Research Output 2001 2019

Filter
Poster
2012

Ethanol decomposition on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Evolution of diffusion characteristics during nanoscopic Mo-Si interlayer growth

Bosgra, J., Verhoeven, J., Yakshin, A. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 22 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Bragg reflectors
reflectance
radiation
lithography
dense plasmas

Extreme ultraviolet induced oxidation of Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Modelling of shot damage tresholds of multilayer optics for short-wavelength FELs

Loch, R. A., Sobierajski, R., Louis, E., Bosgra, J., van de Kruijs, R. W. E., Makhotkin, I. A., Zoethout, E. & Bijkerk, F., 25 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Muellender, S. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer optics for 6.7 nm wavelength

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

1 Downloads (Pure)

Multilayers for 6.8 nm Wavelength

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 8 Oct 2012, p. 74-74.

Research output: Contribution to conferencePosterOther research output

Open Access
File
mirrors
wavelengths
reflectance
lithography
laminates

Nitrogen interface passivation of La/B layeren structures

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Reactions of ethanol on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 3 Sep 2012, p. -.

Research output: Contribution to conferencePosterOther research output

2 Downloads (Pure)

Reconstruction of the structure of La/B4C and LaN/B4C multilayer mirrors using X-ray Standing Waves

Makhotkin, I. A., Yakunin, S. N., Chuev, M., Zoethout, E., Louis, E., Novikov, D., Seregin, A. Y., Pashayev, I. M. & Bijkerk, F., 18 Jun 2012.

Research output: Contribution to conferencePosterOther research output

Open Access
File

Roughness development during growth and ion beam polishing of molybdenum silicon mulitlayer films

Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

silicon films
polishing
molybdenum
roughness
ion beams
8 Downloads (Pure)

Solid state diffusion in multilayered structures on a picometer lengthscale

van de Kruijs, R. W. E., Bosgra, J., Bruijn, S., Yakshin, A. & Bijkerk, F., 15 Sep 2012, p. -.

Research output: Contribution to conferencePosterOther research output

File
solid state
activation energy
grazing incidence
laminates
x ray diffraction

Study of EUV induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 23 Apr 2012, p. -.

Research output: Contribution to conferencePosterOther research output

40 Downloads (Pure)

The X-ray Standing Waves analysis of short period La/B- based multilayers

Makhotkin, I. A., Yakunin, S. N., Chuev, M. A., Zoethout, E., Louis, E., van de Kruijs, R. W. E., Bijkerk, F. & Kovalchuk, M. V., 15 Sep 2012, p. -.

Research output: Contribution to conferencePosterOther research output

File
standing waves
reflectance
x rays
grazing incidence
laminates
2013

2D PIC modeling of the EUV induced hydrogen plasma and comparison to the observed carbon etching rate

Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Krivtsun, V. M., Yakushev, O., Koshelev, K. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

hydrogen plasma
etching
carbon
ions
hydrogen ions

Blister formation on multilayer mirrors due to the exposure of hydrogen

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013, p. -.

Research output: Contribution to conferencePosterOther research output

plasma jets
cleaning
surface waves
carbon
sputtering

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Koshelev, K., Yakushev, O. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

plasma jets
cleaning
surface waves
carbon
gases

Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013, p. -.

Research output: Contribution to conferencePosterOther research output

plasma jets
cleaning
surface waves
carbon
sputtering

Deposition and Oxidation Studies by Low-Energy Ion Scattering (LEIS)

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Engineering optical constants for broadband single layer anti-reflection coatings

Huber, S., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 25 Aug 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Osorio, E., van Kampen, M., Lee, C. J. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakinun, A. M. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Hydrogen uptake and distribution in a multi-layered systems and related effects

Gleeson, M., Kuznetsov, A. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

hydrogen
fusion
insulators
magnetic properties
optical properties

Infrared antireflective filtering for 6.x nm multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Louis, E. & Bijkerk, F., 6 Oct 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Metal Hydride assited contamination on Ru/Si surfaces

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer development for the generation beyond EUVL: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Multiple pulse damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

Sobierajski, R., Loch, R. A., Louis, E., Klinger, D., Dluizewski, P., Klepka, M., Bijkerk, F., Burian, T., Chalupsky, J., Coppola, N., Dastjani Farahani, S., Galasso, G., Hajkova, V., Harmand, M., Krzywinski, J., Juha, L., Jurek, M., Möller, S., Nagasono, M., Ozkan, C. & 9 othersPelka, J. B., Saskl, K., Schulz, J., Sovak, P., Toleikis, S., Tiedtke, K., Vysin, L., Wawro, A. & Gaudin, J., 1 Apr 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Oxidation and metal contamination of EUV optics

Sturm, J. M., Liu, F., Pachecka, M., Lee, C. J. & Bijkerk, F., 9 Dec 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Reflective Pyramid Wavefront Sensor for Extreme Ultraviolet Radiation

Bayraktar, M., van Goor, F. A., Bijkerk, F. & Boller, K. J., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

Bayraktar, M., Chopra, A., Wessels, W. A., van Goor, F. A., Rijnders, A. J. H. M. & Bijkerk, F., 30 Oct 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Study of EUV induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Suppression of long wavelength reflection from Extreme UV multilayer optics

Huang, Q., Medvedev, V., van den Boogaard, T., van der Meer, R., van de Kruijs, R. W. E., Huber, S., Bastiaens, H. M. J., Bruineman, C., Vratsov, B., Louis, E. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

The Industrial Focus Group XUV Optics

Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Lee, C. J., Louis, E. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Transmission grating spectroscopy in the EUV and VUV

Bastiaens, H. M. J., Bruineman, C., Vratzov, B., Louis, E. & Bijkerk, F., 6 Oct 2013, p. -.

Research output: Contribution to conferencePosterOther research output

19 Downloads (Pure)

Waveguide-based External Cavity Semiconductor Laser Arrays

Oldenbeuving, R. M., Fan, Y., Song, H., Verhaegen, M. H. G., Agbana, T., Schitter, G., Klein, E. J., Lee, C. J., Offerhaus, H. L., van Voorst, P. D., van der Slot, P. J. M. & Boller, K-J., 30 Oct 2013. 1 p.

Research output: Contribution to conferencePosterOther research output

Open Access
File
2014

Advanced metrology for multilayer mirrors

Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Assumption-independent approach for GIXRR data analysis for periodic structures

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 25 Sep 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent cleaning of tin and tin hydride containing contamination of EUV optics

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

cleaning
hydrides
tin
contamination
optics

Electronegativity-dependent cleaning of tin from metal capping layers

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 27 Oct 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Injection locking of a hybrid diode-glass waveguide laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 7 Oct 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Narrow-band Borrmann multilayer filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 27 Oct 2014, p. -.

Research output: Contribution to conferencePosterOther research output

7 Downloads (Pure)

Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 22 May 2014, p. -.

Research output: Contribution to conferencePosterOther research output

File
Scattering
Ions
Thin films
Oxidation
Oxygen

Surface and sub-surface thermal oxidation of ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Zoethout, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

ruthenium
oxidation
thin films
atomic force microscopy
x rays

Water dissociation on Ru(0001) by EUV A TOF, RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2014, p. -.

Research output: Contribution to conferencePosterOther research output