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XUV Optics
University of Twente
Faculty of Science and Technology
Overview
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Network
Profiles
(24)
Research Output
(509)
Prizes
(3)
Activities
(80)
Research Output
Research Output per year
2001
2021
223
Article
172
Poster
28
Conference contribution
21
Other contribution
65
More
20
Patent
20
PhD Thesis - Research UT, graduation UT
10
PhD Thesis - Research external, graduation UT
5
Abstract
2
Conference article
2
Pd Eng Thesis
2
Working paper
1
Report
1
Paper
1
Review article
1
Web publication/site
Research Output per year
Research Output per year
2 results
Publication Year, Title
(descending)
Publication Year, Title
(ascending)
Title
Type
Filter
Working paper
Search results
2020
Characterization of 1- and 2-μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light
Schupp, R., Behnke, L., Sheil, J., Bouza, Z.,
Bayraktar, M.
, Ubachs, W., Hoekstra, R. & Versolato, O.,
28 Dec 2020
, (arXiv.org).
Research output
:
Working paper
File
ultraviolet radiation
tin
characterization
wavelengths
lasers
2016
Numerical and experimental studies of the carbon etching in EUV-induced plasma
Astakhov, D., Goedheer, W. J.,
Lee, C. J.
, Ivanov, V. V., Krivtsun, V. M., Yakushev, O., Koshelev, K. N., Lopaev, D. V. &
Bijkerk, F.
,
2016
,
p. -
,
11 p.
Research output
:
Working paper
Open Access
File
etching
carbon
ions
energy
hydrogen plasma
48
Downloads (Pure)