Research Output 2001 2020

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PhD Thesis - Research external, graduation UT
2015
71 Downloads (Pure)

Tailoring spectral properties of Extreme UV multilayer optics

Medvedev, V., 4 Nov 2015, Enschede: Universiteit Twente. 105 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
2014
30 Downloads (Pure)

Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

Nyabero, S. L., 7 Feb 2014, Enschede: Universiteit Twente. 110 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
interlayers
theses
wavelengths
thermal stability
coatings
2013
195 Downloads (Pure)

Hydrogen particle and plasma interactions with heterogeneous structures

Kuznetsov, A., 18 Oct 2013, Enschede: Universiteit Twente. 157 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
plasma interactions
particle interactions
theses
hydrogen
photolithography
97 Downloads (Pure)

Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

Bosgra, J., 4 Jul 2013, Enschede: University of Twente. 124 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
laminates
interlayers
thermodynamics
theses
radiation
27 Downloads (Pure)

Structural and reflective characteristics of multilayers for 6.x nm wavelength

Makhotkin, I. A., 31 Oct 2013, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
theses
mirrors
photolithography
wavelengths
optics
2011
478 Downloads (Pure)

Characterization of EUV induced contamination on multilayer optics

Chen, J., 1 Jul 2011, Enschede: Universiteit Twente. 119 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
contamination
optics
theses
reflectance
lithography
33 Downloads (Pure)

Diffusion phenomena in chemically stabilized multilayer structures

Bruijn, S., 27 Apr 2011, Enschede: University of Twente. 114 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
laminates
barrier layers
theses
damage
annealing
14 Downloads (Pure)

Ion-enhanced growth in planar and structured Mo/Si multilayers

van den Boogaard, T., 13 Dec 2011, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
molybdenum
polishing
gratings
silicon
roughness
2010
37 Downloads (Pure)

Nanoscale diffusion, compound formation and phase transitions in Mo/Si multilayer structures

de Rooij-Lohmann, V. I. T. A., 1 Oct 2010, Enschede: University of Twente. 109 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

File
laminates
interlayers
roughness
mirrors
ions
2005
32 Downloads (Pure)

Interfaces in soft X-ray multilayer mirrors

Kessels, M. J. H., 10 Mar 2005, Enschede: University of Twente. 107 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
theses
mirrors
wavelengths
x rays