1985 …2020

Research output per year

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Research Output

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Conference contribution
1991

A miniaturized chemical analysis using two silicon micro pumps

van der Schoot, B. H., van den Berg, A., Jeanneret, S., de Rooij, N. F. & Grisel, A., 1 Dec 1991, Transducers '91: 1991 International Conference on Solid-State Sensors and Actuators : digest of technical papers. Piscataway, NJ: IEEE, p. 789-791 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
13 Citations (Scopus)
2 Downloads (Pure)

An on-wafer fabricated free-chlorine sensor

van den Berg, A., Koudelka-Hep, M., van der Schoot, B. K., Verney-Norberg, E., Krebs, P., Grisel, A. & de Rooij, N. F., 1 Dec 1991, Transducers '91: 1991 International Conference on Solid-State Sensors and Actuators : digest of technical papers. IEEE, p. 233-236 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
4 Citations (Scopus)
10 Downloads (Pure)

Polymeric membranes for miniature (bio)chemical sensors

Koudelka-Hep, M., van den Berg, A. & de Rooij, N. F., 1 Jan 1991, Spring Meeting 1991, Atlanta, Georgia: Proceedings of the American Chemical Society, Division of Polymeric Materials : Science and Engineering. p. 364-365 2 p. (Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering; vol. 64).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
1994

Micromechanical components for μTAS

Fluitman, J. H. J., van den Berg, A. & Lammerink, T. S. J., 21 Nov 1994, Micro Total Analysis Systems: Proceedings of the μTAS ’94 Workshop, held at MESA Research Institute, University of Twente, The Netherlands, 21–22 November 1994. van den Berg, A. & P. Bergveld, P. (eds.). Dordrecht: Kluwer Academic Publishers, p. 73-83 11 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
33 Downloads (Pure)

Micro system array sensors

Lammerink, T. S. J., van den Berg, A. & Fluitman, J. H. J., 17 Feb 1994, Sensor Technology Conference. Enschede, p. 173-177

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
12 Downloads (Pure)

Miniaturized chemical analysis systems

van den Berg, A., Bergveld, P., Reinhoudt, D., Elwenspoek, M. C. & Fluitman, J. H. J., 2 Oct 1994, Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings. Piscataway: IEEE Computer Society, p. 181-184 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
7 Citations (Scopus)
69 Downloads (Pure)
1995

Modular concept for miniature chemical systems

van den Berg, A., Spiering, V. L., Lammerink, T. S. J., Elwenspoek, M. C. & Bergveld, P., 30 Oct 1995, Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications: October 30 - November 3, 1995, Houston, Texas, USA. Houston, TX: National Aeronautics and Space Administration (NASA)

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Modular concept for miniature chemical systems

van den Berg, A., Lammerink, T. S. J., Spiering, V. L. & Olthuis, W., 1995, Microsystem technology for chemical and biological microreactor: papers of the Workshop on Microsystem Technology, Mainz, 20-21 February, 1995. Frankfurt am Main: Dechema, p. 109-123 (DECHEMA Monographs; vol. 132).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
24 Downloads (Pure)
1996

A µsensor array in a fluidic system for space applications

Spiering, V., Bergveld, P., Elwenspoek, M. & van den Berg, A., 20 Mar 1996, 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands: proceedings. Delft, Netherlands: Delft University Press, p. 143-146 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
15 Downloads (Pure)

Modular concept for fluid handling systems: a demonstrator micro analysis system

Lammerink, T. S. J., Spiering, V. L., Elwenspoek, M. C., Fluitman, J. H. J. & van den Berg, A., 11 Feb 1996, Proceedings of the 9th Annual International Workshop on Micro Electro Mechanical Systems 1996. Piscataway, NJ: IEEE, p. 389-394 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
36 Citations (Scopus)
58 Downloads (Pure)

MST: Issues for the future, with some emphasis on Agri/Horticulture

van den Berg, A., 29 Feb 1996, Proceedings of the Second international micromachine symposium. Tokyo, Japan, p. 3-11

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Porous silicon bulk micromachining for thermally isolated mambrane formation

Ducso, C., Vazsonyi, E., Adam, M., Barsony, I., Barsony, I., Gardeniers, J. G. E. & van den Berg, A., 8 Sep 1996, Proceedings of Eursensors X. Leuven, p. 227-230

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Technologies and microstructures for separation techniques in chemical analysis

Spiering, V. L., Spiering, V. L., Lammerink, T. S. J., Jansen, H. V., van den Berg, A. & Fluitman, J. H. J., Oct 1996, Proceedings of SPIE - The International Society for Optical Engineering - Micromachined Devices and Components II. Bellingham, WA USA: SPIE - The International Society for Optical Engineering, p. 91-100 10 p. (Proceedings of SPIE 2882).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
1 Citation (Scopus)
14 Downloads (Pure)

Tin dioxide sol-gel derived thin films deposited on porous silicon

Cobianu, C., Savaniu, C., Buiu, O., Zaharescu, M., Parlog, C., van den Berg, A., Varsony, E., Pecz, B. & Dascula, D., 29 Feb 1996, Proceedings Eurosensors X. Leuven, Belgium, p. 295-299

