Research Output per year
Research Output per year
Research Output
Search results
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2016
Research in the Industrial Focus Group XUV Optics
Sturm, J. M. & Bijkerk, F., 26 May 2016, DelftResearch output: Other contribution › Other research output
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2011
B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation
Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Maui, Hawaii, USResearch output: Other contribution › Other research output
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Chemical interaction of B4C diffusion barriers with Mo/Si layered nanostructures
Nyabero, S. L., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
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Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLASH and LCLS
Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M. & 4 others, , 2011, HamburgResearch output: Other contribution › Other research output
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Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs
Loch, R. A., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
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Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs
Louis, E., Sobierajski, R., Loch, R. A., Bostedt, C., Bozek, J., Burian, T., Chalupsky, J., Gaudin, J., Graf, A., Grzonka, J., Hajkova, V., Hau-Riege, S. P., van Hattum, E. D., Juha, L., Klinger, D., Krzywinski, J., London, R., Messerschmidt, M., Moeller, S., Plocinski, T. & 3 others, , 2011, PragueResearch output: Other contribution › Other research output
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Depth profiling of Mo/Si multilayers: the effect of Ar-ion energy on layer structure
Zoethout, E., Louis, E. & Bijkerk, F., 2011, Paris, FrResearch output: Other contribution › Other research output
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Diffraction of EUV radiation on free-standing grid structures: theory and experiment
Medvedev, V., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
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EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation
Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Miami, FloridaResearch output: Other contribution › Other research output
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Fiber-based ellipsometry for in situ monitoring
Liu, F., Lee, C. J., Chen, J., Louis, E. & Bijkerk, F., 2011, Baltimore, USResearch output: Other contribution › Other research output
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Kinetic study of EUV-induced plasma chemistry
Astakhov, D., Goedheer, W. J. & Lopaev, D., 2011, RijnhuizenResearch output: Other contribution › Other research output
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Multilayer based solutions for suppression of IR radiation in EUV systems
Medvedev, V., van den Boogaard, T., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, VeldhovenResearch output: Other contribution › Other research output
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Multilayers for the lithography generation beyond EUVL
Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M. & Bijkerk, F., 2011, VeldhovenResearch output: Other contribution › Other research output
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Negating HIO-induced metal and carbide EUV surface contamination
Sturm, J. M., Gleeson, M., van de Kruijs, R. W. E., Lee, C. J., Kleyn, A. W. & Bijkerk, F., 2011Research output: Other contribution › Other research output
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Nitrogen Passivation in La/B4C Layered Structures
Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 2011, BulgariaResearch output: Other contribution › Other research output
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Non-constant diffusion rate in sub nanometer thick Mo-Si interlayers
Bosgra, J., Yakshin, A. & Bijkerk, F., 2011, Dijon, FranceResearch output: Other contribution › Other research output
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Structural properties of sub nanometer thick layers to enhance EUV multilayer mirror reflectance
Bosgra, J., van de Kruijs, R. W. E., Zoethout, E., Verhoeven, J., Yakshin, A. & Bijkerk, F., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
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The Interaction of Hyperthermal Argon Atoms with CO-covered Ru(0001): Scattering and Collision-Induced Desorption
Gleeson, M., Ueta, H. & Kleyn, A. W., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
5 Citations (Scopus) -
Thermal damage in Mo/Si based multilayers for short-wavelength FELs
Yakshin, A., Van de Kruis, R. W. E., Sobierajski, R., Louis, E., Bruijn, S., Loch, R. A. & Bijkerk, F., 2011, Kyoto, JapanResearch output: Other contribution › Other research output
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Understanding solid state diffusion in multilayered structures on a picometer lengthscale
van de Kruijs, R. W. E., Bruijn, S. & de Rooij-Lohmann, V. I. T. A., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
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Wavelength selection for multilayer coatings for the lithography generation beyond EUVL
Makhotkin, I. A., Zoethout, E., Louis, E., Muellender, S. & Bijkerk, F., 2011, Miami, Florida (US)Research output: Other contribution › Other research output