Activities per year
- 14 results
Search results
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Hotwire-assisted Atomic Layer Deposition: principles and examples
Kovalgin, A. Y. (Invited speaker)
3 Sept 2018 → 6 Sept 2018Activity: Talk or presentation › Invited talk
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A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes
Kovalgin, A. Y. (Invited speaker), Banerjee, S. (Contributor) & Apaydin, R. O. (Contributor)
1 Oct 2018Activity: Talk or presentation › Invited talk
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Pure-metal and metal-nitride films by hotwire-assisted atomic layer deposition
Kovalgin, A. Y. (Invited speaker)
22 Nov 2017Activity: Talk or presentation › Invited talk
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Hotwire-assisted Atomic Layer Deposition of Pure Metals and Metal Nitrides
Kovalgin, A. Y. (Invited speaker)
22 Sept 2017Activity: Talk or presentation › Invited talk
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HOT WIRE ASSISTED ATOMIC LAYER DEPOSITION OF TWO- AND SINGLE-ELEMENT FILMS
Kovalgin, A. Y. (Invited speaker)
24 Nov 2017Activity: Talk or presentation › Invited talk
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Hot-wire assisted ALD: from idea to realization
Kovalgin, A. Y. (Invited speaker)
25 Oct 2016Activity: Talk or presentation › Invited talk
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High-quality tungsten films by hotwire-assisted CVD/ALD at low temperature
Kovalgin, A. Y. (Invited speaker)
6 Sept 2016Activity: Talk or presentation › Invited talk
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Thermal, plasma-enhanced and hot-wire assisted ALD of two- and single-element films
Kovalgin, A. Y. (Invited speaker)
6 Jul 2016Activity: Talk or presentation › Invited talk
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Radical-Enhanced Deposition and Etching of Thin Films without Plasma: Dream and Reality
Kovalgin, A. Y. (Invited speaker)
17 Nov 2015 → 20 Nov 2015Activity: Talk or presentation › Invited talk
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Growth and Properties of Subnanometer Thin Titanium Nitride Films
Kovalgin, A. Y. (Invited speaker), Van Bui, H. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Contributor)
10 Mar 2014 → 14 Mar 2014Activity: Talk or presentation › Invited talk
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Radical-enhanced Deposition and Etching of Thin Films without the Use of Plasma: Ideas and Experiments
Kovalgin, A. Y. (Invited speaker)
29 Oct 2014 → 1 Nov 2014Activity: Talk or presentation › Invited talk
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A sub-nanometer-thin continuous TiN film: Metal or non-metal?
Kovalgin, A. Y. (Invited speaker)
12 Nov 2013 → 15 Nov 2013Activity: Talk or presentation › Invited talk
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TiN films by Atomic Layer Deposition: Growth and Electrical Characterization down to sub-nm Thickness
Kovalgin, A. Y. (Invited speaker)
14 Dec 2012Activity: Talk or presentation › Invited talk
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Nanoscopic Conductive Link: a Sensor, Actuator, or Light Emitter?
Kovalgin, A. Y. (Invited speaker)
16 Jun 2011Activity: Talk or presentation › Invited talk