Alexey Y. Kovalgin

19982019
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Research Output 1998 2019

7 Citations (Scopus)
160 Downloads (Pure)

Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems

Lu, J., Liu, W., van der Werf, C. H. M., Kovalgin, A. Y., Sun, Y., Schropp, R. E. I. & Schmitz, J., 6 Dec 2010, Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM). IEEE Electron Devices Society, p. 31.3.1.-31.3.4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
gallium selenides
amorphous silicon
CMOS
solar cells
metal ions
2 Citations (Scopus)

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Banerjee, S. & Kovalgin, A. Y., 30 Sep 2018, p. 21-29.

Research output: Contribution to conferencePaper

Open Access
atomic layer epitaxy
adducts
nitrides
surface reactions
versatility
4 Citations (Scopus)
1 Downloads (Pure)

A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors

Aarnink, A. A. I., Boogaard, A., Brunets, I., Isai, I. G., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 67-69 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
2 Citations (Scopus)
24 Downloads (Pure)

A micro-scale hot-surface device based on non-radiative carrier recombination

Kovalgin, A. Y., Holleman, J. & Iordache, G., 15 Nov 2004, The 34th European Solid-State Device Research conference, 2004. Piscataway: IEEE Computer Society, p. 353-356 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
hot surfaces
heat
sensors
silicon
heat sources
1 Citation (Scopus)

An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer

Van Hao, B., Wiggers, F. B., de Jong, M. P. & Kovalgin, A. Y., 24 Mar 2014, International Conference on Microelectronic Test Structures, ICMTS 2014. USA: IEEE Circuits & Systems Society, p. 53-57 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

An approach to modeling of silicon oxidation in a wet ultra-diluted ambient

Kovalgin, A. Y., Hof, A. J. & Schmitz, J., 2005, In : Microelectronic engineering. 80, p. 432-435 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

An approach to modeling of silicon oxidation in a wet ultra-diluted ambient

Kovalgin, A. Y., Hof, A. J. & Schmitz, J., 17 Jun 2005, In : Microelectronic engineering. 80, 10.1016/j.mee.2005.04.101, p. 432-435 4 p., 10.1016/j.mee.2005.04.101.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance

Kovalgin, A. Y., Tiggelman, N. & Wolters, R. A. M., 1 Feb 2012, In : IEEE transactions on electron devices. 59, 2, p. 426-432 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Contact resistance
Metals
Sheet resistance
Resistors
Analytical models
1 Citation (Scopus)

A nitride-based epitaxial surface layer formed by ammonia treatment of silicene-terminated ZrB2

Wiggers, F. B., Van Hao, B., Friedlein, R., Yamada-Takamura, Y., Schmitz, J., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2016, In : Journal of chemical physics. 144, 134703, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

15 Downloads (Pure)

A novel approach to low-power hot-surface devices with decoupled electrical and thermal resistances

Kovalgin, A. Y., Holleman, J. & van den Berg, A., Sep 2002, Proceedings of Eurosensors 2002. Saneistr, J. & Ripka, P. (eds.). Prague: Czech Technical University, p. 88-91 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Downloads (Pure)

Antifuse injectors for SOI LEDs

Piccolo, G., Hoang, T., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 573-575 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

Iordache, G., Holleman, J., Kovalgin, A. Y. & Jenneboer, A. J. S. M., 25 Nov 2003, Proceedings of Semiconductor Advances for Future Electronics SAFE 2003. Veldhoven, The Netherlands, p. 693-696 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Downloads (Pure)

Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

Iordache, G., Holleman, J., Kovalgin, A. Y. & Jenneboer, A. J. S. M., 25 Nov 2003, p. 693-696. 4 p.

Research output: Contribution to conferencePaper

5 Citations (Scopus)
62 Downloads (Pure)

A pillar-shaped antifuse-based silicon chemical sensor and actuator

Kovalgin, A. Y., Holleman, J. & Iordache, G., Apr 2007, In : IEEE sensors journal. 7, 2/1, p. 18-27 10 p., 10.1109/JSEN.2006.888602.

