Airat Shafikov – Research output — University of Twente Research Information

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3 Article
2 Poster
1 Patent
1 PhD Thesis - Research UT, graduation UT

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2020
Pellicle for EUV lithograpy
Shafikov, A., Bijkerk, F., Schurink, B., Sturm, M. & van de Kruijs, R. W. E., 15 Oct 2020, IPC No. G03F 7/ 20 A I, Patent No. NL2025186, Priority date 12 Apr 2019, Priority No. EP20190168871
Research output: Patent