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Fingerprint Dive into the research topics where Alexey Y. Kovalgin is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Physics & Astronomy

Chemistry and Materials

atomic layer epitaxy
wire
tungsten
gallium nitrides
gallium selenides
ammonia
nitrides
crystallization
titanium nitrides
gallium
boron nitrides
silicon
carbon
hydrogen
amorphous silicon
oxynitrides

Engineering

CMOS
electrical resistivity
solar cells
cold walls
fabrication
contact resistance
heterojunctions
charge carriers
diodes
x rays

General

adducts
chips
ellipsometry
vapor deposition
integrated optics
surface reactions
electronics
high aspect ratio
filaments
thin films
continuity
activation
pulses
reactors
transmission lines
isolation
leakage

Physics

temperature
electroluminescence
optics
diffraction
refractivity

Aerospace Sciences

photoelectron spectroscopy

Geosciences

topography

Engineering & Materials Science

Atomic layer deposition
Wire
Tungsten
Contact resistance
Temperature
Spectroscopic ellipsometry
Hydrogen
Solar cells
Chemical vapor deposition
Sheet resistance
Boron nitride
Oxygen
Gallium nitride
Silicon
Integrated optics
Optical constants
Tungsten deposits
Nitrogen
Heat radiation
Metals
Refractive index
Atoms
Thin films
Substrates
Crystals
Fluorine
Electronic properties
Aspect ratio
Fabrication
Electric lines
Carbon
Transistors
Film growth
Agglomeration
Doping (additives)
Pyrometry
Nanoparticles
Acoustic impedance
Ammonia
Gallium
Ligands
Photoelectron spectroscopy
Composite materials

Chemical Compounds

Atomic layer deposition
Tungsten
Wire
Hydrogen
Metals
Contact resistance
Silicon
Solar cells
Chemical vapor deposition
Temperature
Oxygen
Substrates
Integrated optics
Optical constants
Tungsten deposits
Fluorine
Carbon
Heat radiation
Photoelectron spectroscopy
Refractive index
Atoms
Nitrogen
Encapsulation
Electronic properties
Spectroscopic ellipsometry
Aspect ratio
Fabrication
Film growth
Agglomeration
Doping (additives)
Thin films
Crystals
Pyrometry
Nanoparticles
Gallium
Acoustic impedance
Composite materials
Ammonia
Oxidation
Chemisorption