Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 9 Similar Profiles
Wire Engineering & Materials Science
Atomic layer deposition Engineering & Materials Science
Hydrogen Engineering & Materials Science
Tungsten Engineering & Materials Science
Plasmas Engineering & Materials Science
Substrates Engineering & Materials Science
oxidation Physics & Astronomy
temperature Physics & Astronomy

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Research Output 1989 2018

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A., Schmitz, J. & Kovalgin, A. Y. 12 Jan 2018 In : Thin solid films. 649, p. 17-23

Research output: Scientific - peer-reviewArticle

Atomic layer deposition
Tungsten
Wire
Hydrogen
Substrates
1 Citations
Atomic layer deposition
Wire
Tungsten
Aspect ratio
Spectroscopic ellipsometry
Wire
Atomic layer deposition
Fluorine
Tungsten
Hydrogen
2 Citations

Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

Kovalgin, A. Y., Yang, M., Banerjee, S., Apaydin, R. O., Aarnink, A. A. I., Kinge, S. & Wolters, R. A. M. 8 May 2017 In : Advanced materials interfaces. 4, 18, p. 1-11 11 p., 1700058

Research output: Scientific - peer-reviewArticle

Wire
Atomic layer deposition
Tungsten
Hydrogen
Spectroscopic ellipsometry
4 Citations
Chemical vapor deposition
Atomic layer deposition
Wire
Hydrogen
Tungsten