Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

Open Access
File
  • Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

    van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Open Access
    File
  • 34 Downloads (Pure)

    How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

    Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 22 Downloads (Pure)

    Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

    Banerjee, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 6 Sep 2019, In : Journal of physical chemistry C. 123, 37, p. 23214-23225 12 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 1 Citation (Scopus)
    66 Downloads (Pure)

    Activities

    Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

    Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
    19 Mar 2019

    Activity: Talk or presentationOral presentation

    Hotwire-assisted Atomic Layer Deposition: principles and examples

    Alexey Y. Kovalgin (Invited speaker)
    3 Sep 20186 Sep 2018

    Activity: Talk or presentationInvited talk

    How hot is the wire: optical, electrical and combined methods of filament temperature determination

    Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)
    3 Sep 20186 Sep 2018

    Activity: Talk or presentationOral presentation

    A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

    Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)
    1 Oct 2018

    Activity: Talk or presentationInvited talk

    Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

    Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)
    29 Jul 20181 Aug 2018

    Activity: Talk or presentationOral presentation