Activities per year
Activities 2001 2019
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)Activity: Talk or presentation › Oral presentation
Hotwire-assisted Atomic Layer Deposition: principles and examples
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)Activity: Talk or presentation › Oral presentation
A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)Activity: Talk or presentation › Invited talk
How hot is the wire: optical, electrical and combined methods of filament temperature determination
Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)Activity: Talk or presentation › Oral presentation
Large-scale structures in CVD graphene
Derya Ataç (Contributor), Johannes G.M. Sanderink (Contributor), Sachin Kinge (Contributor), Alexey Y. Kovalgin (Speaker), Michel P. de Jong (Contributor)Activity: Talk or presentation › Oral presentation
Pure-metal and metal-nitride films by hotwire-assisted atomic layer deposition
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
HOT WIRE ASSISTED ATOMIC LAYER DEPOSITION OF TWO- AND SINGLE-ELEMENT FILMS
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films
Sourish Banerjee (Speaker), Ramazan Oguzhan Apaydin (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Machiel Pieter de Jong (Contributor), Alexey Y. Kovalgin (Contributor)Activity: Talk or presentation › Oral presentation
Hotwire-assisted Atomic Layer Deposition of Pure Metals and Metal Nitrides
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
Electronic and structural properties of epitaxial silicene on h-BN-terminated ZrB2
Frank Wiggers (Speaker), Antoine Fleurence (Contributor), Kohei Aoyagi (Contributor), Takahiro Yonezawa (Contributor), Yukiko Yamada-Takamura (Contributor), Haifeng Feng (Contributor), Jincheng Zhuang (Contributor), Yi Du (Contributor), Alexey Kovalgin (Contributor), Michel de Jong (Contributor)Activity: Talk or presentation › Oral presentation
Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD
Mengdi Yang (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Speaker)Activity: Talk or presentation › Oral presentation
Hot-wire assisted ALD: from idea to realization
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia
Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Gerhardus A.M. Kip (Contributor), Dirk J Gravesteijn (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)Activity: Talk or presentation › Oral presentation
High-quality tungsten films by hotwire-assisted CVD/ALD at low temperature
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
Thermal, plasma-enhanced and hot-wire assisted ALD of two- and single-element films
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
PEALD ALN: CONTROLLING GROWTH AND FILM CRYSTALLINITY
Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)Activity: Talk or presentation › Oral presentation
Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes
Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)Activity: Talk or presentation › Oral presentation
A comparison of tungsten films grown by CVD and hot-wire assisted ALD
Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Speaker)Activity: Talk or presentation › Oral presentation
Radical-Enhanced Deposition and Etching of Thin Films without Plasma: Dream and Reality
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
Growth and Properties of Subnanometer Thin Titanium Nitride Films
Alexey Y. Kovalgin (Invited speaker), Hao Van Bui (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)Activity: Talk or presentation › Invited talk
Radical-enhanced Deposition and Etching of Thin Films without the Use of Plasma: Ideas and Experiments
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
A sub-nanometer-thin continuous TiN film: Metal or non-metal?
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
TiN films by Atomic Layer Deposition: Growth and Electrical Characterization down to sub-nm Thickness
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
Nanoscopic Conductive Link: a Sensor, Actuator, or Light Emitter?
Alexey Y. Kovalgin (Invited speaker)Activity: Talk or presentation › Invited talk
Electrical Properties of Room Temperature SiO 2 Deposited by a Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma
I.G. Isai (Speaker), Alexeij Y. Kovalgin (Speaker), J. Holleman (Speaker), P.H. Woerlee (Speaker), Hans Wallinga (Speaker)Activity: Talk or presentation › Oral presentation
On Gas-Phase Depletion During LPCVD of GeSi Films using GeH4/SiH4 and GeH4/Si2H6 Gas Sources.
Alexeij Y. Kovalgin (Speaker), J. Holleman (Speaker)Activity: Talk or presentation › Oral presentation
Antifuses as low-power heating/detecting elements in gas sensors
Alexeij Y. Kovalgin (Speaker)Activity: Talk or presentation › Oral presentation
A Study of Morphology and Texture of LPCVD Germanium-Silicon Films
Alexeij Y. Kovalgin (Speaker)Activity: Talk or presentation › Oral presentation