If you made any changes in Pure these will be visible here soon.

Research Output 1998 2019

2019
24 Downloads (Pure)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Atomic layer deposition
Sheet resistance
Contact resistance
Tungsten
Electric lines
70 Downloads (Pure)

From radical-enhanced to pure thermal ALD of gallium and aluminium nitrides

Banerjee, S., 11 Sep 2019, Enschede: University of Twente. 201 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
gallium nitrides
aluminum nitrides
atomic layer epitaxy
silicon
microelectronics
13 Downloads (Pure)

How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Heat radiation
filaments
wire
Wire
optics
24 Downloads (Pure)

Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

Banerjee, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 6 Sep 2019, In : Journal of physical chemistry C. 123, 37, p. 23214-23225 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Gallium nitride
Atomic layer deposition
gallium nitrides
atomic layer epitaxy
adducts
3 Citations (Scopus)
2 Downloads (Pure)

Van der Waals integration of silicene and hexagonal boron nitride

Wiggers, F. B., Fleurence, A., Aoyagi, K., Yonezawa, T., Yamada-Takamura, Y., Feng, H., Zhuang, J., Du, Y., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2019, In : 2D Materials. 6, 3, 035001.

Research output: Contribution to journalArticleAcademicpeer-review

Boron nitride
boron nitrides
Electronic properties
Silicon
electronics
2018
2 Citations (Scopus)

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Banerjee, S. & Kovalgin, A. Y., 30 Sep 2018, p. 21-29.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
atomic layer epitaxy
adducts
nitrides
surface reactions
versatility
2 Citations (Scopus)
121 Downloads (Pure)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of applied physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
electroluminescence
heterojunctions
charge carriers
diodes
traps
2 Citations (Scopus)

Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index

Banerjee, S., Onnink, A. J., Dutta, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 27 Dec 2018, In : Journal of physical chemistry C. 122, 51, p. 29567-29576 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Refractive index
Carbon
refractivity
composite materials
carbon
7 Citations (Scopus)

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

Grillo, F., Van Bui, H., La Zara, D., Aarnink, A. A. I., Kovalgin, A. Y., Kooyman, P., Kreutzer, M. T. & van Ommen, J. R., 7 Jun 2018, In : Small. 14, 23, 1800765.

Research output: Contribution to journalArticleAcademicpeer-review

Metal Nanoparticles
Atomic layer deposition
Nanoparticles
Agglomeration
Metals
123 Downloads (Pure)

Hot-wire assisted atomic layer deposition of Tungsten films

Yang, M., 19 Jan 2018, Enschede: University of Twente. 135 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
atomic layer epitaxy
tungsten
wire
theses
large scale integration
1 Citation (Scopus)
26 Downloads (Pure)

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 1 Mar 2018, In : Thin solid films. 649, p. 17-23 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
tungsten
wire
3 Citations (Scopus)
62 Downloads (Pure)

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 31 Jan 2018, In : Thin solid films. 646, p. 199-208 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
high aspect ratio
Aspect ratio

Method of forming a device structure using selective deposition of gallium nitride and system for same

Banerjee, S., Aarnink, A. A. I. & Kovalgin, A. Y., 14 Dec 2018, (Submitted) Patent No. Application Number: 62779684

Research output: PatentProfessional

gallium
method
2 Downloads (Pure)

Selective deposition of Tungsten

Kovalgin, A. Y., Yang, M., Aarnink, A. A. I. & Wolters, R. A. M., 25 Jan 2018, Patent No. US 2018/0025939 A1, Priority date 6 Jun 2017, Priority No. 15/615,489

Research output: PatentProfessional

Tungsten
Hydrogen
Substrates
Metals
Wire
1 Citation (Scopus)
1 Downloads (Pure)

Selenidation of epitaxial silicene on ZrB2

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 15 Jan 2018, In : Applied surface science. 428, p. 793-797 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2017
2 Citations (Scopus)
1 Downloads (Pure)
Tungsten
Fluorine
Atomic layer deposition
Hydrogen
Tungsten deposits

Electrical test structures for verifying continuity of ultra-thin insulating and conducting films

Banerjee, S., van der Velde, F. J., Yang, M., Schmitz, J. & Kovalgin, A. Y., 28 Mar 2017, Electrical test structures for verifying continuity of ultra-thin insulating and conducting films. New York: IEEE, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

continuity
conduction
aluminum nitrides
closures
ellipsometry
2 Citations (Scopus)
2 Downloads (Pure)

Encapsulation of epitaxial silicene on ZrB2 with NaCl

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 8 Aug 2017, In : Journal of chemical physics. p. 1-6 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Encapsulation
Photoelectron spectroscopy
Chemisorption
Synchrotrons
chemisorption
9 Citations (Scopus)
1 Downloads (Pure)

Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

Kovalgin, A. Y., Yang, M., Banerjee, S., Apaydin, R. O., Aarnink, A. A. I., Kinge, S. & Wolters, R. A. M., 8 May 2017, In : Advanced materials interfaces. 4, 18, p. 1-11 11 p., 1700058.

