Alexey Y. Kovalgin

19982019
If you made any changes in Pure these will be visible here soon.

Research Output 1998 2019

2006
2 Downloads (Pure)

Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization

Stavitski, N., van Dal, M. J. H., Klootwijk, J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 436-438 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

4 Citations (Scopus)

Green laser crystallization of α-Si films using preformed α-Si Lines

Brunets, I., Holleman, J., Kovalgin, A. Y., Aarnink, A. A. I., Boogaard, A., Oesterlin, P. & Schmitz, J., 29 Oct 2006, Thin Film Transistor Technology 8. Kuo, Y. (ed.). The Electrochemical Society Inc., p. 185-191 7 p. (ECS Transactions 3, 8 (2006); vol. 3, no. 10).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

crystallization
grain boundaries
lasers
silicon films
budgets
5 Citations (Scopus)

Langmuir-probe characterization of an inductively-coupled remote plasma system intended for CVD and ALD

Boogaard, A., Kovalgin, A. Y., Aarnink, A. A. I., Wolters, R. A. M., Holleman, J., Brunets, I. & Schmitz, J., 2006, In : ECS transactions. 2, 7, p. 181-191 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
1 Downloads (Pure)

Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V. & Goossens, M. J., 2006, In : Journal of the Electrochemical Society. 153, 2/9, p. H181-H188 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

31 Downloads (Pure)

Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane.

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V. & Goossens, M. J., 2006, p. 173-183. 11 p.

Research output: Contribution to conferencePaper

File
9 Citations (Scopus)

Low-Temperature LPCVD of Polycrystalline GexSi1-x Films with High Germanium Content

Kovalgin, A. Y. & Holleman, J., 8 Mar 2006, In : Journal of the Electrochemical Society. 153, 2/5, p. G363-G371 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

670 Downloads (Pure)

Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy

Boogaard, A., Kovalgin, A. Y., Aarnink, A. A. I., Wolters, R. A. M., Holleman, J., Brunets, I. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 412-418 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File

Memory devices with encapsulated Si nano-crystals: Realization and Characterization.

Brunets, I., van Hemert, T., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 419-422 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Citation (Scopus)

On the growth of native oxides on hydrogen-terminated silicon surfaces in dark and under illumination with light

Kovalgin, A. Y., Zinine, A., Bankras, R., Wormeester, H., Poelsema, B. & Schmitz, J., 29 Oct 2006, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment. Roozeboom, F., Kwong, D-L., Iwai, H., Öztürk, M. C., Timans, P. J. & Gusev, E. (eds.). Pennington, N.J.: The Electrochemical Society Inc., p. 191-202 12 p. (ECS Transactions; vol. 3, no. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

illumination
oxides
silicon
hydrogen
cleaning
9 Citations (Scopus)
2685 Downloads (Pure)

Specific Contact Resistance Measurements of Metal Semiconductor-Junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 6 Mar 2006, Proceedings of the IEEE International Conference on Microelectronic Test Structures (ICMTS). Austin, TX, USA: IEEE, p. 13-17 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2005
1 Downloads (Pure)

A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors

Aarnink, A. A. I., Boogaard, A., Brunets, I., Isai, I. G., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 67-69 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
vapor deposition
conduction
temperature

An approach to modeling of silicon oxidation in a wet ultra-diluted ambient

Kovalgin, A. Y., Hof, A. J. & Schmitz, J., 2005, In : Microelectronic engineering. 80, p. 432-435 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

An approach to modeling of silicon oxidation in a wet ultra-diluted ambient

Kovalgin, A. Y., Hof, A. J. & Schmitz, J., 17 Jun 2005, In : Microelectronic engineering. 80, 10.1016/j.mee.2005.04.101, p. 432-435 4 p., 10.1016/j.mee.2005.04.101.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

On the oxidation kinetics of silicon in ultradiluted H2O and D2O ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 28 Jul 2005, In : Journal of the Electrochemical Society. 152, 9, p. F133-F137 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Specific contact resistance measurements of metal-semiconductor junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., Nov 2005, p. 52-55. 4 p.

Research output: Contribution to conferencePaper

Specific Contact Resistance Measurements of Metal-Semiconductor Junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 52-55 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

4 Citations (Scopus)
48 Downloads (Pure)

The impact of deuterated CMOS processing on gate oxide reliability

Hof, A. J., Hoekstra, E., Kovalgin, A. Y., van Schaijk, R., Baks, W. M. & Schmitz, J., 1 Jun 2005, In : IEEE transactions on electron devices. 52, 9, p. 2111-2115 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Deuterium
Oxides
Processing
Degradation
Hot carriers

Three-dimensional IC's prolong the life of Moore's law

Brunets, I., Boogaard, A., Isai, I. G., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., Nov 2005, p. 76-78. 3 p.

