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Review article
2016
28 Citations (Scopus)
11 Downloads (Pure)

Recommended reading list of early publications on atomic layer deposition-outcome of the "virtual project on the history of ALD"

Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D. C., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D. M., Hwang, C. S., Jen, S. H., Kallio, T., Kanervo, J. & 42 othersKhmelnitskiy, I., Kim, D. H., Klibanov, L., Koshtyal, Y., Krause, A. O. I., Kuhs, J., Karkkanen, I., Kaariainen, M. L., Kaariainen, T., Lamagna, L., Lapicki, A. A., Leskela, M., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Mennad, A., Militzer, C., Molarius, J., Norek, M., Ozgit-Akgun, C., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R. L., Rampelberg, G., Ras, R. H. A., Rauwel, E., Roozeboom, F., Sajavaara, T., Salami, H., Savin, H., Schneider, N., Seidel, T. E., Sundqvist, J., Suyatin, D. B., Torndahl, T., van Ommen, J. R., Wiemer, C., Ylivaara, O. M. E. & Yurkevich, O., 2016, In : Journal of vacuum science and technology A: vacuum, surfaces, and films. 35, 1, 010801.

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atomic layer epitaxy
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Atomic layer epitaxy