Research output: Contribution to journalArticleAcademicpeer-review

File
6 Citations (Scopus)
207 Downloads (Pure)

A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 24 Mar 2008, Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society, p. 199-204 6 p. 10.1109/ICMTS.2008.4509338

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

A Study of LPCVD of Germanium-Silicon Alloys

Kovalgin, A. Y. & Holleman, J., 1998, University of Twente: Geen opgaven. 119 p.

Research output: Book/ReportReportProfessional

A study of morphology and texture of LPCVD germanium-silicon films

Kovalgin, A. Y. & Holleman, J., 2001, In : Journal de physique IV. IV, p. Pr3-47-Pr3-54 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

A Study of Morphology and Texture of LPCVD Germanium-Silicon Films

Kovalgin, A. Y. & Holleman, J., 2001, In : Journal de physique IV. 11, p. 47-54 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers

Brunets, I., Groenland, A. W., Boogaard, A., Aarnink, A. A. I. & Kovalgin, A. Y., 29 Jun 2008, Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008. Eindhoven, The Netherlands: TUE, p. P-54

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
9 Downloads (Pure)

A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption

Kovalgin, A. Y., Holleman, J. & Iordache, G., 31 Oct 2006, Proceedings of the IEEE Sensors Conference 2005. Piscataway, NJ, USA: IEEE, p. 1225-1228 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

hot surfaces
actuators
sensors
silicon
heat sources

Characterisation of Silicon Oxide films deposited by means of ECR PECVD

Kovalgin, A. Y., Isai, I. G., Holleman, J., Dekker, R., Woerlee, P. H. & Wallinga, H., 24 Nov 1999, SAFE'99. Mierlo, The Netherlands, p. 239-246 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

19 Citations (Scopus)

Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

Boogaard, A., Kovalgin, A. Y., Brunets, I., Aarnink, A. A. I., Holleman, J., Wolters, R. A. M. & Schmitz, J., 1 Sep 2007, In : Surface and coatings technology. 201, WP07-01, p. 8976-8980 5 p., 10.1016/j.surfcoat.2007.04.039.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
130 Downloads (Pure)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of applied physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
electroluminescence
heterojunctions
charge carriers
diodes
traps
12 Citations (Scopus)

Chemical modeling of a high-density inductively-coupled plasma reactor containing silane

Kovalgin, A. Y., Boogaard, A., Brunets, I., Holleman, J. & Schmitz, J., Sep 2007, In : Surface and coatings technology. 201, WP07-01, p. 8849-8853 5 p., 10.1016/j.surfcoat.2007.04.086.

Research output: Contribution to journalArticleAcademicpeer-review

10 Downloads (Pure)

Combined light/heat/gas sensor with decoupled electrical and thermal resistances

Kovalgin, A. Y., Holleman, J. & van den Berg, A., 29 Nov 2002, Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands: STW, p. 635-648 14 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
thermal resistance
electrical resistance
hot surfaces
heat
sensors

Comparison of H2O and D2O oxidation kinetics of <100> silicon

Hof, A. J., Kovalgin, A. Y. & Woerlee, P. H., 27 Nov 2002, p. 35-38. 4 p.

Research output: Contribution to conferencePaper

Comparison of H2O and D2O Oxidation Kinetics of Silicon

Hof, A. J., Kovalgin, A. Y. & Woerlee, P. H., 27 Nov 2002, Proceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002. Utrecht, The Netherlands: STW, p. 35-38 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
17 Downloads (Pure)
Open Access
File
cold walls
Tungsten
Atomic layer deposition
atomic layer epitaxy
Chemical vapor deposition
2 Citations (Scopus)

Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index

Banerjee, S., Onnink, A. J., Dutta, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 27 Dec 2018, In : Journal of physical chemistry C. 122, 51, p. 29567-29576 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Refractive index
Carbon
refractivity
composite materials
carbon
9 Citations (Scopus)
1 Downloads (Pure)

