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2020

A semi-Analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

Nikolaev, K. V., Soltwisch, V., Honicke, P., Scholze, F., De La Rie, J., Yakunin, S. N., Makhotkin, I. A., Van De Kruijs, R. W. E. & Bijkerk, F., 1 Mar 2020, In : Journal of synchrotron radiation. 27, p. 386-395 10 p.

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Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

Mund, B. K., Sturm, J. M., van den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 28 Feb 2020, In : Applied surface science. 504, 144485.

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Exploring Voltage Mediated Delamination of Suspended 2D Materials as a Cause of Commonly Observed Breakdown

Loessberg-Zahl, J., De Bruijn, D. S., Van Den Beld, W. T. E., Dollekamp, E., Grady, E., Keerthi, A., Bomer, J., Radha, B., Zandvliet, H. J. W., Bol, A. A., Van Den Berg, A. & Eijkel, J. C. T., 9 Jan 2020, In : Journal of physical chemistry C. 124, 1, p. 430-435

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Hydrogen diffusion through Ru thin films

Soroka, O., Sturm, J. M., Lee, C. J., Schreuders, H., Dam, B. & Bijkerk, F., 26 May 2020, In : International journal of hydrogen energy. 45, 29, p. 15003-15010 8 p.

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Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography

Torretti, F., Sheil, J., Schupp, R., Basko, M. M., Bayraktar, M., Meijer, R., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O., Neukirch, A. & Colgan, J., 11 May 2020, In : Nature communications. 11, 2334.

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Reflective aperiodic multilayer filters for metrology at XUV sources

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 3 Feb 2020, In : Optics express. 28, 3, p. 3331-3351 21 p.

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Ruthenium under ultrafast laser excitation: Model and dataset for equation of state, conductivity, and electron-ion coupling

Petrov, Y., Migdal, K., Inogamov, N., Khokhlov, V., Ilnitsky, D., Milov, I., Medvedev, N., Lipp, V. & Zhakhovsky, V., Feb 2020, In : Data in brief. 28, 104980.

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Similarity in ruthenium damage induced by photons with different energies: From visible light to hard X-rays

Milov, I., Lipp, V., Ilnitsky, D., Medvedev, N., Migdal, K., Zhakhovsky, V., Khokhlov, V., Petrov, Y., Inogamov, N., Semin, S., Kimel, A., Ziaja, B., Makhotkin, I. A., Louis, E. & Bijkerk, F., 31 Jan 2020, In : Applied surface science. 501, 143973.

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1 Citation (Scopus)
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The role of pinhole structures in Mo thin films on multi-layer graphene synthesis

Kizir, S., van den Beld, W., Schurink, B., van de Kruijs, R. W. E., Benschop, J. P. H. & Bijkerk, F., 12 Mar 2020, In : Journal of Physics : Materials. 3, 2, 9 p., 025004.

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W/B short period multilayer structures for soft x-rays

Medvedev, R., Zameshin, A., Sturm, J. M., Yakshin, A. & Bijkerk, F., 1 Apr 2020, In : AIP advances. 10, 4, 8 p., 045305.

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2019

Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

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Characterization of nitrogen doped graphene bilayers synthesized by fast, low temperature microwave plasma-enhanced chemical vapour deposition

Stilhano Vilas Boas, C. R., Focassio, B., Marinho Jr., E., G. Larrude, D., Salvadori, M. C., Rocha Leao, C. & dos Santos, D., 23 Sep 2019, In : Scientific reports. 9, 12 p., 13715.

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4 Citations (Scopus)
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Efficient Generation of Extreme Ultraviolet Light From Nd: YAG-Driven Microdroplet-Tin Plasma

Schupp, R., Torretti, F., Meijer, R., Bayraktar, M., Scheers, J., Kurilovich, D., Bayerle, A., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 8 Jul 2019, In : Physical review applied. 12, 1, 014010.

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6 Citations (Scopus)
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Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.

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Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

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Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

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Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of Applied Physics. 126, 14, 145301.

