Research Output 2001 2019

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Poster
Poster

2D PIC modeling of the EUV induced hydrogen plasma and comparison to the observed carbon etching rate

Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Krivtsun, V. M., Yakushev, O., Koshelev, K. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

hydrogen plasma
etching
carbon
ions
hydrogen ions

Ab-initio simulated X-ray Absorption Spectroscopy of hexagonal Boron Nitride

Huber, S., van de Kruijs, R. W. E., Bijkerk, F., Gullikson, E. M. & Prendergast, D., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation

Coloma Ribera, R., 1 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Adaptive mirrors - upcoming powerful technologies for wavefront correction

Pollak, T., Finken, R., Hild, K., Wylie- Van Eerd, B., Jurgens, D. & Spengler, D., 28 Jun 2017.

Research output: Contribution to conferencePosterOther research output

Advanced crystal surface characterization with asymmetrical X-ray diffraction

Nikolaev, K., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

Advanced metrology for multilayer mirrors

Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

16 Downloads (Pure)

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePosterAcademic

File
standing waves
x rays
mirrors
reflectance
fluorescence

A model for hydrogen induced blister growth in Mo/Si multilayer mirror structures

van den Bos, R., Benschop, J., Bijkerk, F. & Lee, C. J., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

4 Citations (Scopus)

Anomalous transmission filters for spectral monitoring in the extreme ultraviolet wavelength region

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 17 Jan 2017, p. -.

Research output: Contribution to conferencePosterOther research output

Assumption-independent approach for GIXRR data analysis for periodic structures

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 25 Sep 2014, p. -.

Research output: Contribution to conferencePosterOther research output

A wide band transmission mode spectrometer for diagnosis of EUV sources

Barreaux, J. L. P., Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Blister formation on multilayer mirrors due to the exposure of hydrogen

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Blister mechanism in extreme ultraviolet multilayer mirrors

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 19 Dec 2017.

Research output: Contribution to conferencePosterOther research output

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.

Research output: Contribution to conferencePosterAcademic

Co-existence of 2D and 3D growth in thermally oxidized ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 11 May 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Compact Anomalous Transmission Filters for EUV Spectral Monitoring

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 11 Oct 2016, p. -.

Research output: Contribution to conferencePosterOther research output

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013, p. -.

Research output: Contribution to conferencePosterOther research output

plasma jets
cleaning
surface waves
carbon
sputtering

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Koshelev, K., Yakushev, O. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

plasma jets
cleaning
surface waves
carbon
gases

Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013, p. -.

Research output: Contribution to conferencePosterOther research output

plasma jets
cleaning
surface waves
carbon
sputtering

Controlling interface chemistry in 6.x nm La/B multilayer optics

Kuznetsov, D., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Louis, E. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

15 Downloads (Pure)

Crystal surface characterization

Nikolaev, K., Makhotkin, I., Yakunin, S., van de Kruijs, R. & Bijkerk, F., 22 May 2017.

Research output: Contribution to conferencePosterOther research output

Open Access
File
crystal surfaces
grazing incidence
x rays
insulators
injection

Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Deposition and Oxidation Studies by Low-Energy Ion Scattering (LEIS)

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Elastic modulus of extreme ultraviolet exposed single layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
optics
membranes
photomasks

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Electonegativity-dependent cleaning of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electron density profile determination for multilayers

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent cleaning of tin and tin hydride containing contamination of EUV optics

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

cleaning
hydrides
tin
contamination
optics

Electronegativity-dependent cleaning of tin from metal capping layers

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 27 Oct 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surfact materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Engineering optical constants for broadband single layer anti-reflection coatings

Huber, S., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 25 Aug 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Ethanol decomposition on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

EUV collector design for spectral purification and infrared light recycling

Bayraktar, M., van Goor, F. A., Boller, K. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

Liu, F., Sturm, J. M., Darlatt, E., Kolbe, M., Bijkerk, F. & Lee, C. J., 5 Nov 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV induced surface chemistry of water on clean and p(2x1) O covered Ru(0001): a RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV source spectroscopic measurement

Liu, F., Bayraktar, M., Frijns, O., Bijkerk, F., Goossens, T. & Rommers, J., 28 Apr 2017.

Research output: Contribution to conferencePosterOther research output

Evolution of diffusion characteristics during nanoscopic Mo-Si interlayer growth

Bosgra, J., Verhoeven, J., Yakshin, A. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Experimental Demonstration of Multilayer Anomalous-Transmission Filters for Narrow-Band Transmission at 13.5 nm

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 21 Jun 2016, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Osorio, E., van Kampen, M., Lee, C. J. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakinun, A. M. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 22 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Bragg reflectors
reflectance
radiation
lithography
dense plasmas

Extreme ultraviolet induced oxidation of Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Flying Circus Spectrometer for characterization of EUV light sources from UV to soft x-ray wavelengths

Bayraktar, M., Bruineman, C., Vratzov, B., Bastiaens, H. M. J. & Bijkerk, F., 21 Jun 2016.

Research output: Contribution to conferencePosterOther research output

Formation of H2O on the surface of CO2 dosed Ru(0001) under Extreme Ultraviolet Light and H2

Mund, B. K., Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePosterAcademic