Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

2020

Conduction and electric field effect in ultra-thin tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., May 2020, In : IEEE Transactions on Semiconductor Manufacturing. 33, 2, p. 202-209 8 p., 9016070.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
13 Downloads (Pure)
2019

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
1 Citation (Scopus)
48 Downloads (Pure)

How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
30 Downloads (Pure)

Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

Banerjee, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 6 Sep 2019, In : Journal of physical chemistry C. 123, 37, p. 23214-23225 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
112 Downloads (Pure)

Van der Waals integration of silicene and hexagonal boron nitride

Wiggers, F. B., Fleurence, A., Aoyagi, K., Yonezawa, T., Yamada-Takamura, Y., Feng, H., Zhuang, J., Du, Y., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2019, In : 2D Materials. 6, 3, 035001.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
10 Downloads (Pure)
2018

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Banerjee, S. & Kovalgin, A. Y., 30 Sep 2018, p. 21-29.

Research output: Contribution to conferencePaper

Open Access
2 Citations (Scopus)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of Applied Physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
180 Downloads (Pure)

Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index

Banerjee, S., Onnink, A. J., Dutta, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 27 Dec 2018, In : Journal of physical chemistry C. 122, 51, p. 29567-29576 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
3 Citations (Scopus)

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

Grillo, F., Van Bui, H., La Zara, D., Aarnink, A. A. I., Kovalgin, A. Y., Kooyman, P., Kreutzer, M. T. & van Ommen, J. R., 7 Jun 2018, In : Small. 14, 23, 1800765.

Research output: Contribution to journalArticleAcademicpeer-review

18 Citations (Scopus)

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 1 Mar 2018, In : Thin solid films. 649, p. 17-23 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
62 Downloads (Pure)

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 31 Jan 2018, In : Thin solid films. 646, p. 199-208 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
5 Citations (Scopus)
235 Downloads (Pure)

Method of forming a device structure using selective deposition of gallium nitride and system for same

Banerjee, S., Aarnink, A. A. I. & Kovalgin, A. Y., 14 Dec 2018, (Submitted) Patent No. Application Number: 62779684

Research output: Patent

Selective deposition of Tungsten

Kovalgin, A. Y., Yang, M., Aarnink, A. A. I. & Wolters, R. A. M., 25 Jan 2018, Patent No. US 2018/0025939 A1, Priority date 6 Jun 2017, Priority No. 15/615,489

Research output: Patent

2 Downloads (Pure)

Selenidation of epitaxial silicene on ZrB2

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 15 Jan 2018, In : Applied surface science. 428, p. 793-797 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)
2017
3 Citations (Scopus)
1 Downloads (Pure)

Electrical test structures for verifying continuity of ultra-thin insulating and conducting films

Banerjee, S., van der Velde, F. J., Yang, M., Schmitz, J. & Kovalgin, A. Y., 28 Mar 2017, Electrical test structures for verifying continuity of ultra-thin insulating and conducting films. New York: IEEE, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Encapsulation of epitaxial silicene on ZrB2 with NaCl

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 8 Aug 2017, In : Journal of chemical physics. p. 1-6 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
2 Downloads (Pure)

Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

Kovalgin, A. Y., Yang, M., Banerjee, S., Apaydin, R. O., Aarnink, A. A. I., Kinge, S. & Wolters, R. A. M., 8 May 2017, In : Advanced materials interfaces. 4, 18, p. 1-11 11 p., 1700058.

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)
1 Downloads (Pure)
2016

A nitride-based epitaxial surface layer formed by ammonia treatment of silicene-terminated ZrB2

Wiggers, F. B., Van Hao, B., Friedlein, R., Yamada-Takamura, Y., Schmitz, J., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2016, In : Journal of chemical physics. 144, 134703, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
Open Access
File
8 Citations (Scopus)
29 Downloads (Pure)
Open Access
File
124 Downloads (Pure)
2015

Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
4 Citations (Scopus)
21 Downloads (Pure)

Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
33 Citations (Scopus)
1 Downloads (Pure)

On the feasibility of silicene encapsulation by AlN deposited using an atomic layer deposition process

Van Hao, B., Wiggers, F. B., Friedlein, R., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 9 Feb 2015, In : Journal of chemical physics. 142, p. 064712 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
1 Downloads (Pure)
2014

An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer

Van Hao, B., Wiggers, F. B., de Jong, M. P. & Kovalgin, A. Y., 24 Mar 2014, International Conference on Microelectronic Test Structures, ICMTS 2014. USA: IEEE Circuits & Systems Society, p. 53-57 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Growth and properties of subnanometer thin titanium nitride films

Kovalgin, A. Y., Van Hao, B., Schmitz, J. & Wolters, R. A. M., 10 Mar 2014, p. 1.

