XUV Optics

Research Output 2001 2019

Filter
Working paper
2016
2 Downloads (Pure)

Numerical and experimental studies of the carbon etching in EUV-induced plasma

Astakhov, D., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsun, V. M., Yakushev, O., Koshelev, K. N., Lopaev, D. V. & Bijkerk, F., 2016, p. -, 11 p.

Research output: Working paper › Professional

Open Access
File
etching
carbon
ions
energy
hydrogen plasma