1989 …2019
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Fingerprint Dive into the research topics where Antonius A.I. Aarnink is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 14 Similar Profiles
Atomic layer deposition Engineering & Materials Science
Tungsten Chemical Compounds
atomic layer epitaxy Physics & Astronomy
Wire Engineering & Materials Science
gallium nitrides Physics & Astronomy
Hydrogen Chemical Compounds
Spectroscopic ellipsometry Engineering & Materials Science
tungsten Physics & Astronomy

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Research Output 1989 2019

19 Downloads (Pure)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Atomic layer deposition
Sheet resistance
Contact resistance
Tungsten
Electric lines
1 Downloads (Pure)

Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

Banerjee, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 6 Sep 2019, In : Journal of physical chemistry C. 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Gallium nitride
Atomic layer deposition
gallium nitrides
atomic layer epitaxy
adducts
1 Citation (Scopus)
106 Downloads (Pure)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of applied physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
electroluminescence
heterojunctions
charge carriers
diodes
traps
1 Citation (Scopus)

Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index

Banerjee, S., Onnink, A. J., Dutta, S., Aarnink, A. A. I., Gravesteijn, D. J. & Kovalgin, A. Y., 27 Dec 2018, In : Journal of physical chemistry C. 122, 51, p. 29567-29576 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Refractive index
Carbon
refractivity
composite materials
carbon
4 Citations (Scopus)

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

Grillo, F., Van Bui, H., La Zara, D., Aarnink, A. A. I., Kovalgin, A. Y., Kooyman, P., Kreutzer, M. T. & van Ommen, J. R., 7 Jun 2018, In : Small. 14, 23, 1800765.

Research output: Contribution to journalArticleAcademicpeer-review

Metal Nanoparticles
Atomic layer deposition
Nanoparticles
Agglomeration
Metals

Activities 2015 2019

  • 8 Oral presentation

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation

Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)
29 Jul 20181 Aug 2018

Activity: Talk or presentationOral presentation

Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films

Sourish Banerjee (Speaker), Ramazan Oguzhan Apaydin (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Machiel Pieter de Jong (Contributor), Alexey Y. Kovalgin (Contributor)
11 Jun 201717 Jun 2017

Activity: Talk or presentationOral presentation

Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD

Mengdi Yang (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Speaker)
11 Jun 201714 Jun 2017

Activity: Talk or presentationOral presentation

Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia

Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Gerhardus A.M. Kip (Contributor), Dirk J Gravesteijn (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
24 Jul 201627 Jul 2016

Activity: Talk or presentationOral presentation