Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

Growth of sub-nanometer thin continuous TiN films by atomic layer deposition

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 3 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 285-290 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)
1 Downloads (Pure)

Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

Van Hao, B., Groenland, A. W., Aarnink, A. A. I., Wolters, R. A. M., Schmitz, J. & Kovalgin, A. Y., 3 Jan 2011, In : Journal of the Electrochemical Society. 158, 3, p. 214-220 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

44 Citations (Scopus)
1 Downloads (Pure)

Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AlN films

Van Hao, B., Wiggers, F. B., Aarnink, A. A. I., Nguyen, D. M., de Jong, M. P., Kovalgin, A. Y. & Gupta, A. Y., 18 Jun 2014, Proceeding of the 14th International Conference on Atomic Layer Deposition. Japan: ALD 2014, p. 113-113 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Growth and properties of subnanometer thin titanium nitride films

Kovalgin, A. Y., Van Hao, B., Schmitz, J. & Wolters, R. A. M., 10 Mar 2014, p. 1.

Research output: Contribution to conferenceAbstract

File
23 Downloads (Pure)

Grouwth and properties of IC dielectrics

Kovalgin, A. Y., Isai, I. G., Wang, Z., Houtsma, V. E., Holleman, J., Dekker, R., Salm, C., Woerlee, P. H. & Mouthaan, A. J., 14 Oct 1999, Enschede, The Netherlands

Research output: Other contributionOther research output

Green laser crystallization of α-Si films using preformed α-Si Lines

Brunets, I., Holleman, J., Kovalgin, A. Y., Aarnink, A. A. I., Boogaard, A., Oesterlin, P. & Schmitz, J., 29 Oct 2006, Thin Film Transistor Technology 8. Kuo, Y. (ed.). The Electrochemical Society Inc., p. 185-191 7 p. (ECS Transactions 3, 8 (2006); vol. 3, no. 10).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Green Laser Crystallization of GeSi thin Films and Dopant Activation

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 1 May 2011, 219th ECS Meeting Transactions. The Electrochemical Society Inc., p. 17-25 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Gate oxide reliability and deuterated CMOS processing

Hof, A. J., Kovalgin, A., van Schaijk, R., Baks, W. M. & Schmitz, J., 25 Apr 2004, IEEE Integrated Reliability Workshop 2004. Piscataway, NJ: IEEE Computer Society, p. 7-10 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Citation (Scopus)
60 Downloads (Pure)

Functional layers for CIGS solar cell on-chip fabrication during post-processing

Lu, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 487-490 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

Grillo, F., Van Bui, H., La Zara, D., Aarnink, A. A. I., Kovalgin, A. Y., Kooyman, P., Kreutzer, M. T. & van Ommen, J. R., 7 Jun 2018, In : Small. 14, 23, 1800765.

Research output: Contribution to journalArticleAcademicpeer-review

18 Citations (Scopus)

Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 14 Apr 2009, Proceedings of the 2009 IEEE International Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society Press, p. 191-195 5 p. 10.1109/ICMTS.2009.4814639

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
58 Downloads (Pure)
1 Citation (Scopus)

Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
4 Citations (Scopus)
23 Downloads (Pure)

Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction

Stavitski, N., van Dal, M. J. H., Lauwers, A., Vrancken, C., Kovalgin, A. Y. & Wolters, R. A. M., 22 Apr 2008, In : IEEE transactions on electron devices. 55, DTR08-9/5, p. 1170-1176 7 p., 10.1109/TED.2008.918658.

Research output: Contribution to journalArticleAcademicpeer-review

File
18 Citations (Scopus)
291 Downloads (Pure)

Encapsulation of epitaxial silicene on ZrB2 with NaCl

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 8 Aug 2017, In : Journal of chemical physics. p. 1-6 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
2 Downloads (Pure)

Electrical test structures for verifying continuity of ultra-thin insulating and conducting films

Banerjee, S., van der Velde, F. J., Yang, M., Schmitz, J. & Kovalgin, A. Y., 28 Mar 2017, Electrical test structures for verifying continuity of ultra-thin insulating and conducting films. New York: IEEE, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electrical Properties of Room Temperature SiO2 Deposited by Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2003, Thin Film Transistor Technologies VI: proceedings of the international symposium. Kuo, Y. (ed.). Pennington, NJ: The Electrochemical Society Inc., p. 190-197 8 p. (Proceedings; no. 2002-23).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling

Kovalgin, A. Y., Boogaard, A., Brunets, I., Aarnink, A. A. I. & Wolters, R. A. M., 2009, In : ECS transactions. 25, 8, p. 23-32 10 p., 10.1149/1.3207572.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
1 Citation (Scopus)
49 Downloads (Pure)

Electrical characterisation of gate dielectrics deposited with multipolar electron cyclotron resonance plasma source

Isai, I. G., Kovalgin, A. Y., Holleman, J., Wallinga, H., Woerlee, P. H. & Cobianu, C., 11 Sep 2000, Proceedings of the 30th European Solid State Device Research Conference. Piscataway, NJ, USA: IEEE, p. 424-427

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
3 Citations (Scopus)
1 Downloads (Pure)

Effect of carrier injector size on silicon LED performance

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 167-169 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Dielectric thin films deposited by means of ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Dekker, R., Woerlee, P. H. & Wallinga, H., 21 Dec 1999, Veldhoven, The Netherlands

Research output: Other contributionOther research output

Open Access
File
129 Downloads (Pure)

Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD

Boogaard, A., Roesthuis, R., Brunets, I., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 452-456 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 3 Feb 2009, In : IEEE transactions on semiconductor manufacturing. 22, 1, p. 146-152 7 p., 10.1109/TSM.2008.2010746.

Research output: Contribution to journalArticleAcademicpeer-review

File
35 Citations (Scopus)
100 Downloads (Pure)

Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization

Stavitski, N., van Dal, M. J. H., Klootwijk, J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 436-438 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Downloads (Pure)

Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Boksteen, B. K., Boksteen, B. K., Kovalgin, A. Y. & Wolters, R. A. M., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 551-554 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2051 Downloads (Pure)

Contact chain measurements for ultrathin conducting films

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 150-152 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Conduction and electric field effect in ultra-thin tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., May 2020, In : IEEE Transactions on Semiconductor Manufacturing. 33, 2, p. 202-209 8 p., 9016070.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
15 Downloads (Pure)

Conduction and electric field effect in ultra-thin TiN films

Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)
1 Downloads (Pure)

Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index

Banerjee, S., Onnink, A. J., Dutta, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 27 Dec 2018, In : Journal of physical chemistry C. 122, 51, p. 29567-29576 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
3 Citations (Scopus)
Open Access
File
8 Citations (Scopus)
34 Downloads (Pure)

Comparison of H2O and D2O Oxidation Kinetics of Silicon

Hof, A. J., Kovalgin, A. Y. & Woerlee, P. H., 27 Nov 2002, Proceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002. Utrecht, The Netherlands: STW, p. 35-38 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Comparison of H2O and D2O oxidation kinetics of <100> silicon

Hof, A. J., Kovalgin, A. Y. & Woerlee, P. H., 27 Nov 2002, p. 35-38. 4 p.

Research output: Contribution to conferencePaper

Combined light/heat/gas sensor with decoupled electrical and thermal resistances

Kovalgin, A. Y., Holleman, J. & van den Berg, A., 29 Nov 2002, Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands: STW, p. 635-648 14 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
12 Downloads (Pure)

Chemical modeling of a high-density inductively-coupled plasma reactor containing silane

Kovalgin, A. Y., Boogaard, A., Brunets, I., Holleman, J. & Schmitz, J., Sep 2007, In : Surface and coatings technology. 201, WP07-01, p. 8849-8853 5 p., 10.1016/j.surfcoat.2007.04.086.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of Applied Physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
194 Downloads (Pure)

Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

Boogaard, A., Kovalgin, A. Y., Brunets, I., Aarnink, A. A. I., Holleman, J., Wolters, R. A. M. & Schmitz, J., 1 Sep 2007, In : Surface and coatings technology. 201, WP07-01, p. 8976-8980 5 p., 10.1016/j.surfcoat.2007.04.039.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)

Characterization of Green Laser Crystallized GeSi Thin Films

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 2011, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2011. p. a06-04 6 p. (MRS online proceedings; vol. 1321).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

37 Downloads (Pure)

Characterisation of Silicon Oxide films deposited by means of ECR PECVD

Kovalgin, A. Y., Isai, I. G., Holleman, J., Dekker, R., Woerlee, P. H. & Wallinga, H., 24 Nov 1999, SAFE'99. Mierlo, The Netherlands, p. 239-246 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption

Kovalgin, A. Y., Holleman, J. & Iordache, G., 31 Oct 2006, Proceedings of the IEEE Sensors Conference 2005. Piscataway, NJ, USA: IEEE, p. 1225-1228 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
9 Downloads (Pure)

A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers

Brunets, I., Groenland, A. W., Boogaard, A., Aarnink, A. A. I. & Kovalgin, A. Y., 29 Jun 2008, Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008. Eindhoven, The Netherlands: TUE, p. P-54

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A study of morphology and texture of LPCVD germanium-silicon films

Kovalgin, A. & Holleman, J., 2001, In : Journal de physique IV. 11, Pr3, p. 47-54 8 p.

Research output: Contribution to journalConference articleAcademicpeer-review

A Study of LPCVD of Germanium-Silicon Alloys

Kovalgin, A. Y. & Holleman, J., 1998, University of Twente: Geen opgaven. 119 p.

Research output: Book/ReportReportProfessional

A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 24 Mar 2008, Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society, p. 199-204 6 p. 10.1109/ICMTS.2008.4509338

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
269 Downloads (Pure)

A pillar-shaped antifuse-based silicon chemical sensor and actuator

Kovalgin, A. Y., Holleman, J. & Iordache, G., Apr 2007, In : IEEE sensors journal. 7, 2/1, p. 18-27 10 p., 10.1109/JSEN.2006.888602.

Research output: Contribution to journalArticleAcademicpeer-review

File
5 Citations (Scopus)
76 Downloads (Pure)

Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

Iordache, G., Holleman, J., Kovalgin, A. Y. & Jenneboer, T., 25 Nov 2003, Semiconductor Advances for Future Electronics: Proceedings of SAFE 2003. Veldhoven, The Netherlands: STW, p. 693-696 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
2 Downloads (Pure)

Antifuse injectors for SOI LEDs

Piccolo, G., Hoang, T., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 573-575 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)