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1997

Designing, realization and characterization of a novel capacitive pressure/flow sensor

Oosterbroek, R. E., Lammerink, T. S. J., Berenschot, J. W., van den Berg, A. & Elwenspoek, M. C., 16 Jun 1997, Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2). Piscataway: IEEE Computer Society, p. 151-154 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
19 Citations (Scopus)
100 Downloads (Pure)

Etching technology for microchannels

Tjerkstra, R. W., de Boer, M. J., Berenschot, J. W., Gardeniers, J. G. E., van den Berg, A. & Elwenspoek, M. C., 26 Jan 1997, Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS. Piscataway: IEEE Computer Society, p. 147-152 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
39 Citations (Scopus)
637 Downloads (Pure)

Novel microstructures and technologies applied in chemical analysis techniques

Spiering, V. L., van der Moolen, J. N., Burger, G-J. & van den Berg, A., 16 Jun 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). Piscataway, NJ: IEEE, p. 511-514

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
18 Citations (Scopus)
54 Downloads (Pure)

Technologies and applications for micro fluid systems

Spiering, V. L., Lammerink, T. S. J., Burger, G. J., te Riet o g Scholten, J. K. & van den Berg, A., 10 Jun 1997, International Conference on Power Transmission Automation and Planning 1997. Milaan, p. 577-591

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1998

A Mixer Based on Diffusion-Mixing Designed for the MAFIAS-Project

Veenstra, T. T., Lammerink, T. S. J., van den Berg, A. & Elwenspoek, M. C., 2 Mar 1998, Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. van den Berg, A. & Bergveld, P. (eds.). Dordrecht: Kluwer Academic, p. 263-267 (MESA monographs; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems

Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A. & Elwenspoek, M. C., 2 Mar 1998, Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. van den Berg, A. & Bergveld, P. (eds.). Dordrecht: Kluwer Academic Publishers, p. 85-90 (MESA monographs; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Characterisation method for a new diffusion-mixer applicable in micro flow injection analysis system

Veenstra, T. T., Lammerink, T. S. J., van den Berg, A. & Elwenspoek, M. C., 3 Jun 1998, Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, p. 186-189

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Characterization of Silicon-Based Insulated Channels for Capillary Electrophoresis

Fintschenko, Y., Fowler, P., Spiering, V., Burger, G-J. & van den Berg, A., 1998, Micro Total Analysis Systems '98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Harrison, D. J. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 327-330

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Continuous Flow Versus Stopped flow in A Micro flow Injection System

van Akker, E. B., Bos, M., van den Berg, A. & van der Linden, W. E., 13 Oct 1998, Micro Total analysis Systems '98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Harrison, D. J. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 335-338

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Deep drawing simulation of Tailored Blanks

van den Berg, A., Meinders, V. T. & Stokman, B., 15 Jun 1998, Proceedings of the 20th Biennial congress. Brussel, Belgium, p. 133-144 12 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
15 Downloads (Pure)

Deep drawing simulations of Tailored Blanks and experimental verification

Meinders, V. T., Huetink, H. & van den Berg, A., 6 Apr 1998, The 6th International Conference on Sheet Metal (SheMet '98). Enschede, p. 235-246

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
246 Downloads (Pure)

Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A. & Elwenspoek, M. C., 3 Jun 1998, Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, p. 104-107

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A. & Elwenspoek, M. C., 6 Apr 1998, Modelling and simulation of microsystems, semiconductors, sensors and actuators. Santa Clara, USA, p. - 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electrochemical Fabrication of Multi Walled Micro Channels

Tjerkstra, R. W., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 25 Mar 1998, Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Harrison, D. J. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Glass Channels and Capillary Injectors for Capillary Zone Electrophoresis

Fintschenko, Y., van den Berg, A., Spiering, V., Burger, G-J. & van der Moolen, J., 2 Mar 1998, Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. van den Berg, A. & Bergveld, P. (eds.). Dordrecht: Kluwer Academic, p. 77-84 8 p. (MESA monographs; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

In-plane oriented fluid control components, fabricated with new etching techniques

Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A. & Elwenspoek, M. C., 17 Jun 1998, Proceedings of the 6th International conference on New Actuators with accompanying Exhibition (Actuator 98). Bremen, Germany, p. 43-46

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves

Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A. & Elwenspoek, M. C., 25 Mar 1998, Second Symposium on Microsystems in Practice. Gelsenkirchen, Germany, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
23 Downloads (Pure)

Sn02 sol-gel derived thin layers for gas sensing applications

Cobianu, C., Savaniu, C., Dumitrescu, M., Iorgulescu, R., Arnautu, A., Barsony, I., Barsony, I., Pecz, B., Ducso, C., Szilagyi, E., Paszti, F., Niinisto, L., Utriaino, M., Kolev, S. D., Kolev, S. D., van den Berg, A., Holleman, J. & Wallinga, H., 6 May 1998, Proceedings of the 5th NEXUSPAN Workshop on Thermal Aspects in Microsystem Technology. Hungary, p. 82-87 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications

Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A. & Elwenspoek, M. C., 25 Mar 1998, Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Harrison, D. J. & van den Berg, A. (eds.). Kluwer Academic Publishers, p. 137-140

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1999

µTransparent Insulating Channels as Components for Miniaturized Chemical Separation Devices

Schasfoort, R. B. M., Hendrikse, J. & van den Berg, A., 7 Jun 1999, Transducers '99: proceedings of the Tenth International Conference on Solid-State Sensors and Actuators. p. 872-875

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Characterization and optimization of mono-crystalline in-plane operating check valves

Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., Krijnen, G. J. M., Elwenspoek, M. C. & van den Berg, A., 6 Jun 1999, Proceedings IEEE International Conference on Solid-State Sensors and Actuators, Transducers '99. Sendai, Japan, p. 1816-1819

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Light Emission Spectra as Experimental Evidence for the Morphology of Silicon-based Antifuse Diode Structure

Le Minh, P., Akil, N. A., Houtsma, V. E., Woerlee, P. H., Wallinga, H., van den Berg, A. & Holleman, J., 24 Nov 1999, SAFE'99. Mierlo, The Netherlands, p. 265-268 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

New design methodologies in (111)-oriented silicon wafers

Oosterbroek, R. E., Berenschot, J. W., Nijdam, A. J., Pandraud, G., Elwenspoek, M. C. & van den Berg, A., 20 Sep 1999, Micromachining and Microfabrication Process Technology V: 20-22 September 1999, Santa Clara, California. Smith, J. H. & Karam, J. M. (eds.). Bellingham, WA, USA: SPIE, p. 384-394 11 p. (Proceedings of SPIE; vol. 3874).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

New Phenomenon of Slow Boron Diffusion from Spin-on-Dopant Source

Le Minh, P., Dao Khac An, U., Nguyen Duc Chien, U., Holleman, J., van den Berg, A., Woerlee, P. H. & Wallinga, H., 2 Nov 1999, IWOMS '99. Hanoi, Vietnam, p. 517-520 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Selective fusion bonding by surface roughness control

Gui, C., Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A. & Elwenspoek, M. C., 17 Oct 1999, Proceedings of the 1999 Joint international meeting. Hawaii, p. 1017-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

The use of selective anodic bonding to create near-zero dead volume membranes

Veenstra, T. T., Berenschot, J. W., Gardeniers, J. G. E., Sanders, R. G. P., Elwenspoek, M. C. & van den Berg, A., 17 Oct 1999, Proceedings of the 1999 joint international meeting. Hawaii, p. 998-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Visible light emission from reverse-biased silicon nanometer-scale diode-antifuses

Houtsma, V. E., Holleman, J., Akil, N. A., Le Minh, P., Zieren, V., van den Berg, A., Wallinga, H. & Woerlee, P. H., 5 Oct 1999, CAS'99. Sinaia, Romania: IEEE, p. 461-465 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
56 Downloads (Pure)
2000

A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A micro viscosity detector for a planar hydrodynamic chromatography (HDC) system

van der Heyden, F. H. J., Blom, M. T., Gardeniers, J. G. E., Chmela, E., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 14 May 2000, Proceedings of MicroTAS 2000 conference. Enschede, p. 595-598

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A Novel Silicon Electro-Optic Device for sensor applications

Le Minh, P., Akil, N. A., Wallinga, H., Woerlee, P. H., van den Berg, A. & Holleman, J., 13 Nov 2000, 2000 IEEE Annual Meeting Conference Proceedings. Rio Grande: IEEE, p. 523-524

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
3 Citations (Scopus)
50 Downloads (Pure)

A simple selfpriming bubble tolerant peristaltic micropump

Veenstra, T. T., Berenschot, J. W., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 27 Aug 2000, Proceedings Eurosensors 2000 Conference. Kopenhagen, Denemarken, p. 371-372

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Bonding and etching techniques for precision frabrication of reliable microvalves

Oosterbroek, R. E., Gui, C., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., Elwenspoek, M. C. & van den Berg, A., 14 May 2000, Proceedings of MicroTAS 2000 conference. Enschede, p. 179-182

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fabrication and application of silicon-based microchannels

Gardeniers, J. G. E., Tjerkstra, R. W. & van den Berg, A., 1 May 2000, IMRET 3: Proceedings of the International Conference on microreaction technology. Frankfurt, Germany: Springer, p. 36-44

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA

Rusu, C. R., van 't Oever, R., de Boer, M. J., Jansen, H. V., Berenschot, J. W., Bennink, M. L., Kanger, J. S., de Grooth, B. G., Elwenspoek, M. C., Greve, J., van den Berg, A. & Brugger, J. P., 23 Jan 2000, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, p. 429-434 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
102 Downloads (Pure)

Failure mechanisms of pressurized microchannels, model and experiments

Blom, M. T., Tas, N. R., Pandraud, G., Chmela, E., Gardeniers, J. G. E., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 23 Jan 2000, Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on. Piscataway: IEEE Computer Society, p. 199-204 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
49 Downloads (Pure)

High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review