Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

LPCVD of GexSi1-x films using SiH4 and GeH4 source gases

Kovalgin, A. Y., Holleman, J., Salm, C., Woerlee, P. H. & Ponomarev, Y. V., 26 Jun 1998, Enschede, the Netherlands

Research output: Other contributionOther research output

LPCVD of GeXSi1-x Films Using SiH4 and GeH4 Source Gases

Kovalgin, A. Y., Holleman, J., Salm, C., Woerlee, P. H. & Ponomarev, Y. V., 26 Nov 1998, Proceedings of the SAFE'98. Mierlo, the Netherlands, p. 311-317 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Materials and integration schemes for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., 7 Apr 2014, 15th International Conference on Ultimate Integration on Silicon, ULIS 2014. USA: IEEE Circuits & Systems Society, p. 153-156 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Materials Characterization of CIGS solar cells on Top of CMOS chips

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Jun 2011, Proceedings of 2011 MRS Spring Meeting. Venkatasubramanian, R., Radousky, H. & Liang, H. (eds.). Cambridge, UK: Cambridge University Press, p. e06-23 8 p. (MRS proceedings; vol. 1325).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
64 Downloads (Pure)

Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy

Boogaard, A., Kovalgin, A. Y., Aarnink, A. A. I., Wolters, R. A. M., Holleman, J., Brunets, I. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 412-418 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
845 Downloads (Pure)

Memory devices with encapsulated Si nano-crystals: Realization and Characterization.

Brunets, I., van Hemert, T., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 419-422 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Method of forming a device structure using selective deposition of gallium nitride and system for same

Banerjee, S., Aarnink, A. A. I. & Kovalgin, A. Y., 14 Dec 2018, (Submitted) Patent No. Application Number: 62779684

Research output: Patent

Micro- and nano-link ultra-low power heaters for sensors

Groenland, A. W., Vereshchagina, E., Kovalgin, A. Y., Wolters, R. A. M., Gardeniers, J. G. E. & Schmitz, J., 17 Sep 2012, European Solid-State Device Research Conference, ESSDERC 2012. USA: IEEE Solid-State Circuits Society, p. 169-172 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
2 Downloads (Pure)

Modeling of an Integrated Electromagnetic Generator for Energy Scavenging

Lu, J., Kovalgin, A. Y. & Schmitz, J., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 603-607 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
42 Downloads (Pure)

Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators

Groenland, A. W., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 1 May 2011, In : ECS transactions. 35, 30, p. 25-34 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Nanometer-scale Hot Spots & Light Emitting Antifuses

Le Minh, P., Kovalgin, A. Y., Akil, N. A., Woerlee, P. H., van den Berg, A., Wallinga, H. & Holleman, J., 12 Oct 2000, Enschede, The Netherlands

Research output: Other contributionOther research output

Nanoscale Antifuses/Hotspots for Novel Sensing Concepts

Le Minh, P., Kovalgin, A. Y., Holleman, J., Woerlee, P. H., van den Berg, A. & Wallinga, H., 12 Nov 2001, p. -.

Research output: Contribution to conferencePoster

Nanoscale carrier injectors for high luminescence Si-based LEDs

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 27 Apr 2012, In : Solid-state electronics. 74, Special Issue, Selected Papers from the ESSDERC 2011 Conference, p. 43-48 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Nano-scale hotspots: a route to fast, real time and reliable gas sensing

Kovalgin, A. Y., Akil, N. A., Le Minh, P., Holleman, J., van den Berg, A., Houtsma, V. E. & Wallinga, H., 1 Dec 2000, Proceedings of STW/SeSence 2000. Veldhoven, The Netherlands: STW, p. 651-654

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Negative Charge in Plasma Oxidized SiO2 Layers

Boogaard, A., Kovalgin, A. Y. & Wolters, R. A. M., 1 Jul 2011, 219th ECS Meeting. USA: The Electrochemical Society Inc., p. 259-272 14 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)

Net Negative Charge in low-temperature SiO2 gate dielectric layers

Boogaard, A., Kovalgin, A. Y. & Wolters, R. A. M., 23 Apr 2009, In : Microelectronic engineering. 86, 7-9, p. 1707-1710 4 p., 10.1016/j.mee.2009.03.124.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

On Gas-Phase Depletion During LPCVD of GeSi Films using GeH4/SiH4 and GeH4/Si2H6 Gas Sources

Kovalgin, A. Y. & Holleman, J., 2003, Thin Film Transistor Technologies VI: proceedings of the international symposium. Kuo, Y. (ed.). Pennington, NJ: The Electrochemical Society Inc., p. 216-223 8 p. (Proceedings; no. 2002-23).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

On oxidation kinetics and electrical quality of gate oxide grown in H2O or D2O ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 25 Nov 2003, p. 743-747. 5 p.

