Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

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Conference contribution
2019

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
1 Citation (Scopus)
48 Downloads (Pure)
2017

Electrical test structures for verifying continuity of ultra-thin insulating and conducting films

Banerjee, S., van der Velde, F. J., Yang, M., Schmitz, J. & Kovalgin, A. Y., 28 Mar 2017, Electrical test structures for verifying continuity of ultra-thin insulating and conducting films. New York: IEEE, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2014

An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer

Van Hao, B., Wiggers, F. B., de Jong, M. P. & Kovalgin, A. Y., 24 Mar 2014, International Conference on Microelectronic Test Structures, ICMTS 2014. USA: IEEE Circuits & Systems Society, p. 53-57 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AlN films

Van Hao, B., Wiggers, F. B., Aarnink, A. A. I., Nguyen, D. M., de Jong, M. P., Kovalgin, A. Y. & Gupta, A. Y., 18 Jun 2014, Proceeding of the 14th International Conference on Atomic Layer Deposition. Japan: ALD 2014, p. 113-113 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Materials and integration schemes for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., 7 Apr 2014, 15th International Conference on Ultimate Integration on Silicon, ULIS 2014. USA: IEEE Circuits & Systems Society, p. 153-156 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2013

On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 15 Mar 2013, SURFINT-SREN III. Amsterdam: Elsevier, p. 45-49 5 p. (Applied Surface Science; vol. 269).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

33 Citations (Scopus)
2012

Micro- and nano-link ultra-low power heaters for sensors

Groenland, A. W., Vereshchagina, E., Kovalgin, A. Y., Wolters, R. A. M., Gardeniers, J. G. E. & Schmitz, J., 17 Sep 2012, European Solid-State Device Research Conference, ESSDERC 2012. USA: IEEE Solid-State Circuits Society, p. 169-172 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
2 Downloads (Pure)

TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness

Bui, H. V., Wolters, R. A. M. & Kovalgin, A. Y., 14 Dec 2012, Anvanced Materials and Nanotechnology: International Conference Proceedings, 13-14th December 2012, Hanoi - Vietnam. Hoa, V. B. (ed.). Hanoi, Vietnam: Hanoi University of Science and Technology, p. 7-12 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2011

Characterization of Green Laser Crystallized GeSi Thin Films

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 2011, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2011. p. a06-04 6 p. (MRS online proceedings; vol. 1321).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

37 Downloads (Pure)

Green Laser Crystallization of GeSi thin Films and Dopant Activation

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 1 May 2011, 219th ECS Meeting Transactions. The Electrochemical Society Inc., p. 17-25 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Increased light emission by geometrical changes in Si LEDs

Puliyankot Palackavalapil, V., Piccolo, G., Hueting, R. J. E., Heringa, A., Kovalgin, A. Y. & Schmitz, J., 14 Sep 2011, Proceedings of the 8th International Conference on Group IV Photonics (GFP). USA: IEEE Photonics Society, p. 287-289 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Light emission enhancement by geometrical scaling of carrier injectors in Si-based LEDs

Piccolo, G., Puliyankot Palackavalapil, V., Kovalgin, A. Y., Hueting, R. J. E., Heringa, A. & Schmitz, J., 12 Sep 2011, 2011 Proceedings of the 41st European Solid-State Device Research Conference (Essderc). USA: IEEE Solid-State Circuits Society, p. 175-178 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Materials Characterization of CIGS solar cells on Top of CMOS chips

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Jun 2011, Proceedings of 2011 MRS Spring Meeting. Venkatasubramanian, R., Radousky, H. & Liang, H. (eds.). Cambridge, UK: Cambridge University Press, p. e06-23 8 p. (MRS proceedings; vol. 1325).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
64 Downloads (Pure)

Negative Charge in Plasma Oxidized SiO2 Layers

Boogaard, A., Kovalgin, A. Y. & Wolters, R. A. M., 1 Jul 2011, 219th ECS Meeting. USA: The Electrochemical Society Inc., p. 259-272 14 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)

Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source

Brunets, I., Walters, R. J., Kovalgin, A. Y., Polman, A. & Schmitz, J., 1 May 2011, 219th ECS Meeting. Pennington, NJ, USA: Electro Chemical Society, p. MA2011-01 4 p. (Meeting Abstracts; vol. MA2011-01).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2010

Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems

Lu, J., Liu, W., van der Werf, C. H. M., Kovalgin, A. Y., Sun, Y., Schropp, R. E. I. & Schmitz, J., 6 Dec 2010, Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM). IEEE Electron Devices Society, p. 31.3.1.-31.3.4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
7 Citations (Scopus)
194 Downloads (Pure)

On the effect of nano-injectors on conduction in silicon p-i-n diodes

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 18 Nov 2010, Proceedings of STW.ICT Conference 2010. Utrecht: STW, p. 140-142 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
18 Downloads (Pure)

On the leakage problem of MIM capacitors due to improper etching of titanium nitride

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 18 Nov 2010, Proceedings of STW.ICT Conference 2010. Utrecht: STW, p. 89-92 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
213 Downloads (Pure)
2009

Contact chain measurements for ultrathin conducting films

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 150-152 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Effect of carrier injector size on silicon LED performance

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 167-169 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films

Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 14 Apr 2009, Proceedings of the 2009 IEEE International Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society Press, p. 191-195 5 p. 10.1109/ICMTS.2009.4814639

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
58 Downloads (Pure)

Influence of passivation process on chip performance

Lu, J., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 542-544 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen

Aarnink, A. A. I., Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 19 Jul 2009, Proceedings of the 9th International conference on Atomic Layer Deposition. Madison, USA: America Vaccum Society, Omnipress, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Low temperature TFTs with poly-stripes

Brunets, I., Boogaard, A., Smits, S. M., de Vries, H., Aarnink, A. A. I., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 5 Mar 2009, Proceedings of the 5th International Thin Film Transistor Conference ITC'09. Paris, France: Ecole Polytechnique, p. 62-65 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Downloads (Pure)

TFTs as photodetectors for optical interconnects

Rangarajan, B., Brunets, I., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 52-54 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
21 Downloads (Pure)

Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 26 Nov 2009, Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, the Netherlands: STW, p. 59-62 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2008

Antifuse injectors for SOI LEDs

Piccolo, G., Hoang, T., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 573-575 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 24 Mar 2008, Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures. Piscataway: IEEE Computer Society, p. 199-204 6 p. 10.1109/ICMTS.2008.4509338

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
263 Downloads (Pure)

A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers

Brunets, I., Groenland, A. W., Boogaard, A., Aarnink, A. A. I. & Kovalgin, A. Y., 29 Jun 2008, Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008. Eindhoven, The Netherlands: TUE, p. P-54

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD

Boogaard, A., Roesthuis, R., Brunets, I., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 452-456 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Functional layers for CIGS solar cell on-chip fabrication during post-processing

Lu, J., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 487-490 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures

Brunets, I., van Loon, R. V. A., Walters, R. J., Polman, A., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M., Holleman, J. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 399-402 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
27 Downloads (Pure)

Poly-Si stripe TFTs by Grain-Boundary controlled crystallization of Amorphous-Si

Brunets, I., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2008, Proceedings of the 38th European Solid-State Device Research Conference. Edinburgh, Schotland: IOP Institute of Physics, p. 87-90 4 p. 10.1109/ESSDERC.2008.4681705

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Silicon LEDs with antifuse injection

Piccolo, G., Hoang, T., Holleman, J., Kovalgin, A. Y. & Schmitz, J., 17 Sep 2008, 5th IEEE International Conference on Group IV Photonics, 2008. Piscataway: IEEE Computer Society Press, p. 49-51 3 p. 10.1109/GROUP4.2008.4638093

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Thermal and plasma-enhanced oxidation of ALD TiN

Groenland, A. W., Brunets, I., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y. & Schmitz, J., 27 Nov 2008, Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, p. 468-471 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
376 Downloads (Pure)
2007

Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Boksteen, B. K., Boksteen, B. K., Kovalgin, A. Y. & Wolters, R. A. M., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 551-554 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1945 Downloads (Pure)

Low-temperature process steps for realization of non-volatile memory devices

Brunets, I., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M., Holleman, J. & Schmitz, J., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 504-508 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
23 Downloads (Pure)

Modeling of an Integrated Electromagnetic Generator for Energy Scavenging

Lu, J., Kovalgin, A. Y. & Schmitz, J., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 603-607 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
42 Downloads (Pure)

Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

Boogaard, A., Kovalgin, A. Y., Brunets, I., Holleman, J. & Schmitz, J., 29 Nov 2007, Proceedings of the 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, p. 404-407 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Simulation of a Nanolink Hot-Plate Device

Groenland, A. W., Kovalgin, A. Y., Holleman, J. & Schmitz, J., 29 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW, p. 581-583 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
41 Downloads (Pure)
2006

A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption

Kovalgin, A. Y., Holleman, J. & Iordache, G., 31 Oct 2006, Proceedings of the IEEE Sensors Conference 2005. Piscataway, NJ, USA: IEEE, p. 1225-1228 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
9 Downloads (Pure)

Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization

Stavitski, N., van Dal, M. J. H., Klootwijk, J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 436-438 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Downloads (Pure)

Green laser crystallization of α-Si films using preformed α-Si Lines

Brunets, I., Holleman, J., Kovalgin, A. Y., Aarnink, A. A. I., Boogaard, A., Oesterlin, P. & Schmitz, J., 29 Oct 2006, Thin Film Transistor Technology 8. Kuo, Y. (ed.). The Electrochemical Society Inc., p. 185-191 7 p. (ECS Transactions 3, 8 (2006); vol. 3, no. 10).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy

Boogaard, A., Kovalgin, A. Y., Aarnink, A. A. I., Wolters, R. A. M., Holleman, J., Brunets, I. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 412-418 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
845 Downloads (Pure)

Memory devices with encapsulated Si nano-crystals: Realization and Characterization.

Brunets, I., van Hemert, T., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 419-422 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

On the growth of native oxides on hydrogen-terminated silicon surfaces in dark and under illumination with light

Kovalgin, A. Y., Zinine, A., Bankras, R., Wormeester, H., Poelsema, B. & Schmitz, J., 29 Oct 2006, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment. Roozeboom, F., Kwong, D-L., Iwai, H., Öztürk, M. C., Timans, P. J. & Gusev, E. (eds.). Pennington, N.J.: The Electrochemical Society Inc., p. 191-202 12 p. (ECS Transactions; vol. 3, no. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Specific Contact Resistance Measurements of Metal Semiconductor-Junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 6 Mar 2006, Proceedings of the IEEE International Conference on Microelectronic Test Structures (ICMTS). Austin, TX, USA: IEEE, p. 13-17 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
9 Citations (Scopus)
3119 Downloads (Pure)
2005

A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors

Aarnink, A. A. I., Boogaard, A., Brunets, I., Isai, I. G., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 67-69 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
5 Downloads (Pure)

Specific Contact Resistance Measurements of Metal-Semiconductor Junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 52-55 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Three-dimensional IC's prolong the life of Moore's law

Brunets, I., Boogaard, A., Isai, I. G., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 76-78 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic