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2016
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Numerical and experimental studies of the carbon etching in EUV-induced plasma

Astakhov, D., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsun, V. M., Yakushev, O., Koshelev, K. N., Lopaev, D. V. & Bijkerk, F., 2016, p. -, 11 p.

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etching
carbon
ions
energy
hydrogen plasma