Research Output per year
Research Output 2001 2020
2019
69
Downloads
(Pure)
Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner
Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.Research output: Thesis › Pd Eng Thesis
Open Access
File
scanners
silver
reticles
absorbers
nickel
2017
18
Downloads
(Pure)
Smart multilayer interactive optics for lithography at extreme UV wavelengths
Antonov, O., 27 Jun 2017, Enschede: University of Twente. 19 p.Research output: Thesis › Pd Eng Thesis
Open Access
File