Research output: Contribution to conferencePaper

Three-dimensional IC's prolong the life of Moore's law

Brunets, I., Boogaard, A., Isai, I. G., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 76-78 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2004
2 Citations (Scopus)
25 Downloads (Pure)

A micro-scale hot-surface device based on non-radiative carrier recombination

Kovalgin, A. Y., Holleman, J. & Iordache, G., 15 Nov 2004, The 34th European Solid-State Device Research conference, 2004. Piscataway: IEEE Computer Society, p. 353-356 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
hot surfaces
heat
sensors
silicon
heat sources
45 Downloads (Pure)

Gate oxide reliability and deuterated CMOS processing

Hof, A. J., Kovalgin, A., van Schaijk, R., Baks, W. M. & Schmitz, J., 25 Apr 2004, IEEE Integrated Reliability Workshop 2004. Piscataway, NJ: IEEE Computer Society, p. 7-10 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
Deuterium
Oxides
Processing
Isotopes
Hot carriers

Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V. & Goossens, M., 2004, Proceedings of the International Symposium. Davidson, J. L., Hesketh, P. J., Mistra, D. & Shoji, S. (eds.). The Electrochemical Society Inc., p. 173-183 11 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Low-power Micro-Scale CMOS-Copatible Silicon Sensor on a Suspended Membrane

Kovalgin, A. Y., Iordache, G. & Holleman, J., 2 Oct 2004, Meeting abstracts 206th Meeting of the Electrochemical Society. Honolulu, USA, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Downloads (Pure)

On Oxidation of Silicon in Ultra-Diluted H2O and D2O Ambient

Hof, A. J., Kovalgin, A. Y. & Schmitz, J., 27 Jun 2004, proceedings Wodim 2004. Cork, Ireland, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2003

Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

Iordache, G., Holleman, J., Kovalgin, A. Y. & Jenneboer, A. J. S. M., 25 Nov 2003, Proceedings of Semiconductor Advances for Future Electronics SAFE 2003. Veldhoven, The Netherlands, p. 693-696 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Downloads (Pure)

Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

Iordache, G., Holleman, J., Kovalgin, A. Y. & Jenneboer, A. J. S. M., 25 Nov 2003, p. 693-696. 4 p.

Research output: Contribution to conferencePaper

Electrical Properties of Room Temperature SiO2 Deposited by Combination of Jet Vapor and Multipolar Electron Cyclotron Resonance Plasma

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2003, Thin Film Transistor Technologies VI: proceedings of the international symposium. Kuo, Y. (ed.). Pennington, NJ: The Electrochemical Society Inc., p. 190-197 8 p. (Proceedings; no. 2002-23).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

On Gas-Phase Depletion During LPCVD of GeSi Films using GeH4/SiH4 and GeH4/Si2H6 Gas Sources

Kovalgin, A. Y. & Holleman, J., 2003, Thin Film Transistor Technologies VI: proceedings of the international symposium. Kuo, Y. (ed.). Pennington, NJ: The Electrochemical Society Inc., p. 216-223 8 p. (Proceedings; no. 2002-23).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

On oxidation kinetics and electrical quality of gate oxide grown in H2O or D2O ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 25 Nov 2003, p. 743-747. 5 p.

Research output: Contribution to conferencePaper

On Oxidation Kinetics and Electrical Quality of Gate Oxide Grown in H2O or D2O Ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 25 Nov 2003, Proceedings of Semiconductor Advances for Future Electronics SAFE 2003. p. 743-747 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Physical properties of silicon oxide layers deposited at room temperature by a combination of ECR plasma and high-speed jet of silane

Isai, I. G., Kovalgin, A. Y., Holleman, J., Wallinga, H., Woerlee, P. H., Cobianu, C. & Modreanu, M., 1 Apr 2003, Proceedings of Chemical Vapor Deposition XVI and EUROCVD 14. The Electrochemical Society Inc., p. 609-616 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Semiconductor Devices - The Smell of Fear

Kovalgin, A. Y., Iordache, G., Holleman, J. & Jenneboer, A. J. S. M., 2 Oct 2003, p. -.

