Activities per year
Activities
- 8 Oral presentation
- 8 results
Search results
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Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)
19 Mar 2019Activity: Talk or presentation › Oral presentation
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Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Banerjee, S. (Speaker), Dutta, S. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor) & Kovalgin, A. Y. (Contributor)
29 Jul 2018 → 1 Aug 2018Activity: Talk or presentation › Oral presentation
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Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD
Yang, M. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Speaker)
11 Jun 2017 → 14 Jun 2017Activity: Talk or presentation › Oral presentation
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Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films
Banerjee, S. (Speaker), Apaydin, R. O. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor), de Jong, M. P. (Contributor) & Kovalgin, A. Y. (Contributor)
11 Jun 2017 → 17 Jun 2017Activity: Talk or presentation › Oral presentation
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Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia
Banerjee, S. (Speaker), Aarnink, A. A. I. (Contributor), Kip, G. A. M. (Contributor), Gravesteijn, D. J. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)
24 Jul 2016 → 27 Jul 2016Activity: Talk or presentation › Oral presentation
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Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes
Yang, M. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Contributor)
13 Jul 2015 → 17 Jul 2015Activity: Talk or presentation › Oral presentation
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PEALD ALN: CONTROLLING GROWTH AND FILM CRYSTALLINITY
Banerjee, S. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor) & Schmitz, J. (Contributor)
13 Jul 2015 → 17 Jul 2015Activity: Talk or presentation › Oral presentation
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A comparison of tungsten films grown by CVD and hot-wire assisted ALD
Yang, M. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Speaker)
28 Jun 2015 → 1 Jul 2015Activity: Talk or presentation › Oral presentation