Alexey Y. Kovalgin

Activities

Activities per year 2001 2015 2016 2017 2018 2019

• 15 Oral presentation
• 14 Invited talk

Activities per year

Search results

• Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

  van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)

  19 Mar 2019

  Activity: Talk or presentation › Oral presentation

• Hotwire-assisted Atomic Layer Deposition: principles and examples

  Kovalgin, A. Y. (Invited speaker)

  3 Sept 2018 → 6 Sept 2018

  Activity: Talk or presentation › Invited talk

• Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

  Banerjee, S. (Speaker), Dutta, S. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor) & Kovalgin, A. Y. (Contributor)

  29 Jul 2018 → 1 Aug 2018

  Activity: Talk or presentation › Oral presentation

• How hot is the wire: optical, electrical and combined methods of filament temperature determination

  Onnink, A. J. (Speaker), Kovalgin, A. Y. (Contributor) & Schmitz, J. (Contributor)

  3 Sept 2018 → 6 Sept 2018

  Activity: Talk or presentation › Oral presentation

• A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

  Kovalgin, A. Y. (Invited speaker), Banerjee, S. (Contributor) & Apaydin, R. O. (Contributor)

  1 Oct 2018

  Activity: Talk or presentation › Invited talk

• Large-scale structures in CVD graphene

  Ataç, D. (Contributor), Sanderink, J. G. M. (Contributor), Kinge, S. (Contributor), Kovalgin, A. Y. (Speaker) & de Jong, M. P. (Contributor)

  11 Jun 2017 → 14 Jun 2017

  Activity: Talk or presentation › Oral presentation

• Pure-metal and metal-nitride films by hotwire-assisted atomic layer deposition

  Kovalgin, A. Y. (Invited speaker)

  22 Nov 2017

  Activity: Talk or presentation › Invited talk

• Electronic and structural properties of epitaxial silicene on h-BN-terminated ZrB2

  Wiggers, F. (Speaker), Fleurence, A. (Contributor), Aoyagi, K. (Contributor), Yonezawa, T. (Contributor), Yamada-Takamura, Y. (Contributor), Feng, H. (Contributor), Zhuang, J. (Contributor), Du, Y. (Contributor), Kovalgin, A. (Contributor) & de Jong, M. (Contributor)

  13 Mar 2017

  Activity: Talk or presentation › Oral presentation

• Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films

  Banerjee, S. (Speaker), Apaydin, R. O. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor), de Jong, M. P. (Contributor) & Kovalgin, A. Y. (Contributor)

  11 Jun 2017 → 17 Jun 2017

  Activity: Talk or presentation › Oral presentation

• Hotwire-assisted Atomic Layer Deposition of Pure Metals and Metal Nitrides

  Kovalgin, A. Y. (Invited speaker)

  22 Sept 2017

  Activity: Talk or presentation › Invited talk

• Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD

  Yang, M. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Speaker)

  11 Jun 2017 → 14 Jun 2017

  Activity: Talk or presentation › Oral presentation

• HOT WIRE ASSISTED ATOMIC LAYER DEPOSITION OF TWO- AND SINGLE-ELEMENT FILMS

  Kovalgin, A. Y. (Invited speaker)

  24 Nov 2017

  Activity: Talk or presentation › Invited talk

• Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia

  Banerjee, S. (Speaker), Aarnink, A. A. I. (Contributor), Kip, G. A. M. (Contributor), Gravesteijn, D. J. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)

  24 Jul 2016 → 27 Jul 2016

  Activity: Talk or presentation › Oral presentation

• Hot-wire assisted ALD: from idea to realization

  Kovalgin, A. Y. (Invited speaker)

  25 Oct 2016

  Activity: Talk or presentation › Invited talk

• High-quality tungsten films by hotwire-assisted CVD/ALD at low temperature

  Kovalgin, A. Y. (Invited speaker)

  6 Sept 2016

  Activity: Talk or presentation › Invited talk

• Thermal, plasma-enhanced and hot-wire assisted ALD of two- and single-element films

  Kovalgin, A. Y. (Invited speaker)

  6 Jul 2016

  Activity: Talk or presentation › Invited talk

• A comparison of tungsten films grown by CVD and hot-wire assisted ALD

  Yang, M. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Speaker)

  28 Jun 2015 → 1 Jul 2015

  Activity: Talk or presentation › Oral presentation

• Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes

  Yang, M. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Contributor)

  13 Jul 2015 → 17 Jul 2015

  Activity: Talk or presentation › Oral presentation

• Radical-Enhanced Deposition and Etching of Thin Films without Plasma: Dream and Reality

  Kovalgin, A. Y. (Invited speaker)

  17 Nov 2015 → 20 Nov 2015

  Activity: Talk or presentation › Invited talk

• PEALD ALN: CONTROLLING GROWTH AND FILM CRYSTALLINITY

  Banerjee, S. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor) & Schmitz, J. (Contributor)

  13 Jul 2015 → 17 Jul 2015

  Activity: Talk or presentation › Oral presentation

• Growth and Properties of Subnanometer Thin Titanium Nitride Films

  Kovalgin, A. Y. (Invited speaker), Van Bui, H. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Contributor)

  10 Mar 2014 → 14 Mar 2014

  Activity: Talk or presentation › Invited talk

• Radical-enhanced Deposition and Etching of Thin Films without the Use of Plasma: Ideas and Experiments

  Kovalgin, A. Y. (Invited speaker)

  29 Oct 2014 → 1 Nov 2014

  Activity: Talk or presentation › Invited talk

• A sub-nanometer-thin continuous TiN film: Metal or non-metal?

  Kovalgin, A. Y. (Invited speaker)

  12 Nov 2013 → 15 Nov 2013

  Activity: Talk or presentation › Invited talk

• TiN films by Atomic Layer Deposition: Growth and Electrical Characterization down to sub-nm Thickness

  Kovalgin, A. Y. (Invited speaker)

  14 Dec 2012

  Activity: Talk or presentation › Invited talk

• Nanoscopic Conductive Link: a Sensor, Actuator, or Light Emitter?

  Kovalgin, A. Y. (Invited speaker)

  16 Jun 2011

  Activity: Talk or presentation › Invited talk

• Electrical Properties of Room Temperature SiO 2 Deposited by a Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

  Isai, I. G. (Speaker), Kovalgin, A. Y. (Speaker), Holleman, J. (Speaker), Woerlee, P. H. (Speaker) & Wallinga, H. (Speaker)

  2002

  Activity: Talk or presentation › Oral presentation

• On Gas-Phase Depletion During LPCVD of GeSi Films using GeH4/SiH4 and GeH4/Si2H6 Gas Sources.

  Kovalgin, A. Y. (Speaker) & Holleman, J. (Speaker)

  20 Oct 2002

  Activity: Talk or presentation › Oral presentation

• Antifuses as low-power heating/detecting elements in gas sensors

  Kovalgin, A. Y. (Speaker)

  10 May 2001

  Activity: Talk or presentation › Oral presentation

• A Study of Morphology and Texture of LPCVD Germanium-Silicon Films

  Kovalgin, A. Y. (Speaker)

  26 Aug 2001

  Activity: Talk or presentation › Oral presentation