Activities per year
Activities
Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)19 Mar 2019
Activity: Talk or presentation › Oral presentation
Hotwire-assisted Atomic Layer Deposition: principles and examples
Alexey Y. Kovalgin (Invited speaker)3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Invited talk
How hot is the wire: optical, electrical and combined methods of filament temperature determination
Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)3 Sep 2018 → 6 Sep 2018
Activity: Talk or presentation › Oral presentation
A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)1 Oct 2018
Activity: Talk or presentation › Invited talk
Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)29 Jul 2018 → 1 Aug 2018
Activity: Talk or presentation › Oral presentation
Electronic and structural properties of epitaxial silicene on h-BN-terminated ZrB2
Frank Wiggers (Speaker), Antoine Fleurence (Contributor), Kohei Aoyagi (Contributor), Takahiro Yonezawa (Contributor), Yukiko Yamada-Takamura (Contributor), Haifeng Feng (Contributor), Jincheng Zhuang (Contributor), Yi Du (Contributor), Alexey Kovalgin (Contributor), Michel de Jong (Contributor)13 Mar 2017
Activity: Talk or presentation › Oral presentation
HOT WIRE ASSISTED ATOMIC LAYER DEPOSITION OF TWO- AND SINGLE-ELEMENT FILMS
Alexey Y. Kovalgin (Invited speaker)24 Nov 2017
Activity: Talk or presentation › Invited talk
Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films
Sourish Banerjee (Speaker), Ramazan Oguzhan Apaydin (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Machiel Pieter de Jong (Contributor), Alexey Y. Kovalgin (Contributor)11 Jun 2017 → 17 Jun 2017
Activity: Talk or presentation › Oral presentation
Large-scale structures in CVD graphene
Derya Ataç (Contributor), Johannes G.M. Sanderink (Contributor), Sachin Kinge (Contributor), Alexey Y. Kovalgin (Speaker), Michel P. de Jong (Contributor)11 Jun 2017 → 14 Jun 2017
Activity: Talk or presentation › Oral presentation
Hotwire-assisted Atomic Layer Deposition of Pure Metals and Metal Nitrides
Alexey Y. Kovalgin (Invited speaker)22 Sep 2017
Activity: Talk or presentation › Invited talk
Pure-metal and metal-nitride films by hotwire-assisted atomic layer deposition
Alexey Y. Kovalgin (Invited speaker)22 Nov 2017
Activity: Talk or presentation › Invited talk
Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD
Mengdi Yang (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Speaker)11 Jun 2017 → 14 Jun 2017
Activity: Talk or presentation › Oral presentation
Hot-wire assisted ALD: from idea to realization
Alexey Y. Kovalgin (Invited speaker)25 Oct 2016
Activity: Talk or presentation › Invited talk
High-quality tungsten films by hotwire-assisted CVD/ALD at low temperature
Alexey Y. Kovalgin (Invited speaker)6 Sep 2016
Activity: Talk or presentation › Invited talk
Thermal, plasma-enhanced and hot-wire assisted ALD of two- and single-element films
Alexey Y. Kovalgin (Invited speaker)6 Jul 2016
Activity: Talk or presentation › Invited talk
Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia
Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Gerhardus A.M. Kip (Contributor), Dirk J Gravesteijn (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)24 Jul 2016 → 27 Jul 2016
Activity: Talk or presentation › Oral presentation
Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes
Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)13 Jul 2015 → 17 Jul 2015
Activity: Talk or presentation › Oral presentation
Radical-Enhanced Deposition and Etching of Thin Films without Plasma: Dream and Reality
Alexey Y. Kovalgin (Invited speaker)17 Nov 2015 → 20 Nov 2015
Activity: Talk or presentation › Invited talk
PEALD ALN: CONTROLLING GROWTH AND FILM CRYSTALLINITY
Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)13 Jul 2015 → 17 Jul 2015
Activity: Talk or presentation › Oral presentation
A comparison of tungsten films grown by CVD and hot-wire assisted ALD
Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Speaker)28 Jun 2015 → 1 Jul 2015
Activity: Talk or presentation › Oral presentation
Radical-enhanced Deposition and Etching of Thin Films without the Use of Plasma: Ideas and Experiments
Alexey Y. Kovalgin (Invited speaker)29 Oct 2014 → 1 Nov 2014
Activity: Talk or presentation › Invited talk
Growth and Properties of Subnanometer Thin Titanium Nitride Films
Alexey Y. Kovalgin (Invited speaker), Hao Van Bui (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)10 Mar 2014 → 14 Mar 2014
Activity: Talk or presentation › Invited talk
A sub-nanometer-thin continuous TiN film: Metal or non-metal?
Alexey Y. Kovalgin (Invited speaker)12 Nov 2013 → 15 Nov 2013
Activity: Talk or presentation › Invited talk
TiN films by Atomic Layer Deposition: Growth and Electrical Characterization down to sub-nm Thickness
Alexey Y. Kovalgin (Invited speaker)14 Dec 2012
Activity: Talk or presentation › Invited talk
Nanoscopic Conductive Link: a Sensor, Actuator, or Light Emitter?
Alexey Y. Kovalgin (Invited speaker)16 Jun 2011
Activity: Talk or presentation › Invited talk
Electrical Properties of Room Temperature SiO 2 Deposited by a Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma
I.G. Isai (Speaker), Alexeij Y. Kovalgin (Speaker), J. Holleman (Speaker), P.H. Woerlee (Speaker), Hans Wallinga (Speaker)2002
Activity: Talk or presentation › Oral presentation
On Gas-Phase Depletion During LPCVD of GeSi Films using GeH4/SiH4 and GeH4/Si2H6 Gas Sources.
Alexeij Y. Kovalgin (Speaker), J. Holleman (Speaker)20 Oct 2002
Activity: Talk or presentation › Oral presentation
Antifuses as low-power heating/detecting elements in gas sensors
Alexeij Y. Kovalgin (Speaker)10 May 2001
Activity: Talk or presentation › Oral presentation
A Study of Morphology and Texture of LPCVD Germanium-Silicon Films
Alexeij Y. Kovalgin (Speaker)26 Aug 2001
Activity: Talk or presentation › Oral presentation