Alexey Y. Kovalgin

19982019
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Research Output 1998 2019

9 Citations (Scopus)

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

Grillo, F., Van Bui, H., La Zara, D., Aarnink, A. A. I., Kovalgin, A. Y., Kooyman, P., Kreutzer, M. T. & van Ommen, J. R., 7 Jun 2018, In : Small. 14, 23, 1800765.

Research output: Contribution to journalArticleAcademicpeer-review

Metal Nanoparticles
Atomic layer deposition
Nanoparticles
Agglomeration
Metals
4 Citations (Scopus)

Functional layers for CIGS solar cell on-chip fabrication during post-processing

Lu, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 487-490 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

46 Downloads (Pure)

Gate oxide reliability and deuterated CMOS processing

Hof, A. J., Kovalgin, A., van Schaijk, R., Baks, W. M. & Schmitz, J., 25 Apr 2004, IEEE Integrated Reliability Workshop 2004. Piscataway, NJ: IEEE Computer Society, p. 7-10 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
Deuterium
Oxides
Processing
Isotopes
Hot carriers
36 Downloads (Pure)

Green laser crystallization of GeSi thin films

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 2011, p. a06-04. 6 p.

Research output: Contribution to conferencePaper

File

Green Laser Crystallization of GeSi thin Films and Dopant Activation

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 1 May 2011, 219th ECS Meeting Transactions. The Electrochemical Society Inc., p. 17-25 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

activation
crystallization
thin films
lasers
annealing
4 Citations (Scopus)

Green laser crystallization of α-Si films using preformed α-Si Lines

Brunets, I., Holleman, J., Kovalgin, A. Y., Aarnink, A. A. I., Boogaard, A., Oesterlin, P. & Schmitz, J., 29 Oct 2006, Thin Film Transistor Technology 8. Kuo, Y. (ed.). The Electrochemical Society Inc., p. 185-191 7 p. (ECS Transactions 3, 8 (2006); vol. 3, no. 10).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

crystallization
grain boundaries
lasers
silicon films
budgets

Grouwth and properties of IC dielectrics

Kovalgin, A. Y., Isai, I. G., Wang, Z., Houtsma, V. E., Holleman, J., Dekker, R., Salm, C., Woerlee, P. H. & Mouthaan, A. J., 14 Oct 1999, Enschede, The Netherlands

Research output: Other contributionOther research output

16 Downloads (Pure)

Growth and properties of subnanometer thin titanium nitride films

Kovalgin, A. Y., Van Hao, B., Schmitz, J. & Wolters, R. A. M., 10 Mar 2014, p. 1.

Research output: Contribution to conferenceAbstract

File
titanium nitrides
atomic layer epitaxy
metal nitrides
microelectronics
encounters

Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AlN films

Van Hao, B., Wiggers, F. B., Aarnink, A. A. I., Nguyen, D. M., de Jong, M. P., Kovalgin, A. Y. & Gupta, A. Y., 18 Jun 2014, Proceeding of the 14th International Conference on Atomic Layer Deposition. Japan: ALD 2014, p. 113-113 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

43 Citations (Scopus)
1 Downloads (Pure)

Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

Van Hao, B., Groenland, A. W., Aarnink, A. A. I., Wolters, R. A. M., Schmitz, J. & Kovalgin, A. Y., 3 Jan 2011, In : Journal of the Electrochemical Society. 158, 3, p. 214-220 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
1 Downloads (Pure)

Growth of sub-nanometer thin continuous TiN films by atomic layer deposition

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 3 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 285-290 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

High quality, Room temperature Gate Dielectrics for TFTs

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 29 Nov 2000, Proceedings of SAFE conference 2000. Veldhoven, The Netherlands, p. 69-74

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High Quality Silicon Oxide Deposited with a Multipolar Electron Cyclotron Resonance Plasma Source

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 23 Oct 2001, Thin Film Transistor Technologies V: proceedings of the international symposium. Pennington, NJ, p. 169-175 7 p. (Proceedings; vol. 2000-31).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High Quality Silicon Oxide Deposited with a Multipolar Electron Cyclotron Resonance Plasma Source

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 22 Oct 2000, Proceedings of the 198th Meeting of the Electrochemical Society. Phoenix, USA, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)
1 Downloads (Pure)

Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

Kovalgin, A. Y., Yang, M., Banerjee, S., Apaydin, R. O., Aarnink, A. A. I., Kinge, S. & Wolters, R. A. M., 8 May 2017, In : Advanced materials interfaces. 4, 18, p. 1-11 11 p., 1700058.