Research output: Contribution to conferenceAbstract

File
22 Downloads (Pure)

Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AlN films

Van Hao, B., Wiggers, F. B., Aarnink, A. A. I., Nguyen, D. M., de Jong, M. P., Kovalgin, A. Y. & Gupta, A. Y., 18 Jun 2014, Proceeding of the 14th International Conference on Atomic Layer Deposition. Japan: ALD 2014, p. 113-113 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules

Friedlein, R., Van Hao, B., Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 27 May 2014, In : Journal of chemical physics. 140, p. 204705:1-204705:4 4 p., 204705.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)

Materials and integration schemes for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., 7 Apr 2014, 15th International Conference on Ultimate Integration on Silicon, ULIS 2014. USA: IEEE Circuits & Systems Society, p. 153-156 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films

Van Bui, H., Nguyen, M. D., Wiggers, F. B., Aarnink, A. A. I., de Jong, M. P. & Kovalgin, A. Y., 20 Feb 2014, In : ECS journal of solid state science and technology. 3, 4, p. P101-P106 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

22 Citations (Scopus)
2013

Conduction and electric field effect in ultra-thin TiN films

Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
1 Downloads (Pure)

Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Hot-Wire generated atomic hydrogen and its impact on thermal ALD in TiCl4/NH3 System

Van Hao, B., Kovalgin, A. Y., Aarnink, A. A. I. & Wolters, R. A. M., 8 Feb 2013, In : ECS journal of solid state science and technology. 2, 4, p. 149-155 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

In situ spectroscopic ellipsometry for studying the growth and optical constants of ALD AlN films

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y. & de Jong, M. P., 1 Nov 2013, In : NEVAC blad. 51, 3, p. 24-31 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Downloads (Pure)

Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics

Rangarajan, B., Kovalgin, A. Y., Worhoff, K. & Schmitz, J., 13 Mar 2013, In : Optics letters. 38, 6, p. 941-943 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)

On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 15 Mar 2013, SURFINT-SREN III. Amsterdam: Elsevier, p. 45-49 5 p. (Applied Surface Science; vol. 269).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

33 Citations (Scopus)

Semiconductor processing apparatus with compact free radical source

Kovalgin, A. Y. & Aarnink, A. A. I., 19 Dec 2013, Patent No. US2013337653 (A1), Priority date 14 Jun 2013

Research output: Patent

File
18 Downloads (Pure)
2012

An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance

Kovalgin, A. Y., Tiggelman, N. & Wolters, R. A. M., 1 Feb 2012, In : IEEE transactions on electron devices. 59, 2, p. 426-432 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Citation (Scopus)

Growth of sub-nanometer thin continuous TiN films by atomic layer deposition

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 3 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 285-290 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)
1 Downloads (Pure)

Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser

Rangarajan, B., Kovalgin, A. Y., Oesterlin, P., de Kloe, R., Brunets, I. & Schmitz, J., 1 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 263-268 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Micro- and nano-link ultra-low power heaters for sensors

Groenland, A. W., Vereshchagina, E., Kovalgin, A. Y., Wolters, R. A. M., Gardeniers, J. G. E. & Schmitz, J., 17 Sep 2012, European Solid-State Device Research Conference, ESSDERC 2012. USA: IEEE Solid-State Circuits Society, p. 169-172 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
2 Downloads (Pure)

Nanoscale carrier injectors for high luminescence Si-based LEDs

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 27 Apr 2012, In : Solid-state electronics. 74, Special Issue, Selected Papers from the ESSDERC 2011 Conference, p. 43-48 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness

Bui, H. V., Wolters, R. A. M. & Kovalgin, A. Y., 14 Dec 2012, Anvanced Materials and Nanotechnology: International Conference Proceedings, 13-14th December 2012, Hanoi - Vietnam. Hoa, V. B. (ed.). Hanoi, Vietnam: Hanoi University of Science and Technology, p. 7-12 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2011
4 Citations (Scopus)
1 Downloads (Pure)

Characterization of Green Laser Crystallized GeSi Thin Films

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 2011, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2011. p. a06-04 6 p. (MRS online proceedings; vol. 1321).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

37 Downloads (Pure)