Research Output 2001 2020

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Poster

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surfact materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Ellipsometry with random varying polarization state

Liu, F., van Albada, B., Lee, C. J. & Bijkerk, F., 16 Jan 2012, p. -.

Research output: Contribution to conferencePoster

ellipsometry
polarization
light beams
orbits
fibers

Engineering optical constants for broadband single layer anti-reflection coatings

Huber, S., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 25 Aug 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Ethanol decomposition on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

EUV full-band spectrum and DUV/EUV ratio dependency on source operating conditions

Liu, F., Bayraktar, M., Lim, J-K., Bijkerk, F., Havermans, P. & Claes, B., 20 Jun 2019.

Research output: Contribution to conferencePoster

EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

Liu, F., Sturm, J. M., Darlatt, E., Kolbe, M., Bijkerk, F. & Lee, C. J., 5 Nov 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV induced surface chemistry of water on clean and p(2x1) O covered Ru(0001): a RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV source spectroscopic measurement

Liu, F., Bayraktar, M., Frijns, O., Bijkerk, F., Goossens, T. & Rommers, J., 28 Apr 2017.

Research output: Contribution to conferencePoster

Evolution of diffusion characteristics during nanoscopic Mo-Si interlayer growth

Bosgra, J., Verhoeven, J., Yakshin, A. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Experimental Demonstration of Multilayer Anomalous-Transmission Filters for Narrow-Band Transmission at 13.5 nm

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 21 Jun 2016, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Osorio, E., van Kampen, M., Lee, C. J. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 22 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Bragg reflectors
reflectance
radiation
lithography
dense plasmas

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakinun, A. M. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme ultraviolet induced oxidation of Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Flying Circus Spectrometer for characterization of EUV light sources from UV to soft x-ray wavelengths

Bayraktar, M., Bruineman, C., Vratzov, B., Bastiaens, H. M. J. & Bijkerk, F., 21 Jun 2016.

Research output: Contribution to conferencePoster

Formation of H2O on the surface of CO2 dosed Ru(0001) under Extreme Ultraviolet Light and H2

Mund, B. K., Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePosterAcademic

GISAXS analysis of “delayed nitridation” 6.x nm multilayers

Kuznetsov, D., Yakshin, A., Makhotkin, I. A., Bijkerk, F., Mukharamova, N., Yakunin, S. N. & Subbotin, I. A., 1 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

X-Rays
Research

Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

ion scattering
kinetics
coatings
oxidation
optical coatings

Growthof silicon nitride thin films at room temperature

Zoethout, E., Louis, E. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

Growth of silicon nitride thin films at room termperature

Zoethout, E. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

High reflectance multilayer coating technology for 3100 EUVL projection optics

van Hattum, E. D., Louis, E., van der Westen, A., Salle, P., Zoethout, E., von Blanckenhage, G., Enkish, H., Müllender, S. & Bijkerk, F., 21 Feb 2010, p. -.

Research output: Contribution to conferencePoster

Hydrogen diffusion measurements using Y thin film monitoring

Soroka, O., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePosterAcademic

Hydrogen induced blister formation in multilayer mirror structures

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

Hydrogen-induced blistering phenomena in multilayered systems

Kuznetsov, A., Gleeson, M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 10 Mar 2015, p. -.

Research output: Contribution to conferencePoster

Hydrogen interaction with mirrors for EUVL lithography

Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J., Schmid, K. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

Hydrogen uptake and distribution in a multi-layered systems and related effects

Gleeson, M., Kuznetsov, A. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

hydrogen
fusion
insulators
magnetic properties
optical properties
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Membranes
Thin films
Boron
Compressive stress
Tensile stress
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Infrared antireflective filtering for 6.x nm multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Louis, E. & Bijkerk, F., 6 Oct 2013, p. -.

Research output: Contribution to conferencePoster

Infrared suppression by hybrid EUV multilayer - IR lossy etalon structures

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

infrared suppression
retarding
radiation
coatings
laser plasmas

In-house X-ray Standing Wave study of LaN/B multilayer mirrors

Hendrikx, C. P., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePoster

Injection locking of a hybrid diode-glass waveguide laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 7 Oct 2014, p. -.

Research output: Contribution to conferencePoster

Insitu stress measurement of thin film and multilayer growth

Reinink, J., van de Kruijs, R. W. E. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

Interface study of Mo/Si systems using LEIS and in-situ stress analysis

Reinink, J., van de Kruijs, R. W. E. & Bijkerk, F., 19 Oct 2017.

Research output: Contribution to conferencePoster

Introducing CP3E

Kuznetsov, A., Kleijn, A., Koshelev, K., Muellender, S., Kurz, P., van Kampen, M., Banine, V. Y., Temmerman, G. C., Goedheer, W. J. & Bijkerk, F., 16 Jun 2011, p. -.

Research output: Contribution to conferencePoster

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

In-vacuo growth studies of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 1 Dec 2016, p. -.

Research output: Contribution to conferencePosterOther research output

thin films
sharpness
ion scattering
caps
mirrors

IR antireflective filtering for EUV multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePosterOther research output

infrared suppression
Bragg reflectors
mirrors
reflectance
coatings