Conduction and electric field effect in ultra-thin TiN films

Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Contact chain measurements for ultrathin conducting films

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 150-152 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1479 Downloads (Pure)

Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Boksteen, B. K., Boksteen, B. K., Kovalgin, A. Y. & Wolters, R. A. M., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 551-554 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Downloads (Pure)

Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization

Stavitski, N., van Dal, M. J. H., Klootwijk, J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 436-438 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

33 Citations (Scopus)
80 Downloads (Pure)

Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 3 Feb 2009, In : IEEE transactions on semiconductor manufacturing. 22, 1, p. 146-152 7 p., 10.1109/TSM.2008.2010746.

Research output: Contribution to journalArticleAcademicpeer-review

File
4 Citations (Scopus)

Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD

Boogaard, A., Roesthuis, R., Brunets, I., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 452-456 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

112 Downloads (Pure)
Open Access
File
gallium nitrides
gallium
ammonia
pulses
carbon

Dielectric thin films deposited by means of ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Dekker, R., Woerlee, P. H. & Wallinga, H., 21 Dec 1999, Veldhoven, The Netherlands

Research output: Other contributionOther research output

Effect of carrier injector size on silicon LED performance

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 167-169 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Citations (Scopus)
1 Downloads (Pure)
Tungsten
Fluorine
Atomic layer deposition
Hydrogen
Tungsten deposits
1 Citation (Scopus)

Electrical characterisation of gate dielectrics deposited with multipolar electron cyclotron resonance plasma source

Isai, I. G., Kovalgin, A. Y., Holleman, J., Wallinga, H., Woerlee, P. H. & Cobianu, C., 11 Sep 2000, Proceedings of the 30th European Solid State Device Research Conference. Piscataway, NJ, USA: IEEE, p. 424-427

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

electron cyclotron resonance
electrical properties
vapor deposition
oxides
silicon oxides
28 Downloads (Pure)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Atomic layer deposition
Sheet resistance
Contact resistance
Tungsten
Electric lines
1 Citation (Scopus)

Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling

Kovalgin, A. Y., Boogaard, A., Brunets, I., Aarnink, A. A. I. & Wolters, R. A. M., 2009, In : ECS transactions. 25, 8, p. 23-32 10 p., 10.1149/1.3207572.

Research output: Contribution to journalArticleAcademicpeer-review

Electrical Properties of Room Temperature SiO2 Deposited by Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2003, Thin Film Transistor Technologies VI: proceedings of the international symposium. Kuo, Y. (ed.). Pennington, NJ: The Electrochemical Society Inc., p. 190-197 8 p. (Proceedings; no. 2002-23).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electrical test structures for verifying continuity of ultra-thin insulating and conducting films

Banerjee, S., van der Velde, F. J., Yang, M., Schmitz, J. & Kovalgin, A. Y., 28 Mar 2017, Electrical test structures for verifying continuity of ultra-thin insulating and conducting films. New York: IEEE, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

continuity
conduction
aluminum nitrides
closures
ellipsometry
2 Citations (Scopus)
2 Downloads (Pure)

Encapsulation of epitaxial silicene on ZrB2 with NaCl

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 8 Aug 2017, In : Journal of chemical physics. p. 1-6 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Encapsulation
Photoelectron spectroscopy
Chemisorption
Synchrotrons
chemisorption
17 Citations (Scopus)
231 Downloads (Pure)

Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction

Stavitski, N., van Dal, M. J. H., Lauwers, A., Vrancken, C., Kovalgin, A. Y. & Wolters, R. A. M., 22 Apr 2008, In : IEEE transactions on electron devices. 55, DTR08-9/5, p. 1170-1176 7 p., 10.1109/TED.2008.918658.

Research output: Contribution to journalArticleAcademicpeer-review

File
4 Citations (Scopus)
6 Downloads (Pure)

Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Integrated optics
integrated optics
CMOS
oxynitrides
Fabrication
1 Citation (Scopus)