Research Output 2001 2020

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Poster

Metal Hydride assited contamination on Ru/Si surfaces

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Multilayer development for the generation beyond EUVL: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Multiple pulse damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

Sobierajski, R., Loch, R. A., Louis, E., Klinger, D., Dluizewski, P., Klepka, M., Bijkerk, F., Burian, T., Chalupsky, J., Coppola, N., Dastjani Farahani, S., Galasso, G., Hajkova, V., Harmand, M., Krzywinski, J., Juha, L., Jurek, M., Möller, S., Nagasono, M., Ozkan, C. & 9 others, Pelka, J. B., Saskl, K., Schulz, J., Sovak, P., Toleikis, S., Tiedtke, K., Vysin, L., Wawro, A. & Gaudin, J., 1 Apr 2013, p. -.

Research output: Contribution to conferencePoster

Numerical Investigation on Supercontinuum Generation in Silicon Nitride Waveguides

Epping, J. P., Kues, M., van der Slot, P. J. M., Lee, C. J., Fallnich, C. & Boller, K. J., 16 Mar 2013.

Research output: Contribution to conferencePoster

66 Downloads (Pure)

Numerical modeling of seeded FWM in silicon nitride waveguides for CARS

Epping, J. P., Kues, M., van der Slot, P. J. M., Lee, C. J., Fallnich, C. & Boller, K-J., 19 Apr 2013. 1 p.

Research output: Contribution to conferencePoster

Open Access
File
silicon nitrides
four-wave mixing
light sources
pumping
tuning

Oxidation and metal contamination of EUV optics

Sturm, J. M., Liu, F., Pachecka, M., Lee, C. J. & Bijkerk, F., 9 Dec 2013, p. -.

Research output: Contribution to conferencePoster

Reflective Pyramid Wavefront Sensor for Extreme Ultraviolet Radiation

Bayraktar, M., van Goor, F. A., Bijkerk, F. & Boller, K. J., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

Bayraktar, M., Chopra, A., Wessels, W. A., van Goor, F. A., Rijnders, A. J. H. M. & Bijkerk, F., 30 Oct 2013, p. -.

Research output: Contribution to conferencePoster

Spectral Control of Four Wave Mixing in Si3N4/SiO2 optical waveguides

Epping, J. P., Kues, M., van der Slot, P. J. M., Lee, C. J., Fallnich, C. & Boller, K-J., 16 Sep 2013.

Research output: Contribution to conferencePoster

Study of EUV induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Suppression of long wavelength reflection from Extreme UV multilayer optics

Huang, Q., Medvedev, V., van den Boogaard, T., van der Meer, R., van de Kruijs, R. W. E., Huber, S., Bastiaens, H. M. J., Bruineman, C., Vratsov, B., Louis, E. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

The Industrial Focus Group XUV Optics

Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Lee, C. J., Louis, E. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePoster

The role of excitation states in particle-surface interactions

Gleeson, M., Zaharia, T., Ueta, H. & Kleijn, A., 21 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Transmission grating spectroscopy in the EUV and VUV

Bastiaens, H. M. J., Bruineman, C., Vratzov, B., Louis, E. & Bijkerk, F., 6 Oct 2013, p. -.

Research output: Contribution to conferencePoster

Waveguide‐based External Cavity Semiconductor Laser

Fan, Y., Oldenbeuving, R. M., Taddei, C., Hoekman, M., Leinse, A., Lee, C. J., van Dijk, P., Roeloffzen, C. G. H. & van der Slot, P. J. M., 14 Nov 2013.

Research output: Contribution to conferencePoster

21 Downloads (Pure)

Waveguide-based External Cavity Semiconductor Laser Arrays

Oldenbeuving, R. M., Fan, Y., Song, H., Verhaegen, M. H. G., Agbana, T., Schitter, G., Klein, E. J., Lee, C. J., Offerhaus, H. L., van Voorst, P. D., van der Slot, P. J. M. & Boller, K-J., 30 Oct 2013. 1 p.

Research output: Contribution to conferencePoster

Open Access
File
2012
9 Downloads (Pure)

2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate

Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Yakushev, O., Krivtsun, V. M., Koshelev, K. & Bijkerk, F., 8 Oct 2012, p. 49-49.

Research output: Contribution to conferencePoster

Open Access
File

Bragg reflectors with IR suppression for Extreme Ultraviolet Lithography

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Bragg reflectors
lithography
retarding
reflectance
radiation
annealing
barrier layers
grazing incidence
free electron lasers
laminates

Damage of multilayer optics under irradiation with multiple femtosecond XUV pulses

Sobierajski, R., Loch, R. A., Klinger, D., Dluzewski, P., Klepka, M., Burian, T., Chalupsky, J., Visin, L., Farahani, S. D., Hajkova, V., Harmand, M., Krzywinski, J., Juha, L., Jurek, M., Möller, S., Nagasono, M., Ozkan, C., Saskl, K., Sinn, H., Sovak, P. & 2 others, Toleikis, S. & Gaudin, J., 15 Jul 2012, p. -.

Research output: Contribution to conferencePoster

Ellipsometry with random varying polarization state

Liu, F., van Albada, B., Lee, C. J. & Bijkerk, F., 16 Jan 2012, p. -.

