Research output per year
Research output per year
Search results
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2020
Method of forming a device structure using selective deposition of gallium nitride and system for same
Banerjee, S. (Inventor), Aarnink, A. (Inventor) & Kovalgin, A. (Inventor), 18 Jun 2020, Patent No. 62/779684, 12 Dec 2019Research output: Patent
Open AccessFile105 Downloads (Pure) -
2018
Selective deposition of Tungsten
Kovalgin, A. Y. (Inventor), Yang, M. (Inventor), Aarnink, A. A. I. (Inventor) & Wolters, R. A. M. (Inventor), 25 Jan 2018, Patent No. US 2018/0025939 A1, Priority date 6 Jun 2017, Priority No. 15/615,489Research output: Patent
2 Downloads (Pure) -
2013
Semiconductor processing apparatus with compact free radical source
Kovalgin, A. Y. (Inventor) & Aarnink, A. A. I. (Inventor), 19 Dec 2013, Patent No. US2013337653 (A1), Priority date 14 Jun 2013Research output: Patent
File170 Downloads (Pure)