Alexey Y. Kovalgin

Associate Professor, Integrated Devices and Systems
Associate Professor, MESA+ Institute

Research activity per year

If you made any changes in Pure these will be visible here soon.

Fingerprint

Dive into the research topics where Alexey Y. Kovalgin is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

9 Similar Profiles

Network

Recent external collaboration on country level. Dive into details by clicking on the dots or

74 Conference contribution
64 Article
8 Paper
5 Other contribution
More

Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
Apaydin, R. O., Onnink, A. J., Liu, X., Aarnink, A. A. I., de Jong, M. P., Gravesteijn, D. J. & Kovalgin, A. Y., 23 Apr 2020, In : Journal of vacuum science and technology A: vacuum, surfaces, and films. 38, 3, 033411.
Research output: Contribution to journal › Article › Academic › peer-review

Open Access
File
3 Downloads (Pure)
Conduction and electric field effect in ultra-thin tungsten films
van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., May 2020, In : IEEE Transactions on Semiconductor Manufacturing. 33, 2, p. 202-209 8 p., 9016070.
Research output: Contribution to journal › Article › Academic › peer-review

Open Access
File
28 Downloads (Pure)
Large scale structures in chemical vapor deposition-grown graphene on Ni thin films
Ataç, D., Sanderink, J. G. M., Kinge, S., Gravesteijn, D. J., Kovalgin, A. Y. & de Jong, M. P., 1 Sep 2020, In : Thin solid films. 709, 138225.
Research output: Contribution to journal › Article › Academic › peer-review

Open Access
File
1 Citation (Scopus)

12 Downloads (Pure)
Method of forming a device structure using selective deposition of gallium nitride and system for same
Banerjee, S., Aarnink, A. & Kovalgin, A., 18 Jun 2020, Patent No. 62/779684, 12 Dec 2019
Research output: Patent

Open Access
File
4 Downloads (Pure)
Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy
Onnink, A. J., Apaydin, R. O., Aarnink, A. A. I., de Jong, M. P., Gravesteijn, D. J. & Kovalgin, A. Y., 15 Jul 2020, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 38, 4, 044009.
Research output: Contribution to journal › Article › Academic › peer-review

15 Oral presentation
14 Invited talk

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor) & Alexey Y. Kovalgin (Contributor)
19 Mar 2019
Activity: Talk or presentation › Oral presentation
A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor) & Ramazan Oguzhan Apaydin (Contributor)
1 Oct 2018
Activity: Talk or presentation › Invited talk
Hotwire-assisted Atomic Layer Deposition: principles and examples
Alexey Y. Kovalgin (Invited speaker)
3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Invited talk
How hot is the wire: optical, electrical and combined methods of filament temperature determination
Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor) & Jurriaan Schmitz (Contributor)
3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Oral presentation
Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor) & Alexey Y. Kovalgin (Contributor)
29 Jul 2018 → 1 Aug 2018
Activity: Talk or presentation › Oral presentation

Hot-Wire assisted ALD: Another example of radical-enhanced atomic layer deposition
Alexey Y. Kovalgin, Antonius A.I. Aarnink & Mengdi Yang
2/06/20
1 Media contribution
Press/Media: Research