Research output per year
Research output per year
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Dive into the research topics where Alexey Y. Kovalgin is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Li intercalation into multilayer graphene with controlled defect densities
Ochapski, M. W., Ataç, D., Sanderink, J. G. M., Kovalgin, A. Y. & de Jong, M. P., 4 Jul 2021, In: Carbon trends. 4, 6 p., 100045.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)22 Downloads (Pure) -
Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
Apaydin, R. O., Onnink, A. J., Liu, X., Aarnink, A. A. I., de Jong, M. P., Gravesteijn, D. J. & Kovalgin, A. Y., 23 Apr 2020, In: Journal of vacuum science and technology A: vacuum, surfaces, and films. 38, 3, 033411.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)47 Downloads (Pure) -
Conduction and electric field effect in ultra-thin tungsten films
van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., May 2020, In: IEEE Transactions on Semiconductor Manufacturing. 33, 2, p. 202-209 8 p., 9016070.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile1 Citation (Scopus)48 Downloads (Pure) -
Large scale structures in chemical vapor deposition-grown graphene on Ni thin films
Ataç, D., Sanderink, J. G. M., Kinge, S., Gravesteijn, D. J., Kovalgin, A. Y. & de Jong, M. P., 1 Sep 2020, In: Thin solid films. 709, 138225.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)27 Downloads (Pure) -
Method of forming a device structure using selective deposition of gallium nitride and system for same
Banerjee, S., Aarnink, A. & Kovalgin, A., 18 Jun 2020, Patent No. 62/779684, 12 Dec 2019Research output: Patent
Open AccessFile14 Downloads (Pure)
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Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor) & Alexey Y. Kovalgin (Contributor)
19 Mar 2019Activity: Talk or presentation › Oral presentation
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Hotwire-assisted Atomic Layer Deposition: principles and examples
Alexey Y. Kovalgin (Invited speaker)
3 Sep 2018 → 6 Sep 2018Activity: Talk or presentation › Invited talk
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Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor) & Alexey Y. Kovalgin (Contributor)
29 Jul 2018 → 1 Aug 2018Activity: Talk or presentation › Oral presentation
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A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor) & Ramazan Oguzhan Apaydin (Contributor)
1 Oct 2018Activity: Talk or presentation › Invited talk
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How hot is the wire: optical, electrical and combined methods of filament temperature determination
Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor) & Jurriaan Schmitz (Contributor)
3 Sep 2018 → 6 Sep 2018Activity: Talk or presentation › Oral presentation
Press / Media
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Hot-Wire assisted ALD: Another example of radical-enhanced atomic layer deposition
Alexey Y. Kovalgin, Antonius A.I. Aarnink & Mengdi Yang
2/06/20
1 Media contribution
Press/Media: Research