Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

2011

Green Laser Crystallization of GeSi thin Films and Dopant Activation

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 1 May 2011, 219th ECS Meeting Transactions. The Electrochemical Society Inc., p. 17-25 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

Van Hao, B., Groenland, A. W., Aarnink, A. A. I., Wolters, R. A. M., Schmitz, J. & Kovalgin, A. Y., 3 Jan 2011, In : Journal of the Electrochemical Society. 158, 3, p. 214-220 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

43 Citations (Scopus)
1 Downloads (Pure)

Increased light emission by geometrical changes in Si LEDs

Puliyankot Palackavalapil, V., Piccolo, G., Hueting, R. J. E., Heringa, A., Kovalgin, A. Y. & Schmitz, J., 14 Sep 2011, Proceedings of the 8th International Conference on Group IV Photonics (GFP). USA: IEEE Photonics Society, p. 287-289 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

Lu, J., Kovalgin, A. Y., van der Werf, K. H. M., Schropp, R. E. I. & Schmitz, J., 1 Jul 2011, In : IEEE transactions on electron devices. 58, 5, p. 2014-2021 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
14 Citations (Scopus)
12 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Aug 2011, In : IEEE transactions on electron devices. 58, 8, p. 2620-2627 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
7 Citations (Scopus)
17 Downloads (Pure)

Light emission enhancement by geometrical scaling of carrier injectors in Si-based LEDs

Piccolo, G., Puliyankot Palackavalapil, V., Kovalgin, A. Y., Hueting, R. J. E., Heringa, A. & Schmitz, J., 12 Sep 2011, 2011 Proceedings of the 41st European Solid-State Device Research Conference (Essderc). USA: IEEE Solid-State Circuits Society, p. 175-178 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS

Kazmi, S. N. R., Aarnink, A. A. I., Kovalgin, A. Y., Salm, C. & Schmitz, J., 1 May 2011, In : ECS transactions. 35, 30, p. 45-52 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Materials Characterization of CIGS solar cells on Top of CMOS chips

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Jun 2011, Proceedings of 2011 MRS Spring Meeting. Venkatasubramanian, R., Radousky, H. & Liang, H. (eds.). Cambridge, UK: Cambridge University Press, p. e06-23 8 p. (MRS proceedings; vol. 1325).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
56 Downloads (Pure)

Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators

Groenland, A. W., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 1 May 2011, In : ECS transactions. 35, 30, p. 25-34 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Negative Charge in Plasma Oxidized SiO2 Layers

Boogaard, A., Kovalgin, A. Y. & Wolters, R. A. M., 1 Jul 2011, 219th ECS Meeting. USA: The Electrochemical Society Inc., p. 259-272 14 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)

Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source

Brunets, I., Walters, R. J., Kovalgin, A. Y., Polman, A. & Schmitz, J., 1 May 2011, 219th ECS Meeting. Pennington, NJ, USA: Electro Chemical Society, p. MA2011-01 4 p. (Meeting Abstracts; vol. MA2011-01).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y. & Wolters, R. A. M., 1 Sep 2011, In : Journal of nanoscience and nanotechnology. 11, 9, p. 8120-8125 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
2010

Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems

Lu, J., Liu, W., van der Werf, C. H. M., Kovalgin, A. Y., Sun, Y., Schropp, R. E. I. & Schmitz, J., 6 Dec 2010, Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM). IEEE Electron Devices Society, p. 31.3.1.-31.3.4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
7 Citations (Scopus)
175 Downloads (Pure)

Low specific contact resistance of NiSi and PtSi to Si: impact of interface

Tiggelman, N., Kovalgin, A. Y., Brennan, R. & Wolters, R. A. M., 30 Sep 2010, In : Electrochemical and solid-state letters. 13, 12, p. H450-H453 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

On the effect of nano-injectors on conduction in silicon p-i-n diodes

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 18 Nov 2010, Proceedings of STW.ICT Conference 2010. Utrecht: STW, p. 140-142 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
17 Downloads (Pure)

On the leakage problem of MIM capacitors due to improper etching of titanium nitride

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 18 Nov 2010, Proceedings of STW.ICT Conference 2010. Utrecht: STW, p. 89-92 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
203 Downloads (Pure)
2009

Contact chain measurements for ultrathin conducting films

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 150-152 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 3 Feb 2009, In : IEEE transactions on semiconductor manufacturing. 22, 1, p. 146-152 7 p., 10.1109/TSM.2008.2010746.

