Alexey Y. Kovalgin

19982020

Research output per year

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Research Output

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Conference article
2001

A study of morphology and texture of LPCVD germanium-silicon films

Kovalgin, A. & Holleman, J., 2001, In : Journal de physique IV. 11, Pr3, p. 47-54 8 p.

Research output: Contribution to journalConference articleAcademicpeer-review

Room Temperature SiO2 Films Deposited by Multipolar ECR PECVD

Isai, I. G., Kovalgin, A. Y., Holleman, J., Woerlee, P. H. & Wallinga, H., 2001, In : Journal de physique IV. 11, Pr3, p. 747-753

Research output: Contribution to journalConference articleAcademicpeer-review