Research Output per year
Research Output per year
Research Output
Search results
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2020
Characterization of 1- and 2-μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light
Schupp, R., Behnke, L., Sheil, J., Bouza, Z., Bayraktar, M., Ubachs, W., Hoekstra, R. & Versolato, O., 28 Dec 2020, (arXiv.org).Research output: Working paper
File -
2016
Numerical and experimental studies of the carbon etching in EUV-induced plasma
Astakhov, D., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsun, V. M., Yakushev, O., Koshelev, K. N., Lopaev, D. V. & Bijkerk, F., 2016, p. -, 11 p.Research output: Working paper
Open AccessFile48 Downloads (Pure)