Alexey Y. Kovalgin

19982019

Research output per year

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Research Output

Article

Net Negative Charge in low-temperature SiO2 gate dielectric layers

Boogaard, A., Kovalgin, A. Y. & Wolters, R. A. M., 23 Apr 2009, In : Microelectronic engineering. 86, 7-9, p. 1707-1710 4 p., 10.1016/j.mee.2009.03.124.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

On the feasibility of silicene encapsulation by AlN deposited using an atomic layer deposition process

Van Hao, B., Wiggers, F. B., Friedlein, R., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 9 Feb 2015, In : Journal of chemical physics. 142, p. 064712 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)

On the oxidation kinetics of silicon in ultradiluted H2O and D2O ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 28 Jul 2005, In : Journal of the Electrochemical Society. 152, 9, p. F133-F137 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

On the verification of EEDFs in plasmas with silane using optical emission spectroscopy

Boogaard, A., Ozturk, M. (ed.), Gusev, E. (ed.), Kovalgin, A. Y., Brunets, I., Iwai, H. (ed.), Aarnink, A. A. I., Koester, S. (ed.), Wolters, R. A. M., Kwong, D. (ed.), Holleman, J., Roozeboom, F. (ed.), Timans, P. (ed.) & Schmitz, J., 2007, In : ECS transactions. 6, 7/1, p. 259-270 12 p., 10.1149/1.2727409.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
1 Downloads (Pure)

Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching

Kim, G. M., Kovalgin, A. Y., Holleman, J. & Brugger, J. P., 1 Feb 2002, In : Journal of nanoscience and nanotechnology. 2, 1, p. 55-59 5 p., 10.1166/jnn.2002.073.

Research output: Contribution to journalArticleAcademicpeer-review

18 Citations (Scopus)

Selenidation of epitaxial silicene on ZrB2

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 15 Jan 2018, In : Applied surface science. 428, p. 793-797 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films

Van Bui, H., Nguyen, M. D., Wiggers, F. B., Aarnink, A. A. I., de Jong, M. P. & Kovalgin, A. Y., 20 Feb 2014, In : ECS journal of solid state science and technology. 3, 4, p. P101-P106 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)

Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range

Stavitski, N., van Dal, M. J. H., Lauwers, A., Vrancken, C., Kovalgin, A. Y. & Wolters, R. A. M., 1 Apr 2008, In : IEEE electron device letters. 29, 4952/4, p. 378-381 4 p., 10.1109/LED.2008.917934.

Research output: Contribution to journalArticleAcademicpeer-review

File
72 Citations (Scopus)
151 Downloads (Pure)

The impact of deuterated CMOS processing on gate oxide reliability

Hof, A. J., Hoekstra, E., Kovalgin, A. Y., van Schaijk, R., Baks, W. M. & Schmitz, J., 1 Jun 2005, In : IEEE transactions on electron devices. 52, 9, p. 2111-2115 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
50 Downloads (Pure)

Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

Banerjee, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 6 Sep 2019, In : Journal of physical chemistry C. 123, 37, p. 23214-23225 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
64 Downloads (Pure)

Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y. & Wolters, R. A. M., 1 Sep 2011, In : Journal of nanoscience and nanotechnology. 11, 9, p. 8120-8125 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Van der Waals integration of silicene and hexagonal boron nitride

Wiggers, F. B., Fleurence, A., Aoyagi, K., Yonezawa, T., Yamada-Takamura, Y., Feng, H., Zhuang, J., Du, Y., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2019, In : 2D Materials. 6, 3, 035001.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
3 Downloads (Pure)
Conference article

A study of morphology and texture of LPCVD germanium-silicon films

Kovalgin, A. & Holleman, J., 2001, In : Journal de physique IV. 11, Pr3, p. 47-54 8 p.