Research output: Contribution to journalArticleAcademicpeer-review

Spectroscopic ellipsometry
Atomic layer deposition
Wire
Tungsten
Hydrogen
8 Citations (Scopus)

Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Hot-Wire generated atomic hydrogen and its impact on thermal ALD in TiCl4/NH3 System

Van Hao, B., Kovalgin, A. Y., Aarnink, A. A. I. & Wolters, R. A. M., 8 Feb 2013, In : ECS journal of solid state science and technology. 2, 4, p. 149-155 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

18 Downloads (Pure)

How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Heat radiation
filaments
wire
Wire
optics
1 Citation (Scopus)

Impact of small deviations in EEDF on silane-based plasma chemistry

Kovalgin, A. Y., Boogaard, A. & Wolters, R. A. M., 2009, In : ECS transactions. 25, 8, p. 429-436 8 p., 10.1149/1.3207622.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Increased light emission by geometrical changes in Si LEDs

Puliyankot Palackavalapil, V., Piccolo, G., Hueting, R. J. E., Heringa, A., Kovalgin, A. Y. & Schmitz, J., 14 Sep 2011, Proceedings of the 8th International Conference on Group IV Photonics (GFP). USA: IEEE Photonics Society, p. 287-289 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Influence of passivation process on chip performance

Lu, J., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 542-544 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Citation (Scopus)
43 Downloads (Pure)

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 1 Mar 2018, In : Thin solid films. 649, p. 17-23 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
tungsten
wire
30 Citations (Scopus)
1 Downloads (Pure)

In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen

Aarnink, A. A. I., Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 19 Jul 2009, Proceedings of the 9th International conference on Atomic Layer Deposition. Madison, USA: America Vaccum Society, Omnipress, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Downloads (Pure)

In situ spectroscopic ellipsometry for studying the growth and optical constants of ALD AlN films

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y. & de Jong, M. P., 1 Nov 2013, In : NEVAC blad. 51, 3, p. 24-31 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)
7 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

Lu, J., Kovalgin, A. Y., van der Werf, K. H. M., Schropp, R. E. I. & Schmitz, J., 1 Jul 2011, In : IEEE transactions on electron devices. 58, 5, p. 2014-2021 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Solar cells
Photovoltaic cells
Energy harvesting
Microsystems
Dust
7 Citations (Scopus)
11 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Aug 2011, In : IEEE transactions on electron devices. 58, 8, p. 2620-2627 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Solar cells
Gallium
Indium
Surface topography
Metal ions
19 Citations (Scopus)

Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules

Friedlein, R., Van Hao, B., Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 27 May 2014, In : Journal of chemical physics. 140, p. 204705:1-204705:4 4 p., 204705.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Langmuir-probe characterization of an inductively-coupled remote plasma system intended for CVD and ALD

Boogaard, A., Kovalgin, A. Y., Aarnink, A. A. I., Wolters, R. A. M., Holleman, J., Brunets, I. & Schmitz, J., 2006, In : ECS transactions. 2, 7, p. 181-191 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser

Rangarajan, B., Kovalgin, A. Y., Oesterlin, P., de Kloe, R., Brunets, I. & Schmitz, J., 1 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 263-268 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Light emission enhancement by geometrical scaling of carrier injectors in Si-based LEDs

Piccolo, G., Puliyankot Palackavalapil, V., Kovalgin, A. Y., Hueting, R. J. E., Heringa, A. & Schmitz, J., 12 Sep 2011, 2011 Proceedings of the 41st European Solid-State Device Research Conference (Essderc). USA: IEEE Solid-State Circuits Society, p. 175-178 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

27 Downloads (Pure)

Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures

Brunets, I., van Loon, R. V. A., Walters, R. J., Polman, A., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M., Holleman, J. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 399-402 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
4 Citations (Scopus)
1 Downloads (Pure)

Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V. & Goossens, M. J., 2006, In : Journal of the Electrochemical Society. 153, 2/9, p. H181-H188 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V. & Goossens, M., 2004, Proceedings of the International Symposium. Davidson, J. L., Hesketh, P. J., Mistra, D. & Shoji, S. (eds.). The Electrochemical Society Inc., p. 173-183 11 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

34 Downloads (Pure)

Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane.

