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2019
98 Downloads (Pure)

Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
material absorption
Electric Power Supplies
Optical Devices
Synchrotrons
spacers
Open Access
Graphite
Optical sensors
optical measuring instruments
Graphene
Etching
13 Downloads (Pure)

Efficient Generation of Extreme Ultraviolet Light From Nd: YAG-Driven Microdroplet-Tin Plasma

Schupp, R., Torretti, F., Meijer, R., Bayraktar, M., Scheers, J., Kurilovich, D., Bayerle, A., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 8 Jul 2019, In : Physical review applied. 12, 1, 014010.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ultraviolet radiation
yttrium-aluminum garnet
tin
lasers
ion charge
1 Downloads (Pure)

Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

Mund, B. K., Sturm, J. M., van den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 29 Oct 2019, In : Applied surface science. 504, 144485.

Research output: Contribution to journalArticleAcademicpeer-review

Graphite
Graphene
Etching
graphene
etching
12 Downloads (Pure)

Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Oxide films
Thin films
oxides
Electrons
thin films
5 Downloads (Pure)

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
grazing incidence
Multilayers
Mirrors
mirrors
Wavelength
1 Citation (Scopus)
20 Downloads (Pure)

Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
X ray scattering
grazing incidence
Scanning Transmission Electron Microscopy
Multilayers
X-Rays

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of applied physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
hydrogenation
thin films
ellipsometry
hydrogen
surface plasmon resonance
1 Downloads (Pure)

In-depth structural analysis of swift heavy ion irradiation in KY(WO4)2 for the fabrication of planar optical waveguides

Frentrop, R., Subbotin, I., Segerink, F., Keim, R., Tormo-marquez, V., Olivares, J., Shcherbachev, K., Yakunin, S., Makhotkin, I. & Garcia-blanco, S. M., 1 Dec 2019, In : Optical materials express. 9, 12, p. 4796-4810

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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Heavy Ions
Planar waveguides
Optical waveguides
Ion bombardment
Heavy ions
3 Downloads (Pure)

In-situ studies of silicide formation during growth of molybdenum-silicon interfaces

Reinink, J., Zameshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Oct 2019, In : Journal of applied physics. 126, 13, 135304.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
molybdenum
ion scattering
silicon
tensile stress
availability

Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures

Medvedev, R. V., Nikolaev, K. V., Zameshin, A. A., Ijpes, D., Makhotkin, I. A., Yakunin, S. N., Yakshin, A. E. & Bijkerk, F., 25 Jul 2019, In : Journal of applied physics. 126, 4, 045302.

Research output: Contribution to journalArticleAcademicpeer-review

polishing
laminates
reflectance
roughness
ions
10 Downloads (Pure)

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
x ray optics
modulation
photolithography
wavelengths
actuators
3 Downloads (Pure)
Open Access
File
Scaling laws
Film growth
Transition metals
Thin films
Interfacial energy

Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry

Tryus, M., Nikolaev, K. V., Makhotkin, I. A., Schubert, J., Kibkalo, L., Danylyuk, S., Giglia, A., Nicolosi, P. & Juschkin, L., 30 Jun 2019, In : Thin solid films. 680, p. 94-101 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Optical constants
error analysis
Pulsed laser deposition
Stoichiometry
Error analysis
7 Downloads (Pure)

Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 15 Oct 2019, In : Journal of applied physics. 126, 15, 7 p., 155301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ion scattering
oxidation
oxygen
thin films
metals

Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Schupp, R., Torretti, F., Meijer, R. A., Bayraktar, M., Sheil, J., Scheers, J., Kurilovich, D., Bayerle, A., Schafgans, A. A., Purvis, M., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 20 Sep 2019, In : Applied physics letters. 115, 12, 124101.