Research output: Contribution to conferencePaper

On Oxidation Kinetics and Electrical Quality of Gate Oxide Grown in H2O or D2O Ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 25 Nov 2003, Proceedings of Semiconductor Advances for Future Electronics SAFE 2003. p. 743-747 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

On Oxidation of Silicon in Ultra-Diluted H2O and D2O Ambient

Hof, A. J., Kovalgin, A. Y. & Schmitz, J., 27 Jun 2004, proceedings Wodim 2004. Cork, Ireland, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Downloads (Pure)

On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 15 Mar 2013, SURFINT-SREN III. Amsterdam: Elsevier, p. 45-49 5 p. (Applied Surface Science; vol. 269).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

33 Citations (Scopus)

On the effect of nano-injectors on conduction in silicon p-i-n diodes

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 18 Nov 2010, Proceedings of STW.ICT Conference 2010. Utrecht: STW, p. 140-142 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
18 Downloads (Pure)

On the feasibility of silicene encapsulation by AlN deposited using an atomic layer deposition process

Van Hao, B., Wiggers, F. B., Friedlein, R., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 9 Feb 2015, In : Journal of chemical physics. 142, p. 064712 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)

On the feasibility of using Antifuses as Low-Power Heating/Detecting Elements in Pellistor-Type Gas Sensors

Kovalgin, A. Y., Holleman, J. & van den Berg, A., 14 May 2001, Sensor Technology 2001. Enschede, the Netherlands, p. 107-112 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

On the growth of native oxides on hydrogen-terminated silicon surfaces in dark and under illumination with light

Kovalgin, A. Y., Zinine, A., Bankras, R., Wormeester, H., Poelsema, B. & Schmitz, J., 29 Oct 2006, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment. Roozeboom, F., Kwong, D-L., Iwai, H., Öztürk, M. C., Timans, P. J. & Gusev, E. (eds.). Pennington, N.J.: The Electrochemical Society Inc., p. 191-202 12 p. (ECS Transactions; vol. 3, no. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

On the leakage problem of MIM capacitors due to improper etching of titanium nitride

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 18 Nov 2010, Proceedings of STW.ICT Conference 2010. Utrecht: STW, p. 89-92 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
218 Downloads (Pure)

On the oxidation kinetics of silicon in ultradiluted H2O and D2O ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 28 Jul 2005, In : Journal of the Electrochemical Society. 152, 9, p. F133-F137 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

On the verification of EEDFs in plasmas with silane using optical emission spectroscopy

Boogaard, A., Ozturk, M. (ed.), Gusev, E. (ed.), Kovalgin, A. Y., Brunets, I., Iwai, H. (ed.), Aarnink, A. A. I., Koester, S. (ed.), Wolters, R. A. M., Kwong, D. (ed.), Holleman, J., Roozeboom, F. (ed.), Timans, P. (ed.) & Schmitz, J., 2007, In : ECS transactions. 6, 7/1, p. 259-270 12 p., 10.1149/1.2727409.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

Boogaard, A., Kovalgin, A. Y., Brunets, I., Holleman, J. & Schmitz, J., 29 Nov 2007, Proceedings of the 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 404-407 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
1 Downloads (Pure)

Physical properties of silicon oxide layers deposited at room temperature by a combination of ECR plasma and high-speed jet of silane

Isai, I. G., Kovalgin, A. Y., Holleman, J., Wallinga, H., Woerlee, P. H., Cobianu, C. & Modreanu, M., 1 Apr 2003, Proceedings of Chemical Vapor Deposition XVI and EUROCVD 14. The Electrochemical Society Inc., p. 609-616 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Poly-Si stripe TFTs by Grain-Boundary controlled crystallization of Amorphous-Si

