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Research Output 1998 2019

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2019
13 Downloads (Pure)

How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Heat radiation
filaments
wire
Wire
optics
24 Downloads (Pure)

Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

Banerjee, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 6 Sep 2019, In : Journal of physical chemistry C. 123, 37, p. 23214-23225 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Gallium nitride
Atomic layer deposition
gallium nitrides
atomic layer epitaxy
adducts
3 Citations (Scopus)
2 Downloads (Pure)

Van der Waals integration of silicene and hexagonal boron nitride

Wiggers, F. B., Fleurence, A., Aoyagi, K., Yonezawa, T., Yamada-Takamura, Y., Feng, H., Zhuang, J., Du, Y., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2019, In : 2D Materials. 6, 3, 035001.

Research output: Contribution to journalArticleAcademicpeer-review

Boron nitride
boron nitrides
Electronic properties
Silicon
electronics
2018
2 Citations (Scopus)
121 Downloads (Pure)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of applied physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
electroluminescence
heterojunctions
charge carriers
diodes
traps
2 Citations (Scopus)

Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index

Banerjee, S., Onnink, A. J., Dutta, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 27 Dec 2018, In : Journal of physical chemistry C. 122, 51, p. 29567-29576 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Refractive index
Carbon
refractivity
composite materials
carbon
7 Citations (Scopus)

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

Grillo, F., Van Bui, H., La Zara, D., Aarnink, A. A. I., Kovalgin, A. Y., Kooyman, P., Kreutzer, M. T. & van Ommen, J. R., 7 Jun 2018, In : Small. 14, 23, 1800765.

Research output: Contribution to journalArticleAcademicpeer-review

Metal Nanoparticles
Atomic layer deposition
Nanoparticles
Agglomeration
Metals
1 Citation (Scopus)
25 Downloads (Pure)

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 1 Mar 2018, In : Thin solid films. 649, p. 17-23 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
tungsten
wire
3 Citations (Scopus)
62 Downloads (Pure)

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 31 Jan 2018, In : Thin solid films. 646, p. 199-208 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
high aspect ratio
Aspect ratio
1 Citation (Scopus)
1 Downloads (Pure)

Selenidation of epitaxial silicene on ZrB2

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 15 Jan 2018, In : Applied surface science. 428, p. 793-797 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2017
2 Citations (Scopus)
1 Downloads (Pure)
Tungsten
Fluorine
Atomic layer deposition
Hydrogen
Tungsten deposits
2 Citations (Scopus)
2 Downloads (Pure)

Encapsulation of epitaxial silicene on ZrB2 with NaCl

Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 8 Aug 2017, In : Journal of chemical physics. p. 1-6 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Encapsulation
Photoelectron spectroscopy
Chemisorption
Synchrotrons
chemisorption
9 Citations (Scopus)
1 Downloads (Pure)

Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

Kovalgin, A. Y., Yang, M., Banerjee, S., Apaydin, R. O., Aarnink, A. A. I., Kinge, S. & Wolters, R. A. M., 8 May 2017, In : Advanced materials interfaces. 4, 18, p. 1-11 11 p., 1700058.

Research output: Contribution to journalArticleAcademicpeer-review

Spectroscopic ellipsometry
Atomic layer deposition
Wire
Tungsten
Hydrogen
2016
1 Citation (Scopus)

A nitride-based epitaxial surface layer formed by ammonia treatment of silicene-terminated ZrB2

Wiggers, F. B., Van Hao, B., Friedlein, R., Yamada-Takamura, Y., Schmitz, J., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2016, In : Journal of chemical physics. 144, 134703, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
6 Downloads (Pure)
Open Access
File
cold walls
Tungsten
Atomic layer deposition
atomic layer epitaxy
Chemical vapor deposition
2015
4 Citations (Scopus)
3 Downloads (Pure)

Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Integrated optics
integrated optics
CMOS
oxynitrides
Fabrication
8 Citations (Scopus)

Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

29 Citations (Scopus)
1 Downloads (Pure)
7 Citations (Scopus)

On the feasibility of silicene encapsulation by AlN deposited using an atomic layer deposition process

Van Hao, B., Wiggers, F. B., Friedlein, R., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 9 Feb 2015, In : Journal of chemical physics. 142, p. 064712 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2014
18 Citations (Scopus)

Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules

Friedlein, R., Van Hao, B., Wiggers, F. B., Yamada-Takamura, Y., Kovalgin, A. Y. & de Jong, M. P., 27 May 2014, In : Journal of chemical physics. 140, p. 204705:1-204705:4 4 p., 204705.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)

Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films

Van Bui, H., Nguyen, M. D., Wiggers, F. B., Aarnink, A. A. I., de Jong, M. P. & Kovalgin, A. Y., 20 Feb 2014, In : ECS journal of solid state science and technology. 3, 4, p. P101-P106 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Optical constants
Atomic layer deposition
Thin films
Temperature
Spectroscopic ellipsometry
2013
9 Citations (Scopus)
1 Downloads (Pure)

Conduction and electric field effect in ultra-thin TiN films

Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Hot-Wire generated atomic hydrogen and its impact on thermal ALD in TiCl4/NH3 System

Van Hao, B., Kovalgin, A. Y., Aarnink, A. A. I. & Wolters, R. A. M., 8 Feb 2013, In : ECS journal of solid state science and technology. 2, 4, p. 149-155 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Downloads (Pure)

In situ spectroscopic ellipsometry for studying the growth and optical constants of ALD AlN films

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y. & de Jong, M. P., 1 Nov 2013, In : NEVAC blad. 51, 3, p. 24-31 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics

Rangarajan, B., Kovalgin, A. Y., Worhoff, K. & Schmitz, J., 13 Mar 2013, In : Optics letters. 38, 6, p. 941-943 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

2012
2 Citations (Scopus)

An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance

Kovalgin, A. Y., Tiggelman, N. & Wolters, R. A. M., 1 Feb 2012, In : IEEE transactions on electron devices. 59, 2, p. 426-432 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Contact resistance
Metals
Sheet resistance
Resistors
Analytical models
1 Citation (Scopus)
11 Citations (Scopus)
1 Downloads (Pure)

Growth of sub-nanometer thin continuous TiN films by atomic layer deposition

Van Hao, B., Kovalgin, A. Y. & Wolters, R. A. M., 3 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 285-290 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser

Rangarajan, B., Kovalgin, A. Y., Oesterlin, P., de Kloe, R., Brunets, I. & Schmitz, J., 1 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 263-268 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Nanoscale carrier injectors for high luminescence Si-based LEDs

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 27 Apr 2012, In : Solid-state electronics. 74, Special Issue, Selected Papers from the ESSDERC 2011 Conference, p. 43-48 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2011
3 Citations (Scopus)
1 Downloads (Pure)
42 Citations (Scopus)
1 Downloads (Pure)

Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

Van Hao, B., Groenland, A. W., Aarnink, A. A. I., Wolters, R. A. M., Schmitz, J. & Kovalgin, A. Y., 3 Jan 2011, In : Journal of the Electrochemical Society. 158, 3, p. 214-220 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)
1 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

Lu, J., Kovalgin, A. Y., van der Werf, K. H. M., Schropp, R. E. I. & Schmitz, J., 1 Jul 2011, In : IEEE transactions on electron devices. 58, 5, p. 2014-2021 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Solar cells
Photovoltaic cells
Energy harvesting
Microsystems
Dust
6 Citations (Scopus)
3 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Aug 2011, In : IEEE transactions on electron devices. 58, 8, p. 2620-2627 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Solar cells
Gallium
Indium
Surface topography
Metal ions
1 Citation (Scopus)

Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS

Kazmi, S. N. R., Aarnink, A. A. I., Kovalgin, A. Y., Salm, C. & Schmitz, J., 1 May 2011, In : ECS transactions. 35, 30, p. 45-52 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators

Groenland, A. W., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 1 May 2011, In : ECS transactions. 35, 30, p. 25-34 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation

Van Hao, B., Aarnink, A. A. I., Kovalgin, A. Y. & Wolters, R. A. M., 1 Sep 2011, In : Journal of nanoscience and nanotechnology. 11, 9, p. 8120-8125 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2010
2 Citations (Scopus)

