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Antonius A.I. Aarnink

1989 …2018
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  • 10 Similar Profiles
Atomic layer deposition Engineering & Materials Science
Tungsten Chemical Compounds
Wire Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
Hydrogen Chemical Compounds
Spectroscopic ellipsometry Engineering & Materials Science
tungsten Physics & Astronomy
Oxygen Chemical Compounds

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Research Output 1989 2018

Open Access
File
electroluminescence
heterojunctions
charge carriers
diodes
traps
2 Citations

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

Grillo, F., Van Bui, H., La Zara, D., Aarnink, A. A. I., Kovalgin, A. Y., Kooyman, P., Kreutzer, M. T. & van Ommen, J. R. 7 Jun 2018 In : Small. 14, 23, 1800765

Research output: Contribution to journalArticle

Metal Nanoparticles
Atomic layer deposition
Nanoparticles
Agglomeration
Metals

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A., Schmitz, J. & Kovalgin, A. Y. Mar 2018 In : Thin solid films. 649, p. 17-23

Research output: Contribution to journalArticle

Tungsten
Atomic layer deposition
atomic layer epitaxy
tungsten
wire
1 Citations
Tungsten
Atomic layer deposition
atomic layer epitaxy
high aspect ratio
Aspect ratio

Selective deposition of Tungsten

Kovalgin, A. Y., Yang, M., Aarnink, A. A. I. & Wolters, R. A. M. 25 Jan 2018 6 Jun 201715/615,489

Research output: Patent

Tungsten
Hydrogen
Substrates
Metals
Wire

Activities 2015 2017

  • 4 Oral presentation

Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD

Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
11 Jun 201714 Jun 2017

Activity: Talk or presentationOral presentation

Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films

Sourish Banerjee (Speaker), Ramazan Oguzhan Apaydin (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Machiel Pieter de Jong (Contributor), Alexey Y. Kovalgin (Contributor)
11 Jun 201717 Jun 2017

Activity: Talk or presentationOral presentation

Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia

Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Gerhardus A.M. Kip (Contributor), Dirk J Gravesteijn (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
24 Jul 201627 Jul 2016

Activity: Talk or presentationOral presentation

Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes

Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)
13 Jul 201517 Jul 2015

Activity: Talk or presentationOral presentation