Research output: Contribution to conferencePoster

ellipsometry
polarization
light beams
orbits
fibers

Ethanol decomposition on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Evolution of diffusion characteristics during nanoscopic Mo-Si interlayer growth

Bosgra, J., Verhoeven, J., Yakshin, A. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 22 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Bragg reflectors
reflectance
radiation
lithography
dense plasmas

Extreme ultraviolet induced oxidation of Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Hydrogen-induced blistering phenomena in multilayered systems

Kuznetsov, A., Gleeson, M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Infrared suppression by hybrid EUV multilayer - IR lossy etalon structures

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

infrared suppression
retarding
radiation
coatings
laser plasmas

IR antireflective filtering for EUV multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

infrared suppression
Bragg reflectors
mirrors
reflectance
coatings
7 Downloads (Pure)

Modeling of Plasma Dynamics and EUV Generation for Distributed Sn Targets Irradiated with Short Laser Pulses

Grushin, A. S., Novikov, D., Ivanov, V., Medvedev, V., Krivtsun, V. M. & Koshelev, K., 8 Oct 2012, p. 78-78.

Research output: Contribution to conferencePoster

Open Access
File

Modeling of the effective electron energy distribution at an irradiated Multi Layer Mirror surface in vacuum

Astakhov, D., Goedheer, W. J., van Kampen, M., Lopaev, D., Ivanov, V. & Bijkerk, F., 11 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Modelling of shot damage tresholds of multilayer optics for short-wavelength FELs

Loch, R. A., Sobierajski, R., Louis, E., Bosgra, J., van de Kruijs, R. W. E., Makhotkin, I. A., Zoethout, E. & Bijkerk, F., 25 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Muellender, S. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

Multilayer optics for 6.7 nm wavelength

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

3 Downloads (Pure)

Multilayers for 6.8 nm Wavelength

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 8 Oct 2012, p. 74-74.

Research output: Contribution to conferencePoster

Open Access
File
mirrors
wavelengths
reflectance
lithography
laminates

Multilayers for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, N. & Bijkerk, F., 29 Sep 2012, p. -.

Research output: Contribution to conferencePoster

Nitrogen interface passivation of La/B layeren structures

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

Reactions of ethanol on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 3 Sep 2012, p. -.

Research output: Contribution to conferencePoster

5 Downloads (Pure)

Reconstruction of the structure of La/B4C and LaN/B4C multilayer mirrors using X-ray Standing Waves

Makhotkin, I. A., Yakunin, S. N., Chuev, M., Zoethout, E., Louis, E., Novikov, D., Seregin, A. Y., Pashayev, I. M. & Bijkerk, F., 18 Jun 2012.

Research output: Contribution to conferencePoster

Open Access
File

Roughness development during growth and ion beam polishing of molybdenum silicon mulitlayer films

Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

silicon films
polishing
molybdenum
roughness
ion beams
10 Downloads (Pure)

Solid state diffusion in multilayered structures on a picometer lengthscale

van de Kruijs, R. W. E., Bosgra, J., Bruijn, S., Yakshin, A. & Bijkerk, F., 15 Sep 2012, p. -.

Research output: Contribution to conferencePoster

File
solid state
activation energy
grazing incidence
laminates
x ray diffraction

Study of EUV induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 23 Apr 2012, p. -.

Research output: Contribution to conferencePoster

42 Downloads (Pure)

The X-ray Standing Waves analysis of short period La/B- based multilayers

Makhotkin, I. A., Yakunin, S. N., Chuev, M. A., Zoethout, E., Louis, E., van de Kruijs, R. W. E., Bijkerk, F. & Kovalchuk, M. V., 15 Sep 2012, p. -.

Research output: Contribution to conferencePoster

File
standing waves
reflectance
x rays
grazing incidence
laminates
2011

B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 13 Jun 2011, p. -.

Research output: Contribution to conferencePoster

Behavior of transition metal and metal oxide surfaces under oxidative and reductive environment

Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J. & Bijkerk, F., 18 Jan 2011, p. -.

Research output: Contribution to conferencePoster

Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLSH and LCLS

Loch, R. A., Sobierajski, R., Bostedt, C., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y. C., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M., Moeller, S. & 3 others, Schlotter, W., Tiedtke, K. & Bijkerk, F., 26 Jan 2011, p. -.

Research output: Contribution to conferencePoster

Introducing CP3E

Kuznetsov, A., Kleijn, A., Koshelev, K., Muellender, S., Kurz, P., van Kampen, M., Banine, V. Y., Temmerman, G. C., Goedheer, W. J. & Bijkerk, F., 16 Jun 2011, p. -.

Research output: Contribution to conferencePoster

2010

Damage mechanisms in Mo/Si multilayer optics for short-wavelengths FELs

Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Castagna, J. C., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., Hajkova, V., van Hattum, E. D., Hau-Riege, S., van de Kruijs, R. W. E., Klinger, D., Krzywinski, J., Jastrow, U., Juha, L., Louis, E. & 4 others, Messerschmidt, M., Moeller, S., Tiedtke, K. & Bijkerk, F., 28 Jun 2010, p. -.

Research output: Contribution to conferencePoster