -.

Research output: Contribution to conferencePoster

Behavior of transition metal and metal oxide surfaces under oxidative and reductive environment

Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J. & Bijkerk, F., 18 Jan 2011, p. -.

Research output: Contribution to conferencePoster

Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLSH and LCLS

Loch, R. A., Sobierajski, R., Bostedt, C., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y. C., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M., Moeller, S. & 3 others, Schlotter, W., Tiedtke, K. & Bijkerk, F., 26 Jan 2011, p. -.

Research output: Contribution to conferencePoster

Introducing CP3E

Kuznetsov, A., Kleijn, A., Koshelev, K., Muellender, S., Kurz, P., van Kampen, M., Banine, V. Y., Temmerman, G. C., Goedheer, W. J. & Bijkerk, F., 16 Jun 2011, p. -.

Research output: Contribution to conferencePoster

2012

2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate

Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Yakushev, O., Krivtsun, V. M., Koshelev, K. & Bijkerk, F., 8 Oct 2012, p. 49-49.

Research output: Contribution to conferencePoster

Open Access
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10 Downloads (Pure)

Bragg reflectors with IR suppression for Extreme Ultraviolet Lithography

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Damage of multilayer optics under irradiation with multiple femtosecond XUV pulses

Sobierajski, R., Loch, R. A., Klinger, D., Dluzewski, P., Klepka, M., Burian, T., Chalupsky, J., Visin, L., Farahani, S. D., Hajkova, V., Harmand, M., Krzywinski, J., Juha, L., Jurek, M., Möller, S., Nagasono, M., Ozkan, C., Saskl, K., Sinn, H., Sovak, P. & 2 others, Toleikis, S. & Gaudin, J., 15 Jul 2012, p. -.

Research output: Contribution to conferencePoster

Ellipsometry with random varying polarization state

Liu, F., van Albada, B., Lee, C. J. & Bijkerk, F., 16 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Ethanol decomposition on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Evolution of diffusion characteristics during nanoscopic Mo-Si interlayer growth

Bosgra, J., Verhoeven, J., Yakshin, A. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 22 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Extreme ultraviolet induced oxidation of Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Hydrogen-induced blistering phenomena in multilayered systems

Kuznetsov, A., Gleeson, M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Infrared suppression by hybrid EUV multilayer - IR lossy etalon structures

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

IR antireflective filtering for EUV multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

Modeling of Plasma Dynamics and EUV Generation for Distributed Sn Targets Irradiated with Short Laser Pulses

Grushin, A. S., Novikov, D., Ivanov, V., Medvedev, V., Krivtsun, V. M. & Koshelev, K., 8 Oct 2012, p. 78-78.

Research output: Contribution to conferencePoster

Open Access
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8 Downloads (Pure)

Modeling of the effective electron energy distribution at an irradiated Multi Layer Mirror surface in vacuum

Astakhov, D., Goedheer, W. J., van Kampen, M., Lopaev, D., Ivanov, V. & Bijkerk, F., 11 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Modelling of shot damage tresholds of multilayer optics for short-wavelength FELs

Loch, R. A., Sobierajski, R., Louis, E., Bosgra, J., van de Kruijs, R. W. E., Makhotkin, I. A., Zoethout, E. & Bijkerk, F., 25 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Muellender, S. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

Multilayer optics for 6.7 nm wavelength

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Multilayers for 6.8 nm Wavelength

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 8 Oct 2012, p. 74-74.

Research output: Contribution to conferencePoster

Open Access
File
4 Downloads (Pure)

Multilayers for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, N. & Bijkerk, F., 29 Sep 2012, p. -.

Research output: Contribution to conferencePoster

Nitrogen interface passivation of La/B layeren structures

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

Reactions of ethanol on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 3 Sep 2012, p. -.

Research output: Contribution to conferencePoster

Reconstruction of the structure of La/B4C and LaN/B4C multilayer mirrors using X-ray Standing Waves

Makhotkin, I. A., Yakunin, S. N., Chuev, M., Zoethout, E., Louis, E., Novikov, D., Seregin, A. Y., Pashayev, I. M. & Bijkerk, F., 18 Jun 2012.

Research output: Contribution to conferencePoster

Open Access
File
6 Downloads (Pure)

Roughness development during growth and ion beam polishing of molybdenum silicon mulitlayer films

Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Solid state diffusion in multilayered structures on a picometer lengthscale

van de Kruijs, R. W. E., Bosgra, J., Bruijn, S., Yakshin, A. & Bijkerk, F., 15 Sep 2012, p. -.

Research output: Contribution to conferencePoster

File
11 Downloads (Pure)

Study of EUV induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 23 Apr 2012, p. -.

Research output: Contribution to conferencePoster

The X-ray Standing Waves analysis of short period La/B- based multilayers

Makhotkin, I. A., Yakunin, S. N., Chuev, M. A., Zoethout, E., Louis, E., van de Kruijs, R. W. E., Bijkerk, F. & Kovalchuk, M. V., 15 Sep 2012, p. -.

Research output: Contribution to conferencePoster

File
43 Downloads (Pure)
2013

2D PIC modeling of the EUV induced hydrogen plasma and comparison to the observed carbon etching rate

Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Krivtsun, V. M., Yakushev, O., Koshelev, K. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Blister formation on multilayer mirrors due to the exposure of hydrogen

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Koshelev, K., Yakushev, O. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013, p. -.

Research output: Contribution to conferencePoster

Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013.

Research output: Contribution to conferencePoster

Deposition and Oxidation Studies by Low-Energy Ion Scattering (LEIS)

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePoster

Engineering optical constants for broadband single layer anti-reflection coatings

Huber, S., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 25 Aug 2013, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Osorio, E., van Kampen, M., Lee, C. J. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakinun, A. M. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Hydrogen uptake and distribution in a multi-layered systems and related effects

Gleeson, M., Kuznetsov, A. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Infrared antireflective filtering for 6.x nm multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Louis, E. & Bijkerk, F., 6 Oct 2013, p. -.

Research output: Contribution to conferencePoster