Research Output 2001 2019

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PhD Thesis - Research UT, graduation UT
2019

Multi-dimensional analysis of nano-scale periodic structures using EUV and X-RAY characterization: theoretical concepts and applications

Nikolaev, K., 4 Jul 2019, Enschede: University of Twente. 130 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

dimensional analysis
x rays
theses
reflectance
grazing incidence
2018
65 Downloads (Pure)

Extreme UV photon and hydrogen radical interaction with graphene and ruthenium surfaces

Mund, B. K., 22 Nov 2018, Enschede: University of Twente. 107 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
99 Downloads (Pure)

Hydrogen induced blister formation in Mo/Si multilayer structures

van den Bos, R. A. J. M., 2 May 2018, Enschede: University of Twente. 113 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
blisters
laminates
hydrogen
particle telescopes
electromagnetic spectra
48 Downloads (Pure)

Metal diffusion and chemical processes of mono and bi-layer thin films

Pachecka, M., 13 Jul 2018, Enschede: University of Twente. 102 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
etching
thin films
dissociation
metals
MIM (semiconductors)
415 Downloads (Pure)

Plasma-assisted cleaning of extreme UV optics

Dolgov, A. A., 1 Mar 2018, Enschede: University of Twente. 147 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
cleaning
optics
plasma chemistry
carbon
mirrors
7 Downloads (Pure)

Probing atomic scale interface processes using X-rays and ions

Zameshin, A., 14 Nov 2018, Enschede: University of Twente. 150 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

ion scattering
theses
ions
x rays
matrices
58 Downloads (Pure)

Structure control of La/B multilayer systems by partial nitridation

Kuznetsov, D., 8 Nov 2018, Enschede: University of Twente. 100 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
theses
grazing incidence
thermal stability
incidence
mirrors
2017
284 Downloads (Pure)

Growth and thermal oxidation of Ru and ZrO2 thin films as oxidation protective layers

Coloma Ribera, R., 1 Mar 2017, Enschede: Universiteit Twente. 176 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
oxidation
thin films
oxygen
theses
activation energy
2016
46 Downloads (Pure)

Illuminating the structure of borides through X-ray absorption spectroscopy

Huber, S., 20 Oct 2016, Enschede: Universiteit Twente. 166 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
160 Downloads (Pure)

Numerical study of extreme-ultra-violet generated plasmas in hydrogen

Astakhov, D., 28 Apr 2016, Enschede: Universiteit Twente. 122 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
hydrogen
probes
plasma density
plasma dynamics
etching
2015
84 Downloads (Pure)

Adaptive multilayer optics for extreme ultraviolet wavelengths

Bayraktar, M., 26 Feb 2015, Enschede: Universiteit Twente. 124 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
optics
theses
wavelengths
ultraviolet radiation
mirrors
560 Downloads (Pure)

Analysis of extreme ultraviolet induced surface defect processes

Gao, A., 22 Oct 2015, Enschede: Universiteit Twente. 134 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
2013
38 Downloads (Pure)

Single-order lamellar multilayer gratings

van der Meer, R., 22 Mar 2013, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
gratings
optics
reflectance
spectral resolution
mirrors
2012
55 Downloads (Pure)

Physics and technology development of multilayer EUV reflective optics

Louis, E., 23 Nov 2012, Enschede: Universiteit Twente. 139 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
theses
optics
physics
lithography
thin films
2009
25 Downloads (Pure)

Surface and interface dynamics in multilayered systems

Tsarfati, T., 26 Jun 2009, Enschede, the Netherlands: University of Twente. 103 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
caps
bombardment
contaminants
metal oxides
interlayers
2007
21 Downloads (Pure)

Interface structure and interdiffusion in Mo/Si multilayers

Nedelcu, I., 7 Sep 2007, Enschede: University of Twente. 129 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
theses
interlayers
plasma diagnostics
structural analysis
bombardment