Research output: Contribution to journalArticleAcademicpeer-review

radiation transport
optical thickness
YAG lasers
tin
scaling

Spectral characterization of an industrial EUV light source for nanolithography

Torretti, F., Liu, F., Bayraktar, M., Scheers, J., Bouza, Z., Ubachs, W., Hoekstra, R. & Versolato, O., 28 Nov 2019, In : Journal of physics D: applied physics. 53, 5, 055204.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Nanolithography
Light sources
light sources
Laser produced plasmas
Plasmas
1 Citation (Scopus)
19 Downloads (Pure)

Surface structure determination by x-ray standing waves at a free-electron laser

Mercurio, G., Makhotkin, I. A., Milov, I., Kim, Y., Zaluzhnyy, I., Dziarzhytski, S., Wenthaus, L., Vartanyants, I. & Wurth, W., 28 Mar 2019, In : New journal of physics. 21, 3, 13 p., 033031.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
standing waves
free electron lasers
x rays
dynamic structural analysis
temporal resolution
2018
2 Citations (Scopus)
7 Downloads (Pure)

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Graphite
Amorphous silicon
Graphene
Hydrogen
Degradation
2 Citations (Scopus)
8 Downloads (Pure)

Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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Hydrogen
Desorption
Adsorption
Yttrium
Thin films
2 Citations (Scopus)
50 Downloads (Pure)

Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold

Makhotkin, I. A., Milov, I., Chalupský, J., Tiedtke, K., Enkisch, H., de Vries, G., Scholze, F., Siewert, F., Sturm, J. M., Nikolaev, K. V., van de Kruijs, R. W. E., Smithers, M. A., Van Wolferen, H. A. G. M., Keim, E. G., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Pelka, J. B., Juha, L. & 15 othersHájková, V., Vozda, V., Sburian, T., Saksl, K., Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Donker, R., Mey, T. & Sobierajski, R., 1 Nov 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 11, p. 2799-2805 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
free electron lasers
ruthenium
ablation
shot
damage
3 Citations (Scopus)
7 Downloads (Pure)

Double matrix effect in Low Energy Ion Scattering from La surfaces

Zameshin, A. A., Yakshin, A. E., Sturm, J. M., Brongerma, H. H. & Bijkerk, F., 15 May 2018, In : Applied surface science. 440, p. 570-579 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Scattering
Ions
Charge transfer
Lanthanum
Conduction bands
2 Citations (Scopus)
48 Downloads (Pure)

Electrofusion of single cells in picoliter droplets

Schoeman, R. M., Van Den Beld, W. T. E., Kemna, E. W. M., Wolbers, F., Eijkel, J. C. T. & Van Den Berg, A., 27 Feb 2018, In : Scientific reports. 8, 3714.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Fusion reactions
Microfluidics
Assays
Microchannels
Platinum
10 Citations (Scopus)
33 Downloads (Pure)

Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., Scholze, F., Siewert, F., van de Kruijs, R. W. E., Milov, I., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Nittler, L., Syryanyy, Y., Juha, L., Hájková, V., Vozda, V., Burian, T. & 13 othersSaksl, K., Faatz, B., Keitel, B., Plonjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T. & Enkisch, H., Jan 2018, In : Journal of synchrotron radiation. 25, 1, p. 77-84 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Free electron lasers
Radiation damage
yield point
radiation damage
free electron lasers
1 Citation (Scopus)
6 Downloads (Pure)

Formation of H2O on a CO2 dosed Ru(0 0 0 1) surface under Extreme Ultraviolet Light and H2

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Oct 2018, In : Applied surface science. 456, p. 538-544 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Amorphous carbon
Temperature programmed desorption
Absorption spectroscopy
Reaction products
Carbon Dioxide
2 Citations (Scopus)
6 Downloads (Pure)

Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

van den Bos, R. A. J. M., Reinink, J., Lopaev, D. V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 22 Feb 2018, In : Journal of physics D: applied physics. 51, 11, 11 p., 115302.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
blisters
residual stress
Hydrogen
Residual stresses
Multilayers
23 Downloads (Pure)

In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

Krause, B., Kuznetsov, D. S., Yakshin, A. E., Ibrahimkutty, S., Baumbach, T. & Bijkerk, F., Aug 2018, In : Journal of applied crystallography. 51, p. 1013-1020 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Lanthanum
Sputter deposition
Nitrides
Monitoring
Crystallites
5 Citations (Scopus)
25 Downloads (Pure)

Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Chalupsky, J., Sturm, J. M., Tiedtke, K., de Vries, G., Störmer, M., Siewert, F., van de Kruijs, R., Louis, E., Jacyna, I., Jurek, M., Juha, L., Hájková, V., Vozda, V., Burian, T., Saksl, K. & 13 othersFaatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T., Enkisch, H. & Bijkerk, F., 23 Jul 2018, In : Optics express. 26, 15, p. 19665-19685 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ultraviolet lasers
free electron lasers
shot
damage
thin films
1 Citation (Scopus)
42 Downloads (Pure)

Modeling of XUV-induced damage in Ru films: The role of model parameters

Milov, I., Lipp, V., Medvedev, N., Makhotkin, I. A., Louis, E. & Bijkerk, F., 28 Sep 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 10, p. B43-B53 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
damage
photoabsorption
hot electrons
ruthenium
electrons
95 Downloads (Pure)
Open Access
File
nitrogen ions
Ion bombardment
Ruthenium
ruthenium
bombardment
87 Downloads (Pure)

Plasma-assisted oxide removal from ruthenium-coated EUV optics

Dolgov, A., Lee, C. J., Bijkerk, F., Abrikosov, A., Krivtsun, V. M., Lopaev, D., Yakushev, O. & van Kampen, M., 18 Apr 2018, In : Journal of applied physics. 123, 15, 9 p., 153301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ruthenium
hydrogen plasma
optics
cold plasmas
oxides
1 Citation (Scopus)
53 Downloads (Pure)

Self-contained in-vacuum in situ thin film stress measurement tool

Reinink, J., Van De Kruijs, R. W. E. & Bijkerk, F., 14 May 2018, In : Review of scientific instruments. 89, 5, 6 p., 053904.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
stress measurement
Stress measurement
Vacuum
Thin films
vacuum
34 Downloads (Pure)

Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range

Nikolaev, K. V., Makhotkin, I. A., Yakunin, S. N., Van De Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 1 Sep 2018, In : Acta Crystallographica Section A: Foundations and Advances. 74, 5, p. 545-552 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
specular reflection
grazing incidence
X-Ray Diffraction
Theoretical Models
Diffraction
1 Citation (Scopus)

Study of ultrathin Pt/Co/Pt trilayers modified by nanosecond XUV pulses from laser-driven plasma source

Jacyna, I., Klinger, D., Pełka, J. B., Minikayev, R., Dłużewski, P., Dynowska, E., Jakubowski, M., Klepka, M. T., Zymierska, D., Bartnik, A., Kurant, Z., Wolska, A., Wawro, A., Sveklo, I., Plaisier, J. R., Eichert, D., Brigidi, F., Makhotkin, I., Maziewski, A. & Sobierajski, R., 30 Sep 2018, In : Journal of alloys and compounds. 763, p. 899-908 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Plasma sources
Laser pulses
X rays
Magnetization
Lasers
2017
7 Citations (Scopus)
42 Downloads (Pure)

Adsorption and Dissociation of CO2 on Ru (0001)

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2017, In : Journal of physical chemistry. p. 6729-6735 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Carbon Monoxide
Temperature programmed desorption
Infrared spectroscopy
desorption
infrared spectroscopy
9 Citations (Scopus)
2 Downloads (Pure)

Blister formation in Mo/Si multilayered structures induced by hydrogen ions

Van Den Bos, R. A. J. M., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 9 Jun 2017, In : Journal of physics D: applied physics. 50, 26, 265302.

Research output: Contribution to journalArticleAcademicpeer-review

blisters
hydrogen ions
Protons
Ions
Fluxes
4 Citations (Scopus)
31 Downloads (Pure)

Characterization of self-assembled monolayers on a ruthenium surface

Shaheen, A., Sturm, J. M., Ricciardi, R., Huskens, J., Lee, C. J. & Bijkerk, F., 6 Jun 2017, In : Langmuir. 33, 25, p. 6419-6429 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Ruthenium
Self assembled monolayers
ruthenium
Monolayers
sulfur
2 Citations (Scopus)
1 Downloads (Pure)

Coexistence of ice clusters and liquid-like water clusters on the Ru(0001) surface

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 2017, In : Physical chemistry chemical physics. 19, 12, p. 8288-8299 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Ice
ice
Water
Liquids
liquids
4 Citations (Scopus)

Detection of defect populations in superconductor boron subphosphide B12P2 through X-ray absorption spectroscopy

