Research Output

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PhD Thesis - Research external, graduation UT

Characterization of EUV induced contamination on multilayer optics

Chen, J., 1 Jul 2011, Enschede: Universiteit Twente. 119 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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600 Downloads (Pure)

Diffusion phenomena in chemically stabilized multilayer structures

Bruijn, S., 27 Apr 2011, Enschede: University of Twente. 114 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

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40 Downloads (Pure)

Hydrogen particle and plasma interactions with heterogeneous structures

Kuznetsov, A., 18 Oct 2013, Enschede: Universiteit Twente. 157 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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385 Downloads (Pure)

Interfaces in soft X-ray multilayer mirrors

Kessels, M. J. H., 10 Mar 2005, Enschede: University of Twente. 107 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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66 Downloads (Pure)

Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

Bosgra, J., 4 Jul 2013, Enschede: University of Twente. 124 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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124 Downloads (Pure)

Ion-enhanced growth in planar and structured Mo/Si multilayers

van den Boogaard, T., 13 Dec 2011, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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18 Downloads (Pure)

Nanoscale diffusion, compound formation and phase transitions in Mo/Si multilayer structures

de Rooij-Lohmann, V. I. T. A., 1 Oct 2010, Enschede: University of Twente. 109 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

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51 Downloads (Pure)

Structural and reflective characteristics of multilayers for 6.x nm wavelength

Makhotkin, I. A., 31 Oct 2013, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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42 Downloads (Pure)

Tailoring spectral properties of Extreme UV multilayer optics

Medvedev, V., 4 Nov 2015, Enschede: Universiteit Twente. 105 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

Open Access
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189 Downloads (Pure)

Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

Nyabero, S. L., 7 Feb 2014, Enschede: Universiteit Twente. 110 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

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41 Downloads (Pure)