Research output: Contribution to journalArticleAcademicpeer-review

Spectroscopic ellipsometry
Atomic layer deposition
Wire
Tungsten
Hydrogen

Surface science studies of epitaxial silicene

Wiggers, F. B., 18 Oct 2017, Enschede: University of Twente. 114 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

2016
1 Citation (Scopus)

A nitride-based epitaxial surface layer formed by ammonia treatment of silicene-terminated ZrB2

Wiggers, F. B., Van Hao, B., Friedlein, R., Yamada-Takamura, Y., Schmitz, J., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2016, In : Journal of chemical physics. 144, 134703, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
6 Downloads (Pure)
Open Access
File
cold walls
Tungsten
Atomic layer deposition
atomic layer epitaxy
Chemical vapor deposition
103 Downloads (Pure)
Open Access
File
gallium nitrides
gallium
ammonia
pulses
carbon
2015
4 Citations (Scopus)
3 Downloads (Pure)

Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Integrated optics
integrated optics
CMOS
oxynitrides
Fabrication
8 Citations (Scopus)

Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

29 Citations (Scopus)
1 Downloads (Pure)
7 Citations (Scopus)

On the feasibility of silicene encapsulation by AlN deposited using an atomic layer deposition process

Van Hao, B., Wiggers, F. B., Friedlein, R., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 9 Feb 2015, In : Journal of chemical physics. 142, p. 064712 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2014
1 Citation (Scopus)

An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer

Van Hao, B., Wiggers, F. B., de Jong, M. P. & Kovalgin, A. Y., 24 Mar 2014, International Conference on Microelectronic Test Structures, ICMTS 2014. USA: IEEE Circuits & Systems Society, p. 53-57 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

15 Downloads (Pure)

Growth and properties of subnanometer thin titanium nitride films

Kovalgin, A. Y., Van Hao, B., Schmitz, J. & Wolters, R. A. M., 10 Mar 2014, p. 1.

Research output: Contribution to conferenceAbstractOther research output

File
titanium nitrides
atomic layer epitaxy
metal nitrides
microelectronics
encounters

Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AlN films

Van Hao, B., Wiggers, F. B., Aarnink, A. A. I., Nguyen, D. M., de Jong, M. P., Kovalgin, A. Y. & Gupta, A. Y., 18 Jun 2014, Proceeding of the 14th International Conference on Atomic Layer Deposition. Japan: ALD 2014, p. 113-113 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

18 Citations (Scopus)

Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules

Friedlein, R., Van Hao, B., Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 27 May 2014, In : Journal of chemical physics. 140, p. 204705:1-204705:4 4 p., 204705.

Research output: Contribution to journalArticleAcademicpeer-review

Materials and integration schemes for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., 7 Apr 2014, 15th International Conference on Ultimate Integration on Silicon, ULIS 2014. USA: IEEE Circuits & Systems Society, p. 153-156 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

19 Citations (Scopus)

Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films

Van Bui, H., Nguyen, M. D., Wiggers, F. B., Aarnink, A. A. I., de Jong, M. P. & Kovalgin, A. Y., 20 Feb 2014, In : ECS journal of solid state science and technology. 3, 4, p. P101-P106 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Optical constants
Atomic layer deposition
Thin films
Temperature
Spectroscopic ellipsometry
2013
908 Downloads (Pure)

Atomic layer deposition of TiN films : growth and electrical behavior down to sub-nanometer scale

Van Hao, B., 16 Jan 2013, Enschede: University of Twente. 124 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
9 Citations (Scopus)
1 Downloads (Pure)

Conduction and electric field effect in ultra-thin TiN films

Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Hot-Wire generated atomic hydrogen and its impact on thermal ALD in TiCl4/NH3 System

Van Hao, B., Kovalgin, A. Y., Aarnink, A. A. I. & Wolters, R. A. M., 8 Feb 2013, In : ECS journal of solid state science and technology. 2, 4, p. 149-155 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Downloads (Pure)

In situ spectroscopic ellipsometry for studying the growth and optical constants of ALD AlN films

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y. & de Jong, M. P., 1 Nov 2013, In : NEVAC blad. 51, 3, p. 24-31 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics

Rangarajan, B., Kovalgin, A. Y., Worhoff, K. & Schmitz, J., 13 Mar 2013, In : Optics letters. 38, 6, p. 941-943 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

58 Downloads (Pure)

Materials for monolithic integration of optical functions on CMOS

Rangarajan, B., 8 Nov 2013, Enschede: University of Twente. 92 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
32 Citations (Scopus)

On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 15 Mar 2013, SURFINT-SREN III. Amsterdam: Elsevier, p. 45-49 5 p. (Applied Surface Science; vol. 269).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

16 Downloads (Pure)

Semiconductor processing apparatus with compact free radical source

Kovalgin, A. Y. & Aarnink, A. A. I., 19 Dec 2013, Patent No. US2013337653 (A1), Priority date 14 Jun 2013

Research output: PatentProfessional

File
2012
2 Citations (Scopus)

An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance

Kovalgin, A. Y., Tiggelman, N. & Wolters, R. A. M., 1 Feb 2012, In : IEEE transactions on electron devices. 59, 2, p. 426-432 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Contact resistance
Metals
Sheet resistance
Resistors
Analytical models
1 Citation (Scopus)
11 Citations (Scopus)
1 Downloads (Pure)

Growth of sub-nanometer thin continuous TiN films by atomic layer deposition

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 3 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 285-290 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser

Rangarajan, B., Kovalgin, A. Y., Oesterlin, P., de Kloe, R., Brunets, I. & Schmitz, J., 1 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 263-268 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
2 Downloads (Pure)

Micro- and nano-link ultra-low power heaters for sensors

Groenland, A. W., Vereshchagina, E., Kovalgin, A. Y., Wolters, R. A. M., Gardeniers, J. G. E. & Schmitz, J., 17 Sep 2012, European Solid-State Device Research Conference, ESSDERC 2012. USA: IEEE Solid-State Circuits Society, p. 169-172 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Nanoscale carrier injectors for high luminescence Si-based LEDs

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 27 Apr 2012, In : Solid-state electronics. 74, Special Issue, Selected Papers from the ESSDERC 2011 Conference, p. 43-48 6 p.

Research output: Contribution to journalArticleAcademicpeer-review