Brunets, I., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2008, Proceedings of the 38th European Solid-State Device Research Conference. Edinburgh, Schotland: IOP Institute of Physics, p. 87-90 4 p. 10.1109/ESSDERC.2008.4681705

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source

Brunets, I., Walters, R. J., Kovalgin, A. Y., Polman, A. & Schmitz, J., 1 May 2011, 219th ECS Meeting. Pennington, NJ, USA: Electro Chemical Society, p. MA2011-01 4 p. (Meeting Abstracts; vol. MA2011-01).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching

Kim, G. M., Kovalgin, A. Y., Holleman, J. & Brugger, J. P., 1 Feb 2002, In : Journal of nanoscience and nanotechnology. 2, 1, p. 55-59 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)

Room Temperature SiO2 films by Multipolar ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2001.

Research output: Contribution to conferencePoster

Room Temperature SiO2 Films Deposited by Multipolar ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2001, In : Journal de physique IV. 11, Pr3, p. 747-753

Research output: Contribution to journalConference articleAcademicpeer-review

Selective deposition of Tungsten

Kovalgin, A. Y., Yang, M., Aarnink, A. A. I. & Wolters, R. A. M., 25 Jan 2018, Patent No. US 2018/0025939 A1, Priority date 6 Jun 2017, Priority No. 15/615,489

Research output: Patent

2 Downloads (Pure)

Selenidation of epitaxial silicene on ZrB2

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 15 Jan 2018, In : Applied surface science. 428, p. 793-797 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films

Van Bui, H., Nguyen, M. D., Wiggers, F. B., Aarnink, A. A. I., de Jong, M. P. & Kovalgin, A. Y., 20 Feb 2014, In : ECS journal of solid state science and technology. 3, 4, p. P101-P106 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

22 Citations (Scopus)

Semiconductor Devices - The Smell of Fear

Kovalgin, A. Y., Iordache, G., Holleman, J. & Jenneboer, A. J. S. M., 2 Oct 2003, p. -.

Research output: Contribution to conferencePoster

Semiconductor processing apparatus with compact free radical source

Kovalgin, A. Y. & Aarnink, A. A. I., 19 Dec 2013, Patent No. US2013337653 (A1), Priority date 14 Jun 2013

Research output: Patent

File
18 Downloads (Pure)

Silicon LEDs with antifuse injection

Piccolo, G., Hoang, T., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 17 Sep 2008, 5th IEEE International Conference on Group IV Photonics, 2008. Piscataway: IEEE Computer Society Press, p. 49-51 3 p. 10.1109/GROUP4.2008.4638093

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Simulation of a Nanolink Hot-Plate Device

Groenland, A. W., Kovalgin, A. Y., Holleman, J. & Schmitz, J., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 581-583 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
41 Downloads (Pure)

Specific Contact Resistance Measurements of Metal Semiconductor-Junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 6 Mar 2006, Proceedings of the IEEE International Conference on Microelectronic Test Structures (ICMTS). Austin, TX, USA: IEEE, p. 13-17 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
9 Citations (Scopus)
3132 Downloads (Pure)

Specific contact resistance measurements of metal-semiconductor junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., Nov 2005, p. 52-55. 4 p.

Research output: Contribution to conferencePaper

Specific Contact Resistance Measurements of Metal-Semiconductor Junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 52-55 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range

Stavitski, N., van Dal, M. J. H., Lauwers, A., Vrancken, C., Kovalgin, A. Y. & Wolters, R. A. M., 1 Apr 2008, In : IEEE electron device letters. 29, 4952/4, p. 378-381 4 p., 10.1109/LED.2008.917934.

Research output: Contribution to journalArticleAcademicpeer-review

File
73 Citations (Scopus)
164 Downloads (Pure)

TFTs as photodetectors for optical interconnects

Rangarajan, B., Brunets, I., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 52-54 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
21 Downloads (Pure)

The impact of deuterated CMOS processing on gate oxide reliability

Hof, A. J., Hoekstra, E., Kovalgin, A. Y., van Schaijk, R., Baks, W. M. & Schmitz, J., 1 Jun 2005, In : IEEE transactions on electron devices. 52, 9, p. 2111-2115 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
53 Downloads (Pure)