Research output per year
Research output per year
Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Dive into the research topics where Antonius A.I. Aarnink is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
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Metallic molybdenum obtained by atomic layer deposition from Mo(CO)6
van der Zouw, K., van der Wel, B. Y., Sturm, J. M., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y., 1 Mar 2025, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 43, 2, 022407.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile7 Downloads (Pure) -
Electrical behavior of ALD-molybdenum films in the thin-film limit
Van Der Zouw, K., Dulfer, S. D., Aarnink, A. A. I. & Kovalgin, A. Y., 10 May 2024, 2024 IEEE 36th International Conference on Microelectronic Test Structures, ICMTS 2024 - Proceedings. IEEE, (IEEE International Conference on Microelectronic Test Structures).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile104 Downloads (Pure) -
From hot wire to cold finger:methods to detect the unstable product SnH4 of Sn etching
Onnink, A., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A., 2024. 1 p.Research output: Contribution to conference › Poster › Academic
Open AccessFile14 Downloads (Pure) -
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride
van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y., 17 Aug 2023, In: Journal of Physical Chemistry C. 127, 34, p. 17134-17145 12 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile2 Citations (Scopus)122 Downloads (Pure) -
Batch furnace CVD of pure boron layers on Si and GaN substrates for lowleakage- current diode fabrication
Vu, T. T. H., Batenburg, K. M., Aarnink, A. A. I., Knežević, T., Liu, X. & Nanver, L. K., Apr 2023, In: JST: Engineering and Technology for Sustainable Development. 33, 2, p. 29-35Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile72 Downloads (Pure)
Activities
- 9 Oral presentation
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Towards Deposition of Metallic Molybdenum Films from Molybdenum Hexacarbonyl in a Process Involving an Intermediate ALD Step and Subsequent Reduction
van der Zouw, K. (Speaker), Sturm, M. (Contributor), Aarnink, A. A. I. (Contributor) & Kovalgin, A. Y. (Contributor)
7 Aug 2024Activity: Talk or presentation › Oral presentation
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Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)
19 Mar 2019Activity: Talk or presentation › Oral presentation
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Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Banerjee, S. (Speaker), Dutta, S. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor) & Kovalgin, A. Y. (Contributor)
29 Jul 2018 → 1 Aug 2018Activity: Talk or presentation › Oral presentation
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Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD
Yang, M. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Speaker)
11 Jun 2017 → 14 Jun 2017Activity: Talk or presentation › Oral presentation
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Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films
Banerjee, S. (Speaker), Apaydin, R. O. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor), de Jong, M. P. (Contributor) & Kovalgin, A. Y. (Contributor)
11 Jun 2017 → 17 Jun 2017Activity: Talk or presentation › Oral presentation
Press/Media
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Hot-Wire assisted ALD: Another example of radical-enhanced atomic layer deposition
Kovalgin, A. Y., Aarnink, A. A. I. & Yang, M.
2/06/20
1 Media contribution
Press/Media: Research