Research Output 2001 2019

Filter
Pd Eng Thesis
2019
44 Downloads (Pure)

Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner

Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.

Research output: ThesisPd Eng ThesisAcademic

Open Access
File
scanners
silver
reticles
absorbers
nickel
2017
11 Downloads (Pure)

Smart multilayer interactive optics for lithography at extreme UV wavelengths

Antonov, O., 27 Jun 2017, Enschede: University of Twente. 19 p.

Research output: ThesisPd Eng ThesisAcademic

Open Access
File