Research Output per year
Research Output 2001 2020
2016
Research in the Industrial Focus Group XUV Optics
Sturm, J. M. & Bijkerk, F., 26 May 2016, DelftResearch output: Other contribution › Other research output
2011
B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation
Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Maui, Hawaii, USResearch output: Other contribution › Other research output
Chemical interaction of B4C diffusion barriers with Mo/Si layered nanostructures
Nyabero, S. L., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
interactions
barrier layers
laminates
interlayers
x rays
Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLASH and LCLS
Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M. & 4 others, , 2011, HamburgResearch output: Other contribution › Other research output
Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs
Loch, R. A., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
free electron lasers
optics
damage
wavelengths
yield point
Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs
Louis, E., Sobierajski, R., Loch, R. A., Bostedt, C., Bozek, J., Burian, T., Chalupsky, J., Gaudin, J., Graf, A., Grzonka, J., Hajkova, V., Hau-Riege, S. P., van Hattum, E. D., Juha, L., Klinger, D., Krzywinski, J., London, R., Messerschmidt, M., Moeller, S., Plocinski, T. & 3 others, , 2011, PragueResearch output: Other contribution › Other research output
optics
damage
free electron lasers
wavelengths
optical coatings
Depth profiling of Mo/Si multilayers: the effect of Ar-ion energy on layer structure
Zoethout, E., Louis, E. & Bijkerk, F., 2011, Paris, FrResearch output: Other contribution › Other research output
erosion
Bragg reflectors
ions
Auger spectroscopy
molybdenum
Diffraction of EUV radiation on free-standing grid structures: theory and experiment
Medvedev, V., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
transmittance
grids
filters
radiation
diffraction
EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation
Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Miami, FloridaResearch output: Other contribution › Other research output
laser beams
mirrors
reflectance
extreme ultraviolet radiation
infrared radiation
Fiber-based ellipsometry for in situ monitoring
Liu, F., Lee, C. J., Chen, J., Louis, E. & Bijkerk, F., 2011, Baltimore, USResearch output: Other contribution › Other research output
preserving
line of sight
ellipsometry
fibers
polarization
Kinetic study of EUV-induced plasma chemistry
Astakhov, D., Goedheer, W. J. & Lopaev, D., 2011, RijnhuizenResearch output: Other contribution › Other research output
Multilayer based solutions for suppression of IR radiation in EUV systems
Medvedev, V., van den Boogaard, T., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, VeldhovenResearch output: Other contribution › Other research output
retarding
reflectance
radiation
mirrors
specular reflection
Multilayers for the lithography generation beyond EUVL
Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M. & Bijkerk, F., 2011, VeldhovenResearch output: Other contribution › Other research output
lithography
reflectance
interlayers
wavelengths
ions
Negating HIO-induced metal and carbide EUV surface contamination
Sturm, J. M., Gleeson, M., van de Kruijs, R. W. E., Lee, C. J., Kleyn, A. W. & Bijkerk, F., 2011Research output: Other contribution › Other research output
photolithography
ultraviolet radiation
carbides
contamination
projection
Nitrogen Passivation in La/B4C Layered Structures
Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 2011, BulgariaResearch output: Other contribution › Other research output
passivity
nitrogen
nitrides
mirrors
binding energy
Non-constant diffusion rate in sub nanometer thick Mo-Si interlayers
Bosgra, J., Yakshin, A. & Bijkerk, F., 2011, Dijon, FranceResearch output: Other contribution › Other research output
Structural properties of sub nanometer thick layers to enhance EUV multilayer mirror reflectance
Bosgra, J., van de Kruijs, R. W. E., Zoethout, E., Verhoeven, J., Yakshin, A. & Bijkerk, F., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
transition metals
mirrors
reflectance
interlayers
laminates
5
Citations
(Scopus)
The Interaction of Hyperthermal Argon Atoms with CO-covered Ru(0001): Scattering and Collision-Induced Desorption
Gleeson, M., Ueta, H. & Kleyn, A. W., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
desorption
argon
collisions
scattering
atoms
Thermal damage in Mo/Si based multilayers for short-wavelength FELs
Yakshin, A., Van de Kruis, R. W. E., Sobierajski, R., Louis, E., Bruijn, S., Loch, R. A. & Bijkerk, F., 2011, Kyoto, JapanResearch output: Other contribution › Other research output
Understanding solid state diffusion in multilayered structures on a picometer lengthscale
van de Kruijs, R. W. E., Bruijn, S. & de Rooij-Lohmann, V. I. T. A., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
solid state
x ray diffraction
mirrors
activation energy
annealing
Wavelength selection for multilayer coatings for the lithography generation beyond EUVL
Makhotkin, I. A., Zoethout, E., Louis, E., Muellender, S. & Bijkerk, F., 2011, Miami, Florida (US)Research output: Other contribution › Other research output