Research output per year
Research output per year
Research output
Search results
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2019
Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner
Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.Research output: Thesis › EngD Thesis › Academic
Open AccessFile397 Downloads (Pure) -
2017
Smart multilayer interactive optics for lithography at extreme UV wavelengths
Antonov, O., 27 Jun 2017, Enschede: University of Twente. 19 p.Research output: Thesis › EngD Thesis › Academic
Open AccessFile158 Downloads (Pure)