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Activities 2001 2019

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Invited talk

Hotwire-assisted Atomic Layer Deposition: principles and examples

Alexey Y. Kovalgin (Invited speaker)
3 Sep 20186 Sep 2018

Activity: Talk or presentationInvited talk

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Alexey Y. Kovalgin (Invited speaker), Sourish Banerjee (Contributor), Ramazan Oguzhan Apaydin (Contributor)
1 Oct 2018

Activity: Talk or presentationInvited talk

Pure-metal and metal-nitride films by hotwire-assisted atomic layer deposition

Alexey Y. Kovalgin (Invited speaker)
22 Nov 2017

Activity: Talk or presentationInvited talk

HOT WIRE ASSISTED ATOMIC LAYER DEPOSITION OF TWO- AND SINGLE-ELEMENT FILMS

Alexey Y. Kovalgin (Invited speaker)
24 Nov 2017

Activity: Talk or presentationInvited talk

Hotwire-assisted Atomic Layer Deposition of Pure Metals and Metal Nitrides

Alexey Y. Kovalgin (Invited speaker)
22 Sep 2017

Activity: Talk or presentationInvited talk

Hot-wire assisted ALD: from idea to realization

Alexey Y. Kovalgin (Invited speaker)
25 Oct 2016

Activity: Talk or presentationInvited talk

High-quality tungsten films by hotwire-assisted CVD/ALD at low temperature

Alexey Y. Kovalgin (Invited speaker)
6 Sep 2016

Activity: Talk or presentationInvited talk

Thermal, plasma-enhanced and hot-wire assisted ALD of two- and single-element films

Alexey Y. Kovalgin (Invited speaker)
6 Jul 2016

Activity: Talk or presentationInvited talk

Radical-Enhanced Deposition and Etching of Thin Films without Plasma: Dream and Reality

Alexey Y. Kovalgin (Invited speaker)
17 Nov 201520 Nov 2015

Activity: Talk or presentationInvited talk

Growth and Properties of Subnanometer Thin Titanium Nitride Films

Alexey Y. Kovalgin (Invited speaker), Hao Van Bui (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)
10 Mar 201414 Mar 2014

Activity: Talk or presentationInvited talk

Radical-enhanced Deposition and Etching of Thin Films without the Use of Plasma: Ideas and Experiments

Alexey Y. Kovalgin (Invited speaker)
29 Oct 20141 Nov 2014

Activity: Talk or presentationInvited talk

A sub-nanometer-thin continuous TiN film: Metal or non-metal?

Alexey Y. Kovalgin (Invited speaker)
12 Nov 201315 Nov 2013

Activity: Talk or presentationInvited talk

Nanoscopic Conductive Link: a Sensor, Actuator, or Light Emitter?

Alexey Y. Kovalgin (Invited speaker)
16 Jun 2011

Activity: Talk or presentationInvited talk