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Activities 2001 2019

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation

Hotwire-assisted Atomic Layer Deposition: principles and examples

Alexey Y. Kovalgin (Invited speaker)
3 Sep 20186 Sep 2018

Activity: Talk or presentationInvited talk

Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)
29 Jul 20181 Aug 2018

Activity: Talk or presentationOral presentation

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)
1 Oct 2018

Activity: Talk or presentationInvited talk

How hot is the wire: optical, electrical and combined methods of filament temperature determination

Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)
3 Sep 20186 Sep 2018

Activity: Talk or presentationOral presentation

Large-scale structures in CVD graphene

Derya Ataç (Contributor), Johannes G.M. Sanderink (Contributor), Sachin Kinge (Contributor), Alexey Y. Kovalgin (Speaker), Michel P. de Jong (Contributor)
11 Jun 201714 Jun 2017

Activity: Talk or presentationOral presentation

Pure-metal and metal-nitride films by hotwire-assisted atomic layer deposition

Alexey Y. Kovalgin (Invited speaker)
22 Nov 2017

Activity: Talk or presentationInvited talk

HOT WIRE ASSISTED ATOMIC LAYER DEPOSITION OF TWO- AND SINGLE-ELEMENT FILMS

Alexey Y. Kovalgin (Invited speaker)
24 Nov 2017

Activity: Talk or presentationInvited talk

Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films

Sourish Banerjee (Speaker), Ramazan Oguzhan Apaydin (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Machiel Pieter de Jong (Contributor), Alexey Y. Kovalgin (Contributor)
11 Jun 201717 Jun 2017

Activity: Talk or presentationOral presentation

Hotwire-assisted Atomic Layer Deposition of Pure Metals and Metal Nitrides

Alexey Y. Kovalgin (Invited speaker)
22 Sep 2017

Activity: Talk or presentationInvited talk

Electronic and structural properties of epitaxial silicene on h-BN-terminated ZrB2

Frank Wiggers (Speaker), Antoine Fleurence (Contributor), Kohei Aoyagi (Contributor), Takahiro Yonezawa (Contributor), Yukiko Yamada-Takamura (Contributor), Haifeng Feng (Contributor), Jincheng Zhuang (Contributor), Yi Du (Contributor), Alexey Kovalgin (Contributor), Michel de Jong (Contributor)
13 Mar 2017

Activity: Talk or presentationOral presentation

Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD

Mengdi Yang (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Speaker)
11 Jun 201714 Jun 2017

Activity: Talk or presentationOral presentation

Hot-wire assisted ALD: from idea to realization

Alexey Y. Kovalgin (Invited speaker)
25 Oct 2016

Activity: Talk or presentationInvited talk

Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia

Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Gerhardus A.M. Kip (Contributor), Dirk J Gravesteijn (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
24 Jul 201627 Jul 2016

Activity: Talk or presentationOral presentation

High-quality tungsten films by hotwire-assisted CVD/ALD at low temperature

Alexey Y. Kovalgin (Invited speaker)
6 Sep 2016

Activity: Talk or presentationInvited talk

Thermal, plasma-enhanced and hot-wire assisted ALD of two- and single-element films

Alexey Y. Kovalgin (Invited speaker)
6 Jul 2016

Activity: Talk or presentationInvited talk

PEALD ALN: CONTROLLING GROWTH AND FILM CRYSTALLINITY

Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)
13 Jul 201517 Jul 2015

Activity: Talk or presentationOral presentation

Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes

Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)
13 Jul 201517 Jul 2015

Activity: Talk or presentationOral presentation

A comparison of tungsten films grown by CVD and hot-wire assisted ALD

Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Speaker)
28 Jun 20151 Jul 2015

Activity: Talk or presentationOral presentation

Radical-Enhanced Deposition and Etching of Thin Films without Plasma: Dream and Reality

Alexey Y. Kovalgin (Invited speaker)
17 Nov 201520 Nov 2015

Activity: Talk or presentationInvited talk

Growth and Properties of Subnanometer Thin Titanium Nitride Films

Alexey Y. Kovalgin (Invited speaker), Hao Van Bui (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)
10 Mar 201414 Mar 2014

Activity: Talk or presentationInvited talk

Radical-enhanced Deposition and Etching of Thin Films without the Use of Plasma: Ideas and Experiments

Alexey Y. Kovalgin (Invited speaker)
29 Oct 20141 Nov 2014

Activity: Talk or presentationInvited talk

A sub-nanometer-thin continuous TiN film: Metal or non-metal?

Alexey Y. Kovalgin (Invited speaker)
12 Nov 201315 Nov 2013

Activity: Talk or presentationInvited talk

Nanoscopic Conductive Link: a Sensor, Actuator, or Light Emitter?

Alexey Y. Kovalgin (Invited speaker)
16 Jun 2011

Activity: Talk or presentationInvited talk

Electrical Properties of Room Temperature SiO 2 Deposited by a Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

I.G. Isai (Speaker), Alexeij Y. Kovalgin (Speaker), J. Holleman (Speaker), P.H. Woerlee (Speaker), Hans Wallinga (Speaker)
2002

Activity: Talk or presentationOral presentation

On Gas-Phase Depletion During LPCVD of GeSi Films using GeH4/SiH4 and GeH4/Si2H6 Gas Sources.

Alexeij Y. Kovalgin (Speaker), J. Holleman (Speaker)
20 Oct 2002

Activity: Talk or presentationOral presentation

Antifuses as low-power heating/detecting elements in gas sensors

Alexeij Y. Kovalgin (Speaker)
10 May 2001

Activity: Talk or presentationOral presentation

A Study of Morphology and Texture of LPCVD Germanium-Silicon Films

Alexeij Y. Kovalgin (Speaker)
26 Aug 2001

Activity: Talk or presentationOral presentation