Research Output 2001 2020

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Poster

Multilayers for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, N. & Bijkerk, F., 29 Sep 2012, p. -.

Research output: Contribution to conferencePoster

Multiple pulse damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

Sobierajski, R., Loch, R. A., Louis, E., Klinger, D., Dluizewski, P., Klepka, M., Bijkerk, F., Burian, T., Chalupsky, J., Coppola, N., Dastjani Farahani, S., Galasso, G., Hajkova, V., Harmand, M., Krzywinski, J., Juha, L., Jurek, M., Möller, S., Nagasono, M., Ozkan, C. & 9 others, Pelka, J. B., Saskl, K., Schulz, J., Sovak, P., Toleikis, S., Tiedtke, K., Vysin, L., Wawro, A. & Gaudin, J., 1 Apr 2013, p. -.

Research output: Contribution to conferencePoster

Narrow-band Borrmann multilayer filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 27 Oct 2014, p. -.

Research output: Contribution to conferencePoster

Narrow-band multilayer Borrmann filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Nitrogen interface passivation of La/B layeren structures

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Numerical Investigation on Supercontinuum Generation in Silicon Nitride Waveguides

Epping, J. P., Kues, M., van der Slot, P. J. M., Lee, C. J., Fallnich, C. & Boller, K. J., 16 Mar 2013.

Research output: Contribution to conferencePoster

66 Downloads (Pure)

Numerical modeling of seeded FWM in silicon nitride waveguides for CARS

Epping, J. P., Kues, M., van der Slot, P. J. M., Lee, C. J., Fallnich, C. & Boller, K-J., 19 Apr 2013. 1 p.

Research output: Contribution to conferencePoster

Open Access
File
silicon nitrides
four-wave mixing
light sources
pumping
tuning

On-chip broadband supercontinuum generation at telecom wavelengths using silicon nitride waveguides

Garcia Porcel, M. A., Schepers, F., Epping, J. P., Hellwig, T., Hoekman, M., Leinse, A., Heideman, R., van Rees, A., van der Slot, P. J. M., Lee, C. J., Schmidt, R., Bratschitsch, R., Fallnich, C. & Boller, K. J., 13 Dec 2016.

Research output: Contribution to conferencePoster

Oxidation and metal contamination of EUV optics

Sturm, J. M., Liu, F., Pachecka, M., Lee, C. J. & Bijkerk, F., 9 Dec 2013, p. -.

Research output: Contribution to conferencePoster

3 Downloads (Pure)

Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

Reactions of ethanol on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 3 Sep 2012, p. -.

Research output: Contribution to conferencePoster

5 Downloads (Pure)

Reconstruction of the structure of La/B4C and LaN/B4C multilayer mirrors using X-ray Standing Waves

Makhotkin, I. A., Yakunin, S. N., Chuev, M., Zoethout, E., Louis, E., Novikov, D., Seregin, A. Y., Pashayev, I. M. & Bijkerk, F., 18 Jun 2012.

Research output: Contribution to conferencePoster

Open Access
File

Reflective Pyramid Wavefront Sensor for Extreme Ultraviolet Radiation

Bayraktar, M., van Goor, F. A., Bijkerk, F. & Boller, K. J., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Roughness development during growth and ion beam polishing of molybdenum silicon mulitlayer films

Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

silicon films
polishing
molybdenum
roughness
ion beams

Single-shot damage of Ru thin film induced by FEL fs pulses

Milov, I., Makhotkin, I. A., Enkisch, H., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Scholze, F., Siewert, F., Störmer, M., van de Kruijs, R. W. E., Keim, E. G., van Wolferen, H. A. G. M., Yatsyna, I., Jurek, M., Juha, L., Hajkova, V., Vozda, V., Burian, T., Saksl, K. & 11 others, Faatz, B., Keitel, B., Ploenjes, E., Schreiber, S., Toleikis, S., Loch, R. A., Hermann, M., Strobel, S., Nienhuys, H., Louis, E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePoster

Single-shot damage of Ru thin film induced by FEL fs pulses

Milov, I., Makhotkin, I. A., Enkisch, H., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Scholze, F., Siewert, F., Störmer, M., van de Kruijs, R. W. E., Keim, R., van Wolferen, H. A. G. M., Yatsyna, I., Jurek, M., Juha, L., Hajkova, V., Vozda, V., Burian, T., Saksl, K. & 11 others, Faatz, B., Keitel, B., Ploenjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H., Louis, E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePoster

Small period multilayer structures for X-ray spectroscopic applications

Medvedev, R., Yakshin, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePoster

Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

Bayraktar, M., Chopra, A., Wessels, W. A., van Goor, F. A., Rijnders, A. J. H. M. & Bijkerk, F., 30 Oct 2013, p. -.

Research output: Contribution to conferencePoster

10 Downloads (Pure)

Solid state diffusion in multilayered structures on a picometer lengthscale

van de Kruijs, R. W. E., Bosgra, J., Bruijn, S., Yakshin, A. & Bijkerk, F., 15 Sep 2012, p. -.

Research output: Contribution to conferencePoster

File
solid state
activation energy
grazing incidence
laminates
x ray diffraction

Source plasma emission spectrum under various operating conditions

Liu, F., Bayraktar, M., Goossens, T., Bijkerk, F., Quintana Ramirez, J. & Beenhakker, T., 21 Jun 2018.

Research output: Contribution to conferencePoster

Spectral Control of Four Wave Mixing in Si3N4/SiO2 optical waveguides

Epping, J. P., Kues, M., van der Slot, P. J. M., Lee, C. J., Fallnich, C. & Boller, K-J., 16 Sep 2013.

Research output: Contribution to conferencePoster

Spectroscopic ellipsometry for H diffusion

Soroka, O., Jose, A. A., van de Kruijs, R. W. E., Bijkerk, F. & Lee, C. J., 3 Apr 2016, p. -.

Research output: Contribution to conferencePoster

34 Downloads (Pure)

Sputter damage by low energy charged particle irradiation

Phadke, P., Sturm, M., van de Kruijs, R. & Bijkerk, F., 18 Jun 2018.

Research output: Contribution to conferencePoster

Open Access
File
quartz crystals
microbalances
charged particles
damage
metal crystals

Study of crystal surface with asymmetrical X-Ray diffraction

Nikolaev, K., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Jul 2016, p. -.

Research output: Contribution to conferencePoster

Study of EUV induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 23 Apr 2012, p. -.

Research output: Contribution to conferencePoster

Study of EUV induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Suppression of long wavelength reflection from Extreme UV multilayer optics

Huang, Q., Medvedev, V., van den Boogaard, T., van der Meer, R., van de Kruijs, R. W. E., Huber, S., Bastiaens, H. M. J., Bruineman, C., Vratsov, B., Louis, E. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

11 Downloads (Pure)

Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 22 May 2014, p. -.

Research output: Contribution to conferencePoster

File
Scattering
Ions
Thin films
Oxidation
Oxygen

Surface and sub-surface thermal oxidation of ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Zoethout, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePoster

ruthenium
oxidation
thin films
atomic force microscopy
x rays

The Industrial Focus Group XUV Optics

Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Lee, C. J., Louis, E. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePoster

The role of excitation states in particle-surface interactions

Gleeson, M., Zaharia, T., Ueta, H. & Kleijn, A., 21 Jan 2013, p. -.

Research output: Contribution to conferencePoster

42 Downloads (Pure)

The X-ray Standing Waves analysis of short period La/B- based multilayers

Makhotkin, I. A., Yakunin, S. N., Chuev, M. A., Zoethout, E., Louis, E., van de Kruijs, R. W. E., Bijkerk, F. & Kovalchuk, M. V., 15 Sep 2012, p. -.

Research output: Contribution to conferencePoster

File
standing waves
reflectance
x rays
grazing incidence
laminates

Translating the Borrmann effect into narrow-band EUV transmission windows

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 28 Sep 2015, p. -.