Research output: Contribution to journalArticleAcademicpeer-review

File
33 Citations (Scopus)
88 Downloads (Pure)

Effect of carrier injector size on silicon LED performance

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 167-169 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling

Kovalgin, A. Y., Boogaard, A., Brunets, I., Aarnink, A. A. I. & Wolters, R. A. M., 2009, In : ECS transactions. 25, 8, p. 23-32 10 p., 10.1149/1.3207572.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 14 Apr 2009, Proceedings of the 2009 IEEE International Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society Press, p. 191-195 5 p. 10.1109/ICMTS.2009.4814639

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
52 Downloads (Pure)

Impact of small deviations in EEDF on silane-based plasma chemistry

Kovalgin, A. Y., Boogaard, A. & Wolters, R. A. M., 2009, In : ECS transactions. 25, 8, p. 429-436 8 p., 10.1149/1.3207622.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Influence of passivation process on chip performance

Lu, J., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 542-544 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen

Aarnink, A. A. I., Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 19 Jul 2009, Proceedings of the 9th International conference on Atomic Layer Deposition. Madison, USA: America Vaccum Society, Omnipress, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Low-temperature fabricated TFTs on polysilicon stripes

Brunets, I., Holleman, J., Kovalgin, A. Y., Boogaard, A. & Schmitz, J., Aug 2009, In : IEEE transactions on electron devices. 56, 8, p. 1637-1644 8 p., 10.1109/TED.2009.2023021.

Research output: Contribution to journalArticleAcademicpeer-review

File
15 Citations (Scopus)
53 Downloads (Pure)

Low temperature TFTs with poly-stripes

Brunets, I., Boogaard, A., Smits, S. M., de Vries, H., Aarnink, A. A. I., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 5 Mar 2009, Proceedings of the 5th International Thin Film Transistor Conference ITC'09. Paris, France: Ecole Polytechnique, p. 62-65 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Downloads (Pure)

Net Negative Charge in low-temperature SiO2 gate dielectric layers

Boogaard, A., Kovalgin, A. Y. & Wolters, R. A. M., 23 Apr 2009, In : Microelectronic engineering. 86, 7-9, p. 1707-1710 4 p., 10.1016/j.mee.2009.03.124.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

TFTs as photodetectors for optical interconnects

Rangarajan, B., Brunets, I., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 52-54 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
21 Downloads (Pure)

Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, the Netherlands: STW, p. 59-62 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2008

Antifuse injectors for SOI LEDs

Piccolo, G., Hoang, T., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 573-575 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 24 Mar 2008, Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society, p. 199-204 6 p. 10.1109/ICMTS.2008.4509338

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
222 Downloads (Pure)

A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers

Brunets, I., Groenland, A. W., Boogaard, A., Aarnink, A. A. I. & Kovalgin, A. Y., 29 Jun 2008, Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008. Eindhoven, The Netherlands: TUE, p. P-54

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD

Boogaard, A., Roesthuis, R., Brunets, I., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 452-456 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction

Stavitski, N., van Dal, M. J. H., Lauwers, A., Vrancken, C., Kovalgin, A. Y. & Wolters, R. A. M., 22 Apr 2008, In : IEEE transactions on electron devices. 55, DTR08-9/5, p. 1170-1176 7 p., 10.1109/TED.2008.918658.

