Alexey Y. Kovalgin

Associate Professor, Integrated Devices and Systems
Associate Professor, Mesa+

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74 Conference contribution
62 Article
8 Paper
5 Other contribution
12 More

Conduction and electric field effect in ultra-thin tungsten films
van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., May 2020, In : IEEE Transactions on Semiconductor Manufacturing. 33, 2, p. 202-209 8 p., 9016070.
Research output: Contribution to journal › Article › Academic › peer-review

Open Access
File
19 Downloads (Pure)
Method of forming a device structure using selective deposition of gallium nitride and system for same
Banerjee, S., Aarnink, A. & Kovalgin, A., 18 Jun 2020, Patent No. 62/779684, 12 Dec 2019
Research output: Patent

Open Access
File
1 Downloads (Pure)
Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy
Onnink, A. J., Apaydin, R. O., Aarnink, A. A. I., de Jong, M. P., Gravesteijn, D. J. & Kovalgin, A. Y., 15 Jul 2020, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 38, 4, 044009.
Research output: Contribution to journal › Article › Academic › peer-review
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
File
1 Citation (Scopus)

60 Downloads (Pure)
How hot is the wire: Optical, electrical, and combined methods to determine filament temperature
Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.
Research output: Contribution to journal › Article › Academic › peer-review

Open Access
File
46 Downloads (Pure)

15 Oral presentation
14 Invited talk

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor) & Alexey Y. Kovalgin (Contributor)
19 Mar 2019
Activity: Talk or presentation › Oral presentation
How hot is the wire: optical, electrical and combined methods of filament temperature determination
Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor) & Jurriaan Schmitz (Contributor)
3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Oral presentation
A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor) & Ramazan Oguzhan Apaydin (Contributor)
1 Oct 2018
Activity: Talk or presentation › Invited talk
Hotwire-assisted Atomic Layer Deposition: principles and examples
Alexey Y. Kovalgin (Invited speaker)
3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Invited talk
Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor) & Alexey Y. Kovalgin (Contributor)
29 Jul 2018 → 1 Aug 2018
Activity: Talk or presentation › Oral presentation