Huber, S., Gullikson, E., Meyer-Ilse, J., Frye, C. D., Edgar, J. H., van de Kruijs, R. W. E., Bijkerk, F. & Prendergast, D., 2017, In : Journal of materials chemistry. A. 5, 12, p. 5737-5749 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

X ray absorption spectroscopy
Boron
Superconducting materials
Vacancies
Defects
2 Citations (Scopus)

Determining crystal phase purity in c-BP through X-ray absorption spectroscopy

Huber, S., Medvedev, V., Gullikson, E., Padavala, B., Edgar, J. H., van de Kruijs, R. W. E., Bijkerk, F. & Prendergast, D., 2017, In : Physical chemistry chemical physics. 19, 12, p. 8174-8187 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

boron phosphides
X ray absorption spectroscopy
Boron
absorption spectroscopy
purity
7 Citations (Scopus)
22 Downloads (Pure)

High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region

Huang, Q., Yi, Q., Cao, Z., Qi, R., Loch, R. A., Jonnard, P., Wu, M., Giglia, A., Li, W., Louis, E., Bijkerk, F., Zhang, Z. & Wang, Z., 1 Dec 2017, In : Scientific reports. 7, 1, 12929.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
reflectance
incidence
water
x rays
barrier layers
10 Citations (Scopus)
52 Downloads (Pure)

In-situ Raman spectroscopy to elucidate the influence of adsorption in graphene electrochemistry

van den Beld, W. T. E., Odijk, M., Vervuurt, R. H. J., Weber, J-W., Bol, A. A., van den Berg, A. & Eijkel, J. C. T., 24 Mar 2017, In : Scientific reports. 7, 45080.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
279 Downloads (Pure)
Open Access
File
magnetron sputtering
oxidation
thin films
oxygen
photoelectron spectroscopy
12 Citations (Scopus)
Crown Ethers
Crown ethers
Ketones
Ether
Ethers
2 Citations (Scopus)
99 Downloads (Pure)

Metal diffusion properties of ultra-thin high-k Sc2O3 films

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 1 Oct 2017, In : AIP advances. 7, 10, 21 p., 105324.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
metals
tin
etching
ruthenium
adhesion
100 Downloads (Pure)

Narrowband and tunable anomalous transmission filters for special monitoring in the extreme ultraviolet wavelength region

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 25 Jan 2017, In : Optics express. 25, 3, p. 1993-2008

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
narrowband
filters
wavelengths
incidence
standing waves
6 Citations (Scopus)

Numerical simulations based on probe measurements in EUV-induced hydrogen plasma

Abrikosov, A., Reshetnyak, V., Astakhov, D., Dolgov, A., Yakushev, O., Lopaev, D. & Krivtsun, V., 16 Mar 2017, In : Plasma sources science and technology. 26, 4, 045011.

Research output: Contribution to journalArticleAcademicpeer-review

hydrogen plasma
probes
simulation
extreme ultraviolet radiation
ionization
25 Downloads (Pure)

Passive pumping for the parallel trapping of single neurons onto a microsieve electrode array

Frimat, J. P., Schurink, B. & Luttge, R., 1 Nov 2017, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 35, 6, 06GA01.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
neurons
Neurons
pumping
trapping
chips
9 Citations (Scopus)

Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers

Philipsen, V., Luong, K. V., Souriau, L., Erdmann, A., Xu, D., Evanschitzky, P., Van De Kruijs, R. W. E., Edrisi, A., Scholze, F., Laubis, C., Irmscher, M., Naasz, S., Reuter, C. & Hendrickx, E., 1 Oct 2017, In : Journal of micro/nanolithography, MEMS, and MOEMS. 16, 4, 13 p., 041002.

Research output: Contribution to journalArticleAcademicpeer-review

absorbers (materials)
Masks
absorbers
masks
Metals
19 Citations (Scopus)
47 Downloads (Pure)

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang, Q., Medvedev, V., van de Kruijs, R. W. E., Yakshin, A., Louis, E. & Bijkerk, F., 21 Mar 2017, In : Applied physics reviews. 4, 1, 15 p., 011104.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
gratings
optics
monochromators
x rays
spectral sensitivity