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Research Output 1998 2019

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PhD Thesis - Research UT, graduation UT
2019
71 Downloads (Pure)

From radical-enhanced to pure thermal ALD of gallium and aluminium nitrides

Banerjee, S., 11 Sep 2019, Enschede: University of Twente. 201 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
gallium nitrides
aluminum nitrides
atomic layer epitaxy
silicon
microelectronics
2018
124 Downloads (Pure)

Hot-wire assisted atomic layer deposition of Tungsten films

Yang, M., 19 Jan 2018, Enschede: University of Twente. 135 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
atomic layer epitaxy
tungsten
wire
theses
large scale integration
2017

Surface science studies of epitaxial silicene

Wiggers, F. B., 18 Oct 2017, Enschede: University of Twente. 114 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

2013
916 Downloads (Pure)

Atomic layer deposition of TiN films : growth and electrical behavior down to sub-nanometer scale

Van Hao, B., 16 Jan 2013, Enschede: University of Twente. 124 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
59 Downloads (Pure)

Materials for monolithic integration of optical functions on CMOS

Rangarajan, B., 8 Nov 2013, Enschede: University of Twente. 92 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
2011
77 Downloads (Pure)

Nanolink-based thermal devices: integration of ALD TiN thin films

Groenland, A. W., 8 Jul 2011, Enschede: GildePrint. 157 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
231 Downloads (Pure)

Plasma-enhanced chemical vapor deposition of silicon dioxide : optimizing dielectric films through plasma characterization

Boogaard, A., 12 Jan 2011, Enschede: Ipskamp Printing. 186 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
76 Downloads (Pure)

Solar Cells on CMOS Chips as Energy Harvesters

Lu, J., 22 Jun 2011, Enschede: Ipskamp Printing. 117 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
2009
371 Downloads (Pure)

Silicide-to-silicon specific contact resistance characterization

Stavitski, N., 3 Dec 2009, Eindhoven: University of Twente. 127 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
Contact resistance
Silicon
MOSFET devices
Integrated circuits
Transistors
2004
19 Downloads (Pure)

Deuterium in the gate dielectric of CMOS devices

Hof, A. J., 29 Oct 2004, Enschede: Twente University Press (TUP). 97 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
MOS devices
Gate dielectrics
MOSFET devices
Deuterium
Integrated circuits