Research Output per year
Fingerprint Dive into the research topics where Alexey Y. Kovalgin is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Atomic layer deposition
Engineering & Materials Science
atomic layer epitaxy
Physics & Astronomy
Tungsten
Chemical Compounds
Wire
Engineering & Materials Science
Contact resistance
Engineering & Materials Science
Hydrogen
Chemical Compounds
wire
Physics & Astronomy
tungsten
Physics & Astronomy
Network
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Research Output 1998 2019
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open Access
File
Atomic layer deposition
Sheet resistance
Contact resistance
Tungsten
Electric lines
From radical-enhanced to pure thermal ALD of gallium and aluminium nitrides
Banerjee, S., 11 Sep 2019, Enschede: University of Twente. 201 p.Research output: Thesis › PhD Thesis - Research UT, graduation UT › Academic
Open Access
File
gallium nitrides
aluminum nitrides
atomic layer epitaxy
silicon
microelectronics
How hot is the wire: Optical, electrical, and combined methods to determine filament temperature
Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Heat radiation
filaments
wire
Wire
optics
Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride
Banerjee, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 6 Sep 2019, In : Journal of physical chemistry C. 123, 37, p. 23214-23225 12 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Gallium nitride
Atomic layer deposition
gallium nitrides
atomic layer epitaxy
adducts
Van der Waals integration of silicene and hexagonal boron nitride
Wiggers, F. B., Fleurence, A., Aoyagi, K., Yonezawa, T., Yamada-Takamura, Y., Feng, H., Zhuang, J., Du, Y., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2019, In : 2D Materials. 6, 3, 035001.Research output: Contribution to journal › Article › Academic › peer-review
Boron nitride
boron nitrides
Electronic properties
Silicon
electronics
Activities 2001 2019
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)19 Mar 2019
Activity: Talk or presentation › Oral presentation
Hotwire-assisted Atomic Layer Deposition: principles and examples
Alexey Y. Kovalgin (Invited speaker)3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Invited talk
Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)29 Jul 2018 → 1 Aug 2018
Activity: Talk or presentation › Oral presentation
A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)1 Oct 2018
Activity: Talk or presentation › Invited talk
How hot is the wire: optical, electrical and combined methods of filament temperature determination
Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Oral presentation