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V. & Goossens, M. J., 2006, p. 173-183. 11 p.

Research output: Contribution to conferencePaper

File

Low-power Micro-Scale CMOS-Copatible Silicon Sensor on a Suspended Membrane

Kovalgin, A. Y., Iordache, G. & Holleman, J., 2 Oct 2004, Meeting abstracts 206th Meeting of the Electrochemical Society. Honolulu, USA, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Low-pressure CVD of Germanium-Silicon films using silane and germane sources

Kovalgin, A. Y., Holleman, J., Salm, C. & Woerlee, P. H., 22 Oct 2000, Proceedings of the 198th Meeting of the Electrochemical Society. Phoenix, USA, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Low-Pressure CVD of Germanium-Silicon Films using Silane and Germane Sources

Kovalgin, A. Y., Holleman, J., Salm, C. & Woerlee, P. H., 22 Oct 2001, Thin Film Transistor Technologies V: proceedings of the international symposium. Pennington, NJ, p. 269-275 7 p. (Proceedings; vol. 2000-31).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
131 Downloads (Pure)

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 31 Jan 2018, In : Thin solid films. 646, p. 199-208 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
high aspect ratio
Aspect ratio
2 Citations (Scopus)

Low specific contact resistance of NiSi and PtSi to Si: impact of interface

Tiggelman, N., Kovalgin, A. Y., Brennan, R. & Wolters, R. A. M., 30 Sep 2010, In : Electrochemical and solid-state letters. 13, 12, p. H450-H453 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Contact resistance
contact resistance
Doping (additives)
Silicon
silicon
4 Citations (Scopus)

Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS

Kazmi, S. N. R., Aarnink, A. A. I., Kovalgin, A. Y., Salm, C. & Schmitz, J., 1 May 2011, In : ECS transactions. 35, 30, p. 45-52 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics

Rangarajan, B., Kovalgin, A. Y., Worhoff, K. & Schmitz, J., 13 Mar 2013, In : Optics letters. 38, 6, p. 941-943 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

15 Citations (Scopus)
50 Downloads (Pure)

Low-temperature fabricated TFTs on polysilicon stripes

Brunets, I., Holleman, J., Kovalgin, A. Y., Boogaard, A. & Schmitz, J., Aug 2009, In : IEEE transactions on electron devices. 56, 8, p. 1637-1644 8 p., 10.1109/TED.2009.2023021.

Research output: Contribution to journalArticleAcademicpeer-review

File
9 Citations (Scopus)

Low-Temperature LPCVD of Polycrystalline GexSi1-x Films with High Germanium Content

Kovalgin, A. Y. & Holleman, J., 8 Mar 2006, In : Journal of the Electrochemical Society. 153, 2/5, p. G363-G371 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices

Brunets, I., Aarnink, A. A. I., Boogaard, A., Kovalgin, A. Y., Wolters, R. A. M., Holleman, J. & Schmitz, J., Sep 2007, In : Surface and coatings technology. 201, 2, p. 9209-9214 6 p., 10.1016/j.surfcoat.2007.03.035.

Research output: Contribution to journalArticleAcademicpeer-review

23 Downloads (Pure)

Low-temperature process steps for realization of non-volatile memory devices

Brunets, I., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M., Holleman, J. & Schmitz, J., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 504-508 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Low Temperature SiO2 films deposited by Multipolar ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Dekker, R., Woerlee, P. H. & Wallinga, H., 19 Dec 2000, Veldhoven, The Netherlands

Research output: Other contributionOther research output

7 Citations (Scopus)
1 Downloads (Pure)

Low-temperature SiO2 layers deposited by combination of ECR plasma and supersonic silane/helium jet

Kovalgin, A. Y., Isai, I. G., Holleman, J. & Schmitz, J., 1 Jan 2008, In : Journal of the Electrochemical Society. 155, 2, p. G21-G28 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Downloads (Pure)

Low temperature TFTs with poly-stripes

Brunets, I., Boogaard, A., Smits, S. M., de Vries, H., Aarnink, A. A. I., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 5 Mar 2009, Proceedings of the 5th International Thin Film Transistor Conference ITC'09. Paris, France: Ecole Polytechnique, p. 62-65 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Transistors
Amorphous silicon
Grain boundaries
Annealing
Thin films