Research output per year
Research output per year
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Dive into the research topics where Antonius A.I. Aarnink is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 1 Similar Profiles
Collaborations and top research areas from the last five years
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Low-resistivity molybdenum obtained by atomic layer deposition
van der Zouw, K., van der Wel, B. Y., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y., 1 Sept 2023, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 41, 5, 052402.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile8 Downloads (Pure) -
Thin-film (Al)BCN materials synthesized by sequential precursor pulses to mimic atomic layer deposition
Apaydin, R. O., Aarnink, A. A. I., Gravesteijn, D. J., De Jong, M. P. & Kovalgin, A. Y., 1 Feb 2023, In: AIP advances. 13, 2, 025237.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile7 Downloads (Pure) -
PureB diode fabrication using physical or chemical vapor deposition methods for increased back-end-of-line accessibility
Thammaiah, S. D., Liu, X., Knežević, T., Batenburg, K. M., Aarnink, A. A. I. & Nanver, L. K., Mar 2021, In: Solid-state electronics. 177, 107938.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)64 Downloads (Pure) -
Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
Apaydin, R. O., Onnink, A. J., Liu, X., Aarnink, A. A. I., de Jong, M. P., Gravesteijn, D. J. & Kovalgin, A. Y., 23 Apr 2020, In: Journal of vacuum science and technology A: vacuum, surfaces, and films. 38, 3, 033411.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)152 Downloads (Pure) -
Conduction and electric field effect in ultra-thin tungsten films
van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., May 2020, In: IEEE Transactions on Semiconductor Manufacturing. 33, 2, p. 202-209 8 p., 9016070.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)97 Downloads (Pure)
Activities
- 8 Oral presentation
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Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor) & Alexey Y. Kovalgin (Contributor)
19 Mar 2019Activity: Talk or presentation › Oral presentation
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Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor) & Alexey Y. Kovalgin (Contributor)
29 Jul 2018 → 1 Aug 2018Activity: Talk or presentation › Oral presentation
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Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD
Mengdi Yang (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor) & Alexey Y. Kovalgin (Speaker)
11 Jun 2017 → 14 Jun 2017Activity: Talk or presentation › Oral presentation
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Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films
Sourish Banerjee (Speaker), Ramazan Oguzhan Apaydin (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Machiel Pieter de Jong (Contributor) & Alexey Y. Kovalgin (Contributor)
11 Jun 2017 → 17 Jun 2017Activity: Talk or presentation › Oral presentation
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Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia
Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Gerhardus A.M. Kip (Contributor), Dirk J Gravesteijn (Contributor), Jurriaan Schmitz (Contributor) & Alexey Y. Kovalgin (Contributor)
24 Jul 2016 → 27 Jul 2016Activity: Talk or presentation › Oral presentation
Press/Media
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Hot-Wire assisted ALD: Another example of radical-enhanced atomic layer deposition
Alexey Y. Kovalgin, Antonius A.I. Aarnink & Mengdi Yang
2/06/20
1 Media contribution
Press/Media: Research