Alexey Y. Kovalgin

Activities

Activities per year 2001 2015 2016 2017 2018 2019

• 15 Oral presentation
• 14 Invited talk

Activities per year

Search results

• Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

  van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)

  19 Mar 2019

  Activity: Talk or presentation › Oral presentation

• Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

  Banerjee, S. (Speaker), Dutta, S. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor) & Kovalgin, A. Y. (Contributor)

  29 Jul 2018 → 1 Aug 2018

  Activity: Talk or presentation › Oral presentation

• How hot is the wire: optical, electrical and combined methods of filament temperature determination

  Onnink, A. J. (Speaker), Kovalgin, A. Y. (Contributor) & Schmitz, J. (Contributor)

  3 Sept 2018 → 6 Sept 2018

  Activity: Talk or presentation › Oral presentation

• Large-scale structures in CVD graphene

  Ataç, D. (Contributor), Sanderink, J. G. M. (Contributor), Kinge, S. (Contributor), Kovalgin, A. Y. (Speaker) & de Jong, M. P. (Contributor)

  11 Jun 2017 → 14 Jun 2017

  Activity: Talk or presentation › Oral presentation

• Electronic and structural properties of epitaxial silicene on h-BN-terminated ZrB2

  Wiggers, F. (Speaker), Fleurence, A. (Contributor), Aoyagi, K. (Contributor), Yonezawa, T. (Contributor), Yamada-Takamura, Y. (Contributor), Feng, H. (Contributor), Zhuang, J. (Contributor), Du, Y. (Contributor), Kovalgin, A. (Contributor) & de Jong, M. (Contributor)

  13 Mar 2017

  Activity: Talk or presentation › Oral presentation

• Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films

  Banerjee, S. (Speaker), Apaydin, R. O. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor), de Jong, M. P. (Contributor) & Kovalgin, A. Y. (Contributor)

  11 Jun 2017 → 17 Jun 2017

  Activity: Talk or presentation › Oral presentation

• Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD

  Yang, M. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Speaker)

  11 Jun 2017 → 14 Jun 2017

  Activity: Talk or presentation › Oral presentation

• Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia

  Banerjee, S. (Speaker), Aarnink, A. A. I. (Contributor), Kip, G. A. M. (Contributor), Gravesteijn, D. J. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)

  24 Jul 2016 → 27 Jul 2016

  Activity: Talk or presentation › Oral presentation

• A comparison of tungsten films grown by CVD and hot-wire assisted ALD

  Yang, M. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Speaker)

  28 Jun 2015 → 1 Jul 2015

  Activity: Talk or presentation › Oral presentation

• Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes

  Yang, M. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Contributor)

  13 Jul 2015 → 17 Jul 2015

  Activity: Talk or presentation › Oral presentation

• PEALD ALN: CONTROLLING GROWTH AND FILM CRYSTALLINITY

  Banerjee, S. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor) & Schmitz, J. (Contributor)

  13 Jul 2015 → 17 Jul 2015

  Activity: Talk or presentation › Oral presentation

• Electrical Properties of Room Temperature SiO 2 Deposited by a Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

  Isai, I. G. (Speaker), Kovalgin, A. Y. (Speaker), Holleman, J. (Speaker), Woerlee, P. H. (Speaker) & Wallinga, H. (Speaker)

  2002

  Activity: Talk or presentation › Oral presentation

• On Gas-Phase Depletion During LPCVD of GeSi Films using GeH4/SiH4 and GeH4/Si2H6 Gas Sources.

  Kovalgin, A. Y. (Speaker) & Holleman, J. (Speaker)

  20 Oct 2002

  Activity: Talk or presentation › Oral presentation

• Antifuses as low-power heating/detecting elements in gas sensors

  Kovalgin, A. Y. (Speaker)

  10 May 2001

  Activity: Talk or presentation › Oral presentation

• A Study of Morphology and Texture of LPCVD Germanium-Silicon Films

  Kovalgin, A. Y. (Speaker)

  26 Aug 2001

  Activity: Talk or presentation › Oral presentation