Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

Abstract

Growth and properties of subnanometer thin titanium nitride films

Kovalgin, A. Y., Van Hao, B., Schmitz, J. & Wolters, R. A. M., 10 Mar 2014, p. 1.

Research output: Contribution to conferenceAbstract

File
17 Downloads (Pure)
Article
4 Citations (Scopus)
1 Downloads (Pure)

An approach to modeling of silicon oxidation in a wet ultra-diluted ambient

Kovalgin, A. Y., Hof, A. J. & Schmitz, J., 17 Jun 2005, In : Microelectronic engineering. 80, 10.1016/j.mee.2005.04.101, p. 432-435 4 p., 10.1016/j.mee.2005.04.101.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

An approach to modeling of silicon oxidation in a wet ultra-diluted ambient

Kovalgin, A. Y., Hof, A. J. & Schmitz, J., 2005, In : Microelectronic engineering. 80, p. 432-435 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance

Kovalgin, A. Y., Tiggelman, N. & Wolters, R. A. M., 1 Feb 2012, In : IEEE transactions on electron devices. 59, 2, p. 426-432 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

A nitride-based epitaxial surface layer formed by ammonia treatment of silicene-terminated ZrB2

Wiggers, F. B., Van Hao, B., Friedlein, R., Yamada-Takamura, Y., Schmitz, J., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2016, In : Journal of chemical physics. 144, 134703, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

A pillar-shaped antifuse-based silicon chemical sensor and actuator

Kovalgin, A. Y., Holleman, J. & Iordache, G., Apr 2007, In : IEEE sensors journal. 7, 2/1, p. 18-27 10 p., 10.1109/JSEN.2006.888602.

Research output: Contribution to journalArticleAcademicpeer-review

File
5 Citations (Scopus)
68 Downloads (Pure)

Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

Boogaard, A., Kovalgin, A. Y., Brunets, I., Aarnink, A. A. I., Holleman, J., Wolters, R. A. M. & Schmitz, J., 1 Sep 2007, In : Surface and coatings technology. 201, WP07-01, p. 8976-8980 5 p., 10.1016/j.surfcoat.2007.04.039.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of Applied Physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
149 Downloads (Pure)

Chemical modeling of a high-density inductively-coupled plasma reactor containing silane

Kovalgin, A. Y., Boogaard, A., Brunets, I., Holleman, J. & Schmitz, J., Sep 2007, In : Surface and coatings technology. 201, WP07-01, p. 8849-8853 5 p., 10.1016/j.surfcoat.2007.04.086.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)
Open Access
File
7 Citations (Scopus)
21 Downloads (Pure)

Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index

Banerjee, S., Onnink, A. J., Dutta, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 27 Dec 2018, In : Journal of physical chemistry C. 122, 51, p. 29567-29576 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
2 Citations (Scopus)

Conduction and electric field effect in ultra-thin TiN films

Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)
Open Access
File
2 Downloads (Pure)

Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 3 Feb 2009, In : IEEE transactions on semiconductor manufacturing. 22, 1, p. 146-152 7 p., 10.1109/TSM.2008.2010746.

Research output: Contribution to journalArticleAcademicpeer-review

File
33 Citations (Scopus)
88 Downloads (Pure)

Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
2 Citations (Scopus)
1 Downloads (Pure)

Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling

Kovalgin, A. Y., Boogaard, A., Brunets, I., Aarnink, A. A. I. & Wolters, R. A. M., 2009, In : ECS transactions. 25, 8, p. 23-32 10 p., 10.1149/1.3207572.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Encapsulation of epitaxial silicene on ZrB2 with NaCl

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 8 Aug 2017, In : Journal of chemical physics. p. 1-6 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
2 Downloads (Pure)

Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction

Stavitski, N., van Dal, M. J. H., Lauwers, A., Vrancken, C., Kovalgin, A. Y. & Wolters, R. A. M., 22 Apr 2008, In : IEEE transactions on electron devices. 55, DTR08-9/5, p. 1170-1176 7 p., 10.1109/TED.2008.918658.

Research output: Contribution to journalArticleAcademicpeer-review

File
17 Citations (Scopus)
255 Downloads (Pure)

Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
4 Citations (Scopus)
13 Downloads (Pure)
1 Citation (Scopus)

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

Grillo, F., Van Bui, H., La Zara, D., Aarnink, A. A. I., Kovalgin, A. Y., Kooyman, P., Kreutzer, M. T. & van Ommen, J. R., 7 Jun 2018, In : Small. 14, 23, 1800765.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

Van Hao, B., Groenland, A. W., Aarnink, A. A. I., Wolters, R. A. M., Schmitz, J. & Kovalgin, A. Y., 3 Jan 2011, In : Journal of the Electrochemical Society. 158, 3, p. 214-220 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

43 Citations (Scopus)
1 Downloads (Pure)

Growth of sub-nanometer thin continuous TiN films by atomic layer deposition

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 3 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 285-290 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
1 Downloads (Pure)

Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

Kovalgin, A. Y., Yang, M., Banerjee, S., Apaydin, R. O., Aarnink, A. A. I., Kinge, S. & Wolters, R. A. M., 8 May 2017, In : Advanced materials interfaces. 4, 18, p. 1-11 11 p., 1700058.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
1 Downloads (Pure)

Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Hot-Wire generated atomic hydrogen and its impact on thermal ALD in TiCl4/NH3 System

Van Hao, B., Kovalgin, A. Y., Aarnink, A. A. I. & Wolters, R. A. M., 8 Feb 2013, In : ECS journal of solid state science and technology. 2, 4, p. 149-155 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
22 Downloads (Pure)

Impact of small deviations in EEDF on silane-based plasma chemistry

Kovalgin, A. Y., Boogaard, A. & Wolters, R. A. M., 2009, In : ECS transactions. 25, 8, p. 429-436 8 p., 10.1149/1.3207622.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 1 Mar 2018, In : Thin solid films. 649, p. 17-23 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
50 Downloads (Pure)
31 Citations (Scopus)
1 Downloads (Pure)

In situ spectroscopic ellipsometry for studying the growth and optical constants of ALD AlN films

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y. & de Jong, M. P., 1 Nov 2013, In : NEVAC blad. 51, 3, p. 24-31 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

Lu, J., Kovalgin, A. Y., van der Werf, K. H. M., Schropp, R. E. I. & Schmitz, J., 1 Jul 2011, In : IEEE transactions on electron devices. 58, 5, p. 2014-2021 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
14 Citations (Scopus)
12 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Aug 2011, In : IEEE transactions on electron devices. 58, 8, p. 2620-2627 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
7 Citations (Scopus)
17 Downloads (Pure)

Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules

Friedlein, R., Van Hao, B., Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 27 May 2014, In : Journal of chemical physics. 140, p. 204705:1-204705:4 4 p., 204705.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)

Langmuir-probe characterization of an inductively-coupled remote plasma system intended for CVD and ALD

Boogaard, A., Kovalgin, A. Y., Aarnink, A. A. I., Wolters, R. A. M., Holleman, J., Brunets, I. & Schmitz, J., 2006, In : ECS transactions. 2, 7, p. 181-191 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser

Rangarajan, B., Kovalgin, A. Y., Oesterlin, P., de Kloe, R., Brunets, I. & Schmitz, J., 1 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 263-268 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V. & Goossens, M. J., 2006, In : Journal of the Electrochemical Society. 153, 2/9, p. H181-H188 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
1 Downloads (Pure)

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 31 Jan 2018, In : Thin solid films. 646, p. 199-208 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
159 Downloads (Pure)

Low specific contact resistance of NiSi and PtSi to Si: impact of interface

Tiggelman, N., Kovalgin, A. Y., Brennan, R. & Wolters, R. A. M., 30 Sep 2010, In : Electrochemical and solid-state letters. 13, 12, p. H450-H453 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS

Kazmi, S. N. R., Aarnink, A. A. I., Kovalgin, A. Y., Salm, C. & Schmitz, J., 1 May 2011, In : ECS transactions. 35, 30, p. 45-52 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics

Rangarajan, B., Kovalgin, A. Y., Worhoff, K. & Schmitz, J., 13 Mar 2013, In : Optics letters. 38, 6, p. 941-943 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Low-temperature fabricated TFTs on polysilicon stripes

Brunets, I., Holleman, J., Kovalgin, A. Y., Boogaard, A. & Schmitz, J., Aug 2009, In : IEEE transactions on electron devices. 56, 8, p. 1637-1644 8 p., 10.1109/TED.2009.2023021.

Research output: Contribution to journalArticleAcademicpeer-review

File
15 Citations (Scopus)
53 Downloads (Pure)

Low-Temperature LPCVD of Polycrystalline GexSi1-x Films with High Germanium Content

Kovalgin, A. Y. & Holleman, J., 8 Mar 2006, In : Journal of the Electrochemical Society. 153, 2/5, p. G363-G371 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices

Brunets, I., Aarnink, A. A. I., Boogaard, A., Kovalgin, A. Y., Wolters, R. A. M., Holleman, J. & Schmitz, J., Sep 2007, In : Surface and coatings technology. 201, 2, p. 9209-9214 6 p., 10.1016/j.surfcoat.2007.03.035.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Low-temperature SiO2 layers deposited by combination of ECR plasma and supersonic silane/helium jet

Kovalgin, A. Y., Isai, I. G., Holleman, J. & Schmitz, J., 1 Jan 2008, In : Journal of the Electrochemical Society. 155, 2, p. G21-G28 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
1 Downloads (Pure)

Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators

Groenland, A. W., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 1 May 2011, In : ECS transactions. 35, 30, p. 25-34 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)