Low specific contact resistance of NiSi and PtSi to Si: impact of interface

Tiggelman, N., Kovalgin, A. Y., Brennan, R. & Wolters, R. A. M., 30 Sep 2010, In : Electrochemical and solid-state letters. 13, 12, p. H450-H453 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Contact resistance
contact resistance
Doping (additives)
Silicon
silicon
2009
33 Citations (Scopus)
74 Downloads (Pure)

Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization

Stavitski, N., Klootwijk, J. H., van Zeijl, H. W., Kovalgin, A. Y. & Wolters, R. A. M., 3 Feb 2009, In : IEEE transactions on semiconductor manufacturing. 22, 1, p. 146-152 7 p., 10.1109/TSM.2008.2010746.

Research output: Contribution to journalArticleAcademicpeer-review

File
1 Citation (Scopus)

Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling

Kovalgin, A. Y., Boogaard, A., Brunets, I., Aarnink, A. A. I. & Wolters, R. A. M., 2009, In : ECS transactions. 25, 8, p. 23-32 10 p., 10.1149/1.3207572.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Impact of small deviations in EEDF on silane-based plasma chemistry

Kovalgin, A. Y., Boogaard, A. & Wolters, R. A. M., 2009, In : ECS transactions. 25, 8, p. 429-436 8 p., 10.1149/1.3207622.

Research output: Contribution to journalArticleAcademicpeer-review

15 Citations (Scopus)
46 Downloads (Pure)

Low-temperature fabricated TFTs on polysilicon stripes

Brunets, I., Holleman, J., Kovalgin, A. Y., Boogaard, A. & Schmitz, J., Aug 2009, In : IEEE transactions on electron devices. 56, 8, p. 1637-1644 8 p., 10.1109/TED.2009.2023021.

Research output: Contribution to journalArticleAcademicpeer-review

File
8 Citations (Scopus)

Net Negative Charge in low-temperature SiO2 gate dielectric layers

Boogaard, A., Kovalgin, A. Y. & Wolters, R. A. M., 23 Apr 2009, In : Microelectronic engineering. 86, 7-9, p. 1707-1710 4 p., 10.1016/j.mee.2009.03.124.

Research output: Contribution to journalArticleAcademicpeer-review

2008
17 Citations (Scopus)
219 Downloads (Pure)

Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction

Stavitski, N., van Dal, M. J. H., Lauwers, A., Vrancken, C., Kovalgin, A. Y. & Wolters, R. A. M., 22 Apr 2008, In : IEEE transactions on electron devices. 55, DTR08-9/5, p. 1170-1176 7 p., 10.1109/TED.2008.918658.

Research output: Contribution to journalArticleAcademicpeer-review

File
7 Citations (Scopus)
1 Downloads (Pure)

Low-temperature SiO2 layers deposited by combination of ECR plasma and supersonic silane/helium jet

Kovalgin, A. Y., Isai, I. G., Holleman, J. & Schmitz, J., 1 Jan 2008, In : Journal of the Electrochemical Society. 155, 2, p. G21-G28 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

71 Citations (Scopus)
133 Downloads (Pure)

Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range

Stavitski, N., van Dal, M. J. H., Lauwers, A., Vrancken, C., Kovalgin, A. Y. & Wolters, R. A. M., 1 Apr 2008, In : IEEE electron device letters. 29, 4952/4, p. 378-381 4 p., 10.1109/LED.2008.917934.

Research output: Contribution to journalArticleAcademicpeer-review

File
2007
5 Citations (Scopus)
56 Downloads (Pure)

A pillar-shaped antifuse-based silicon chemical sensor and actuator

Kovalgin, A. Y., Holleman, J. & Iordache, G., Apr 2007, In : IEEE sensors journal. 7, 2/1, p. 18-27 10 p., 10.1109/JSEN.2006.888602.

Research output: Contribution to journalArticleAcademicpeer-review

File
19 Citations (Scopus)

Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

Boogaard, A., Kovalgin, A. Y., Brunets, I., Aarnink, A. A. I., Holleman, J., Wolters, R. A. M. & Schmitz, J., 1 Sep 2007, In : Surface and coatings technology. 201, WP07-01, p. 8976-8980 5 p., 10.1016/j.surfcoat.2007.04.039.

Research output: Contribution to journalArticleAcademicpeer-review