Research Output per year
Fingerprint Dive into the research topics where Alexey Y. Kovalgin is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research Output
Conduction and electric field effect in ultra-thin tungsten films
van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., May 2020, In : IEEE Transactions on Semiconductor Manufacturing. 33, 2, p. 202-209 8 p., 9016070.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open Access
File
1
Citation
(Scopus)
44
Downloads
(Pure)
How hot is the wire: Optical, electrical, and combined methods to determine filament temperature
Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
In-situ study of ammonium bromide formation for optimizing boron nitride ALD from BBr3 and NH3
Onnink, A. J., Apaydin, R. O., Schmitz, J. & Kovalgin, A. Y., 2019.Research output: Contribution to conference › Abstract
Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride
Banerjee, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 6 Sep 2019, In : Journal of physical chemistry C. 123, 37, p. 23214-23225 12 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Activities
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)19 Mar 2019
Activity: Talk or presentation › Oral presentation
How hot is the wire: optical, electrical and combined methods of filament temperature determination
Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Oral presentation
Hotwire-assisted Atomic Layer Deposition: principles and examples
Alexey Y. Kovalgin (Invited speaker)3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Invited talk
A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)1 Oct 2018
Activity: Talk or presentation › Invited talk
Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)29 Jul 2018 → 1 Aug 2018
Activity: Talk or presentation › Oral presentation