XUV Optics

Research Output 2001 2019

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Pd Eng Thesis
2019
44 Downloads (Pure)

Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner

Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.

Research output: Thesis › Pd Eng Thesis › Academic

Open Access
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scanners
silver
reticles
absorbers
nickel
2017
11 Downloads (Pure)

Smart multilayer interactive optics for lithography at extreme UV wavelengths

Antonov, O., 27 Jun 2017, Enschede: University of Twente. 19 p.

Research output: Thesis › Pd Eng Thesis › Academic

Open Access
File