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In-depth structural analysis of swift heavy ion irradiation in KY(WO4)2 for the fabrication of planar optical waveguides

Frentrop, R., Subbotin, I., Segerink, F., Keim, R., Tormo-marquez, V., Olivares, J., Shcherbachev, K., Yakunin, S., Makhotkin, I. & Garcia-blanco, S. M., 1 Dec 2019, In : Optical materials express. 9, 12, p. 4796-4810 15 p.

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In-situ studies of silicide formation during growth of molybdenum-silicon interfaces

Reinink, J., Zameshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Oct 2019, In : Journal of Applied Physics. 126, 13, 135304.

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Lithography for now and the future

van de Kerkhof, M. A., Benschop, J. P. H. & Banine, V. Y., May 2019, In : Solid-state electronics. 155, p. 20-26

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1 Citation (Scopus)

Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures

Medvedev, R. V., Nikolaev, K. V., Zameshin, A. A., Ijpes, D., Makhotkin, I. A., Yakunin, S. N., Yakshin, A. E. & Bijkerk, F., 28 Jul 2019, In : Journal of Applied Physics. 126, 4, 045302.

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Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

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Nanoscale Transition Metal Thin Films: Growth Characteristics and Scaling Law for Interlayer Formation

Chandrasekaran, A., van de Kruijs, R. W. E., Sturm, J. M., Zameshin, A. & Bijkerk, F., 11 Dec 2019, In : ACS applied materials & interfaces. 11, 49, p. 46311−46326 16 p.

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Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry

Tryus, M., Nikolaev, K. V., Makhotkin, I. A., Schubert, J., Kibkalo, L., Danylyuk, S., Giglia, A., Nicolosi, P. & Juschkin, L., 30 Jun 2019, In : Thin solid films. 680, p. 94-101 8 p.

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Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 21 Oct 2019, In : Journal of Applied Physics. 126, 15, 7 p., 155301.

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Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Schupp, R., Torretti, F., Meijer, R. A., Bayraktar, M., Sheil, J., Scheers, J., Kurilovich, D., Bayerle, A., Schafgans, A. A., Purvis, M., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 20 Sep 2019, In : Applied physics letters. 115, 12, 124101.

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2 Citations (Scopus)

Spectral characterization of an industrial EUV light source for nanolithography

Torretti, F., Liu, F., Bayraktar, M., Scheers, J., Bouza, Z., Ubachs, W., Hoekstra, R. & Versolato, O., 28 Nov 2019, In : Journal of physics D: applied physics. 53, 5, 055204.

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Surface structure determination by x-ray standing waves at a free-electron laser

Mercurio, G., Makhotkin, I. A., Milov, I., Kim, Y., Zaluzhnyy, I., Dziarzhytski, S., Wenthaus, L., Vartanyants, I. & Wurth, W., 28 Mar 2019, In : New journal of physics. 21, 3, 13 p., 033031.

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2 Citations (Scopus)
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2018

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

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2 Citations (Scopus)
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Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

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4 Citations (Scopus)
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Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold

Makhotkin, I. A., Milov, I., Chalupský, J., Tiedtke, K., Enkisch, H., de Vries, G., Scholze, F., Siewert, F., Sturm, J. M., Nikolaev, K. V., van de Kruijs, R. W. E., Smithers, M. A., Van Wolferen, H. A. G. M., Keim, E. G., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Pelka, J. B., Juha, L. & 15 others, Hájková, V., Vozda, V., Sburian, T., Saksl, K., Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Donker, R., Mey, T. & Sobierajski, R., 1 Nov 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 11, p. 2799-2805 7 p.

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4 Citations (Scopus)
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Double matrix effect in Low Energy Ion Scattering from La surfaces

Zameshin, A. A., Yakshin, A. E., Sturm, J. M., Brongerma, H. H. & Bijkerk, F., 15 May 2018, In : Applied surface science. 440, p. 570-579 10 p.

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Electrofusion of single cells in picoliter droplets

Schoeman, R. M., Van Den Beld, W. T. E., Kemna, E. W. M., Wolbers, F., Eijkel, J. C. T. & Van Den Berg, A., 27 Feb 2018, In : Scientific reports. 8, 3714.

