Research Output 2001 2020

Filter
Poster
2016

Elastic modulus of extreme ultraviolet exposed single layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
optics
membranes
photomasks

Experimental Demonstration of Multilayer Anomalous-Transmission Filters for Narrow-Band Transmission at 13.5 nm

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 21 Jun 2016, p. -.

Research output: Contribution to conferencePoster

Flying Circus Spectrometer for characterization of EUV light sources from UV to soft x-ray wavelengths

Bayraktar, M., Bruineman, C., Vratzov, B., Bastiaens, H. M. J. & Bijkerk, F., 21 Jun 2016.

Research output: Contribution to conferencePosterOther research output

Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

ion scattering
kinetics
coatings
oxidation
optical coatings

Hydrogen induced blister formation in multilayer mirror structures

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

In-house X-ray Standing Wave study of LaN/B multilayer mirrors

Hendrikx, C. P., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePoster

Insitu stress measurement of thin film and multilayer growth

Reinink, J., van de Kruijs, R. W. E. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

In-vacuo growth studies of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 1 Dec 2016, p. -.

Research output: Contribution to conferencePosterOther research output

thin films
sharpness
ion scattering
caps
mirrors

Low Energy Ion Scattering from La surfaces

Zameshin, A., Yakshin, A., Sturm, J. M., Brongersma, H. H. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

ion scattering
energy
plotting
matrices
charge transfer

Nonequilibrium electron-phonon dynamics in ruthenium thin films exposed to ultra-short laser pulses

Milov, I., Makhotkin, I. A., Enkisch, H., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Scholze, F., Siewert, F., Störmer, M., van de Kruijs, R. W. E., Keim, R., van Wolferen, H. A. G. M., Yatsyna, I., Jurek, M., Juha, L., Hajkova, V., Vozda, V., Burian, T., Saksl, K. & 11 others, Faatz, B., Keitel, B., Ploenjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H., Louis, E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

On-chip broadband supercontinuum generation at telecom wavelengths using silicon nitride waveguides

Garcia Porcel, M. A., Schepers, F., Epping, J. P., Hellwig, T., Hoekman, M., Leinse, A., Heideman, R., van Rees, A., van der Slot, P. J. M., Lee, C. J., Schmidt, R., Bratschitsch, R., Fallnich, C. & Boller, K. J., 13 Dec 2016.

Research output: Contribution to conferencePoster

Single-shot damage of Ru thin film induced by FEL fs pulses

Milov, I., Makhotkin, I. A., Enkisch, H., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Scholze, F., Siewert, F., Störmer, M., van de Kruijs, R. W. E., Keim, E. G., van Wolferen, H. A. G. M., Yatsyna, I., Jurek, M., Juha, L., Hajkova, V., Vozda, V., Burian, T., Saksl, K. & 11 others, Faatz, B., Keitel, B., Ploenjes, E., Schreiber, S., Toleikis, S., Loch, R. A., Hermann, M., Strobel, S., Nienhuys, H., Louis, E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

Spectroscopic ellipsometry for H diffusion

Soroka, O., Jose, A. A., van de Kruijs, R. W. E., Bijkerk, F. & Lee, C. J., 3 Apr 2016, p. -.

Research output: Contribution to conferencePoster

Study of crystal surface with asymmetrical X-Ray diffraction

Nikolaev, K., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Jul 2016, p. -.

Research output: Contribution to conferencePoster

Transmission grating spectrometer for broadband characterization of EUV sources

Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 7 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

gratings
spectrometers
broadband
wavelengths
radiation

Two-octave spanning on-chip supercontinuum generation at telecom wavelengths using silicon nitride waveguides

Garcia Porcel, M. A., Schepers, F., Epping, J. P., Hellwig, T., Hoekman, M., Leinse, A., Heideman, R., van Rees, A., van der Slot, P. J. M., Lee, C. J., Schmidt, R., Bratschitsch, R., Fallnich, C. & Boller, K. J., 10 Oct 2016, p. -.

Research output: Contribution to conferencePoster

Ultra-wideband supercontinuum generation in Si3N4-based waveguides

van der Slot, P. J. M., Epping, J. P., Hellwig, T., Hoekman, M., Leinse, A., Heideman, R., Mateman, R., van Rees, A., Lee, C. J., Fallnich, C. & Boller, K. J., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

Wavefront correction at Angstom length scales

Wylie- Van Eerd, B., Bayraktar, M., Chopra, A. R., Krijnen, B., Rijnders, A. J. H. M. & Bijkerk, F., 20 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

2015

Ab-initio simulated X-ray Absorption Spectroscopy of hexagonal Boron Nitride

Huber, S., van de Kruijs, R. W. E., Bijkerk, F., Gullikson, E. M. & Prendergast, D., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation

Coloma Ribera, R., 1 Oct 2015, p. -.

Research output: Contribution to conferencePoster

A wide band transmission mode spectrometer for diagnosis of EUV sources

Barreaux, J. L. P., Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Blister mechanism in extreme ultraviolet multilayer mirrors

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePoster

Co-existence of 2D and 3D growth in thermally oxidized ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 11 May 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Controlling interface chemistry in 6.x nm La/B multilayer optics

Kuznetsov, D., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Louis, E. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Electonegativity-dependent cleaning of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electron density profile determination for multilayers

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surfact materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV collector design for spectral purification and infrared light recycling

Bayraktar, M., van Goor, F. A., Boller, K. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

Liu, F., Sturm, J. M., Darlatt, E., Kolbe, M., Bijkerk, F. & Lee, C. J., 5 Nov 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV induced surface chemistry of water on clean and p(2x1) O covered Ru(0001): a RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2015, p. -.

Research output: Contribution to conferencePosterOther research output

GISAXS analysis of “delayed nitridation” 6.x nm multilayers

Kuznetsov, D., Yakshin, A., Makhotkin, I. A., Bijkerk, F., Mukharamova, N., Yakunin, S. N. & Subbotin, I. A., 1 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

X-Rays
Research

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 10 Mar 2015, p. -.

Research output: Contribution to conferencePoster

Narrow-band multilayer Borrmann filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Translating the Borrmann effect into narrow-band EUV transmission windows

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 28 Sep 2015, p. -.

Research output: Contribution to conferencePoster

Ultra-narrow-linewidth tunable hybrid laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., Offerhaus, H. L., van der Slot, P. J. M. & Boller, K. J., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

2014

Advanced metrology for multilayer mirrors

Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePoster

Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePoster

Electronegativity-dependent cleaning of tin and tin hydride containing contamination of EUV optics

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

cleaning
hydrides
tin
contamination
optics

Electronegativity-dependent cleaning of tin from metal capping layers

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 27 Oct 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Injection locking of a hybrid diode-glass waveguide laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 7 Oct 2014, p. -.

Research output: Contribution to conferencePoster

Narrow-band Borrmann multilayer filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 27 Oct 2014, p. -.

Research output: Contribution to conferencePoster

13 Downloads (Pure)

Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 22 May 2014, p. -.

Research output: Contribution to conferencePosterOther research output

File
Scattering
Ions
Thin films
Oxidation
Oxygen