Research output per year
Research output per year
Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Dive into the research topics where Alexey Y. Kovalgin is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
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Low-resistivity molybdenum obtained by atomic layer deposition
van der Zouw, K., van der Wel, B. Y., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y., 1 Sept 2023, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 41, 5, 052402.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile8 Downloads (Pure) -
Thin-film (Al)BCN materials synthesized by sequential precursor pulses to mimic atomic layer deposition
Apaydin, R. O., Aarnink, A. A. I., Gravesteijn, D. J., De Jong, M. P. & Kovalgin, A. Y., 1 Feb 2023, In: AIP advances. 13, 2, 025237.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile7 Downloads (Pure) -
Li intercalation into multilayer graphene with controlled defect densities
Ochapski, M. W., Ataç, D., Sanderink, J. G. M., Kovalgin, A. Y. & de Jong, M. P., 4 Jul 2021, In: Carbon trends. 4, 6 p., 100045.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile6 Citations (Scopus)68 Downloads (Pure) -
Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
Apaydin, R. O., Onnink, A. J., Liu, X., Aarnink, A. A. I., de Jong, M. P., Gravesteijn, D. J. & Kovalgin, A. Y., 23 Apr 2020, In: Journal of vacuum science and technology A: vacuum, surfaces, and films. 38, 3, 033411.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)150 Downloads (Pure) -
Conduction and electric field effect in ultra-thin tungsten films
van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., May 2020, In: IEEE Transactions on Semiconductor Manufacturing. 33, 2, p. 202-209 8 p., 9016070.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)97 Downloads (Pure)
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Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor) & Alexey Y. Kovalgin (Contributor)
19 Mar 2019Activity: Talk or presentation › Oral presentation
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Hotwire-assisted Atomic Layer Deposition: principles and examples
Alexey Y. Kovalgin (Invited speaker)
3 Sept 2018 → 6 Sept 2018Activity: Talk or presentation › Invited talk
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How hot is the wire: optical, electrical and combined methods of filament temperature determination
Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor) & Jurriaan Schmitz (Contributor)
3 Sept 2018 → 6 Sept 2018Activity: Talk or presentation › Oral presentation
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Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor) & Alexey Y. Kovalgin (Contributor)
29 Jul 2018 → 1 Aug 2018Activity: Talk or presentation › Oral presentation
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A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor) & Ramazan Oguzhan Apaydin (Contributor)
1 Oct 2018Activity: Talk or presentation › Invited talk
Press/Media
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Hot-Wire assisted ALD: Another example of radical-enhanced atomic layer deposition
Alexey Y. Kovalgin, Antonius A.I. Aarnink & Mengdi Yang
2/06/20
1 Media contribution
Press/Media: Research