Research Output 2001 2019

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Poster
2015

Co-existence of 2D and 3D growth in thermally oxidized ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 11 May 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Controlling interface chemistry in 6.x nm La/B multilayer optics

Kuznetsov, D., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Louis, E. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Electonegativity-dependent cleaning of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electron density profile determination for multilayers

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surfact materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV collector design for spectral purification and infrared light recycling

Bayraktar, M., van Goor, F. A., Boller, K. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

Liu, F., Sturm, J. M., Darlatt, E., Kolbe, M., Bijkerk, F. & Lee, C. J., 5 Nov 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV induced surface chemistry of water on clean and p(2x1) O covered Ru(0001): a RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2015, p. -.

Research output: Contribution to conferencePosterOther research output

GISAXS analysis of “delayed nitridation” 6.x nm multilayers

Kuznetsov, D., Yakshin, A., Makhotkin, I. A., Bijkerk, F., Mukharamova, N., Yakunin, S. N. & Subbotin, I. A., 1 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

X-Rays
Research

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 10 Mar 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Hydrogen induced blisters on extreme ultraviolet multilayer mirror surfaces

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

30 Downloads (Pure)

Multilayer Filter Using the Borrmann Effect for EUV Source Monitoring

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 21 Jun 2015, p. CH_P_35-.

Research output: Contribution to conferencePosterOther research output

File

Narrow-band multilayer Borrmann filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Translating the Borrmann effect into narrow-band EUV transmission windows

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Ultra-narrow-linewidth tunable hybrid laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., Offerhaus, H. L., van der Slot, P. J. M. & Boller, K. J., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

2014

Advanced metrology for multilayer mirrors

Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Assumption-independent approach for GIXRR data analysis for periodic structures

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 25 Sep 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent cleaning of tin and tin hydride containing contamination of EUV optics

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

cleaning
hydrides
tin
contamination
optics

Electronegativity-dependent cleaning of tin from metal capping layers

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 27 Oct 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Injection locking of a hybrid diode-glass waveguide laser

Fan, Y., Oldenbeuving, R., Klein, E. J., Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 7 Oct 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Narrow-band Borrmann multilayer filters for monitoring of EUV sources

Barreaux, J. L. P., Bastiaens, H. M. J., Kozhevnikov, I. V., Bijkerk, F. & Boller, K. J., 27 Oct 2014, p. -.

Research output: Contribution to conferencePosterOther research output

7 Downloads (Pure)

Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 22 May 2014, p. -.

Research output: Contribution to conferencePosterOther research output

File
Scattering
Ions
Thin films
Oxidation
Oxygen

Surface and sub-surface thermal oxidation of ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Zoethout, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

ruthenium
oxidation
thin films
atomic force microscopy
x rays

Water dissociation on Ru(0001) by EUV A TOF, RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2014, p. -.

Research output: Contribution to conferencePosterOther research output

XUV Optics: from deposition to application

Makhotkin, I. A., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Kuznetsov, D. & Bijkerk, F., 1 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

2013

2D PIC modeling of the EUV induced hydrogen plasma and comparison to the observed carbon etching rate

Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Krivtsun, V. M., Yakushev, O., Koshelev, K. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

hydrogen plasma
etching
carbon
ions
hydrogen ions

Blister formation on multilayer mirrors due to the exposure of hydrogen

van den Bos, R. A. J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013, p. -.

Research output: Contribution to conferencePosterOther research output

plasma jets
cleaning
surface waves
carbon
sputtering

Comparison of carbon cleaning mechanisms in EUV-induced and SWD plasmas in H2 and He environments

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Koshelev, K., Yakushev, O. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

plasma jets
cleaning
surface waves
carbon
gases

Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

Dolgov, A., Lopaev, D., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 25 Mar 2013, p. -.

Research output: Contribution to conferencePosterOther research output

plasma jets
cleaning
surface waves
carbon
sputtering

Deposition and Oxidation Studies by Low-Energy Ion Scattering (LEIS)

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Engineering optical constants for broadband single layer anti-reflection coatings

Huber, S., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 25 Aug 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Osorio, E., van Kampen, M., Lee, C. J. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakinun, A. M. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Hydrogen uptake and distribution in a multi-layered systems and related effects

Gleeson, M., Kuznetsov, A. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

hydrogen
fusion
insulators
magnetic properties
optical properties

Infrared antireflective filtering for 6.x nm multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Louis, E. & Bijkerk, F., 6 Oct 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Metal Hydride assited contamination on Ru/Si surfaces

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer development for the generation beyond EUVL: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Multiple pulse damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

Sobierajski, R., Loch, R. A., Louis, E., Klinger, D., Dluizewski, P., Klepka, M., Bijkerk, F., Burian, T., Chalupsky, J., Coppola, N., Dastjani Farahani, S., Galasso, G., Hajkova, V., Harmand, M., Krzywinski, J., Juha, L., Jurek, M., Möller, S., Nagasono, M., Ozkan, C. & 9 othersPelka, J. B., Saskl, K., Schulz, J., Sovak, P., Toleikis, S., Tiedtke, K., Vysin, L., Wawro, A. & Gaudin, J., 1 Apr 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Oxidation and metal contamination of EUV optics

Sturm, J. M., Liu, F., Pachecka, M., Lee, C. J. & Bijkerk, F., 9 Dec 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Reflective Pyramid Wavefront Sensor for Extreme Ultraviolet Radiation

Bayraktar, M., van Goor, F. A., Bijkerk, F. & Boller, K. J., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

Bayraktar, M., Chopra, A., Wessels, W. A., van Goor, F. A., Rijnders, A. J. H. M. & Bijkerk, F., 30 Oct 2013, p. -.

Research output: Contribution to conferencePosterOther research output