Research Output

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PhD Thesis - Research UT, graduation UT
2019

In-situ stress analytics at sub-nanoscale thin film growth

Reinink, J., 27 Nov 2019, Enschede: University of Twente. 116 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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Multi-dimensional analysis of nano-scale periodic structures using EUV and X-RAY characterization: theoretical concepts and applications

Nikolaev, K., 4 Jul 2019, Enschede: University of Twente. 130 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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42 Downloads (Pure)
2018

Extreme UV photon and hydrogen radical interaction with graphene and ruthenium surfaces

Mund, B. K., 22 Nov 2018, Enschede: University of Twente. 107 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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111 Downloads (Pure)

Hydrogen induced blister formation in Mo/Si multilayer structures

van den Bos, R. A. J. M., 2 May 2018, Enschede: University of Twente. 113 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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199 Downloads (Pure)

Metal diffusion and chemical processes of mono and bi-layer thin films

Pachecka, M., 13 Jul 2018, Enschede: University of Twente. 102 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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69 Downloads (Pure)

Plasma-assisted cleaning of extreme UV optics

Dolgov, A. A., 1 Mar 2018, Enschede: University of Twente. 147 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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622 Downloads (Pure)

Probing atomic scale interface processes using X-rays and ions

Zameshin, A., 14 Nov 2018, Enschede: University of Twente. 150 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

12 Downloads (Pure)

Structure control of La/B multilayer systems by partial nitridation

Kuznetsov, D., 8 Nov 2018, Enschede: University of Twente. 100 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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92 Downloads (Pure)
2017

Growth and thermal oxidation of Ru and ZrO2 thin films as oxidation protective layers

Coloma Ribera, R., 1 Mar 2017, Enschede: Universiteit Twente. 176 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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432 Downloads (Pure)
2016

Illuminating the structure of borides through X-ray absorption spectroscopy

Huber, S., 20 Oct 2016, Enschede: Universiteit Twente. 166 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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72 Downloads (Pure)

Numerical study of extreme-ultra-violet generated plasmas in hydrogen

Astakhov, D., 28 Apr 2016, Enschede: Universiteit Twente. 122 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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262 Downloads (Pure)
2015

Adaptive multilayer optics for extreme ultraviolet wavelengths

Bayraktar, M., 26 Feb 2015, Enschede: Universiteit Twente. 124 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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153 Downloads (Pure)

Analysis of extreme ultraviolet induced surface defect processes

Gao, A., 22 Oct 2015, Enschede: Universiteit Twente. 134 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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907 Downloads (Pure)
2013

Single-order lamellar multilayer gratings

van der Meer, R., 22 Mar 2013, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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54 Downloads (Pure)
2012

Physics and technology development of multilayer EUV reflective optics

Louis, E., 23 Nov 2012, Enschede: Universiteit Twente. 139 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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87 Downloads (Pure)
2009

Surface and interface dynamics in multilayered systems

Tsarfati, T., 26 Jun 2009, Enschede, the Netherlands: University of Twente. 103 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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33 Downloads (Pure)
2007

Interface structure and interdiffusion in Mo/Si multilayers

Nedelcu, I., 7 Sep 2007, Enschede: University of Twente. 129 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

Open Access
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133 Downloads (Pure)