Research output per year
Research output per year
Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Dive into the research topics where Alexey Y. Kovalgin is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
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Electrical behavior of ALD-molybdenum films in the thin-film limit
Van Der Zouw, K., Dulfer, S. D., Aarnink, A. A. I. & Kovalgin, A. Y., 10 May 2024, 2024 IEEE 36th International Conference on Microelectronic Test Structures, ICMTS 2024 - Proceedings. IEEE, (IEEE International Conference on Microelectronic Test Structures).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile14 Downloads (Pure) -
Tuning Nanopores in Tubular Ceramic Nanofiltration Membranes with Atmospheric-Pressure Atomic Layer Deposition: Prospects for Pressure-Based In-Line Monitoring of Pore Narrowing
Nijboer, M., Jan, A., Chen, M., Batenburg, K., Peper, J., Aarnink, T., Roozeboom, F., Kovalgin, A., Nijmeijer, A. & Luiten-Olieman, M., 9 Jan 2024, In: Separations. 11, 1, 24.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)153 Downloads (Pure) -
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride
van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y., 17 Aug 2023, In: Journal of Physical Chemistry C. 127, 34, p. 17134-17145 12 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)67 Downloads (Pure) -
Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials
Chen, M., Nijboer, M. P., Kovalgin, A. Y., Nijmeijer, A., Roozeboom, F. & Luiten-Olieman, M. W. J., 20 Jun 2023, In: Dalton transactions. 52, 30, p. 10254-10277 24 p.Research output: Contribution to journal › Review article › Academic › peer-review
Open AccessFile7 Citations (Scopus)51 Downloads (Pure) -
Low-resistivity molybdenum obtained by atomic layer deposition
van der Zouw, K., van der Wel, B. Y., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y., 1 Sept 2023, In: Journal of vacuum science & technology A: vacuum, surfaces, and films. 41, 5, 052402.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile4 Citations (Scopus)125 Downloads (Pure)
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Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)
19 Mar 2019Activity: Talk or presentation › Oral presentation
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Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Banerjee, S. (Speaker), Dutta, S. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor) & Kovalgin, A. Y. (Contributor)
29 Jul 2018 → 1 Aug 2018Activity: Talk or presentation › Oral presentation
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A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Kovalgin, A. Y. (Invited speaker), Banerjee, S. (Contributor) & Apaydin, R. O. (Contributor)
1 Oct 2018Activity: Talk or presentation › Invited talk
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How hot is the wire: optical, electrical and combined methods of filament temperature determination
Onnink, A. J. (Speaker), Kovalgin, A. Y. (Contributor) & Schmitz, J. (Contributor)
3 Sept 2018 → 6 Sept 2018Activity: Talk or presentation › Oral presentation
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Hotwire-assisted Atomic Layer Deposition: principles and examples
Kovalgin, A. Y. (Invited speaker)
3 Sept 2018 → 6 Sept 2018Activity: Talk or presentation › Invited talk
Press/Media
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Hot-Wire assisted ALD: Another example of radical-enhanced atomic layer deposition
Kovalgin, A. Y., Aarnink, A. A. I. & Yang, M.
2/06/20
1 Media contribution
Press/Media: Research