Research Output

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Poster
2018

Sputter damage by low energy charged particle irradiation

Phadke, P., Sturm, M., van de Kruijs, R. & Bijkerk, F., 18 Jun 2018.

Research output: Contribution to conferencePoster

Open Access
File
37 Downloads (Pure)
2019

Adaptive piezoelectric optics for XUV wavelengths

Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M. & Bijkerk, F., 13 Jun 2019.

Research output: Contribution to conferencePoster

Open Access

Angular and spectral bandwidth of XUV multilayers near spacer material absorption edges

Zameshin, A., 21 Jan 2019.

Research output: Contribution to conferencePoster

Comparison of hydrogen transport through thin metal, Si and oxide layers

Soroka, O., Sturm, J. M. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePoster

Open Access
File
10 Downloads (Pure)
Open Access
File
9 Downloads (Pure)

EUV full-band spectrum and DUV/EUV ratio dependency on source operating conditions

Liu, F., Bayraktar, M., Lim, J-K., Bijkerk, F., Havermans, P. & Claes, B., 20 Jun 2019.

Research output: Contribution to conferencePoster

Open Access
File
9 Downloads (Pure)
Open Access
File
2 Downloads (Pure)

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Oct 2019.

Research output: Contribution to conferencePoster

Multiscale modeling of damage processes in Ru thin films induced by femtosecond laser pulses

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Ziaja, B., Medvedev, V., Makhotkin, I. A., Louis, E. & Bijkerk, F., 30 Sep 2019.

Research output: Contribution to conferencePoster

Open Access
File
6 Downloads (Pure)
Open Access
File
2 Downloads (Pure)

Spectral investigation of Sn laser-produced plasmas in the extreme ultraviolet range

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Torretti, F., Bayraktar, M., Bijkerk, F., Shah, C., Bekker, H., Crespo Lopez-Urrutia, J., Ubachs, W., Hoekstra, R. & Versolato, O., 8 Oct 2019.

Research output: Contribution to conferencePoster

Spectral Unraveling of EUV Lithography Light Sources

Bouza, Z., Scheers, J., Sheil, J., Schupp, R., Bayraktar, M., Bijkerk, F., Shah, C., Bekker, H., Ubachs, W., Hoekstra, R. & Versolato, O., 10 May 2019.

Research output: Contribution to conferencePoster

Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

Versolato, O., Bayerle, A., Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L., Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., Schupp, R. & 3 others, Sheil, J., Torretti, F. & Ubachs, W., 24 Jul 2019.

Research output: Contribution to conferencePoster

Spectroscopic Measurements of Sn Laser-Produced Plasmas

Behnke, L., Schupp, R., Bouza, Z., Scheers, J., Sheil, J., Torretti, F., Bayraktar, M., Shah, C., Crespo Lopez-Urrutia, J. R., Ubachs, W., Hoekstra, R. & Versolato, O. O., 4 Nov 2019.

Research output: Contribution to conferencePoster

Open Access
File
6 Downloads (Pure)