Research output: Contribution to conferencePoster

Transmission grating spectrometer for broadband characterization of EUV sources

Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 7 Nov 2016, p. -.

Research output: Contribution to conferencePoster

gratings
spectrometers
broadband
wavelengths
radiation

Transmission grating spectroscopy in the EUV and VUV

Bastiaens, H. M. J., Bruineman, C., Vratzov, B., Louis, E. & Bijkerk, F., 6 Oct 2013, p. -.

Research output: Contribution to conferencePoster

Two-octave spanning on-chip supercontinuum generation at telecom wavelengths using silicon nitride waveguides

Garcia Porcel, M. A., Schepers, F., Epping, J. P., Hellwig, T., Hoekman, M., Leinse, A., Heideman, R., van Rees, A., van der Slot, P. J. M., Lee, C. J., Schmidt, R., Bratschitsch, R., Fallnich, C. & Boller, K. J., 10 Oct 2016, p. -.

Research output: Contribution to conferencePoster

Ultra-narrow-linewidth tunable hybrid laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., Offerhaus, H. L., van der Slot, P. J. M. & Boller, K. J., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Ultra-wideband supercontinuum generation in Si3N4-based waveguides

van der Slot, P. J. M., Epping, J. P., Hellwig, T., Hoekman, M., Leinse, A., Heideman, R., Mateman, R., van Rees, A., Lee, C. J., Fallnich, C. & Boller, K. J., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

Visible to mid-infrared supercontinuum generation in disperion engineered stoichiometric silicon nitride waveguides drive by 120-fs, 1560-nm laser pulses

Garcia Porcel, M. A., Schepers, F., Epping, J. P., Hellwig, T., Hoekman, M., Heideman, R., van der Slot, P. J. M., Lee, C. J., Schmidt, R., Bratschitsch, R., Fallnich, C. & Boller, K. J., 17 Jan 2017, p. -.

Research output: Contribution to conferencePoster

Visible to mid-infrared supercontinuum generation in dispersion engineered stoichiometric silicon nitride waveguides driven by 120-fs, 1560-nm laser pulses

Garcia Porcel, M. A., Schepers, F., Epping, J. P., Hoekman, M., Heideman, R., van der Slot, P. J. M., Lee, C. J., Schmidt, R., Bratschitsch, R., Fallnich, C. & Boller, K. J., 17 Jan 2017, p. -.

Research output: Contribution to conferencePoster

Water dissociation on Ru(0001) by EUV A TOF, RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2014, p. -.

Research output: Contribution to conferencePoster

Wavefront correction at Angstom length scales

Wylie- Van Eerd, B., Bayraktar, M., Chopra, A. R., Krijnen, B., Rijnders, A. J. H. M. & Bijkerk, F., 20 Jan 2016, p. -.

Research output: Contribution to conferencePoster

Waveguide‐based External Cavity Semiconductor Laser

Fan, Y., Oldenbeuving, R. M., Taddei, C., Hoekman, M., Leinse, A., Lee, C. J., van Dijk, P., Roeloffzen, C. G. H. & van der Slot, P. J. M., 14 Nov 2013.

Research output: Contribution to conferencePoster

21 Downloads (Pure)

Waveguide-based External Cavity Semiconductor Laser Arrays

Oldenbeuving, R. M., Fan, Y., Song, H., Verhaegen, M. H. G., Agbana, T., Schitter, G., Klein, E. J., Lee, C. J., Offerhaus, H. L., van Voorst, P. D., van der Slot, P. J. M. & Boller, K-J., 30 Oct 2013. 1 p.

Research output: Contribution to conferencePoster

Open Access
File

X-ray standing wave experiments at FLASH

Mercurio, G., Makhotkin, I. A. (ed.), Milov, I. (ed.), Kim, Y. (ed.), Zaluzhnyy, I. (ed.), Dziarzhytski, S. (ed.), Wenthaus, L. (ed.), Vartanyants, I. (ed.) & Wurth, W. (ed.), 26 Jan 2017.

Research output: Contribution to conferencePoster