Research output per year
Research output per year
Research output
Search results
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2020
Spectral purity performance of high-power EUV systems
van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X., de Kruif, R., Davydova, N., Schiffelers, G., Wählish, F., van Setten, E., Varenkamp, W., Ricken, K., de Winter, L., McNamara, J. & Bayraktar, M., 23 Mar 2020, In : SPIE Conference Proceedings. 11323, 16 p., 1132321.Research output: Contribution to journal › Conference article › Academic › peer-review
3 Citations (Scopus) -
Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography
Versolato, O., Bayerle, A., Bayraktar, M., Behnke, L., Bekker, H., Bouza, Z., Colgan, J., Crespo Lopez-Urrutia, J., Deuzeman, M. J., Hoekstra, R., Kurilovich, D., Poirier, L., Liu, B., Meijer, R., Neukirch, A., Rai, S., Ryabtsev, A., Witte, S., Scheers, J., Schupp, R. & 3 others, , 11 Jun 2020, In : Journal of physics: Conference series. 1412, 19, 192006.Research output: Contribution to journal › Conference article › Academic › peer-review
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