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Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., Scholze, F., Siewert, F., van de Kruijs, R. W. E., Milov, I., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Nittler, L., Syryanyy, Y., Juha, L., Hájková, V., Vozda, V., Burian, T. & 13 others, Saksl, K., Faatz, B., Keitel, B., Plonjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T. & Enkisch, H., Jan 2018, In : Journal of synchrotron radiation. 25, 1, p. 77-84 8 p.

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10 Citations (Scopus)
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Formation of H2O on a CO2 dosed Ru(0 0 0 1) surface under Extreme Ultraviolet Light and H2

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Oct 2018, In : Applied surface science. 456, p. 538-544 7 p.

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Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

van den Bos, R. A. J. M., Reinink, J., Lopaev, D. V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 22 Feb 2018, In : Journal of physics D: applied physics. 51, 11, 11 p., 115302.

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In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

Krause, B., Kuznetsov, D. S., Yakshin, A. E., Ibrahimkutty, S., Baumbach, T. & Bijkerk, F., Aug 2018, In : Journal of applied crystallography. 51, p. 1013-1020 8 p.

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Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Chalupsky, J., Sturm, J. M., Tiedtke, K., de Vries, G., Störmer, M., Siewert, F., van de Kruijs, R., Louis, E., Jacyna, I., Jurek, M., Juha, L., Hájková, V., Vozda, V., Burian, T., Saksl, K. & 13 others, Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T., Enkisch, H. & Bijkerk, F., 23 Jul 2018, In : Optics express. 26, 15, p. 19665-19685 21 p.

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5 Citations (Scopus)
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Modeling of XUV-induced damage in Ru films: The role of model parameters

Milov, I., Lipp, V., Medvedev, N., Makhotkin, I. A., Louis, E. & Bijkerk, F., 28 Sep 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 10, p. B43-B53 11 p.

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Plasma-assisted oxide removal from ruthenium-coated EUV optics

Dolgov, A., Lee, C. J., Bijkerk, F., Abrikosov, A., Krivtsun, V. M., Lopaev, D., Yakushev, O. & van Kampen, M., 18 Apr 2018, In : Journal of Applied Physics. 123, 15, 9 p., 153301.

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Self-contained in-vacuum in situ thin film stress measurement tool

Reinink, J., Van De Kruijs, R. W. E. & Bijkerk, F., 14 May 2018, In : Review of scientific instruments. 89, 5, 6 p., 053904.

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Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range

Nikolaev, K. V., Makhotkin, I. A., Yakunin, S. N., Van De Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 1 Sep 2018, In : Acta Crystallographica Section A: Foundations and Advances. 74, 5, p. 545-552 8 p.

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Study of ultrathin Pt/Co/Pt trilayers modified by nanosecond XUV pulses from laser-driven plasma source

Jacyna, I., Klinger, D., Pełka, J. B., Minikayev, R., Dłużewski, P., Dynowska, E., Jakubowski, M., Klepka, M. T., Zymierska, D., Bartnik, A., Kurant, Z., Wolska, A., Wawro, A., Sveklo, I., Plaisier, J. R., Eichert, D., Brigidi, F., Makhotkin, I., Maziewski, A. & Sobierajski, R., 30 Sep 2018, In : Journal of alloys and compounds. 763, p. 899-908 10 p.

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1 Citation (Scopus)
2017

Adsorption and Dissociation of CO2 on Ru (0001)

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2017, In : Journal of physical chemistry. p. 6729-6735 7 p.

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9 Citations (Scopus)
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Blister formation in Mo/Si multilayered structures induced by hydrogen ions

Van Den Bos, R. A. J. M., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 9 Jun 2017, In : Journal of physics D: applied physics. 50, 26, 265302.

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10 Citations (Scopus)
2 Downloads (Pure)

Characterization of self-assembled monolayers on a ruthenium surface

Shaheen, A., Sturm, J. M., Ricciardi, R., Huskens, J., Lee, C. J. & Bijkerk, F., 6 Jun 2017, In : Langmuir. 33, 25, p. 6419-6429 8 p.

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