Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

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Paper
2018

A Comparative Study of Low-Temperature III-V Nitrides ALD in Thermal and Radical-Enhanced Modes

Banerjee, S. & Kovalgin, A. Y., 30 Sep 2018, p. 21-29.

Research output: Contribution to conferencePaper

Open Access
2 Citations (Scopus)
2016
Open Access
File
124 Downloads (Pure)
2006

Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane.

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V. & Goossens, M. J., 2006, p. 173-183. 11 p.

Research output: Contribution to conferencePaper

File
37 Downloads (Pure)
2005

Specific contact resistance measurements of metal-semiconductor junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., Nov 2005, p. 52-55. 4 p.

Research output: Contribution to conferencePaper

Three-dimensional IC's prolong the life of Moore's law

Brunets, I., Boogaard, A., Isai, I. G., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., Nov 2005, p. 76-78. 3 p.

Research output: Contribution to conferencePaper

2003

On oxidation kinetics and electrical quality of gate oxide grown in H2O or D2O ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 25 Nov 2003, p. 743-747. 5 p.

Research output: Contribution to conferencePaper

2002

Comparison of H2O and D2O oxidation kinetics of <100> silicon

Hof, A. J., Kovalgin, A. Y. & Woerlee, P. H., 27 Nov 2002, p. 35-38. 4 p.

Research output: Contribution to conferencePaper

Top-down meets bottom-up: nano-engineering for link between nm-and mu-scale

Kim, G. M., Kim, B. J., Holleman, J., Huskens, J., ten Have, E. S., Kovalgin, A. Y., Liebau, M., Reinhoudt, D., van Hulst, N. F. & Brugger, J., 19 Jun 2002, p. 71-78.

Research output: Contribution to conferencePaper