Research output: Contribution to journalConference articleAcademicpeer-review

Room Temperature SiO2 Films Deposited by Multipolar ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2001, In : Journal de physique IV. 11, Pr3, p. 747-753

Research output: Contribution to journalConference articleAcademicpeer-review

Conference contribution

Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems

Lu, J., Liu, W., van der Werf, C. H. M., Kovalgin, A. Y., Sun, Y., Schropp, R. E. I. & Schmitz, J., 6 Dec 2010, Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM). IEEE Electron Devices Society, p. 31.3.1.-31.3.4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
7 Citations (Scopus)
175 Downloads (Pure)

A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors

Aarnink, A. A. I., Boogaard, A., Brunets, I., Isai, I. G., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 67-69 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
3 Downloads (Pure)

A micro-scale hot-surface device based on non-radiative carrier recombination

Kovalgin, A. Y., Holleman, J. & Iordache, G., 15 Nov 2004, The 34th European Solid-State Device Research conference, 2004. Piscataway: IEEE Computer Society, p. 353-356 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
31 Downloads (Pure)

An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer

Van Hao, B., Wiggers, F. B., de Jong, M. P. & Kovalgin, A. Y., 24 Mar 2014, International Conference on Microelectronic Test Structures, ICMTS 2014. USA: IEEE Circuits & Systems Society, p. 53-57 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

A novel approach to low-power hot-surface devices with decoupled electrical and thermal resistances

Kovalgin, A. Y., Holleman, J. & van den Berg, A., Sep 2002, Proceedings of Eurosensors 2002. Saneistr, J. & Ripka, P. (eds.). Prague: Czech Technical University, p. 88-91 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
16 Downloads (Pure)

Antifuse injectors for SOI LEDs

Piccolo, G., Hoang, T., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 573-575 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

Iordache, G., Holleman, J., Kovalgin, A. Y. & Jenneboer, A. J. S. M., 25 Nov 2003, Proceedings of Semiconductor Advances for Future Electronics SAFE 2003. Veldhoven, The Netherlands, p. 693-696 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 24 Mar 2008, Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society, p. 199-204 6 p. 10.1109/ICMTS.2008.4509338

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
221 Downloads (Pure)

A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers

Brunets, I., Groenland, A. W., Boogaard, A., Aarnink, A. A. I. & Kovalgin, A. Y., 29 Jun 2008, Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008. Eindhoven, The Netherlands: TUE, p. P-54

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption

Kovalgin, A. Y., Holleman, J. & Iordache, G., 31 Oct 2006, Proceedings of the IEEE Sensors Conference 2005. Piscataway, NJ, USA: IEEE, p. 1225-1228 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
9 Downloads (Pure)

Characterisation of Silicon Oxide films deposited by means of ECR PECVD

Kovalgin, A. Y., Isai, I. G., Holleman, J., Dekker, R., Woerlee, P. H. & Wallinga, H., 24 Nov 1999, SAFE'99. Mierlo, The Netherlands, p. 239-246 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Characterization of Green Laser Crystallized GeSi Thin Films

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 2011, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2011. p. a06-04 6 p. (MRS online proceedings; vol. 1321).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

37 Downloads (Pure)

Combined light/heat/gas sensor with decoupled electrical and thermal resistances

Kovalgin, A. Y., Holleman, J. & van den Berg, A., 29 Nov 2002, Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands: STW, p. 635-648 14 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
11 Downloads (Pure)

Comparison of H2O and D2O Oxidation Kinetics of Silicon

Hof, A. J., Kovalgin, A. Y. & Woerlee, P. H., 27 Nov 2002, Proceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002. Utrecht, The Netherlands: STW, p. 35-38 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Contact chain measurements for ultrathin conducting films

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 150-152 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Boksteen, B. K., Boksteen, B. K., Kovalgin, A. Y. & Wolters, R. A. M., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 551-554 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1613 Downloads (Pure)

Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization

Stavitski, N., van Dal, M. J. H., Klootwijk, J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 436-438 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Downloads (Pure)

Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD

Boogaard, A., Roesthuis, R., Brunets, I., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 452-456 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Effect of carrier injector size on silicon LED performance

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 167-169 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Electrical characterisation of gate dielectrics deposited with multipolar electron cyclotron resonance plasma source

Isai, I. G., Kovalgin, A. Y., Holleman, J., Wallinga, H., Woerlee, P. H. & Cobianu, C., 11 Sep 2000, Proceedings of the 30th European Solid State Device Research Conference. Piscataway, NJ, USA: IEEE, p. 424-427

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
33 Downloads (Pure)

Electrical Properties of Room Temperature SiO2 Deposited by Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2003, Thin Film Transistor Technologies VI: proceedings of the international symposium. Kuo, Y. (ed.). Pennington, NJ: The Electrochemical Society Inc., p. 190-197 8 p. (Proceedings; no. 2002-23).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electrical test structures for verifying continuity of ultra-thin insulating and conducting films

Banerjee, S., van der Velde, F. J., Yang, M., Schmitz, J. & Kovalgin, A. Y., 28 Mar 2017, Electrical test structures for verifying continuity of ultra-thin insulating and conducting films. New York: IEEE, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 14 Apr 2009, Proceedings of the 2009 IEEE International Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society Press, p. 191-195 5 p. 10.1109/ICMTS.2009.4814639

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
52 Downloads (Pure)

Functional layers for CIGS solar cell on-chip fabrication during post-processing

Lu, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 487-490 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Gate oxide reliability and deuterated CMOS processing

Hof, A. J., Kovalgin, A., van Schaijk, R., Baks, W. M. & Schmitz, J., 25 Apr 2004, IEEE Integrated Reliability Workshop 2004. Piscataway, NJ: IEEE Computer Society, p. 7-10 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
49 Downloads (Pure)

Green Laser Crystallization of GeSi thin Films and Dopant Activation

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 1 May 2011, 219th ECS Meeting Transactions. The Electrochemical Society Inc., p. 17-25 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Green laser crystallization of α-Si films using preformed α-Si Lines

Brunets, I., Holleman, J., Kovalgin, A. Y., Aarnink, A. A. I., Boogaard, A., Oesterlin, P. & Schmitz, J., 29 Oct 2006, Thin Film Transistor Technology 8. Kuo, Y. (ed.). The Electrochemical Society Inc., p. 185-191 7 p. (ECS Transactions 3, 8 (2006); vol. 3, no. 10).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AlN films

Van Hao, B., Wiggers, F. B., Aarnink, A. A. I., Nguyen, D. M., de Jong, M. P., Kovalgin, A. Y. & Gupta, A. Y., 18 Jun 2014, Proceeding of the 14th International Conference on Atomic Layer Deposition. Japan: ALD 2014, p. 113-113 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

High quality, Room temperature Gate Dielectrics for TFTs

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 29 Nov 2000, Proceedings of SAFE conference 2000. Veldhoven, The Netherlands, p. 69-74

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High Quality Silicon Oxide Deposited with a Multipolar Electron Cyclotron Resonance Plasma Source

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 22 Oct 2000, Proceedings of the 198th Meeting of the Electrochemical Society. Phoenix, USA, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High Quality Silicon Oxide Deposited with a Multipolar Electron Cyclotron Resonance Plasma Source

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 23 Oct 2001, Thin Film Transistor Technologies V: proceedings of the international symposium. Pennington, NJ, p. 169-175 7 p. (Proceedings; vol. 2000-31).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Increased light emission by geometrical changes in Si LEDs

Puliyankot Palackavalapil, V., Piccolo, G., Hueting, R. J. E., Heringa, A., Kovalgin, A. Y. & Schmitz, J., 14 Sep 2011, Proceedings of the 8th International Conference on Group IV Photonics (GFP). USA: IEEE Photonics Society, p. 287-289 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Influence of passivation process on chip performance

Lu, J., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 542-544 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen

Aarnink, A. A. I., Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 19 Jul 2009, Proceedings of the 9th International conference on Atomic Layer Deposition. Madison, USA: America Vaccum Society, Omnipress, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic