Research Output 2001 2020

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2016

Research in the Industrial Focus Group XUV Optics

Sturm, J. M. & Bijkerk, F., 26 May 2016, Delft

Research output: Other contributionOther research output

2011

B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Maui, Hawaii, US

Research output: Other contributionOther research output

Chemical interaction of B4C diffusion barriers with Mo/Si layered nanostructures

Nyabero, S. L., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

interactions
barrier layers
laminates
interlayers
x rays

Comparative damage studies in multilayer optics induced by intense short-wavelength pulses from FLASH and LCLS

Loch, R. A., Sobierajski, R., Bostedt, C., Bozek, J., Bruijn, S., Burian, T., Chalupsky, J., Feng, Y., Gaudin, J., Graf, A., van Hattum, E. D., Hau-Riege, S., Juha, L., Khorsand, A. R., Klinger, D., van de Kruijs, R. W. E., Krzywinski, J., London, R., Louis, E., Messerschmidt, M. & 4 others, Moeller, S., Schlotter, W., Tiedtke, K. & Bijkerk, F., 2011, Hamburg

Research output: Other contributionOther research output

Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

Loch, R. A., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

free electron lasers
optics
damage
wavelengths
yield point

Damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

Louis, E., Sobierajski, R., Loch, R. A., Bostedt, C., Bozek, J., Burian, T., Chalupsky, J., Gaudin, J., Graf, A., Grzonka, J., Hajkova, V., Hau-Riege, S. P., van Hattum, E. D., Juha, L., Klinger, D., Krzywinski, J., London, R., Messerschmidt, M., Moeller, S., Plocinski, T. & 3 others, Wawro, A., Zabierowski, P. & Bijkerk, F., 2011, Prague

Research output: Other contributionOther research output

optics
damage
free electron lasers
wavelengths
optical coatings

Depth profiling of Mo/Si multilayers: the effect of Ar-ion energy on layer structure

Zoethout, E., Louis, E. & Bijkerk, F., 2011, Paris, Fr

Research output: Other contributionOther research output

erosion
Bragg reflectors
ions
Auger spectroscopy
molybdenum

Diffraction of EUV radiation on free-standing grid structures: theory and experiment

Medvedev, V., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

transmittance
grids
filters
radiation
diffraction

EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Miami, Florida

Research output: Other contributionOther research output

laser beams
mirrors
reflectance
extreme ultraviolet radiation
infrared radiation

Fiber-based ellipsometry for in situ monitoring

Liu, F., Lee, C. J., Chen, J., Louis, E. & Bijkerk, F., 2011, Baltimore, US

Research output: Other contributionOther research output

preserving
line of sight
ellipsometry
fibers
polarization

Kinetic study of EUV-induced plasma chemistry

Astakhov, D., Goedheer, W. J. & Lopaev, D., 2011, Rijnhuizen

Research output: Other contributionOther research output

Multilayer based solutions for suppression of IR radiation in EUV systems

Medvedev, V., van den Boogaard, T., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Krivtsun, V. M., Yakunin, S. N. & Bijkerk, F., 2011, Veldhoven

Research output: Other contributionOther research output

retarding
reflectance
radiation
mirrors
specular reflection

Multilayers for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M. & Bijkerk, F., 2011, Veldhoven

Research output: Other contributionOther research output

lithography
reflectance
interlayers
wavelengths
ions

Negating HIO-induced metal and carbide EUV surface contamination

Sturm, J. M., Gleeson, M., van de Kruijs, R. W. E., Lee, C. J., Kleyn, A. W. & Bijkerk, F., 2011

Research output: Other contributionOther research output

photolithography
ultraviolet radiation
carbides
contamination
projection

Nitrogen Passivation in La/B4C Layered Structures

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 2011, Bulgaria

Research output: Other contributionOther research output

passivity
nitrogen
nitrides
mirrors
binding energy

Non-constant diffusion rate in sub nanometer thick Mo-Si interlayers

Bosgra, J., Yakshin, A. & Bijkerk, F., 2011, Dijon, France

Research output: Other contributionOther research output

Structural properties of sub nanometer thick layers to enhance EUV multilayer mirror reflectance

Bosgra, J., van de Kruijs, R. W. E., Zoethout, E., Verhoeven, J., Yakshin, A. & Bijkerk, F., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

transition metals
mirrors
reflectance
interlayers
laminates
5 Citations (Scopus)

The Interaction of Hyperthermal Argon Atoms with CO-covered Ru(0001): Scattering and Collision-Induced Desorption

Gleeson, M., Ueta, H. & Kleyn, A. W., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

desorption
argon
collisions
scattering
atoms

Thermal damage in Mo/Si based multilayers for short-wavelength FELs

Yakshin, A., Van de Kruis, R. W. E., Sobierajski, R., Louis, E., Bruijn, S., Loch, R. A. & Bijkerk, F., 2011, Kyoto, Japan

Research output: Other contributionOther research output

Understanding solid state diffusion in multilayered structures on a picometer lengthscale

van de Kruijs, R. W. E., Bruijn, S. & de Rooij-Lohmann, V. I. T. A., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

solid state
x ray diffraction
mirrors
activation energy
annealing

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Muellender, S. & Bijkerk, F., 2011, Miami, Florida (US)

Research output: Other contributionOther research output