Research output: Contribution to journalArticleAcademicpeer-review

File
17 Citations (Scopus)
255 Downloads (Pure)

Functional layers for CIGS solar cell on-chip fabrication during post-processing

Lu, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 487-490 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures

Brunets, I., van Loon, R. V. A., Walters, R. J., Polman, A., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M., Holleman, J. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 399-402 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
27 Downloads (Pure)

Low-temperature SiO2 layers deposited by combination of ECR plasma and supersonic silane/helium jet

Kovalgin, A. Y., Isai, I. G., Holleman, J. & Schmitz, J., 1 Jan 2008, In : Journal of the Electrochemical Society. 155, 2, p. G21-G28 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
1 Downloads (Pure)

Poly-Si stripe TFTs by Grain-Boundary controlled crystallization of Amorphous-Si

Brunets, I., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2008, Proceedings of the 38th European Solid-State Device Research Conference. Edinburgh, Schotland: IOP Institute of Physics, p. 87-90 4 p. 10.1109/ESSDERC.2008.4681705

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Silicon LEDs with antifuse injection

Piccolo, G., Hoang, T., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 17 Sep 2008, 5th IEEE International Conference on Group IV Photonics, 2008. Piscataway: IEEE Computer Society Press, p. 49-51 3 p. 10.1109/GROUP4.2008.4638093

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range

Stavitski, N., van Dal, M. J. H., Lauwers, A., Vrancken, C., Kovalgin, A. Y. & Wolters, R. A. M., 1 Apr 2008, In : IEEE electron device letters. 29, 4952/4, p. 378-381 4 p., 10.1109/LED.2008.917934.

Research output: Contribution to journalArticleAcademicpeer-review

File
72 Citations (Scopus)
151 Downloads (Pure)

Thermal and plasma-enhanced oxidation of ALD TiN

Groenland, A. W., Brunets, I., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 468-471 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
324 Downloads (Pure)
2007

A pillar-shaped antifuse-based silicon chemical sensor and actuator

Kovalgin, A. Y., Holleman, J. & Iordache, G., Apr 2007, In : IEEE sensors journal. 7, 2/1, p. 18-27 10 p., 10.1109/JSEN.2006.888602.

Research output: Contribution to journalArticleAcademicpeer-review

File
5 Citations (Scopus)
68 Downloads (Pure)

Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

Boogaard, A., Kovalgin, A. Y., Brunets, I., Aarnink, A. A. I., Holleman, J., Wolters, R. A. M. & Schmitz, J., 1 Sep 2007, In : Surface and coatings technology. 201, WP07-01, p. 8976-8980 5 p., 10.1016/j.surfcoat.2007.04.039.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)

Chemical modeling of a high-density inductively-coupled plasma reactor containing silane

Kovalgin, A. Y., Boogaard, A., Brunets, I., Holleman, J. & Schmitz, J., Sep 2007, In : Surface and coatings technology. 201, WP07-01, p. 8849-8853 5 p., 10.1016/j.surfcoat.2007.04.086.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Boksteen, B. K., Boksteen, B. K., Kovalgin, A. Y. & Wolters, R. A. M., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 551-554 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1626 Downloads (Pure)

Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices

Brunets, I., Aarnink, A. A. I., Boogaard, A., Kovalgin, A. Y., Wolters, R. A. M., Holleman, J. & Schmitz, J., Sep 2007, In : Surface and coatings technology. 201, 2, p. 9209-9214 6 p., 10.1016/j.surfcoat.2007.03.035.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Low-temperature process steps for realization of non-volatile memory devices

Brunets, I., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M., Holleman, J. & Schmitz, J., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 504-508 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
23 Downloads (Pure)

Modeling of an Integrated Electromagnetic Generator for Energy Scavenging

Lu, J., Kovalgin, A. Y. & Schmitz, J., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 603-607 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
42 Downloads (Pure)

On the verification of EEDFs in plasmas with silane using optical emission spectroscopy

Boogaard, A., Ozturk, M. (ed.), Gusev, E. (ed.), Kovalgin, A. Y., Brunets, I., Iwai, H. (ed.), Aarnink, A. A. I., Koester, S. (ed.), Wolters, R. A. M., Kwong, D. (ed.), Holleman, J., Roozeboom, F. (ed.), Timans, P. (ed.) & Schmitz, J., 2007, In : ECS transactions. 6, 7/1, p. 259-270 12 p., 10.1149/1.2727409.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

Boogaard, A., Kovalgin, A. Y., Brunets, I., Holleman, J. & Schmitz, J., 29 Nov 2007, Proceedings of the 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 404-407 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review