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XUV Optics
University of Twente
Faculty of Science and Technology
Overview
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Profiles
(24)
Research Output
(509)
Prizes
(3)
Activities
(80)
Research Output
Research Output per year
2001
2021
223
Article
172
Poster
28
Conference contribution
21
Other contribution
65
More
20
Patent
20
PhD Thesis - Research UT, graduation UT
10
PhD Thesis - Research external, graduation UT
5
Abstract
2
Conference article
2
Pd Eng Thesis
2
Working paper
1
Report
1
Paper
1
Review article
1
Web publication/site
Research Output per year
Research Output per year
2 results
Publication Year, Title
(descending)
Publication Year, Title
(ascending)
Title
Type
Filter
Pd Eng Thesis
Search results
2019
Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner
Edrisi, A.,
4 Mar 2019
, Enschede:
University of Twente
.
80 p.
Research output
:
Thesis
›
Pd Eng Thesis
Open Access
File
Silver
Extreme ultraviolet lithography
Nickel
Surface roughness
Ruthenium
118
Downloads (Pure)
2017
Smart multilayer interactive optics for lithography at extreme UV wavelengths
Antonov, O.,
27 Jun 2017
, Enschede:
University of Twente
.
19 p.
Research output
:
Thesis
›
Pd Eng Thesis
Open Access
File
33
Downloads (Pure)