Research output: Contribution to conferencePoster

2002
15 Downloads (Pure)

A novel approach to low-power hot-surface devices with decoupled electrical and thermal resistances

Kovalgin, A. Y., Holleman, J. & van den Berg, A., Sep 2002, Proceedings of Eurosensors 2002. Saneistr, J. & Ripka, P. (eds.). Prague: Czech Technical University, p. 88-91 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
10 Downloads (Pure)

Combined light/heat/gas sensor with decoupled electrical and thermal resistances

Kovalgin, A. Y., Holleman, J. & van den Berg, A., 29 Nov 2002, Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands: STW, p. 635-648 14 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
thermal resistance
electrical resistance
hot surfaces
heat
sensors

Comparison of H2O and D2O oxidation kinetics of <100> silicon

Hof, A. J., Kovalgin, A. Y. & Woerlee, P. H., 27 Nov 2002, p. 35-38. 4 p.

Research output: Contribution to conferencePaper

Comparison of H2O and D2O Oxidation Kinetics of Silicon

Hof, A. J., Kovalgin, A. Y. & Woerlee, P. H., 27 Nov 2002, Proceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002. Utrecht, The Netherlands: STW, p. 35-38 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

18 Citations (Scopus)

Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching

Kim, G. M., Kovalgin, A. Y., Holleman, J. & Brugger, J. P., 1 Feb 2002, In : Journal of nanoscience and nanotechnology. 2, 1, p. 55-59 5 p., 10.1166/jnn.2002.073.

Research output: Contribution to journalArticleAcademicpeer-review

Top-down meets bottom-up: nano-engineering for link between nm-and mu-scale

Kim, G. M., Kim, B. J., Holleman, J., Huskens, J., ten Have, E. S., Kovalgin, A. Y., Liebau, M., Reinhoudt, D., van Hulst, N. F. & Brugger, J., 19 Jun 2002, p. 71-78.

Research output: Contribution to conferencePaper

2001

A study of morphology and texture of LPCVD germanium-silicon films

Kovalgin, A. Y. & Holleman, J., 2001, In : Journal de physique IV. IV, p. Pr3-47-Pr3-54 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

A Study of Morphology and Texture of LPCVD Germanium-Silicon Films

Kovalgin, A. Y. & Holleman, J., 2001, In : Journal de physique IV. 11, p. 47-54 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

High Quality Silicon Oxide Deposited with a Multipolar Electron Cyclotron Resonance Plasma Source

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 23 Oct 2001, Thin Film Transistor Technologies V: proceedings of the international symposium. Pennington, NJ, p. 169-175 7 p. (Proceedings; vol. 2000-31).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Low-Pressure CVD of Germanium-Silicon Films using Silane and Germane Sources

Kovalgin, A. Y., Holleman, J., Salm, C. & Woerlee, P. H., 22 Oct 2001, Thin Film Transistor Technologies V: proceedings of the international symposium. Pennington, NJ, p. 269-275 7 p. (Proceedings; vol. 2000-31).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Nanoscale Antifuses/Hotspots for Novel Sensing Concepts

Le Minh, P., Kovalgin, A. Y., Holleman, J., Woerlee, P. H., van den Berg, A. & Wallinga, H., 12 Nov 2001, p. -.

Research output: Contribution to conferencePoster

On the feasibility of using Antifuses as Low-Power Heating/Detecting Elements in Pellistor-Type Gas Sensors

Kovalgin, A. Y., Holleman, J. & van den Berg, A., 14 May 2001, Sensor Technology 2001. Enschede, the Netherlands, p. 107-112 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Room Temperature SiO2 films by Multipolar ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2001, In : Journal de physique IV. 11, p. 747-753 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Room Temperature SiO2 Films Deposited by Multipolar ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 26 Aug 2001, p. -.

Research output: Contribution to conferencePoster

Thin-film antifuses for pellistor type gas sensors

Kovalgin, A. Y., Holleman, J., van den Berg, A. & Wallinga, H., 30 Nov 2001, Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2001. Utrecht, The Netherlands: STW, p. 809-812 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2000
1 Citation (Scopus)

Electrical characterisation of gate dielectrics deposited with multipolar electron cyclotron resonance plasma source

Isai, I. G., Kovalgin, A. Y., Holleman, J., Wallinga, H., Woerlee, P. H. & Cobianu, C., 11 Sep 2000, Proceedings of the 30th European Solid State Device Research Conference. Piscataway, NJ, USA: IEEE, p. 424-427

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

electron cyclotron resonance
electrical properties
vapor deposition
oxides
silicon oxides

High quality, Room temperature Gate Dielectrics for TFTs

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 29 Nov 2000, Proceedings of SAFE conference 2000. Veldhoven, The Netherlands, p. 69-74

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review