Research Output 2001 2020

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Pd Eng Thesis
2019
60 Downloads (Pure)

Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner

Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.

Research output: ThesisPd Eng ThesisAcademic

Open Access
File
scanners
silver
reticles
absorbers
nickel
2017
14 Downloads (Pure)

Smart multilayer interactive optics for lithography at extreme UV wavelengths

Antonov, O., 27 Jun 2017, Enschede: University of Twente. 19 p.

Research output: ThesisPd Eng ThesisAcademic

Open Access
File