Antonius A.I. Aarnink

Activities

Activities per year 2015 2015 2017 2019

• 8 Oral presentation

Activities per year

Search results

• Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

  van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)

  19 Mar 2019

  Activity: Talk or presentation › Oral presentation

• Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

  Banerjee, S. (Speaker), Dutta, S. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor) & Kovalgin, A. Y. (Contributor)

  29 Jul 2018 → 1 Aug 2018

  Activity: Talk or presentation › Oral presentation

• Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD

  Yang, M. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Speaker)

  11 Jun 2017 → 14 Jun 2017

  Activity: Talk or presentation › Oral presentation

• Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films

  Banerjee, S. (Speaker), Apaydin, R. O. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor), de Jong, M. P. (Contributor) & Kovalgin, A. Y. (Contributor)

  11 Jun 2017 → 17 Jun 2017

  Activity: Talk or presentation › Oral presentation

• Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia

  Banerjee, S. (Speaker), Aarnink, A. A. I. (Contributor), Kip, G. A. M. (Contributor), Gravesteijn, D. J. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)

  24 Jul 2016 → 27 Jul 2016

  Activity: Talk or presentation › Oral presentation

• PEALD ALN: CONTROLLING GROWTH AND FILM CRYSTALLINITY

  Banerjee, S. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor) & Schmitz, J. (Contributor)

  13 Jul 2015 → 17 Jul 2015

  Activity: Talk or presentation › Oral presentation

• Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes

  Yang, M. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Contributor)

  13 Jul 2015 → 17 Jul 2015

  Activity: Talk or presentation › Oral presentation

• A comparison of tungsten films grown by CVD and hot-wire assisted ALD

  Yang, M. (Speaker), Aarnink, A. A. I. (Contributor), Kovalgin, A. Y. (Contributor), Wolters, R. A. M. (Contributor) & Schmitz, J. (Speaker)

  28 Jun 2015 → 1 Jul 2015

  Activity: Talk or presentation › Oral presentation