Research Output 2001 2020

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Poster

Engineering optical constants for broadband single layer anti-reflection coatings

Huber, S., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 25 Aug 2013, p. -.

Research output: Contribution to conferencePoster

Ethanol decomposition on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

Liu, F., Sturm, J. M., Darlatt, E., Kolbe, M., Bijkerk, F. & Lee, C. J., 5 Nov 2015, p. -.

Research output: Contribution to conferencePoster

EUV source spectroscopic measurement

Liu, F., Bayraktar, M., Frijns, O., Bijkerk, F., Goossens, T. & Rommers, J., 28 Apr 2017.

Research output: Contribution to conferencePoster

Evolution of diffusion characteristics during nanoscopic Mo-Si interlayer growth

Bosgra, J., Verhoeven, J., Yakshin, A. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Experimental Demonstration of Multilayer Anomalous-Transmission Filters for Narrow-Band Transmission at 13.5 nm

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 21 Jun 2016, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Osorio, E., van Kampen, M., Lee, C. J. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 22 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Bragg reflectors
reflectance
radiation
lithography
dense plasmas

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakinun, A. M. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

Extreme ultraviolet induced oxidation of Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePoster

Flying Circus Spectrometer for characterization of EUV light sources from UV to soft x-ray wavelengths

Bayraktar, M., Bruineman, C., Vratzov, B., Bastiaens, H. M. J. & Bijkerk, F., 21 Jun 2016.

Research output: Contribution to conferencePoster

Formation of H2O on the surface of CO2 dosed Ru(0001) under Extreme Ultraviolet Light and H2

Mund, B. K., Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePoster

GISAXS analysis of “delayed nitridation” 6.x nm multilayers

Kuznetsov, D., Yakshin, A., Makhotkin, I. A., Bijkerk, F., Mukharamova, N., Yakunin, S. N. & Subbotin, I. A., 1 Oct 2015, p. -.

Research output: Contribution to conferencePoster

X-Rays
Research
ion scattering
kinetics
coatings
oxidation
optical coatings

Growthof silicon nitride thin films at room temperature

Zoethout, E., Louis, E. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

Growth of silicon nitride thin films at room termperature

Zoethout, E. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

High reflectance multilayer coating technology for 3100 EUVL projection optics

van Hattum, E. D., Louis, E., van der Westen, A., Salle, P., Zoethout, E., von Blanckenhage, G., Enkish, H., Müllender, S. & Bijkerk, F., 21 Feb 2010, p. -.

Research output: Contribution to conferencePoster

Hydrogen diffusion measurements using Y thin film monitoring

Soroka, O., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePoster

Hydrogen induced blister formation in multilayer mirror structures

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

Hydrogen-induced blistering phenomena in multilayered systems

Kuznetsov, A., Gleeson, M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 10 Mar 2015, p. -.

Research output: Contribution to conferencePoster

Hydrogen interaction with mirrors for EUVL lithography

Kuznetsov, A., van de Kruijs, R. W. E., Gleeson, A. J., Schmid, K. & Bijkerk, F., 19 Jan 2010, p. -.

Research output: Contribution to conferencePoster

Hydrogen uptake and distribution in a multi-layered systems and related effects

Gleeson, M., Kuznetsov, A. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePoster

hydrogen
fusion
insulators
magnetic properties
optical properties

Infrared antireflective filtering for 6.x nm multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Louis, E. & Bijkerk, F., 6 Oct 2013, p. -.

Research output: Contribution to conferencePoster

Infrared suppression by hybrid EUV multilayer - IR lossy etalon structures

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePoster

infrared suppression
retarding
radiation
coatings
laser plasmas

In-house X-ray Standing Wave study of LaN/B multilayer mirrors

Hendrikx, C. P., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePoster

Injection locking of a hybrid diode-glass waveguide laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 7 Oct 2014, p. -.

Research output: Contribution to conferencePoster

Insitu stress measurement of thin film and multilayer growth

Reinink, J., van de Kruijs, R. W. E. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

Interface study of Mo/Si systems using LEIS and in-situ stress analysis

Reinink, J., van de Kruijs, R. W. E. & Bijkerk, F., 19 Oct 2017.

Research output: Contribution to conferencePoster

Introducing CP3E

Kuznetsov, A., Kleijn, A., Koshelev, K., Muellender, S., Kurz, P., van Kampen, M., Banine, V. Y., Temmerman, G. C., Goedheer, W. J. & Bijkerk, F., 16 Jun 2011, p. -.

Research output: Contribution to conferencePoster

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePoster

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePoster

In-vacuo growth studies of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 1 Dec 2016, p. -.

Research output: Contribution to conferencePoster

thin films
sharpness
ion scattering
caps
mirrors

IR antireflective filtering for EUV multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePoster

infrared suppression
Bragg reflectors
mirrors
reflectance
coatings

Low Energy Ion Scattering from La surfaces

Zameshin, A., Yakshin, A., Sturm, J. M., Brongersma, H. H. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

ion scattering
energy
plotting
matrices
charge transfer

Metal Hydride assited contamination on Ru/Si surfaces

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

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Modeling of Plasma Dynamics and EUV Generation for Distributed Sn Targets Irradiated with Short Laser Pulses

Grushin, A. S., Novikov, D., Ivanov, V., Medvedev, V., Krivtsun, V. M. & Koshelev, K., 8 Oct 2012, p. 78-78.

Research output: Contribution to conferencePoster

Open Access
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Modeling of the effective electron energy distribution at an irradiated Multi Layer Mirror surface in vacuum

Astakhov, D., Goedheer, W. J., van Kampen, M., Lopaev, D., Ivanov, V. & Bijkerk, F., 11 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Modelling of damage in Ru thin films induced by femtosecond XUV laser pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnisky, D., Migdal, K., Inogamov, N., Medvedev, V. V., Louis, E. & Bijkerk, F., 17 Sep 2018.

Research output: Contribution to conferencePoster

x ray lasers
spallation
free electron lasers
ballistic ranges
damage

Modelling of shot damage tresholds of multilayer optics for short-wavelength FELs

Loch, R. A., Sobierajski, R., Louis, E., Bosgra, J., van de Kruijs, R. W. E., Makhotkin, I. A., Zoethout, E. & Bijkerk, F., 25 Jan 2012, p. -.

Research output: Contribution to conferencePoster