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Research Output 1998 2019

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Paper
2018
2 Citations (Scopus)

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Banerjee, S. & Kovalgin, A. Y., 30 Sep 2018, p. 21-29.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
atomic layer epitaxy
adducts
nitrides
surface reactions
versatility
2016
103 Downloads (Pure)
Open Access
File
gallium nitrides
gallium
ammonia
pulses
carbon
2011
29 Downloads (Pure)

Green laser crystallization of GeSi thin films

Rangarajan, B., Brunets, I., Oesterlin, P., Kovalgin, A. Y. & Schmitz, J., 2011, p. a06-04. 6 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File
2006
29 Downloads (Pure)

Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane.

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V. & Goossens, M. J., 2006, p. 173-183. 11 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File
2005

A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors

Aarnink, A. A. I., Boogaard, A., Brunets, I., Isai, I. G., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., Nov 2005, p. 67-69. 3 p.

Research output: Contribution to conferencePaperAcademic

Specific contact resistance measurements of metal-semiconductor junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., Nov 2005, p. 52-55. 4 p.

Research output: Contribution to conferencePaperAcademic

Three-dimensional IC's prolong the life of Moore's law

Brunets, I., Boogaard, A., Isai, I. G., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., Nov 2005, p. 76-78. 3 p.

Research output: Contribution to conferencePaperAcademic

2003
2 Downloads (Pure)

Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

Iordache, G., Holleman, J., Kovalgin, A. Y. & Jenneboer, A. J. S. M., 25 Nov 2003, p. 693-696. 4 p.

Research output: Contribution to conferencePaperAcademic

On oxidation kinetics and electrical quality of gate oxide grown in H2O or D2O ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 25 Nov 2003, p. 743-747. 5 p.

Research output: Contribution to conferencePaperAcademic

2002

Comparison of H2O and D2O oxidation kinetics of <100> silicon

Hof, A. J., Kovalgin, A. Y. & Woerlee, P. H., 27 Nov 2002, p. 35-38. 4 p.

Research output: Contribution to conferencePaperAcademic

Top-down meets bottom-up: nano-engineering for link between nm-and mu-scale

Kim, G. M., Kim, B. J., Holleman, J., Huskens, J., ten Have, E. S., Kovalgin, A. Y., Liebau, M., Reinhoudt, D., van Hulst, N. F. & Brugger, J., 19 Jun 2002, p. 71-78.

Research output: Contribution to conferencePaperAcademic