Andrey Yakshin

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  • 504 Citations
  • 12 h-Index
19952019
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  • 8 Similar Profiles
Multilayers Engineering & Materials Science
reflectance Physics & Astronomy
mirrors Physics & Astronomy
ion scattering Physics & Astronomy
laminates Physics & Astronomy
thin films Physics & Astronomy
optics Physics & Astronomy
Extreme ultraviolet lithography Engineering & Materials Science

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Research Output 1995 2019

Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Electric Power Supplies
Optical Devices
Synchrotrons
Light

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Incidence
Periodicity
Air
Radiation
1 Citation (Scopus)

Double matrix effect in Low Energy Ion Scattering from La surfaces

Zameshin, A. A., Yakshin, A. E., Sturm, J. M., Brongerma, H. H. & Bijkerk, F., 15 May 2018, In : Applied surface science. 440, p. 570-579 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Scattering
Ions
Charge transfer
Lanthanum
Conduction bands

In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

Krause, B., Kuznetsov, D. S., Yakshin, A. E., Ibrahimkutty, S., Baumbach, T. & Bijkerk, F., Aug 2018, In : Journal of applied crystallography. 51, p. 1013-1020 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Lanthanum
Sputter deposition
Nitrides
Monitoring
Crystallites

Structure control of La/B multilayer systems by partial nitridation

Kuznetsov, D., 8 Nov 2018, Enschede: University of Twente. 100 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
theses
grazing incidence
thermal stability
incidence
mirrors

Activities 2010 2018

  • 13 Oral presentation
  • 1 Invited talk

Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering

Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Cristiane Regina Stilhano Vilas Boas (Contributor), F. Bijkerk (Contributor)
1 Jul 20186 Jul 2018

Activity: Talk or presentationOral presentation

Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation

Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)
8 Nov 2018

Activity: Talk or presentationOral presentation

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
7 Nov 2018

Activity: Talk or presentationOral presentation

Ruthenium growth on B, C and B4C studied by LEIS

Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Frederik Bijkerk (Contributor)
23 May 2017

Activity: Talk or presentationOral presentation