Alexey Y. Kovalgin

19982019
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Research Output 1998 2019

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Abstract
2014
15 Downloads (Pure)

Growth and properties of subnanometer thin titanium nitride films

Kovalgin, A. Y., Van Hao, B., Schmitz, J. & Wolters, R. A. M., 10 Mar 2014, p. 1.

Research output: Contribution to conferenceAbstract

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titanium nitrides
atomic layer epitaxy
metal nitrides
microelectronics
encounters