Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

Paper

Three-dimensional IC's prolong the life of Moore's law

Brunets, I., Boogaard, A., Isai, I. G., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., Nov 2005, p. 76-78. 3 p.

Research output: Contribution to conferencePaper

Top-down meets bottom-up: nano-engineering for link between nm-and mu-scale

Kim, G. M., Kim, B. J., Holleman, J., Huskens, J., ten Have, E. S., Kovalgin, A. Y., Liebau, M., Reinhoudt, D., van Hulst, N. F. & Brugger, J., 19 Jun 2002, p. 71-78.

Research output: Contribution to conferencePaper

Patent

Method of forming a device structure using selective deposition of gallium nitride and system for same

Banerjee, S., Aarnink, A. A. I. & Kovalgin, A. Y., 14 Dec 2018, (Submitted) Patent No. Application Number: 62779684

Research output: Patent

Selective deposition of Tungsten

Kovalgin, A. Y., Yang, M., Aarnink, A. A. I. & Wolters, R. A. M., 25 Jan 2018, Patent No. US 2018/0025939 A1, Priority date 6 Jun 2017, Priority No. 15/615,489

Research output: Patent

2 Downloads (Pure)

Semiconductor processing apparatus with compact free radical source

Kovalgin, A. Y. & Aarnink, A. A. I., 19 Dec 2013, Patent No. US2013337653 (A1), Priority date 14 Jun 2013

Research output: Patent

File
18 Downloads (Pure)
Poster

Nanoscale Antifuses/Hotspots for Novel Sensing Concepts

Le Minh, P., Kovalgin, A. Y., Holleman, J., Woerlee, P. H., van den Berg, A. & Wallinga, H., 12 Nov 2001, p. -.

Research output: Contribution to conferencePoster

Room Temperature SiO2 films by Multipolar ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2001.

Research output: Contribution to conferencePoster

Semiconductor Devices - The Smell of Fear

Kovalgin, A. Y., Iordache, G., Holleman, J. & Jenneboer, A. J. S. M., 2 Oct 2003, p. -.

Research output: Contribution to conferencePoster

Report

A Study of LPCVD of Germanium-Silicon Alloys

Kovalgin, A. Y. & Holleman, J., 1998, University of Twente: Geen opgaven. 119 p.

Research output: Book/ReportReportProfessional